• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.748-754
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• 1994

This paper deals with a geometric error simulator, measurement and inspection of workpiece errors on the machine tools, and identification and compensation methodology of thermal errors in machining centers. In order to raise the machining accuracy of workpieces a measurement and inspection system on the machine tool is developed. By using MPPGT module Manual and CNC type CMMs are realized on the machining centers. To compensate for geometric and thermal deformation errors of machining centers, a real time and an off line geometric adaptive control system were developed on the machining centers. A vertical and a horizontal machining center equipped with FANUC 0MC were used for experiments. Performance of the systems were confirmed with a large amount of experiment.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.1 s.190
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• pp.47-56
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• 2007

Recently, demands on mechanical micro machining technology have been increased in manufacturing of micro-scale precision shapes and parts. The main purpose of this research is to verify the accuracy and cost efficiency of the mechanical micro machining. In order to measure the precision and feasibility of mechanical micro machining, various micro features were machined. Aluminum molds were machined by a 3-axis micro stage in order to fabricate microchips with $200{\mu}m$ wide channel for capillary electrophoresis, then the same geometry of microchip was made by injection molding. To evaluate the cost efficiency of various micro manufacturing processes, cost estimation for mechanical micro machining was conducted, and actual costs of microchips fabricated by mechanical micro machining, injection molding, and MEMS (Micro electro mechanical system) were compared.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.8
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• pp.869-877
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• 2011

In order to manufacture precision parts which are used for IT and BT Industry by machining, users need higher speed & precision machining center. So, for development of this kind of machine, we designed gantry type machining center which is piling of 3 axes on one moving body and the 2-axis rotary table is fixed on the base. It is applied linear motor that is instead of ball-screw and servo-motor combination and 50,000 rpm high-speed spindle. Composite material structure called mineral casting or resin concrete is applied also. This paper presents design technology and evaluated results of high speed and precision machining center.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.97-100
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• 2004

In recent years, a demand for micro-structure machining is increasing by the development of information and optics industries. Micro machining technology is in general well known in the field of lithograghy. However, the requirement of producing micro machine and/or micro mechanism with metal materials will be increased since a variety of workpiece configurations can be easily made. In this paper, ultra precision machine is developed to obtain micro groove and mirror surface using single crystal diamond tool. According to the cutting experiment, no burr was found at the edge of V-grooves, and the surface roughness of copper is about 1～3nm Ra. It is verified that ultra precision machine is effective to high precision machining.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.12
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• pp.68-75
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• 2000

This paper presents the construction of an ultra-precision machining system and machining experiments using the developed system. The system is composed of air bearing system, granite bed, air pad, and linear feeding mechanism. The cutting conditions have great effect on the surface quality in ultra-precision machining. the ultra-precision machining is mainly processed by several ${\mu}{\textrm}{m}$ depth of cut and feed rate. For this, tools with sharper cutting edge and less tool wear are needed. To satisfy these requirement, diamond is generally used as a tool material for ultra-precision machining. In order to evaluate the cutting characteristics of the PCD and MCD tools on the aluminum alloy, the machining experiments performed using the developed system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.589-592
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• 2003

In the machining process of micros shape by using high-precision machining system and micro end-mill, it is important for machining characters of tools to be grasped in order to stably use tools of micro end-mill. In this study. we carried out an analytical experiment of basic machining features by using end-mill tools for the purpose of damage prevention and manufacture of high quality when the tools of micro end-mill are used. This experiment used a micro machining system with high precision and a variety of end-mill tools commercialized from tens to hundreds microns in diameter. To establish an optimal machining condition without tool damage, cutting force was analyzed according to the changes of tool diameter and cutting conditions such as cutting speed. feed rate, depth of cut. And an examination was performed for the shape and surface illumination of machining surface according to the changes of machining conditions. Based on these micro machining conditions, micro square pillar, cylinder shaft. thin wall with high aspect ratio, and micro 3-D structures such as micro gear and fan were manufactured.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.121-122
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• 2007

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.6
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• pp.859-866
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• 2010

Generally, a fixed type guide-bush system is installed during machining miniature work-pieces with high precision in the multi-task CNC lathe. But a conventional guide-bush system does not provide a constant clamping force under the condition of varying work-piece diameters. It is important to maintain a constant clamping force for guaranteeing machining precision. This paper proposes a new guide-bush system with a pneumatic clamping device for the CNC Swiss-turn lathe to keep constant clamping force with changes in work-piece diameters. Through performance tests, new clamping system developed in the study showed better machining precision at the cost of a small increase in the temperature of the system than conventional systems due to an increase in the frictional heat and a change in the heat transfer route.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.608-611
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• 2005

As the optical communication industry is developed, the demand of optical communication part is increasing. $ZrO_2$ ceramic ferrule is very important part which can determines the transmission efficiency and information quality to connect the optical fibers. In general $ZrO_2$ ceramic ferrule is manufactured by grinding process because the demands precision is very high. For the precision grinding machining, it is very important that the error of feeding system is improved. Therefore, we estimated the dynamic characteristics in feeding system of ultra precision co-axial grinding machining system. Then, we performed the machining characteristics experiment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.698-701
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• 2005

We have investigated experimentally a nano patterning using electron beam lithography for the nickel stamper fabrication. Recently, DVD and Blu-ray disk(BD) have nano-scale patterns in order to increase the storage density. Specially, BD has 100nm-scale patterns which are generally fabricated by electron beam lithography. In this paper, we found optimum condition of electron-beam lithography for 100nm-scale patterning. We controlled various conditions of EHP(acceleration voltage), beam current, dose and aperture size in order to obtain optimum conditions. We used 100nm-thick PMMA layer on a silicon wafer as photoresist. We found that EHP was the most dominant factor in electron-beam lithography.