• 전력전자학회:학술대회논문집
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• 전력전자학회 1998년도 Proceedings ICPE 98 1998 International Conference on Power Electronics
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• pp.91-96
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• 1998

This study aims to realize high precision repetitive positioning control of the linear servo motor. The authors have previously improved the repeatability positioning precision by employing a two-degree-of-freedom PID controller in the positioning control, rather than equal distance positioning, and investigates the repeatability positioning precision.

• 동력기계공학회지
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• 제2권2호
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• pp.67-72
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• 1998

To improve control performance, especially positioning speed, of a pneumatic positioning system, dynamic characteristics of a control valve should be considered. In case we design controller including dynamic characteristics of a control valve, it's not easy to design controller gain using simple state feedback because degree of a control system is increased. This study designed controller using loop shaping of $H_{\infty}$ control theory for a model composed of a pneumatic actuator and a control valve, and positioning experiment using this controller was performed. As a result, it was verified that the controller is useful for high speed positioning of a pneumatic positioning system.

• International Journal of Precision Engineering and Manufacturing
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• 제3권3호
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• pp.62-68
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• 2002

To satisfy the requirement of the one axis linear positioning system, which is following control of the desired trajectory without following error and is the high positioning accuracy, feed-forward loop having cogging force model is proposed. In the one axis linear positioning system with linear PM motor, cogging force acting as disturbance is modeled analytically. Analytic model of cogging force is verified by result measured from positioning system constructed with linear PM motor. Measured result is very similar with proposed analytic model. Cogging force model is used as feet forward loop in control scheme of linear positioning system. Cogging force feed-forward'loop is obtained from analytic model of cogging farce. Trajectory following error is reduced from 300nm to 100nm by applying the proposed cogging farce feed-forward loop. By using analytic model of cogging force, the control scheme is simplified. Also this analytic model is applicable to calculation of characteristic value of positioning system in design process.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 춘계학술대회 논문집
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• pp.56-62
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• 1999

We make a study of pricisioning apparatus that is used in the various industrial machine. The study was carried out to develope a pricision positioning apparatus, consisting of servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by servo motor. Control system output a signal from laser interferometer and microsense to amplifier of servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense so, we can controlled positioning of one output by the coarse positioning in the system. Also we obtain the positioning resolution of 9nm in the system.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.1239-1244
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• 2004

Precise positioning is an important problem facing motion control systems which usually use electric motor. A motor possesses a nonlinear property which degrades the positioning accuracy. Therefore, a compensator which linearizes the relationship between the angular velocity and input signal of the motor is required to enable precise positioning. In this paper, the design of a Model Reference Adaptive Control System (MRACS) for realizing the precise positioning for a system using a motor including the nonlinear property is described. The designed MRACS is applied to the attitude control problem on a satellite using a DC servomotor to drive its reaction wheel. Experimental results demonstrate the validity of a proposed control method for a positioning control system with an electric motor.

• 동력기계공학회지
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• 제2권2호
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• pp.60-66
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• 1998

Positioning performance with a normal pneumatic positioning system, is mainly affected by friction force on the actuator and nonlinear characteristics of the control valve. We proposed a positioning system which is composed of a pneumatic actuator and high speed control valve. for accurate and speedy positioning. Driving piston on the actuator is mounted with externally pressurized air bearings to clear the friction force. This paper studies a method in order that improves positioning ability of the pneumatic positioning system considering the nonlinear characteristics of the control valve and the actuator.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1990년도 한국자동제어학술회의논문집(국제학술편); KOEX, Seoul; 26-27 Oct. 1990
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• pp.1312-1315
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• 1990

Nanometer positioning control with high velocity and long stroke is discussed. A one-axis stage mechanism driven by an AC linear motor and guided by a rolling ball guide has been constructed. Coarse and fine position controls are designed by using nonlinear dynamics of the rolling guide. Switching from coarse positioning to fine positioning is studied.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 춘계학술대회 논문집
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• pp.239-244
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• 2009

This paper suggests a precision positioning control technique of a precision positioning stage with coupling effects. The precision positioning stage is supported by four flexible spring hinges and driven by two piezoelectric actuators. The dynamic characteristics of the precision positioning stage is modeled and identified by the FEM analysis. The dynamic characteristics of the stage are also identified by the frequency domain modeling technique based on the experimental data. Reliability of two modeling methods is examined by comparing the numerically and experimentally produced responses of the stage. This paper proposes a sliding mode control technique with integrator to improve the tracking ability of the precision positioning stage to the complex input signal using. To demonstrate the effectiveness of the proposed modeling schemes and control algorithm, experiment validations are performed.

• 한국생산제조학회지
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• 제9권6호
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• pp.164-169
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. As such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. Control performance and stability analysis were performed in advance by modeling and designing the controller with Simulink.

• 대한기계학회논문집
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• 제19권3호
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• pp.661-669
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• 1995

This paper presents a design method of dynamic positioning control system in view ofpractical design concept for reliability and robust realization. This method adopts a design method of multivariable robust servo system. The practical experiments of the dynamic positioning control were carried out for a semi-submersible 2-lower hull type platform model with 4 rotatable thrusters in a small water tank. The results fo overall experiment show that the proposed position control method will be an efficient method to the better control performance of dynamic positioning system under serere environment and it is substentially practicable for the platform.