• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.651-652
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• 2005

Chemical mechanical polishing (CMP) has emerged as the planarization technique of choice in integrated circuit manufacturing. Especially, polishing pad is considered as one of the most important consumables because of its properties. Generally, conventional polishing pad has irregular pores and asperities. If conditioning process is except from whole polishing process, smoothing of asperities and pore glazing occur on the surface of the pad, so repeatability of polishing performances cannot be expected. In this paper, CMP pad with microstructure was made using micro-molding technology and repeatability of ILD(interlayer dielectric) CMP performances and was evaluated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.220-223
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• 2005

The rapid prototyping (RP) technology has been advanced for various applications such as verification of design, functional test. However, many RP machines still have low accuracy and limitation of applications for various materials. In this research, a hybrid RP system was developed to improve precision of micro parts. This hybrid system consists of deposition and material removal process by mechanical micro machining to fabricate nano composites using photo-curable polymer resin with various nano particles. In this work, using hybrid RP process with Multi-Walled Carbon Nano Tube (MWCNT) and hydroxyapatite, micro parts were fabricated. The precision of parts was evaluated based on the original CAD design, and to see the effect of nano particles on mechanical properties, tensile strength was measured. From the results of experiments, it was confirmed that the part made by hybrid process had higher precision, and the addition of nano particles improved mechanical properties.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1993년도 추계학술대회 논문집
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• pp.279-285
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• 1993

This paper presents a precision automatic measuring system for ball screw Pitch. Ball screw is mounted on a precision indexing table, and the ball screw pitch is measured via magnetic scale, where the indexing and measurement are performed by a PC. For precision indexing of ball screw, direct driven motor is coupled to the designed dead and live centers; the performance of the centers are assessed with a precision master sylinder,such as radial motion,tilt motion, and axial motions. An error compensation model is constructed for the measurement system of ball screw pitch, where the error motions of indexing system as well as the scale measurement system are combined to give the measurement error for the ball screw. The developed system proposes an automated precision measurement system for manufacturers and users of ball screw.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.221-225
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• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.617-620
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. Is such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. We will examine the control performance and stability before manufacturing the real apparatus by using MATLAB SIMULINK based or pre-designed controller and system modeling.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.223-226
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• 2002

Appropriate design/manufacturing conditions, to give outstanding material properties to the $Si_3$$N_4$-BN and AIN-BN based composite materials, will be investigated using the experimental design methods. Ultra-precision machinability of the developed ceramics will be systematically studied in the viewpoint of microstructure and material properties. Also, finite element methods will be applied to define basic principles to significantly improve machinability and various properties. Basic experiments will be performed to develop optimum ultra-precision machining technologies for the developed ceramics. For ultra-precision lapping machining, need to develop a ultra-precision lapping system, suitable metal bonded diamond wheel, and appropriate condition of ultra-precision lapping machining.

• Journal of Mechanical Science and Technology
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• 제15권9호
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• pp.1207-1216
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• 2001

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.709-710
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• 2010

• 한국정밀공학회지
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• 제34권3호
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• pp.173-178
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• 2017

Recently, a high-precision ball screw is an essential part of high-speed machines. However, producing high-precision ball screws has been costly and time-consuming. Nowadays, a whirling machine is used to produce high-precision ball screws efficiently. Rotating multi-tips are used to turn the ball screw in the whirling machine. In this study, a structural analysis was performed by a finite-element method to develop a whirling machine. An improved model of the whirling machine was proposed by the analysis. In addition, a thermal analysis was performed to confirm the thermal stability. The results of the analysis can be applied in order to further develop the whirling machine.

• 한국정밀공학회지
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• 제9권4호
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• pp.72-77
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• 1992

In this study, using in-process tool failure detecting system by AE method in turning machining, we measured AE signal from the tool, and the surface roughness of workpiece and then compared it with tool wear. As a result, we found that tool failure can be predicted by means of surface roughness of the workpiece and it can be predicted more precisely by the arithmetical average roughness (Ra) than by the maximum height of irregularities (Rmax) of the workpiece. Also, we found that we could judge whether it was sudden failure or the wear by means of the shape of AE signal and the range distri- bution of power spectrum frequency when tool danage was happened.