• Title/Summary/Keyword: Polystyrene sphere

Search Result 24, Processing Time 0.024 seconds

Measurement of Particle Deposition Velocity toward a Horizontal Semiconductor Wafer Using a Wafer Surface Scanner (Wafer Surface Scanner를 이용한 반도체 웨이퍼상의 입자 침착속도의 측정)

  • Bae, G.N.;Park, S.O.;Lee, C.S.;Myong, H.K.;Shin, H.T.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
    • /
    • v.5 no.2
    • /
    • pp.130-140
    • /
    • 1993
  • Average particle deposition velocity toward a horizontal semiconductor wafer in vertical airflow is measured by a wafer surface scanner(PMS SAS-3600). Use of wafer surface scanner requires very short exposure time normally ranging from 10 to 30 minutes, and hence makes repetition of experiment much easier. Polystyrene latex (PSL) spheres of diameter between 0.2 and $1.0{\mu}m$ are used. The present range of particle sizes is very important in controlling particle deposition on a wafer surface in industrial applications. For the present experiment, convection, diffusion, and sedimentation comprise important agents for deposition mechanisms. To investigate confidence interval of experimental data, mean and standard deviation of average deposition velocities are obtained from more than ten data set for each PSL sphere size. It is found that the distribution of mean of average deposition velocities from the measurement agrees well with the predictions of Liu and Ahn(1987) and Emi et al.(1989).

  • PDF

Conductivity Change of PEDOT:PSS Film according to the Surface Structuring

  • Yu, Jung-Hoon;Nam, Sang-Hoon;Lee, Jin-Su;Hwang, Ki-Hwan;Seo, Hyeon-Jin;Ju, Dong-Woo;Jeon, So-Hyoun;Yun, Sang-Ho;Boo, Jin-Hyo
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2014.02a
    • /
    • pp.248.1-248.1
    • /
    • 2014
  • We present results from an experimental study of conductivity change of poly (3,4-ethylenedioxythiophene) poly(styrenesulfonate) (PEDOT:PSS) film according to the surface structuring. We demonstrate that the patterned structure was enhanced with approximately five times conductivity in comparison with non structure of PEDOT:PSS film. In order to patterning, we have fabricated polystyrene (PS) colloidal monolayer as a template with sphere diameter of 780nm and 1.8um. Structure has honeycomb shape and it provide shorter path way to flowing of electron. Pattern size was controlled by PS diameter and varied by Transformer Coupled Plasma (TCP) etching system. Conductivity was converted from sheet resistance which measured by 4-point prove. Film thickness was derived using Field Emission Scanning Electron Microscopy (FE-SEM) images.

  • PDF

Effects of Oxygen Transfer Rate of a Polystyrene Foam Bead Media in a Packed Column Aerator (Packed Column 에어레이터에서 매질로 이용한 발포스티로폼 입자의 산소 전달 효과)

  • 박정환;김유희;조재윤
    • Journal of Aquaculture
    • /
    • v.13 no.3
    • /
    • pp.267-275
    • /
    • 2000
  • To evaluate the characteristics and efficiency of oxygen transfer rate of a polystyrene foam bead as media in a packed column aerator was tested. This media has more surface area and cheaper than other ordinary plastic media. The polystyrene foam media was a sphere-shaped bead with 2.5 mm in diameter and specific surface area was 1,350 $m^2$/$m^3$. Oxygen transfer rate and standard aeration efficiency were tested under different hydraulic loading rates, depths of the media and temperatures. Experiment 1 was performed using a small packed column aerator with 10 cm in diameter and 1 m in length. The aerator filled with 0, 4.5, 9.0 and 18.0 cm of the media was tested under hydraulic loading rates of 2.0, 4.0 and 5.6 $m^3$/$m^2$/min at temperatures of 20, 25 and 3$0^{\circ}C$, respectively. In this experiment, standard oxygen transfer rate (SOTR) increased with the hydraulic loading rate and depth of the media increased. The maximum SOTR was reached at 5.6 $m^3$/$m^2$/min of hydraulic loading rate with 9 cm in depth of the media. However, standard aeration efficiency (SAE) decreased with the hydraulic loading rate increased because electricity consumed by pump increased as hydraulic loading rate increased. The highest SAE was reached at hydraulic loading rate of 2.0 $m^3$/$m^2$/min with 9.0 cm in depth of the media. Therefore, the highest SOTR and SAE were achieved at 9.0 cm in depth of the media regardless of the hydraulic loading rate. The maximum SAE was about 1.8 kg $O_2$/kW-hr with the hydraulic loading .ate of $m^3$/$m^2$/min at temperature of 20 $^{\circ}C$.Experiment 2 was performed using a larger aerator, 20 cm in diameter with 2 m in height. The aerator filled with 0, 9, 18, 27 and 36 cm of the media was operated under hydraulic loading rate of 2.0, 4.0 and 5.6 $m^3$/$m^2$/min at temperature of 27 $^{\circ}C$. The SAE reached to the highest efficiency (1.9 kg $O_2$/kW-hr) at 2.0 $m^3$/$m^2$/min of hydraulic loading rate and 36 cm in depth of the media. According to the above results, the polystyrene foam bead as a media in a packed column aerator was effective to increase oxygen transfer rate.

  • PDF

Electrochemical Performance as the Positive Electrode of Polyaniline and Polypyrrole Hollow Sphere with Different Shell Thickness (껍질 두께가 다른 폴리아닐린과 폴리피롤 속 빈 구형체 양전극의 전기화학적 성능)

  • Yun, Su-Ryeon;Hwang, Seung-Gi;Cho, Sung-Woo;Kang, Yongku;Ryu, Kawng-Sun
    • Applied Chemistry for Engineering
    • /
    • v.23 no.2
    • /
    • pp.131-137
    • /
    • 2012
  • Polyaniline (PANI) and polypyrrole (Ppy) hollow sphere structures with controlled shell thicknesses can be easily synthesized than those of using a layer-by-layer method for cathode active material of lithium-ion batteries. Polystyrene (PS) core was synthesized by emulsion polymerization using an anion surfactant. The shell thicknesses of PANI and Ppy were controlled by amounts of aniline and pyrrole monomers. PS was removed by an organic solution. This structure increased in contact with an electrolyte and a specific capacity in lithium-ion batteries. But polymers have disadvantages such as the difficult control of molecular weights and low densities. These disadvantages were completed by controlled shell thicknesses. The amount of aniline monomer increased from 1.2, 2.4, 3.6, 4.8 to 6.0 mL, and the shell thicknesses were 30.2, 38.0, 42.2, 48.2, and 52.4 nm, respectively. And the amount of pyrrole monomer was 0.6, 1.2, 2.4 and 3.6 mL, the shell thicknesses were 16.0, 22.0, 27.0 and 34.0 nm, respectively. In the cathode materials with controlled shell thicknesses, shell thicknesses of the PANI hollow spheres were 30.2, 42.2, and 52.4 nm, and discharge specific capacities of after 10 cycle were ~18, ~29, and ~62 mAh/g, respectively. The shell thicknesses of the Ppy hollow spheres were 16.0, 22.0, 27.0 and 34.0 nm, and discharge specific capacities of after 15 cycle were ~15, ~36, ~56, and ~77 mAh/g, respectively. Thus, shell thicknesses of PANI and Ppy increased, the specific capacities increased.