• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.969-974
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• 2003

A simple and cost-effective method for the electrostatic suspension of thin plates like silicon wafers is proposed which is based on a switched voltage control scheme. It operates according to a relay feedback control and deploys only a single high-voltage power supply that can deliver a dc voltage of positive and/or negative polarity. This method possesses the unique feature that no high-voltage amplifiers are needed which leads to a remarkable system simplification relative to conventional methods. It is shown that despite the inherent limit cycle property of the relay feedback based control, an excellent performance in vibration suppression is attained due to the presence of a relatively large squeeze film damping origination from the air between the electrodes and levitated object. Using this scheme, a 4-inch silicon wafer was levitated stably with airgap variation decreasing down to 1 $\mu\textrm{m}$ at an airgap of 100 $\mu\textrm{m}$

• 한국정밀공학회지
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• 제25권3호
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• pp.83-92
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• 2008

This paper develops the theory for a fault-tolerant, permanent magnet biased, homopolar magnetic bearing. If some of the coils or power amplifiers suddenly fail, the remaining coil currents change via a novel distribution matrix such that the same magnetic forces are maintained before and after failure. Lagrange multiplier optimization with equality constraints is utilized to calculate the optimal distribution matrix that maximizes the load capacity of the failed bearing. Some numerical examples of distribution matrices are provided to illustrate the theory. Simulations show that very much the same dynamic responses (orbits or displacements) are maintained throughout failure events (up to any combination of 3 coils failed for the 6 pole magnetic bearing) while currents and fluxes change significantly. The overall load capacity of the bearing actuator is reduced as coils fail. The same magnetic forces are then preserved up to the load capacity of the failed.

• 한국정밀공학회지
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• 제25권3호
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• pp.63-72
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• 2008

A new method for the electrostatic suspension of disk-shaped objects is proposed which is based on a time-optimal control scheme and deploys only high-voltage power supplies that can deliver dc voltages of positive and/or negative polarity. This method possesses the unique feature that no high-voltage amplifiers are needed which leads to a remarkable system simplification and objects can be suspended stably even in vacuum environment. Using this scheme, an aluminium disk used in a 3.5-inch HDD was suspended stably at an airgap of 0.3mm.

• 한국소음진동공학회논문집
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• 제17권11호
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• pp.1102-1111
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• 2007

The theory for a fault-tolerant control of homopolar magnetic bearings is developed. New coil winding law is utilized such that control fluxes are isolated for an 8-pole homopolar magnetic bearing. Decoupling chokes are not required for the fault tolerant magnetic bearing since C-core fluxes are isolated. If some of the coils or power amplifiers suddenly fail, the remaining coil currents change via a distribution matrix such that the same magnetic forces are maintained before and after failure. Lagrange multiplier optimization with equality constraints is utilized to calculate the optimal distribution matrix that maximizes the load capacity of the failed bearing. Some numerical examples of distribution matrices are provided to illustrate the theory. Simulations show that very much the same dynamic responses (orbits or displacements) are maintained throughout failure events while currents and fluxes change significantly.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 춘계학술대회논문집
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• pp.1047-1051
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• 2004

Charge amplifier systems benefit from the very wide dynamic range of PE accelerometers by offering flexibility in adjusting the electrical output characteristics such as sensitivity and range. They are well suited for operation at high temperatures. Modern charge systems feature improved low noise operation, simplified digital controls, and dual mode operation for operation with charge or IEPE voltage mode sensors. high impedance circuitry is not well suited for operation in adverse field or factory environments. The resolution of a PE accelerometer may not be specified or known since noise is a system consideration determined by cable length and amplifier gain. IEPE accelerometrs operate from a constant current power source, provide a high-voltage, low-impedance, fixed mV/g output. They operate through long, ordinary, coaxial cable in adverse environments without degradation of signal quality. They have limited high temperature range. IEPE sensors are simple to operate. Both resolution and operating range are defined specifications. Cost perchannel is lower compared to PE systems since low-noise cable and charge amplifiers are not required.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.263-264
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• 2006

A new method for the electrostatic suspension of disk-shaped objects is proposed which is based on a time-optimal control scheme and deploys only high-voltage power supplies that can deliver do voltages of positive and/or negative polarity. This method possesses the unique feature that no high-voltage amplifiers are needed which leads to a remarkable system simplification and objects can be suspended stably even in vacuum environment. Using this scheme, an Aluminium disk employed in a 3.5-inch HDD was suspended stably at an airgap of 0.3mm.

• 한국정밀공학회지
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• 제22권10호
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• pp.56-64
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• 2005

A simple and cost-effective method for the electrostatic suspension of thin plates like silicon wafers is proposed which is based on a switched voltage control scheme. It operates according to a relay feedback control and deploys only a single high-voltage power supply that can deliver a DC voltage of positive and/or negative polarity. This method possesses the unique feature that no high-voltage amplifiers are needed which leads to a remarkable system simplification relative to conventional methods. It is shown that despite the inherent limit cycle property of the relay feedback based control, an excellent performance in vibration suppression is attained due to the presence of a relatively large squeeze film damping origination from the air between the electrodes and levitated object. Using this scheme, a 4-inch silicon wafer was levitated stably with airgap variation decreasing down to $1 {\mu}m$ at an airgap of $100{\mu}m$.

• Journal of Biosystems Engineering
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• 제13권2호
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• pp.9-17
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• 1988

This study was carried out to develop an agricultural robot for fruit harvesting. As the first step an experimental manipulator and its control system were constructed. The articulated manipulator driven by DC motors has 3 degrees-of-freedom. The manipulator has a gripper adequate for fruit harvesting and an upper arm which forms a kind of guiding channel so thai harvested fruit can pass through. Point-to-point control of joints are accomplished by a digital control system with a PID controller which consists of optical shaft encoders, power amplifiers using PWM, a microcomputer and a software. The microcomputer also computes the positions of manipulator and sequence of motions. The motion of the manipulator was to slow and rough that it would need further improvement.

• 한국광학회:학술대회논문집
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• 한국광학회 2004년도 제15회 정기총회 및 동계학술발표회
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• pp.312-313
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• 2004

The optical gain saturation and noise figure characteristics of 1550nm traveling-wave semiconductor optical amplifiers are analyzed experimentally and theoretically. The result shows that there is an optimum active layer thickness for high saturation output power and low noise figure.

• 전자공학회논문지A
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• 제33A권4호
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• pp.136-141
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• 1996

In this paper, a new CMOS on-chip current reference circit for memory, operational amplifiers, comparators, and data converters is proposed. The reference current is almost independent of temeprature and power-supply variations. In the proposed circuit, the current component with a positive temeprature coefficient cancels that with a negative temperature coefficient each other. While conventional curretn and voltage reference circuits require BiCMOS or bipolar process, the presented circuit can be integrated on a single chip with other digiral and analog circits using a standard CMOS process and an extra mask is not needed. The prototype is fabricated employing th esamsung 1.0um p-well double-poly double-metal CMOS process and the chip area is 300um${\times}$135 um. The proposed reference current circuit shows the temperature coefficient of 380 ppm/.deg. C with the temperature changes form 30$^{\circ}C$ to 80$^{\circ}C$, and the output variation of $\pm$ 1.4% with the supply voltage changes from 4.5 V to 5.5 V.