• Title/Summary/Keyword: Precision measurement equipment

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A Study on the Mismatch of Time and Frequency Domain for Vibration Criteria of Sensitive Equipment (고정밀 장비의 진동허용규제치에 대한 시간 및 주파수 영역에서 나타나는 불일치 문제에 관한 연구)

  • 이홍기;김강부;백재호
    • Journal of the Semiconductor & Display Technology
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    • v.1 no.1
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    • pp.1-7
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    • 2002
  • Modem technology depends on the reliability of extremely high precision equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Therefore, this high technology equipments require very strict environmental vibration criteria because it is used as basic data for the design of building structure and structural dynamics of equipment. In this paper, the new approach is proposed to investigate the mismatch problem of time and frequency domain for vibration criteria of sensitive equipment. The proposed approach is based on a vibration measurement data and a relative transfer function which can be obtained by experiment or analysis.

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A study on the Development of the Device for Portable Safety Diagnosis and Dynamic Characteristics Analysis of Elevator using Fuzzy Algorithm (Fuzzy 알고리즘을 이용한 엘리베이터 포터블 안전진단 및 동특성 분석장치 개발)

  • 김태형;김훈모
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.11a
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    • pp.123-126
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    • 2000
  • An elevator system which is a essential equipment for a vertical movement of object, as a property of building, have been drove by various expenditure and purpose. Since developing electrical control technology, control systems are highly developed. An elevator equipment is expended to wide, but a data accuracy acquisition technique and safety predict technique for securing system safety is still basic level. So, objective verification for elevator confidence condition is required absolutely accuracy measurement technique. Therefore, this study is accomplished in order to conquer a method of depending on sense of a manager with a simple numeric measurement data, and construct a logical, analytical foresight system for more efficient elevator management system.

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A Study on Welding Union by Welding Fume Shape Measurement (용접 Fume 형상 측정에 따른 용접 결합에 관한 연구)

  • Kim J.Y.;Choi C.J.;Kwak N.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.35-36
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    • 2006
  • In Nd:YAG laser welding, evaluation methods of welding flaw are various. But, the method due to fume shape is difficult to classification of welding flaw. The Nd:YAG laser process is known to have high speed and deep penetration capability to become one of the most advanced welding technologies. At the present time, some methods are studied for measurement of fume shape by using high-speed camera and photo diode. This paper describes the machining characteristics of SM45C carbon steel welding by use of an Nd:YAG laser. In spite of its good mechanical characteristics, SM45C carbon steel has a high carbon contents and suffers a limitation in the industrial application due to the poor welding properties. In this study, fume shape was measured by infrared thermal camera that is non-contact/non-destructive thermal measurement equipment through change of laser generating power, speed, focus. Weld was performed on bead-on method. Measurement results are compared as two equipments. Here, two results are composed of measurement results of fume quantities due to fume shape by infrared thermal camera and inspection results of weld bead include weld flaws by ultrasonic inspector.

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Development of measuring and calibrating technology for moving error and precision of chip mounter using Ball Bar (Ball Bar를 이용한 칩마운터의 운동 오차 정밀도 측정 및 평가 기술 개발)

  • 이창하;김정환;박희재
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.05a
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    • pp.621-628
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    • 2000
  • A kinematic ball bar measuring system can analyze the various errors of a machine tool easil rapidly with only one measurement, But it cannot be used to measure the errors of the equipment the semiconductor manufacturing (e.g. chip mounter, PCB router etc.) not to use a cir interpolation. This paper presents the method to apply a kinematic ball bar measuring system tc machines which use merely a linear interpolation Also, the work of measuring and calibratir various errors of a chip mounter with a kinematic bal1 bar measurement system is accomplished

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A Study on the Gait Test Human Dynamic Simulation Using Gait Motion Capture and Foot Pressure Measurement : Analysis of Gait Pattern with Wearing Military Equipment of Korean Male Adult (Gait Motion Capture 및 족압 측정을 이용한 보행특성시험 및 동력학적 인체 시뮬레이션 연구 : 한국인 성인 남자의 군장착용 보행 특성 해석)

  • Lee S.H.;Lee Y.S.;Choi Y.J.;Lee J.W.;Chae J.W.;Choi E.J.;Kim I.W.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.877-880
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    • 2005
  • This paper suggests gait analysis and gait simulation method using Gait Motion Capture equipment and plantar pressure measurement system. The gait of normal person and how it will be effected by added weight with wearing military equipments are studied by suggested method. It is measured that a change of gait pattern when wears military equipments with Korean male adult(height 180 cm, weight 70 kg) and simulated its results.

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An Investigation on Influence of Vibration Noise in Cooling Tower on Precision Equipments (산업용 냉각탑의 진동소음이 정밀장비에 미치는 영향에 대한 연구)

  • Lee, Jin-Kab
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.9
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    • pp.369-374
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    • 2016
  • Cooling towers have been installed on rooftops or outside of buildings and widely applied to control the indoor temperature in residential areas and buildings. However, the noise and vibration resulting from their operation may cause problems in adjacent buildings. The purpose of this study is to measure the noise and vibration of an industrial cooling tower located adjacent to industrial plants and to investigate its influence on the surroundings according to an authorized evaluation standard. Further, in order to measure the effect of the vibration of the tower on the precision equipment inside the plant, an experiment is conducted to measure the vibration of the ground in the plant and the targeted precision equipment. The measurement results indicate that the noise in the cooling tower is 4 to 9 dB(A) higher than the maximum level defined in the standard of 68dB(A). The effect of the vibration of the tower on the precision equipment is comparatively minimal, because that in the supporting frame of the building is weaker than that on the floor where the precision equipment is located. The vibration of the floor on.

The Efficiency of BMD Cross-calibration for each different DEXA-System and Measurement of Precision used by Phantom (Phantom를 이용한 Precision의 측정과 서로 다른 DEXA System의 BMD 교차보정의 유용성)

  • Lee seung un;Choi yu jin;Lee pyeong jae;Kwon young he;Jung sun sun;Seo kil won;Whang seung yeon
    • Journal of The Korean Radiological Technologist Association
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    • v.30 no.1
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    • pp.41-48
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    • 2004
  • To know the Difference of BMD value actually measured by the Hologic equipment and the Lunar equipment that is the latest machine due to the acknowledgement for the difference of value when the follow-up test was performed by other different equipment aft

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Development of Panel Alignment Algorithm and Its Application to BGA Lithography Equipment (기판 정렬 알고리즘 개발 및 BGA 노광 장비 적용)

  • Ryu, SUN-Joong
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.11
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    • pp.77-84
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    • 2009
  • Alignment error of the BGA lithography equipment is mainly caused by the dimensional change of the BGA panel which is generated during the manufacturing processes. To minimize the alignment error, 'mark alignment' algorithm in place of 'center alignment' algorithm was proposed and the optimal solution for the algorithm was derived by simple analytic form. The developed algorithm distributes evenly the alignment error over the whole panel which was evaluated by the numerical simulation. Finally, the developed algorithm was implemented to the controller of the lithography equipment and the alignment error was measured at the fiducial mark location. From the measurement, it is also concluded that the developed alignment algorithm be effective to reduce the maximum value of alignment error.

The measurement temperature and analysis used embedded system by internet explorer (인터넷 익스플로러를 통한 임베디드 시스템 기반의 온도 측정 및 분석)

  • 김희식;김영일;설대연;남철
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.1003-1006
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    • 2004
  • In this paper have developed a system for monitoring and processing the real time sensor data in remote site through network. For realizing this system, measurement equipment and protocol are used to transmit the measurement data to remote server and to process measurement data. In server part, the received data from remote site sensor is converted to text or graphic charts for user. The measurement device in sensor part receives the sensor data form sensor and store the received data to its internal memory for transmitting data to server part through Internet. Also the measurement device can receive data form server. The temperature sensor is connected to the measurement device located in laboratory and the measurement device measures temperature of laboratory which can be confirmed by user through Internet. We have developed a server programworking on the Linux to store measurement data from measurement device to server memory. The program is use for SNMP(Simple Network Management Protocol) to exchange data with measurement device. Also the program changes the measurement data into text and graphic charts for user display. The program is use apache PHP program for user display and inquiry. The real time temperature measurement system can be apply for many parts of industry and living.

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A Study on the Universal Outer Diameter Measurement Module using LVDT (LVDT를 이용한 범용 외경측정 모듈에 관한 연구)

  • Lee, Neung-Gu;Kwac, Lee-Ku;Kim, Hong-Gun
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.16 no.3
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    • pp.100-106
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    • 2017
  • A universal outer diameter measurement module was developed using a linear variable differential transformer (LVDT). This outer diameter measurement module enables simultaneous measurement of outer diameter, displacement, and perpendicularity of bench-type high-precision products by combining analogue and digital measurement principles with mechanically precise and fine adjustment functions. The developed module showed a performance of 0.001mm in measurement resolution, 0.001mm in measurement accuracy, reference surface abrasion lower than Ra 0.1864, and measurement stability of 0.002mm. Therefore, we have acquired domestic measurement technology to improve productivity by securing technical competitiveness for universal diameter measurement technology, lower production costs through import substitution, and increased quality of products with more precise measurement technology. Furthermore, a substitution effect is expected for expensive import measurement system equipment used in production, research, and inspection sites in industries that produce precision processing products such as automobile and machine components.