• 제목/요약/키워드: Post plasma

검색결과 445건 처리시간 0.029초

염소 플라즈마를 이용한 알루미늄 식각 공정이 저유전상수 층간절연막 polyimide에 미치는 영향 (Effect of the Cl-based Plasma for Al Etching on the Interlayer Low Dielectric Polyimide)

  • 문호성;김상훈;이홍구;우상균;김경석;안진호
    • 마이크로전자및패키징학회지
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    • 제6권1호
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    • pp.75-79
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    • 1999
  • 차세대 저유전상수 층간 절연막중 하나로 대두되고 있는 polyimide를 플라즈마에 노출시키고 이때 나타나는 전기적 특성변화를 살펴보았다. polyimide를 알루미늄 식각시 사용되고 있는 Cl-based 플라즈마에 노출시켰을때 유전상수가 약간 증가함을 볼 수 있었고, F-based 플라즈마로 $SF_{6}$ 플라즈마에 노출시켰을 때는 유전상수 감소를 볼 수 있었다. 이는 fluorine또는 chlorine bond의 생성과 관련된 것으로 FTIR과 XPS분석을 통해 확인할 수 있었다. 따라서 Cl-based 플라즈마로 알루미늄 식각 후 $SF_{6}$플라즈마에 노출시킴으로써 이 부식문제의 해결뿐만 아니라 po1yimide의 유전상수도 낮출 수 있으리라 기대된다.

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플라즈마 식각에 의하여 실리콘 표면에 유기된 불순물 오염의 분석 및 제거 (Analysis and Reduction of Impurity Contamination Induced by Plasma Etching on Si Surface)

  • 조선희;이원종
    • 한국전기전자재료학회논문지
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    • 제19권12호
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    • pp.1078-1084
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    • 2006
  • Impurity contamination induced by $CF_4\;and\;HBr/Cl_2/O_2$ plasma etching on Si surface was examined by using surface spectroscopes. XPS(x-ray photoelectron spectroscopy) surface analysis showed that F of 0.4 at % exists in the surface layer in the form of Si-F bonding but Br and Cl are below the detection limit $(0.1{\sim}1.0%)$ of the spectroscope. Static-SIMS(secondary ion mass spectrometry) surface analysis showed that the etched Si surface was contaminated with etching gas elements such as H, F, Cl and Br, and they existed to the depth of about $20{\sim}40nm$. The etched Si surface was treated with three different methods that were HF dip, thermal oxidation followed by HF dip and oxygen-plasma oxidation followed by HF dip. They showed an effect in reducing the impurity contamination and the oxygen-plasma oxidation followed by HF dipping method appears to be a little bit more effective.

산소 플라즈마를 이용하여 원거리 플라즈마 원자층 증착법으로 형성된 하프늄 옥사이드 게이트 절연막의 특성 연구 (Characteristics of Hafnium Oxide Gate Dielectrics Deposited by Remote Plasma-enhanced Atomic Layer Deposition using Oxygen Plasma)

  • 조승찬;전형탁;김양도
    • 한국재료학회지
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    • 제17권5호
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    • pp.263-267
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    • 2007
  • Hafnium oxide $(HfO_2)$ films were deposited on Si(100) substrates by remote plasma-enhanced atomic layer deposition (PEALD) method at $250^{\circ}C$ using TEMAH [tetrakis(ethylmethylamino)hafnium] and $O_2$ plasma. $(HfO_2)$ films showed a relatively low carbon contamination of about 3 at %. As-deposited and annealed $(HfO_2)$ films showed amorphous and randomly oriented polycrystalline structure. respectively. The interfacial layer of $(HfO_2)$ films deposited using remote PEALD was Hf silicate and its thickness increased with increasing annealing temperature. The hysteresis of $(HfO_2)$ films became lower and the flat band voltages shifted towards the positive direction after annealing. Post-annealing process significantly changed the physical, chemical, and electrical properties of $(HfO_2)$ films. $(HfO_2)$ films deposited by remote PEALD using TEMAH and $O_2$ plasma showed generally improved film qualities compare to those of the films deposited by conventional ALD.

레티놀의 생체시료 중 HPLC 분석 및 경피흡수 (HPLC Analysis of Retinol in the Biological Fluids and Cutaneous Absorption after its Transdermal Administration)

  • 정연복;한건
    • Journal of Pharmaceutical Investigation
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    • 제30권4호
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    • pp.283-288
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    • 2000
  • The purpose of the present study was to investigate the topical bioavailability of retinol (vitamin A) after its transdermal administration. For this purpose, we developed the convenient HPLC method to measure the retinol concentration in the biological fluids such as plasma and skin tissues. The low detection limit was $0.1\;{\mu}g/ml$ using a gradient HPLC system of UV detection. The initial plasma concentration of retinol was about $20\;{\mu}g/ml$ after its i.v. bolus administration (4.32 mg/kg). The half life $(t_{1/2{\alpha}})$ in the distributive phase was 1.3 min, while retinol was slowly disappeared in the post-distributive phase. On the other hand, the maximum plasma concentration $(C_{max})$ was about 776 ng/ml after appling to rat skin at a dose of 43.2 mg/kg. Furthermore, the concentration of retinol in the skin tissues was about 600 ng/g tissue at 12 hr after its transdermal administration. In conclusion, the initial plasma concentration of retinol was comparable with the skin concentration after its cutaneous absorption, followed by being decreased with the passage of the time.

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실링이 플라즈마 스프레이 코팅된 알루미나 코팅재의 내부식성에 미치는 영향 (Effect of Sealing on the Corrosion Resistance of Plasma-Sprayed Alumina Coatings)

  • 권의표;김세웅;이종권
    • 한국재료학회지
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    • 제32권10호
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    • pp.442-447
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    • 2022
  • Sealing treatment is a post-surface treatment of the plasma spray coating process to improve the corrosion resistance of the coating material. In this study, the effect of the sealing on the corrosion resistance and adhesive strength of the plasma spray-coated alumina coatings was analyzed. For sealing, an epoxy resin was applied to the surface of the coated specimen using a brush. The coated specimen was subjected to a salt spray test for up to 48 hours and microstructural analysis revealed that corrosion in the coating layer/base material interface was suppressed due to the resin sealing. Measurement of the adhesive strength of the specimens subjected to the salt spray test indicated that the adhesive strength of the sealed specimens remained higher than that of the unsealed specimens. In conclusion, the resin sealing treatment for the plasma spray-coated alumina coatings is an effective method for suppressing corrosion in the coating layer/base material interface and maintaining high adhesive strength.

Coenzyme Q10 섭취가 노인들의 혈중 산화적 스트레스 지표 및 항산화 능력에 미치는 영향 (The Effect of Coenzyme Q10 Supplementation on Oxidative Stress Index and Antioxidant Capacity in the Elderly)

  • 김정규;노성규
    • 운동영양학회지
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    • 제13권1호
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    • pp.29-35
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    • 2009
  • The purpose of this study was to investigate the effects of oral supplementation of coenzyme Q10 (CoQ10) for 4 weeks on the plasma free oxygen radical and total antioxidant capacity at resting and after one bout exercise in healthy old men. Thirty volunteers with an average (+/-SD) age of 62.59+/-5.3 years participated in this study and were divided with three groups; CoQ10 (200 mg daily) group, vitamin C & E (800mg, 400 IU daily) group, and placebo group. A cycle exercise (60% HRR) test was performed at the end of study. Blood samples were taken for the analyses at rest and pre-, post-, 30min after cycle exercise, before and after the 4 weeks of supplementation. After supplementation, there were no significant differences in the plasma free oxygen radical levels and total antioxidant capacity at resting. Plasma free oxygen radical level and total antioxidant capacity in three groups were significantly elevated after exercise, however, it did not vary significantly between groups. CoQ10 supplementation showed significant difference in total antioxidant capacity during recovery phase compared with placebo group. Our results demonstrated that supplementation of CoQ10 in healthy old men improve blood total antioxidant capacity after one bout exercise, despite no alteration of plasma free oxygen radical levels.

후 컬럼 동위원소 희석법을 적용한 HPLC-ICP/MS에서의 정량분석에서 내부 표준물을 이용한 정확도와 정밀도의 개선연구 (Study of improving precision and accuracy by using an internal standard in post column isotope dilution method for HPLC-ICP/MS)

  • 주민규;박명순;박용남
    • 분석과학
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    • 제27권3호
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    • pp.140-146
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    • 2014
  • 후 컬럼 동위원소 희석법(PCID, post column isotope dilution)을 HPLC-ICP/MS (high performance liquid chromatography-inductively coupled plasma/mass spectrometry)에 적용한 정량법에서 내부 표준물을 동시에 사용하여 정확도와 정밀도를 개선하였다. 전통적인 여러 정량법과 후 컬럼 동위원소 희석법을 비교하여 볼 때에 PCID의 경우에 컬럼내에서 발생하는 오차가 가장 큰 요인으로 작용하였음을 알 수 있었다. PCID에서 내부 표준물을 사용하여 컬럼내에서의 손실에 대한 오차를 효과적으로 보정하고 정확도와 정밀도를 개선할 수 있었다. 셀레늄 화학종인 SeMet을 시료로 사용하고 내부 표준물로 MeSecys 또는 $Se^{4+}$를 이용한 결과, 사용하지 않은 경우와 비교하면 상대오차는 각 각 31%와 13%에서 모두 1% 대로 낮아져 정확도가 크게 개선되었으며, 상대 표준편차는 5.1%와 6.9%에서 각각 1.5%와 0.2%로 정밀도 또한 크게 개선되었다. PCID에서 내부 표준물을 사용하였을 때의 정량분석법의 장점을 다른 분석법과 비교 토의하였다.

Association between the plasma concentration of melatonin and behavioral temperament in horses

  • Yubin Song;Junyoung Kim;Youngjae Park;Minjung Yoon
    • Journal of Animal Science and Technology
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    • 제65권5호
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    • pp.1094-1104
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    • 2023
  • Aggression in horses may cause serious accidents during riding and non-riding activities. Hence, predicting the temperament of horses is essential for selecting suitable horses and ensuring safety during the activity. In certain animals, such as hamsters, plasma melatonin concentrations have been correlated with aggressive behavior. However, whether this relationship applies to horses remains unclear. To address this research gap, this study aimed to evaluate differences in the plasma melatonin concentrations among horses of different breeds, ages, and sexes and examine the correlation between plasma melatonin concentrations and the temperament of the horses, including docility, affinity, dominance, and trainability. Blood samples from 32 horses were collected from the Horse Industry Complex Center of Jeonju Kijeon College. The docility, affinity, dominance, and trainability of the horses were assessed by three professional trainers who were well-acquainted with the horses. Plasma melatonin concentrations were measured using an enzyme-linked immunosorbent assay. The consequent values were compared between the horses of different breeds, ages, and sexes using a three-way analysis of variance and least significant difference post hoc test. Linear regression analysis was employed to identify the relationship between plasma melatonin concentrations and docility, affinity, dominance, and trainability. The results showed that the plasma melatonin concentrations significantly differed with breeds in Thoroughbred and cold-blooded horses. However, there were no differences in the plasma melatonin concentrations between the horse ages and sexes. Furthermore, plasma melatonin concentrations did not exhibit a significant correlation with the ranking of docility, affinity, dominance, and trainability.

비기허증(脾氣虛證) 환자의 식사 전후 주관적 식욕과 Gut Hormone 혈중 농도에 대한 탐색적 연구 (Exploratory Study on the Pre-and Post-Prandial Subjective Appetite and Plasma Gut Hormone Levels in Spleen Qi Deficiency (SQD) Syndrome)

  • 오혜원;이지원;김제신;이준희
    • 사상체질의학회지
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    • 제27권1호
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    • pp.125-137
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    • 2015
  • Objectives The aim of this study was to investigate clinical factors of SQD syndrome by tracking plasma gut hormone (active ghrelin, active Glucagon-like peptide-1(GLP-1), pancreatic polypeptide(PP), total peptide YY(PYY)) profiling of pre-post prandial standard meal between SQD group and normal group. Methods A total of 24 adult participants were consecutively recruited on April 2014. They were diagnosed as either by SQD syndrome or normal by Spleen Qi Deficiency Questionnaire (SQDQ). On the experimental day, blood samplings of 2 ml were repeatedly collected at 6 points from 2 groups for measuring plasma levels of gut hormones. At every point, subjective appetite sensations were self-registered. Results & Conclusions 1. There were significantly lower subjective 'Appetite' (p=0.012) and higher 'Satiety' (p=0.012) in SQD group. At each time point, subjective 'Appetite' was significantly lower at 60 min after breakfast (p=0.034) and 'Satiety' were significantly higher at 15 min (p=0.020) and 120 min (p=0.044) after breakfast in SQD group. 2. There were no significant differences in plasma levels of gut hormones (active ghrelin, active GLP-1, PP, total PYY) between SQD and normal group. Also at each time point, there were no significant differences of plasma levels of gut hormones between SQD and normal group. 3. Changes in plasma levels of gut hormones compared to baseline were not significantly different at each time point between SQD and normal group. Plasma PYY levels compared to baseline increased in SQD group following 15 min and 30 min after breakfast but decreased in normal group. 4. Further investigation is needed to construct gut hormone profiling and in this perspective, we can approach evaluation tool on variable appetite in Traditional Korean Medicine (TKM) syndrome in the future.

Controllable Etching of 2-Dimentional Hexagonal Boron Nitride by Using Oxygen Capacitively Coupled Plasma

  • Qu, Deshun;Yoo, Won Jong
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2013년도 춘계학술대회 논문집
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    • pp.170-170
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    • 2013
  • We present a novel etching technique for 2-dimentional (2-D) hexagonal boron nitride (h-BN) by using capacitively coupled plasma (CCP) of oxygen combined with a post-treatment by de-ionized (DI) water. Oxygen CCP etching process for h-BN has been systematically studied. It is found that a passivation layer was generated to obstruct further etching while it can be easily and radically removed by DI water. An essential cleaning effect also has been observed in the etching process, organic residues are successfully removed and the surface roughness has much decreased. Considering h-BN is the most important 2-D dielectric material and its potential application for graphene to silicon-based electronic devices, such an etching method can be widely used to control the 2-D h-BN thickness and improve the surface quality.

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