• 제어로봇시스템학회논문지
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• 제20권4호
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• pp.463-467
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• 2014

High precision machining technology has become one of the most important parts in the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. For machining systems having high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though ball-screw driven linear stages equipped with linear scale have high precision feed drivers and a long stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study is performed to experimentally examine the repeatability for home position decision of a photo micro sensor as a home switch of a ball-screw driven linear stage by using a capacitance probe.

• 한국정밀공학회지
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• 제23권5호
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• pp.85-92
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• 2006

Recently in the field of precision positioning device, the contact-free stages are gaining focuses with their outstanding performances by eliminating mechanical frictions. This paper presents the driving algorithm for contact-free linear stage based on switched reluctance principle. The proposed driving algorithm has a similar structure of that of switched reluctance motor but this study has its own originality in terms of reducing the normal farces and force ripple at the same time. The simulation and experiment are executed to verify the proposed algorithm.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.45-46
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.530-536
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• 2004

In this paper a servo-system is developed to improve straightness of linear motor stages. When a linear motor stage is used for high-precision linear motion systems, high precision straightness accuracy is necessary to meet the required position accuracy. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to the friction, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performance are illustrated along with some experimental results.

• 한국정밀공학회지
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• 제26권8호
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• pp.112-118
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• 2009

A pressure rise is generated while air bearing stages are moving in high vacuum environment. This study analyzed this pressure rise phenomenon theoretically and verified it experimentally using two different kinds of stages - linear and rotary air bearing stages. Results indicate that the pressure rise was caused by additional leakage resulting from stage velocity, along with adsorption and outgassing of gas molecules from the guide rail surface. Though tilting of the stage due to acceleration and deceleration reached several micrometers, it had a negligible effect on pressure rise because the tilting time was very short. Therefore, a rotary air bearing stage showed much less pressure rise than a linear stage because the rotary stage theoretically has nothing to do with the above causes. Additional leakage caused by stage velocity was inevitable if the stage had movements, but pressure rise caused by adsorption and outgassing could be suppressed by improving the surface quality to reduce real surface area, and by coating the guide rail surface with titanium nitride (TiN) which has less adhesion probability of gas molecules. The results also indicate that the pressure rise increased when the air bearing stage operated under high vacuum conditions.

• 한국정밀공학회지
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• 제23권2호
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• 한국정밀공학회지
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• 제22권10호
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• pp.72-79
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• 2005

Compared with linear induction principle, the transverse flux circumferential induction principle is suggested as a driving mechanism of the revolving stage, which can rotate contactlessly without any supporting structure. The stage realizes the integrated motion of levitation, rotation, and planar perturbation, using the two-axis forces, normally directed force of the air-gap and tangential force, of the induction drivers mounted on the stator uniformly. In this paper, the force generating mechanism of the stage is described in detail. First, the various core shapes generating the transverse flux are analyzed to guarantee the proper thrust force. And the vector force intensity of the circumferential induction driver constituting the stage is compared with that of the linear induction driver. Especially it is shown that the magnetic force of the suggested system can be modeled with the linear equivalent model, including the test verification.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.601-602
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• 2008

• 대한기계학회논문집A
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• 제30권9호
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• pp.1094-1101
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• 2006

Recently, a ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator and ultra-precision linear encoder, is designed and developed. The system transfer function of the ultra-precision stage system was derived from the step responses of the system using system identification tool. A $H_{\infty}$ controller was designed using loop shaping method to have robustness for the system uncertainty and external disturbances. For the designed controller, simulations were performed and it was applied to the ultra-precision stage system. From the experimental results it was found that this stage could be controlled with less than 5nm resolution irrespective of hysteresis and creep.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.