• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.22 no.2
• /
• pp.134-138
• /
• 2021

Various types of precision plastic thin films are used widely in high-performance displays, such as smartphones. For plastic thin-films manufactured by the Roll-to-Roll process, the film thickness must be measured and managed while moving. In the Roll-to-Roll process, wrinkles are generated when tension is applied to the film, which causes an inclination on the optical axis of the thickness gauge, resulting in a loss of accuracy. Therefore, this study attempted to develop an optical interference tomography measurement system. In this study, the tilt angle of the film was measured to correct the measurement value error in the thickness gauge caused by the tilt of the film. The system was constructed so that the laser was irradiated on the tilted film, and the laser reflected from the film was formed on the PSD. The relationship between the tilt angle of the film and the output value of the PSD was obtained experimentally. Using this, a device to measure the tilt angle of the film was constructed, and angle measurements were taken at a speed of 250,000Hz.

• Proceedings of the KIEE Conference
• /
• 2002.11a
• /
• pp.251-253
• /
• 2002

We have fabricated a novel Vertical Trench Hall-Effect Device sensitive to the magnetic field parallel to the sensor chip surface for non-contact angular position sensing applications. The Vertical Trench Hall-Effect Device is built on SOI wafer which is produced by silicon direct bonding technology using bulk micromachining, where buried $SiO_2$ layer and surround trench define active device volume. Sensitivity up to 150 V/AT is measured.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.05a
• /
• pp.471-472
• /
• 2010

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.49 no.2
• /
• pp.140-148
• /
• 2000

In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and $10\times10$ each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4$\mum$, and maximum angular displacement is $\pm4.6^{\corc}$ respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device).

• Proceedings of the KIEE Conference
• /
• 1998.11b
• /
• pp.540-542
• /
• 1998

The Position Sensitive Detector(PSD) is an useful device which can be used to measure the position of an incidence light in accuracy and in real-time. In this paper, 2-D PSD sensor is used to measure the 2-D position of moving object with light source. To get the position of light source from PSD sensor exactly, we propose two position computation methods ; the parameter calibration and neural network. Experimental data is presented that offer the comparision between two methods and demonstrates the effectiveness of proposed approach.

• Proceedings of the KIEE Conference
• /
• 2003.11c
• /
• pp.536-539
• /
• 2003

This paper presents a study of position tracing system for Underwater Vehicle Robots(UVR) that is inspecting an atomic furnace. This system development is the basic research for the purpose of position estimation of UVR and preventing that UVR crash into the wall of an atomic furnace. For this purpose, Pan/Tilt Unit that is attached Laser is pointing PSD(Position Sensitive Detector) Sensor which is stuck to the upper side of UVR. Through this action, we can find the Position of UVR. In this paper, we construct the system for aiming the laser pointer at PSD Sensor using pan/tilt and study the optimum algorithm for finding the optional position that is located at the space which is pointable area by Laser device.

• Proceedings of the KIEE Conference
• /
• 2004.07d
• /
• pp.2167-2169
• /
• 2004

The main concern for a displacement measurement is the performance of a sensor such as speed, resolution, accuracy and so on. The mainly used sensors are a linear CCD(charge coupled device) and a PSD(position sensitive detection) as a non-contact type. The output value of a linear CCD is so sensitive to a temperature change that it needs a cooling device. Additionally, because of its structural problem, there are some limits in resolution and speed, and it needs a complex image processing algorithm. Also, PSD has some disadvantages like sensitivity to environmental lights and nonlinearities. Like this, a linear CCD and PSD have their own characteristics and if we know them well, we can choose the one of the two sensors properly in some applications according to purposes. In this paper, I performed which one is superior to the other among the two sensors in terms of accuracy, resolution, measurement speed, signal to noise ratio.

• Bulletin of the Korean Chemical Society
• /
• v.34 no.6
• /
• pp.1845-1847
• /
• 2013

The lateral photovoltaic effect (LPE) can be observed in semiconductors by irradiating a light spot position between electrodes on sample's surface. Because lateral photovoltaic voltage (LPV) is sensitively changed by light spot position, a LPE device has been tried as a position-sensitive detector. This study discusses the correlation between LPV and conductivity in p-type silicon and nano-structured Au deposited p-type silicon (nano-Au silicon), respectively. Conductivity measurement of the sample was carried out using the four-wire method to eliminate contact resistance, and conductivity dependence on LPV was simultaneously measured by changing the light irradiation position. The result showed a strong correlation between conductivity and LPV in the p-type silicon sample. The correlation coefficient was 0.87. The correlation coefficient between LPV and conductivity for the nano-Au silicon sample was 0.41.

• Journal of the Korean Society for Precision Engineering
• /
• v.16 no.7
• /
• pp.40-50
• /
• 1999

Recently, a laser displacement sensor is widely used for the manufacturing automation. The sensor is generally composed of a diode laser and a light receiving device. The diode laser emits a laser beam and the receiving device detects the light reflected from the measured object. The object position is obtained based upon triangulation method. As a light receiving device, a PSD is usually utilized since its structure is very simple and rugged and has a high accuracy. Although the theoretical relationship for this sensor had been developed, the characteristics of the sensor have not been much experimentally studied. In this paper, several experimental results will presented. The measurement accuracy is affected by the surface conditions such as the reflectance characteristics, the angle of the object's surface and the laser intensity. In addition, it is found that the PSD and the signal processing circuit have nonlinearities and showed that those nonlinearities can be reduced by controlling the emitting laser intensity.

• Proceedings of the IEEK Conference
• /
• 2001.06e
• /
• pp.119-122
• /
• 2001

This paper deals with new type of active magnetic bearing (AMB) for the linear motors. We adopted optical sensing mechanism for the gap sensing. Using the laser and the PSD (Position Sensitive Device), the absolute rotor position is obtained independent of the profile of the guide rail. With this measurement, the rotor can be controller to follow the straight beam of the laser. Another advantage of optical sensing mechanism might be the elimination of the possible interference between the proximity sensor and the electro-magnet. By adopting the push-full actuating mechanism, the bearing stiffness is increased near the equilibrium position. For the simplicity, distributed control system is constructed. Eight independent PID control algorithm is used with the full order observer. Several simulation md test results are presented.