• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1844-1847
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• 2003

Electrochemical micro-machining(EMM) is used to achieve a desired workpiece surface by dissolving the metal workpiece with an electrochemical reaction. This machining method can be applied to metal that is difficult to machining using other methods. The workpiece dissolves when it is positioned close to the tool electrode in electrolyte and current is applied. This aim of this work is to develop electrochemical micro-machining(EMM) technique for micro groove shape by establishing appropriate electrochemical parameters of machining

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.636-639
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• 2003

It is difficult to machine below 10 micrometers by conventional machining methods, such as micro-EDM. However, ultra micro machining using focused ion beam(FIB) is able to machine to 50 nanometers. In addition, 3 dimensional structures can be made by a combination of FIB and CVD to the level of 10 nanometers. Die ＆ moulds techniques are better than one-to-one machining techniques in the mass production of ultra size structures, in regards to production costs. In this case, the machining precision of die ＆ moulds affects produced parts. Also, it is advantageous to machine die ＆ moulds to the 10 micrometer level by FIB technique rather than other techniques. In this paper, the grooving characteristics for die ＆ mould materials by FIB were carried out experimentally in order to compare the machining characteristics of FIB with conventional machining methods. The results showed that the machining parameters and the scanning path of FIB affects the precision. The machined width and depth of the groove varied depending on the required depth due to the redeposition of the sputtered ion material accumulating on both the bottom and the side of the wall.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.917-921
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• 2000

One of the major limitations of productivity and quality in machining is machining accuracy of the machine tools. The machining accuracy is affected by geometric, volumetric errors of the machine tools. This paper suggests the enhancement method of machining accuracy for precision machining of high quality metal reflection mirror or optics lens, etc. In this paper, we study 1) the compensation of linear pitch error with NC controller compensation function using laser interferometer measurement, 2) the method for enhancing the accuracy of NC milling machining by modeling and compensation of volumetric error, 3) the generation of the parabolic face profile. And the method is verified by the parabolic face machining experiment with a vertical three axes NC milling machine. After this study, we will inspect using On-machine measurement and study the repetitive machining by a compensated path

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.977-980
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• 1997

Ultraprecision machining process and MEMS technology have been taken more and more important position in machining of micro parts such as PDP and IT components, as the application field of micro parts increases. A micro machining center is very effective equipment for the fabrication of micro parts, because of its benefits such as lower power consumption, high precision and lower machining cost. Therefore, we study the possibility of application to the micro machining of barrier ribs used in PDP and also analyse the machining characteristics. The fabricated barrier rib has 30~$200\mu\textrm{m}$ pitch and was made by the flat endmill with the diameter of 0.2mm, 40, 000rpm condition.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.559-560
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.333-334
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.143-146
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• 1995

Due to the recent growth of die/mold machining industry, demands for the high-precision and the high0quality of die product are increasing rapidly. Free surfaces of die/mold are often manufactured using the ball-end milling process. It is difficult to find the cutting condition of the ball-end milling process due to the free form machining for the various tool paths on inclined surface.

• 한국정밀공학회지
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• 제17권4호
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• pp.129-134
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• 2000

This paper presents the development of ultra-precision machining process of large aspheric aluminum mirrors with a maximum diameter of 620 mm. An ultra-precision machine, "Nanoturn60", developed by Daewoo Heavy Industries Ltd. is used for machining and motion errors of the machine are compensated by using the FTS developed by IAE(Institue for Advanced Engineering) during the machining process. To check the form accuracy of machined aspheric surfaces, on-machine form measurement system is developed. This measurement system consists of air bearing touch probe, straight edge, and laser sensor. With in-process error compensation by FTS(Fast Tool Servo), aspheric mirrors with the from accuracy of submicron order are obtained. obtained.

• 한국생산제조학회지
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• 제20권1호
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• pp.86-95
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• 2011

Ultra-precision machining technology is the essential core technology in today's micro-electronics and electro-optical industries. The needs for processing systems to manufacture products to nanometer(nm) accuracy and sub-nanometer resolutions are increased recently. By using ion beam, it is possible to fabricate ultra-precision and ultra-fine products with nm accuracy and sub-nm resolution. In this paper, the basic research trends of ultra precision machining technology in domestic are surveyed, and the ways to reach to the world-leading level of basic research capabilities in the field of ultra-precision machining technology in domestic is suggested.

• 한국정밀공학회지
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• 제19권1호
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• pp.186-195
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• 2002

The mechanism of micro machining of reacted layer on silicon surface were proposed. The depth of reacted layer and the change of mechanical property were measured and analyzed. Depth of hydrated layer which is created on the surface of silicon by potassium hydrate was analyzed with SEM and XPS. The decrease of the micro victors hardness of silicon surface was shown with the increase of the concentration of potassium hydrate and the change of the dynamic friction coefficient by chemical reacted layer was measured due to the readiness of machining. The experiment of groove machining was done with 3-axis machine with constant load. With chemical mechanical micro machining the surface crack and burrs generated by both brittle and ductile micro machining were diminished. And the surface profile and groove depth was shown in accordance with the machining speed and reaction time with SEM and AFM.