• 제목/요약/키워드: Post plasma

검색결과 446건 처리시간 0.027초

Thermal Stability and Electrical Properties of HfOxNy Gate Dielectrics with TaN Gate Electrode

  • Kim Jeon-Ho;Choi Kyu-Jeong;Seong Nak-Jin;Yoon Soon-Gil;Lee Won-Jae;Kim Jin-dong;Shin Woong-Chul;Ryu Sang-Ouk;Yoon Sung-Min;Yu Byoung-Gon
    • Transactions on Electrical and Electronic Materials
    • /
    • 제4권3호
    • /
    • pp.34-37
    • /
    • 2003
  • [ $HfO_2$ ] and $HfO_xN_y$ films were deposited by plasma-enhanced chemical vapor deposition using $Hf[OC(CH_3)_3]_4$ as the precursor in the absence of $O_2$. The crystallization temperature of the $HfO_xN_y$ films is higher than that of the $HfO_2$ film. Nitrogen incorporation in $HfO_xN_y$ was confirmed by auger electron spectroscopy analysis. After post deposition annealing (PDA) at 800$\Box$, the EOT increased from 1.34 to 1.6 nm in the $HfO_2$ thin films, whereas the increase of EOT was suppressed to less than 0.02 nm in the $HfO_xN_y$. The leakage current density decreased from 0.18 to 0.012 $A/cm^2$ with increasing PDA temperature in the $HfO_2$ films. But the leakage current density of $HfO_xN_y$ does not vary with increasing PDA temperature because an amorphous $HfO_xN_y$ films suppresses the diffusion of oxygen through the gate dielectric.

롤투롤 인쇄공정 적용을 위한 차세대 나노입자 소결 기술 (Alternative Sintering Technology of Printed Nanoparticles for Roll-to-Roll Process)

  • 이은경;은경태;안영석;김용택;천민우;좌성훈
    • 마이크로전자및패키징학회지
    • /
    • 제21권4호
    • /
    • pp.15-24
    • /
    • 2014
  • Recently, a variety of printing technologies, including ink jet, gravure, and roll-to-roll (R2R) printing, has generated intensive interest in the application of flexible and wearable electronic devices. However, the actual use of printing technique is much limited because the sintering process of the printed nanoparticle inks remains as a huge practical drawback. In the fabrication of the conductive metal film, a post-sintering process is required to achieve high conductivity of the printed film. The conventional thermal sintering takes considerable sintering times, and requires high temperatures. For application to flexible devices, the sintering temperature should be as low as possible to minimize the damage of polymer substrate. Several alternative sintering methods were suggested, such as laser, halogen lamp, infrared, plasma, ohmic, microwave, and etc. Eventually, the new sintering technique should be applicable to large area, R2R, and polymer substrate as well as low cost. This article reviews progress in recent technologies for several sintering methods. The advantages and disadvantages of each technology will be reviewed. Several issues for the application in R2R process are discussed.

Effects of Cryoprotectants and Freezing Rates on Cryopreservation of Sea Urchin, Anthocidaris crassispina Sperm

  • Kang, Kyoung-Ho;Kho, Kang-Hee;Kim, YoungHun
    • 한국양식학회지
    • /
    • 제17권1호
    • /
    • pp.46-50
    • /
    • 2004
  • In the present study, attempts were made to cryopreserve sea urchin, Anthocidaris crassispina sperm in liquid nitrogen, to evaluate the effects of various cryoprotectants and freezing rates on motility, survival rate and fertilization rate of the post-thawing sperm, and the ultrastructural changes of sperm after cryopreservation were observed. The highest values of sperm motility (motility index: 3.3$\pm$0.37) and survival rate (72$\pm$3.5%) were obtained with 15% dimethyl sulfoxide (DMSO), and these values were significantly higher than those of sperm preserved with glycerol. Comparisons of motilities and survival rates between treatments of difference freezing rates showed that there was no difference between procedures (a) 5$0^{\circ}C$/min to -8$0^{\circ}C$ (motility index: 3.3$\pm$0.31 ; survival late 70$\pm$2.7%) and (b) 3$0^{\circ}C$/min to -8$0^{\circ}C$ (motility index: 3.1$\pm$0.29; survival rate 69$\pm$3.7%), while the results of (c) 1$0^{\circ}C$/min to -8$0^{\circ}C$ were significantly lower than the others (motility index: 2.2$\pm$0.33 ; survival rate 42$\pm$4.6%). There was no significant difference in fertilization rate between fresh sperm and sperm preserved with 15% DMSO as cryoprotectant and freezing rate (3$0^{\circ}C$/min to -8$0^{\circ}C$). Some ultrastructural changes of sperm, such as the detachment of plasma membrane, the destruction of mitochondria, and the flagellum rolling up head, were observed after cryopreservation. Morphological normality of the sperm in 15% DMSO frozen at the ratio of 5$0^{\circ}C$/min to -8$0^{\circ}C$ was better than the others.

감성돔(Acanthopagrus schlegeli) 정자의 냉동보존에 미치는 희석액과 동해방지제의 영향 (Effects of Diluents and Cryoprotectants on Cryopreservation of Black Seabream (Acanthopagrus schligeli) Sperm)

  • 임한규;장영진
    • 한국양식학회지
    • /
    • 제11권1호
    • /
    • pp.67-75
    • /
    • 1998
  • 감성돔 (Acanthopagrus schlegeli) 정자의 냉동 보존시 정자의 생리활성과 보존효과를 비교하기 위하여, 순환여과 사육시스템에서 사육한 전장 $25.9{\pm}1.7$ cm, 체중$292.8{\pm}53.7$ g의 성어로부터 얻은 정액을 재료로 하여 희석액별, 동해방지제별 해동후 정자의 활성, 생존율 및 알에 대한 수정능력을 평가하였다. 희석액별 냉동보존에서 해동정자의 생존율은 3% sodium citrate에서 $80{\pm}1.4$%로 가장 높았으나, 수정률은 5.4% glucose에서 $63.4{\pm}4.4$%로 가장 높았다. 동해방지제별 냉동보존에서 해동정자의 수정률은 5~15% glycerol을 동해방지제로 사용하였을 때, 50.1~69.4%로 DMSO 보다 나은 효과를 보였다. 감성돔 정자의 냉동보존을 위한 적정 희석액과 동해방지제는 5% glucose와 5% glycerol이었다. 냉동하지 않은 감성돔 정자의 머리는 구형으로 직경 $1.5{\pm}0.1$ ${\mu}$m, 길이 $1.3{\pm}0.1$${\mu}$m였으며, 치밀한 핵질로 채워져 있었다. 편모는 전형적인 9+2 구조를 나타냈다. 그러나 냉동후 해동시킨 정자중에서는 염색질의 과립화, 세포막의 이탈에 의한 그 용적이 커지는 구조변화를 보였다.

  • PDF

Visualization of Multicolored in vivo Organelle Markers for Co-Localization Studies in Oryza sativa

  • Dangol, Sarmina;Singh, Raksha;Chen, Yafei;Jwa, Nam-Soo
    • Molecules and Cells
    • /
    • 제40권11호
    • /
    • pp.828-836
    • /
    • 2017
  • Eukaryotic cells consist of a complex network of thousands of proteins present in different organelles where organelle-specific cellular processes occur. Identification of the subcellular localization of a protein is important for understanding its potential biochemical functions. In the post-genomic era, localization of unknown proteins is achieved using multiple tools including a fluorescent-tagged protein approach. Several fluorescent-tagged protein organelle markers have been introduced into dicot plants, but its use is still limited in monocot plants. Here, we generated a set of multicolored organelle markers (fluorescent-tagged proteins) based on well-established targeting sequences. We used a series of pGWBs binary vectors to ameliorate localization and co-localization experiments using monocot plants. We constructed different fluorescent-tagged markers to visualize rice cell organelles, i.e., nucleus, plastids, mitochondria, peroxisomes, golgi body, endoplasmic reticulum, plasma membrane, and tonoplast, with four different fluorescent proteins (FPs) (G3GFP, mRFP, YFP, and CFP). Visualization of FP-tagged markers in their respective compartments has been reported for dicot and monocot plants. The comparative localization of the nucleus marker with a nucleus localizing sequence, and the similar, characteristic morphology of mCherry-tagged Arabidopsis organelle markers and our generated organelle markers in onion cells, provide further evidence for the correct subcellular localization of the Oryza sativa (rice) organelle marker. The set of eight different rice organelle markers with four different FPs provides a valuable resource for determining the subcellular localization of newly identified proteins, conducting co-localization assays, and generating stable transgenic localization in monocot plants.

Comparison of Serum Fucose Levels in Leukoplakia and Oral Cancer Patients

  • Rai, Narendra Prakash;Anekar, Jayaprasad;Shivaraja, Shankara YM;Divakar, Darshan Devang;Al Kheraif, Abdulaziz Abdullah;Ramakrishnaiah, Ravikumar;Sebastian, Roopa;Raj, AC;Al-Hazmi, Ali;Mustafa, habil Mohamed
    • Asian Pacific Journal of Cancer Prevention
    • /
    • 제16권17호
    • /
    • pp.7497-7500
    • /
    • 2015
  • Background: Tumor markers, designated as a broad group of substances produced by malignancies, could be in the form of biochemical substances, immunological substances, cell surface changes and genetic alterations. Cancer, a disorder of cellular behavior is characterized by alteration of serum glycoproteins. L-fucose, a hexose, which is the terminal sugar in most of the plasma glycoproteins, may be useful as a tumor marker for the detection, monitoring and prognostic assessment of malignancies. The aim of the study was to ascertain the role of serum fucose as a biomarker for early detection of oral cancer and to compare serum fucose levels in healthy controls, leukoplakia and oral cancer patients. Materials and Methods: The study included 60 (100.0%) subjects, who were grouped as 20 (33.3%) control subjects, 20 (33.3%) squamous cell carcinoma patients and 20 (33.3%) leukoplakia patients. Fucose estimation was done using UV-visible spectrophotometry based on the method as adopted by Winzler using cysteine reagent. The results were analyzed statistically using ANOVA with Bonferroni post hoc tests. Results: Results showed a high significance in serum fucose in oral squamous cell carcinoma (OSCC) and leukoplakia subjects compared to normal controls. There was a gradual increase in the values noted from control to leukoplakia and to squamous cell carcinoma. Conclusions: Estimation of serum fucose may be a reliable marker and can be used as an effective diagnostic biomarker in oral squamous cell carcinoma patients.

Effect of Administration of Garlic Extract and PGF2α on Hormonal Changes and Recovery in Endometritis Cows

  • Sarkar, P.;Kumar, H.;Rawat, M.;Varshney, V.P.;Goswami, T.K.;Yadav, M.C.;Srivastava, S.K.
    • Asian-Australasian Journal of Animal Sciences
    • /
    • 제19권7호
    • /
    • pp.964-969
    • /
    • 2006
  • The efficacy of garlic extract and $PGF_2{\alpha}$ in the treatment of endometritis in cows was evaluated. A total of 26 parous cows affected with endometritis were randomly allocated into three groups. Group I (n = 10) animals were infused (IU) with 10 ml garlic extract mixed with 90 ml normal saline, three times at 12 h interval starting from the day of estrum, whereas the animals of Group II (n = 10) were treated with a single injection of $PGF_2{\alpha}$ (25 mg Lutalyse) on the $10^{th}$ to $12^{th}$ day after estrus, and group III (n = 6) remained as control. Cervico-vaginal mucus (CVM) was collected from each animal at pre- and post-treatment estrus and subjected to white side test, pH determination and total bacterial load. The clinical recovery of cows was assessed by negative white side test reaction, pH value and total bacterial count of CVM at subsequent estrus. The recovered animals were inseminated with frozen-thawed semen twice at 12 h intervals and pregnancy was confirmed at 45-60 days following insemination. A significant decline (p<0.05) in pH of CVM was observed in both the treatment groups at subsequent estrus. After treatment there was a significant (p<0.05) reduction in bacterial load, whereas, it was increased in control group. A total number of 65 isolates were identified in CVM samples comprising mostly of facultative anaerobic bacteria. Plasma $T_4$ and $T_3$ concentrations were increased in all the treated animals, whereas, a decline was observed in cortisol levels following treatment. The overall conception rate was 50% in treated groups as compared to nil pregnancy in the control.

TaN 게이트 전극을 가진 $HfO_xN_y$ ($HfO_2$) 게이트 산화막의 열적 안정성 (Thermal Stability and Electrical Properties of $HfO_xN_y$ ($HfO_2$) Gate Dielectrics with TaN Gate Electrode)

  • 김전호;최규정;윤순길;이원재;김진동
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
    • /
    • pp.54-57
    • /
    • 2003
  • [ $HfO_xN_y$ ] films using a hafnium tertiary-butoxide $(Hf[OC(CH_3)_3]_4)$ in plasma and $N_2$ ambient were prepared to improve the thermal stability of hafnium-based gate dielectrics. A 10% nitrogen incorporation into $HfO_2$ films showed a smooth surface morphology and a crystallization temperature as high as $200^{\circ}C$ compared with pure $HfO_2$ films. The $TaN/HfO_xN_y/Si$ capacitors showed a stable capacitance-voltage characteristics even at post-metal annealing temperature of $1000^{\circ}C$ in $N_2$ ambient and a constant value of 1.6 nm EOT (equivalent oxide thickness) irrespective of an increase of PDA and PMA temperature. Leakage current densities of $HfO_xN_y$ capacitors annealed at PDA temperature of 800 and $900^{\circ}C$, respectively were approximately one order of magnitude lower than that of $HfO_2$ capacitors.

  • PDF

Structure and Property Analysis of Nanoporous Low Dielectric Constant SiCOH Thin Films

  • 허규용;이문호;이시우;박영희
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2009년도 춘계학술대회 논문집
    • /
    • pp.167-169
    • /
    • 2009
  • We have carried out quantitative structure and property analysis of the nanoporous structures of low dielectric constant (low-k) carbon-doped silicon oxide (SiCOH) films, which were deposited with plasma enhanced chemical vapor deposition (PECVD) using vinyltrimethylsilane (VTMS), divinyldimethylsilane (DVDMS), and tetravinylsilane (TVS) as precursor and oxygen as an oxidant gas. We found that the SiCOH film using VTMS only showed well defined spherical nanopores within the film after thermal annealing at $450^{\circ}C$ for 4 h. The average pore radius of the generated nanopores within VTMS SiCOH film was 1.21 nm with narrow size distribution of 0.2. It was noted that thermally labile $C_{x}H_{y}$ phase and Si-$CH_3$ was removed to make nanopore within the film by thermal annealing. Consequently, this induced that decrease of average electron density from 387 to $321\;nm^{-3}$ with increasing annealing temperature up to $450^{\circ}C$ and taking a longer annealing time up to 4 h. However, the other SiCOH films showed featureless scattering profiles irrespective of annealing conditions and the decreases of electron density were smaller than VTMS SiCOH film. Because, with more vinyl groups are introduced in original precursor molecule, films contain more organic phase with less volatile characteristic due to the crosslinking of vinyl groups. Collectively, the presenting findings show that the organosilane containing vinyl group was quite effective to deposit SiCOH/$C_{x}H_{y}$ dual phase films, and post annealing has an important role on generation of pores with the SiCOH film.

  • PDF

Control of $Ca^{2+}$- Influx by $Ca^{2+}$/Calmodulin Dependent Protein Kinase II in the Activation of Mouse Eggs

  • Yoon, Sook-Young;Kang, Da-Won;Bae, In-Ha
    • 한국발생생물학회지:발생과생식
    • /
    • 제15권1호
    • /
    • pp.31-39
    • /
    • 2011
  • Change in intracellular $Ca^{2+}$-concentration ($[Ca^{2+}]_i$) is an essential event for egg activation and further development. $Ca^{2+}$ ion is originated from intracellular $Ca^{2+}$-store via inositol 1,4,5-triphosphate receptor and/or $Ca^{2+}$ influx via $Ca^{2+}$ channel. This study was performed to investigate whether changes in $Ca^{2+}$/calmodulin dependent protein kinase II (CaM KII) activity affect $Ca^{2+}$ influx during artificial egg activation with ethanol using $Ca^{2+}$ monitoring system and whole-cell patch clamp technique. Under $Ca^{2+}$ ion-omitted condition, $Ca^{2+}$-oscillation was stopped within 30 min post microinjection of porcine sperm factor, and ethanol-induced $Ca^{2+}$ increase was reduced. To investigate the role of CaM KII known as an integrator of $Ca^{2+}$- oscillation during mammalian egg fertilization, CaM KII activity was tested with a specific inhibitor KN-93. In the eggs treated with KN-93, ethanol failed to induce egg activation. In addition, KN-93 inhibited inward $Ca^{2+}$ current ($I_{Ca}$) in a time-dependent manner in whole-cell configuration. Immunostaining data showed that the voltage-dependent $Ca^{2+}$ channels were distributed along the plasma membrane of mouse egg and 2-cell embryo. From these results, we suggest that $Ca^{2+}$ influx during fertilization might be controlled by CaM KII activity.