Poly[(1-methacryloyloxy-4-tosyloxycyclohexane)-co-(tert-butyl methacrylate)] as an acid amplifying photoresist
(산 증식형 포토레지스트로 Poly($MTC_{10}-co-tBMA_{90}$ )의 합성 및 특성 연구)
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- Journal of the Korean Graphic Arts Communication Society
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- v.20 no.2
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- pp.131-140
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- 2002