• Title/Summary/Keyword: Precise measurement

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GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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A Study on the Postoperative Stability of Hard Tissue in Orthognathic Surgery Patients Depending on the Difference of Occlusal Plane (악교정 수술시 교합평면의 차이에 따른 술후 경조직의 안정성에 관한 연구)

  • Hwang, Chung-Ju;Lim, Seon-A;Moon, Jeong-Lyon
    • The korean journal of orthodontics
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    • v.29 no.2 s.73
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    • pp.239-249
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    • 1999
  • In orthognathic surgery to obtain proper functional and esthetic form after skeletal discrepancy treatment, precise diagnosis and treatment plan are essential. Especially in two jaw surgeries that have serious upper and lower jaw problems, maxilla and mandible are arranged in three dimensions. Based on the maxillary rearrangement, mandibular sagittal and transverse positions are determined, and thus new occlusal plane is established. The object of this study is to evaluate the stability of the indiviual ideal occlusal plane based on the architectural and structural craniofacial analysis of Delaires. The subjects of this study were 48 patients who underwent two jaw surgeries, and they were equally divided into two groups, A and B. A group was operated with ideal occlusal plane and B group was not. Two groups were compared at the preoperative, immediate postoperative (average 4.3days), and long-term postoperative (average 1.3years) lateral cephalometric radiographs. The following results were obtained: 1. ANS was lower than that of PNS for both A and B after the surgery. That is, maxilla and mandible are rotated in posterior and superior direction. 2. Significances were found between $T_2$ and $T_3$ for both A and B are HRP-Me at vortical measurements, articular angle(p<0.01), gonial angle(p<0.01), and Mn. plane angle(p<0.05) at angular measurement. Mn. plane angle is increased at HRP-Me is decreased for both A and B. 3. There is no significance in skeletal stability aster the surgery between group A and B. 4. Horizontal movements of B and Pog by surgery have statistically significant inverse correlations with horizontal relapse of B and Pog, and vertical relapse of PNS, as well as Mn. Plane angle, and gonial angle after the surgery.

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Extra Dose Measurement of Differential Slice Thickness of MVCT Image with Helical Tomotherapy (토모테라피 치료 시 MVCT Image의 Slice Thickness 차이에 따른 선량 비교)

  • Lee, Byungkoo;Kang, Suman
    • Journal of the Korean Society of Radiology
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    • v.7 no.2
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    • pp.145-149
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    • 2013
  • Helical Tomotherapy is an innovative means of delivering intensity modulated radiation therapy (IMRT) using a device that merges features of a linear accelerator and helical computed tomography (CT) scanner. Hereat, during helical tomotherapy process, megavoltage computed tomography (MVCT) image are usually used for guiding the precise set-up of patient before/after treatment delivery. But which would certainly increase the total dose for patients, this study was to investigate the imaging dose of MVCT using the cylindrical "Cheese" phantom on a tomotherapy machine. A set of cylindrical "Cheese" phantom was adopted for scanning with respectively pitch value (1, 2, 3 mm) with same number slice (10 slice), same length (approximately 9 cm) and phantom set-ups on the couch of tomotherapy system. The average MVCT imaging dose were measured using A1SL ion chamber inserted in the phantom with preset geometry. The MVCT scanning average dose for the cylindrical "Cheese" phantom was 2.24 cGy, 1.02 cGy, 0.81 cGy during respectively pitch value (pitch 1, 2, 3 mm) with same number slice (10 slice), and same length's average dose was 2.47 cGy, 1.28 cGy, 0.88 cGy respectively (pitch 1, 2, 3 mm). Two major parameters, the assigned pitch numbers and scanning length, where the most important impacts to the dose variation. The MVCT dose was inversely proportional to the CT pitch value. The results may provide a reliable guidance for proper planning design of the scanning region, which is valuable to help minimize the extra dose to patient. Questionnaires were distributed to Radiology departments at hospitals with 300 sickbeds throughout the Pohang region of North Gyeongsang Province concerning awareness and performance levels of infection control. The investigation included measurements of the pollution levels of imaging equipment and assistive apparatuses in order to prepare a plan for the activation of prevention and management of hospital infections. The survey was designed to question respondents in regards to personal data, infection management prevention education, and infection management guidelines.

Analysis of the Factors Affecting Anaerobic Thermophilic Digestibility of Food Wastes (음식물쓰레기의 고온 혐기성 소화도에 미치는 요소에 대한 분석)

  • Kim, Do Hee;Hyun, Seung Hoon;Kim, Kyung Woong;Cho, Jaeweon;Kim, In S.
    • Journal of the Korea Organic Resources Recycling Association
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    • v.8 no.2
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    • pp.130-139
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    • 2000
  • Serial basic tests were conducted for the determination of fundamental kinetics and for the actual application of kinetic parameter to food waste digestion with precise measurement of methane production under a thermophilic condition. The effects of food particle size, sodium ion concentration, and volatile solid (VS) loading rate on the anaerobic thermophilic food waste digestion process were investigated. Results of serial test for the determination of fundamental kinetic coefficients showed the value of k (maximum substrate utilization rate coefficient) and KS (half-saturation coefficient) as $0.24hr^{-1}$ and $700mg/{\ell}$, respectively, for non-inhibiting organic loading range. No inhibition effect was shown until $5g/{\ell}$ of sodium ion concentration was applied to a serum bottle reactor. However, the volume of methane gas was decreased gradually when the concentrations of more than $5g/{\ell}$ of sodium ion applied. All sizes of food waste particle showed the same constants (A : 0.45) but the maximum substrate utilization rate constant ($k_{HA}$) was inversely proportional to particle size. As an average particle size increased from 1.02 mm to 2.14 mm, $k_{HA}$ decreased from $0.0033hr^{-1}$ to $0.0015hr^{-1}$. The result reveals that particle size is one of the most important factors in anaerobic food waste digestion. There was no inhibition effect of sodium ion when VS loading rate was $30g/{\ell}$. And maximum injection concentration of VS loading rate was determined about $40g/{\ell}$.

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The Effects of Cognitive Bias on Entrepreneurial Opportunity Evaluations through Perceived Risks in Entrepreneurial Self-Efficacy (창업가의 인지편향이 지각된 위험과 조절된 창업효능감에 따라 창업기회평가에 미치는 영향)

  • Kim, Daeyop;Park, Jaehwan
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.15 no.1
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    • pp.95-112
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    • 2020
  • This paper is to investigate how cognitive bias of college students and entrepreneurs relates to perceived risks and entrepreneurial opportunities that represent uncertainty, and how various cognitive bias and entrepreneurial efficacy In the same way. The purpose of this study is to find improvement points of entrepreneurship education for college students and to suggest problems and improvement possibilities in the decision making process of current entrepreneurs. This empirical study is a necessary to improve the decision-making of individuals who want to start a business at the time when various attempts are made to activate the start-up business and increase the sustainability of the existing SME management. And understanding of the difference in opportunity evaluation, and suggests that it is necessary to provide good opportunities together with the upbringing of entrepreneurs. In order to achieve the purpose of the study, questionnaires were conducted for college students and entrepreneurs. A total of 363 questionnaire data were obtained and demonstrated through structural equation modeling. This study confirms that there is some relationship between perceived risk and cognitive bias. Overconfidence and control illusions among cognitive bias have a significant relationship between perceived risk and wealth. Especially, it is confirmed that control illusion of college students has a significant relationship with perceived risk. Second, cognitive bias demonstrated some significant relationship with opportunity evaluation. Although we did not find evidence that excess self-confidence is related to opportunity evaluation, we have verified that control illusions and current status bias are related to opportunity evaluation. Control illusions were significant in both college students and entrepreneurs. Third, perceived risk has a negative relationship with opportunity evaluation. All students, regardless of whether they are college students or entrepreneurs, judge opportunities positively if they perceive low risk. Fourth, it can be seen from the college students 'group that entrepreneurial efficacy has a moderating effect between perceived risk and opportunity evaluation, but no significant results were found in the entrepreneurs' group. Fifth, the college students and entrepreneurs have different cognitive bias, and they have proved that there is a different relationship between entrepreneurial opportunity evaluation and perceived risk. On the whole, there are various cognitive biases that are caused by time pressure or stress on college students and entrepreneurs who have to make judgments in uncertain opportunities, and in this respect, they can improve their judgment in the future. At the same time, university students can have a positive view of new opportunities based on high entrepreneurial efficacy, but if they fully understand the intrinsic risks of entrepreneurship through entrepreneurial education and fully understand the cognitive bias present in direct entrepreneurial experience, You will get a better opportunity assessment. This study has limitations in that it is based on the fact that university students and entrepreneurs are integrated, and that the survey respondents are selected by the limited random sampling method. It is necessary to conduct more systematic research based on more faithful data in the absence of the accumulation of entrepreneurial research data. Second, the translation tools used in the previous studies were translated and the meaning of the measurement tools might not be conveyed due to language differences. Therefore, it is necessary to construct a more precise scale for the accuracy of the study. Finally, complementary research should be done to identify what competitive opportunities are and what opportunities are appropriate for entrepreneurs.

Modulation of Adhesion Proteins Integrin β1 and FAK, and Cytoskeletal Protein Actin by Spermine in MCF-7 Cells (MCF-7 세포에서 spermine에 의한 부착단백질 Integrin β1과 FAK, 세포골격 단백질 actin의 조절)

  • Jee, Hye-Jin;Kim, Byeong-Gee
    • Journal of Life Science
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    • v.22 no.1
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    • pp.16-24
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    • 2012
  • Polyamines are essential for cell growth and differentiation; however their precise roles are unclear yet. In the present study, the cytotoxic effect of spermine (spm) on MCF-7 cells was investigated. In the MTT assay of MCF-7 cells treated with spm, cell viability was significantly decreased in a time-and dose-dependent manner. Cell viability measurement was confirmed by trypan blue staining. FACS analysis shows that sub-G1 was increased in a time-and dose-dependent manner too. When the cells were treated with spm, cells started to show morphological changes within 2 hrs. The expression of adhesion proteins (FAK and integrin ${\beta}1$), and cytoskeletal protein (actin) was checked by Western blotting analysis. Integrin ${\beta}1$ levels were slightly decreased, and FAK and actin levels were rapidly decreased with spm treatment. In confocal laser scanning microscopy, the distribution of actin did not change but the expression decreased in a dose-dependent manner with spm treatment. FAK was evenly distributed under the plasma membrane in the untreated control. However, at 10 ${\mu}M$ spm FAK seemed to move toward the cell nucleus. Integrin ${\beta}1$, which was mainly found in the focal point of the plasma membrane in the untreated control, dispersed through the entire plasma membrane in spm treatment. The present results indicate that cytotoxic effects of spm are triggered by the disruption of adhesion proteins and cytoskeletal protein.

Three dimensional GPR survey for the exploration of old remains at Buyeo area (부여지역 유적지 발굴을 위한 3차원 GPR 탐사)

  • Kim Jung-Bo;Son Jeong-Sul;Yi Myeong-Jong;Lim Seong-Keun;Cho Seong-Jun;Jeong Ji-Min;Park Sam-Gyu
    • 한국지구물리탐사학회:학술대회논문집
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    • 2004.08a
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    • pp.49-69
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    • 2004
  • One of the important roles of geophysical exploration in archeological survey may be to provide the subsurface information for effective and systematic excavations of historical remains. Ground Penetrating Radar (GPA) can give us images of shallow subsurface structure with high resolution and is regarded as a useful and important technology in archeological exploration. Since the buried cultural relics are the three-dimensional (3-D) objects in nature, the 3-D or areal survey is more desirable in archeological exploration. 3-D GPR survey based on the very dense data in principle, however, might need much higher cost and longer time of exploration than the other geophysical methods, thus it could have not been applied to the wide area exploration as one of routine procedures. Therefore, it is important to develop an effective way of 3-D GPR survey. In this study, we applied 3-D GPR method to investigate the possible historical remains of Baekje Kingdom at Gatap-Ri, Buyeo city, prior to the excavation. The principal purpose of the investigation was to provide the subsurface images of high resolution for the excavation of the surveyed area. Besides this, another purpose was to investigate the applicability and effectiveness of the continuous data acquisition system which was newly devised for the archeological investigation. The system consists of two sets of GPR antennas and the precise measurement device tracking the path of GPR antenna movement automatically and continuously Besides this hardware system, we adopted a concept of data acquisition that the data were acquired arbitrary not along the pre-established profile lines, because establishing the many profile lines itself would make the field work much longer, which results in the higher cost of field work. Owing to the newly devised system, we could acquire 3-D GPR data of an wide area over about $17,000 m^2$ as a result of the just two-days field work. Although the 3-D GPR data were gathered randomly not along the pre-established profile lines, we could have the 3-D images with high resolution showing many distinctive anomalies which could be interpreted as old agricultural lands, waterways, and artificial structures or remains. This case history led us to the conclusion that 3-D GPR method can be used easily not only to examine a small anomalous area but also to investigate the wider region of archeological interests. We expect that the 3-D GPR method will be applied as a one of standard exploration procedures to the exploration of historical remains in Korea in the near future.

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Chemical Age Dating of Zircon and Monazite by E1ectron Microprobe (전자현미분석기를 이용한 저어콘 및 모나자이트의 화학적 연대 측정법)

  • 이석훈
    • The Journal of the Petrological Society of Korea
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    • v.10 no.3
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    • pp.179-189
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    • 2001
  • The determination of trace concentration of U, Th and Pb was carried out for chemical dating of zircon and monazite by electron microprobe. Detection limit and error range should be considered to measure characteristic X-rays of M-line from those minerals, which are low in the ionization of atom and low peak intensity in the spectrum. The element of U, Th and Pb were simultaneously measured with 3 spectrometers equipped with PET crystal to reduce a total counting time and error due to drift of instrumental operating condition. Detection limit could be improved from increase of the peak/background ratio through adjusting pulse height analyzer about 1000 mv baseline. Under permissible maximum analytical conditions, theoretical detection limit of U, Th and Pb is down to 30 ppm (99% confidence level). The analytical result was maintained at a relative error $\pm$10% ($2{\sigma}$) in 800 ppm Pb, $\pm$5% ($2{\sigma}$) in 2330 ppm U and $\pm$10% ($2{\sigma}$) in dating from a single measurement of zircon at 15 keV and 100 nA. However, for the precise dating of zircon and monazite, if it is considered a 3 $\mu\textrm{m}$ spatial resolution, <100 ppm ($3{\sigma}$) detection limit and <$\pm$10% ($2{\sigma}$) relative error, optimum analytical conditions are given as 15~20 keV accelerating voltage, 100~200 nA beam current and 300~1200 sec total counting time. To reduce material damage by high current, there is need to be up to 3~5 $\mu\textrm{m}$ of electron beam diameter, or to use arithmetic average of multiple measuring at a shorter counting time. A younger or relatively low concentration rocks can be dated chemically by lower detection limit and improved precision resulted from increase of current and measuring time.

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Studies on Determinant Factors of SCM Performance: From the Supplier Perspective (SCM 성과 결정요인에 관한 통합적 연구: 공급업체 관점으로)

  • Park, Kwang-Oh;Chang, Hwal-Sik
    • Asia pacific journal of information systems
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    • v.21 no.1
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    • pp.1-27
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    • 2011
  • In an attempt to cope with widespread, dynamic, and accelerating changes in both internal and external business environments, companies often utilize information technologies such as SCM(Supply Chain Management). To date, SCM research has mainly focused on the effects of dynamic factors on SCM success and emphasized adoption strategies and critical success factors. Consequently, the effects of more static factors such as interdependency between SCM partners have been largely ignored. The purpose of this study, therefore, is to examine the effects of both dynamic and static factors on SCM performance by controlling for information quality and partnership quality. The five factors examined in this study include innovative ness, mutual dependency, quality of information, partnership quality, and SCM performance. All factors were examined from the perspective of part suppliers, except the mutual dependency which was examined from two aspects: supplier's dependency on customer and customer's dependency on supplier. Data was collected through five hundred survey questionnaires distributed to the part supplier companies that have implemented SCM systems for at least one year. As a result, a total of 170 valid responses were obtained. A structural equation research model was fitted using SAS 9.1.3 and SMART-PLS 2.0. The results of this study can be summarized as follows. First, innovativeness positively affected SCM information quality. SCM partnership quality, and ultimately SCM performance. The path coefficient between innovativeness and information quality was 0.387, with a t-value of 3.528. Innovativeness also had a positively direct effect on partnership quality. The path coefficient was 0.351 with a t-value of 3.366. The total effect of innovativeness on partnership quality was significant, although its indirect effect on partnership quality by altering information quality was negligible. The total indirect effect of innovativeness on SCM performance by affecting information quality and partnership quality was significant with a p-value of 0.014. Innovativeness played an important role in determining SCM performance. Second, mutual dependency showed no significant effect on SCM information quality. This result contradicts the earlier assertion that the more dependent two companies are, the more accurate and timely the information they exchange ought to be. This study showed that this may not be the case; a partner may provide information of poor quality even when it is strongly dependent on the other. Mutual dependency showed significant effect on partnership quality. However, when the mutual dependency perceived by suppliers was divided into two parts, one being a supplier's dependency on its customer company and the other being a customer's dependency on the supplier, the latter showed a significant impact on the perceived SCM partnership quality. This result indicates that a customer company can hardly improve the partnership quality perceived by suppliers by making them more dependent. It improves only when the suppliers perceive that their partners, typically having more bargaining power, are more dependent on them. The overall effect of mutual dependency of any kind on SCM performance, however, was not significant. Although mutual dependency has been mentioned as an important static factor influencing almost every aspect of cooperation on a supply chain, its influences may not be as significant as it was initially perceived to be. Third, the correlation between information quality and partnership quality was 0.448 with a p-value of less than 0.001. Information quality had a path coefficient of 0.256 to partnership quality with a t-value of 2.940. The quality of information exchanged between partners may have an impact on their partnership quality. Fourth, information quality also had a significant impact on SCM performance with a path coefficient of 0.325 with a t-value of 3.611. In this study, SCM performance was divided into four categories: product quality, cost saving, service quality, and order fulfillment. Information quality has Significant impacts on product quality, cost saving and service quality, but not on order fulfillment. Fifth, partnership quality, as expected, had a significant impact on SCM performance. The path coefficient was 0.403 with a t-value of 3.539. Partnership quality, like information quality, had positive impacts on product quality, cost saving and service quality, but showed no impact on order fulfillment. It seemed that order fulfillment is the hardest category of performance that SCM can satisfy. One major limitation of this study is that it surveyed only the suppliers. To better understand the dual aspects of SCM, it is important to survey both suppliers and the assemblers, especially in pairs. This research, to our best knowledge, was the first attempt to study the level of dependency between the two groups by measuring the dual aspects of SCM and studying mutual dependency from the categories of suppliers and assemblers each.. In the future, a more comprehensive and precise measurement of SCM characteristics needs to be achieved by examining from both the supplier's and assembler's perspectives.

Influence of Parotid from Various Dose Rate in Intensity Modulated Radiation Therapy Planning for Head and Neck Cancer (두경부암 세기변조방사선치료 계획 시 선량율 변화가 이하선에 미치는 영향)

  • Hong, Joo-Wan;Jeong, Yun-Ju;Won, Hui-Su;Chang, Nam-Jun;Choi, Ji-Hun;Seok, Jin-Yong
    • The Journal of Korean Society for Radiation Therapy
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    • v.22 no.2
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    • pp.105-111
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    • 2010
  • Purpose: There are various beam parameter in intensity modulated radiation therapy (IMRT). The aim of this study is to investigate how various dose rate affect the parotid in treatment plan of IMRT. Materials and Methods: The study was performed on 10 nasopharyngeal carcinoma patients who have undergone IMRT. CT images were scanned 3 mm of thickness in the same condition and the treatment plan was performed by Eclipse (Ver.7.1, Varian, Palo Alto, USA). The parameters for planning used 6 MV energy and 8 beams under the same dose volume constraint. The variation of dose rates were used 300, 400, 500 MU/min. The mean dose of both parotid was accessed from the calculated planning among the 10 patients. The mean dose of parotid was verificated by 2D diode array (Mapcheck from Sun Nuclear Corporation, Melbourne, Florida). Also, Total monitor unit (MU) and beam-on time was analysed. Results: According to the dose rate, the mean dose of parotid was increased by 0.8%, 2.0% each, when dose rate was changed from 300 MU/min to 400, 500 MU/min, moreover Total MU was increased by 5.4% and 10.6% each. There was also a dose upward trend in the dose measurement of parotid by 2D diode array. However, beam - on time difference of 1~2 minutes was no signigicant in the dose rate increases. Conclusion: From this study, when the dose rates increase, there was a signigicant increase of Total MU and the parotid dose accordingly, however the shortened treatment time was not significant. Hence, it is considered that there is a significant decrease of late side effect in parotid radiation therapy, if the precise dose rate in IMRT is used.

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