• Title/Summary/Keyword: Polynomial Regression

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Endpoint Detection Using Both By-product and Etchant Gas in Plasma Etching Process (플라즈마 식각공정 시 By-product와 Etchant gas를 이용한 식각 종료점 검출)

  • Kim, Dong-Il;Park, Young-Kook;Han, Seung-Soo
    • Journal of IKEEE
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    • v.19 no.4
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    • pp.541-547
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    • 2015
  • In current semiconductor manufacturing, as the feature size of integrated circuit (IC) devices continuously shrinks, detecting endpoint in plasma etching process is more difficult than before. For endpoint detection, various kinds of sensors are installed in semiconductor manufacturing equipments, and sensor data are gathered with predefined sampling rate. Generally, detecting endpoint is performed using OES data of by-product. In this study, OES data of both by-product and etchant gas are used to improve reliability of endpoint detection. For the OES data pre-processing, a combination of Signal to Noise Ratio (SNR) and Principal Component Analysis (PCA),are used. Polynomial Regression and Expanded Hidden Markov model (eHMM) technique are applied to pre-processed OES data to detect endpoint.

Number of sampling leaves for reflectance measurement of Chinese cabbage and kale

  • Chung, Sun-Ok;Ngo, Viet-Duc;Kabir, Md. Shaha Nur;Hong, Soon-Jung;Park, Sang-Un;Kim, Sun-Ju;Park, Jong-Tae
    • Korean Journal of Agricultural Science
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    • v.41 no.3
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    • pp.169-175
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    • 2014
  • Objective of this study was to investigate effects of pre-processing method and number of sampling leaves on stability of the reflectance measurement for Chinese cabbage and kale leaves. Chinese cabbage and kale were transplanted and cultivated in a plant factory. Leaf samples of the kale and cabbage were collected at 4 weeks after transplanting of the seedlings. Spectra data were collected with an UV/VIS/NIR spectrometer in the wavelength region from 190 to 1130 nm. All leaves (mature and young leaves) were measured on 9 and 12 points in the blade part in the upper area for kale and cabbage leaves, respectively. To reduce the spectral noise, the raw spectral data were preprocessed by different methods: i) moving average, ii) Savitzky-Golay filter, iii) local regression using weighted linear least squares and a $1^{st}$ degree polynomial model (lowess), iv) local regression using weighted linear least squares and a $2^{nd}$ degree polynomial model (loess), v) a robust version of 'lowess', vi) a robust version of 'loess', with 7, 11, 15 smoothing points. Effects of number of sampling leaves were investigated by reflectance difference (RD) and cross-correlation (CC) methods. Results indicated that the contribution of the spectral data collected at 4 sampling leaves were good for both of the crops for reflectance measurement that does not change stability of measurement much. Furthermore, moving average method with 11 smoothing points was believed to provide reliable pre-processed data for further analysis.

Performance Evaluation System for Tow-Channel Ring-Core Flux-Gate Compass (2-체널 링-코어 프럭스-게이트 콤파스의 성능평가 시스템 개발)

  • Yim, Jeong-Bin;Jeong, Jung-Sik;Park, Sung-Hyeon;Kim, Bong-Seok
    • Journal of Navigation and Port Research
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    • v.26 no.5
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    • pp.529-535
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    • 2002
  • Design and implementation methodologies on the performance evaluation system of Two-Channel Ring-Core Flux-Gate Compass (TCRC FG-Compass) are described, with evaluation procedures and methods based on the polynomial regression models. Performance evaluation system consists of a step motor driving unit, a bearing transmitting unit and evaluation programs derived from polynomial regression formulae. Newly designed performance evaluation system enabled the accuracy of TCRC FG-Compass to be ascertained. It was confirmed that the size of residual deviation of TCRC FG-Compass is $2^{\circ}$, while that of the conventional one is $4^{\circ}$. In addition, the design methodology to the self estimation and correction of residual deviations is also discussed.

NDVI Noise Interpolation Using Harmonic Analysis (조화 분석을 이용한 식생지수 보정 기법에 관한 연구)

  • Park, Soo-Jae;Han, Kyung-Soo;Pi, Kyoung-Jin
    • Korean Journal of Remote Sensing
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    • v.26 no.4
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    • pp.403-410
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    • 2010
  • NDVI(Normalized Difference Vegetation Index), which is broadly used as short-term data composite, is an important parameter for climate change and long-term land surface monitoring. Although atmospheric correction is performed, NDVI dramatically appears several low peak noise in the long-term time series. They are related to various contaminated sources, such as cloud masking problem and wet ground condition. This study suggests a simple method through harmonic analysis for reducing NDVI noise using SPOT/VGT NDVI 10-day MVC data. The harmonic analysis method is compared with the polynomial regression method suggested previously. The polynomial regression method overestimates the NDVI values in the time series. The proposed method showed an improvement in NDVI correction of low peak and overestimation.

Predictive model for the shear strength of concrete beams reinforced with longitudinal FRP bars

  • Alzabeebee, Saif;Dhahir, Moahmmed K.;Keawsawasvong, Suraparb
    • Structural Engineering and Mechanics
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    • v.84 no.2
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    • pp.143-154
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    • 2022
  • Corrosion of steel reinforcement is considered as the main cause of concrete structures deterioration, especially those under humid environmental conditions. Hence, fiber reinforced polymer (FRP) bars are being increasingly used as a replacement for conventional steel owing to their non-corrodible characteristics. However, predicting the shear strength of beams reinforced with FRP bars still challenging due to the lack of robust shear theory. Thus, this paper aims to develop an explicit data driven based model to predict the shear strength of FRP reinforced beams using multi-objective evolutionary polynomial regression analysis (MOGA-EPR) as data driven models learn the behavior from the input data without the need to employee a theory that aid the derivation, and thus they have an enhanced accuracy. This study also evaluates the accuracy of predictive models of shear strength of FRP reinforced concrete beams employed by different design codes by calculating and comparing the values of the mean absolute error (MAE), root mean square error (RMSE), mean (𝜇), standard deviation of the mean (𝜎), coefficient of determination (R2), and percentage of prediction within error range of ±20% (a20-index). Experimental database has been developed and employed in the model learning, validation, and accuracy examination. The statistical analysis illustrated the robustness of the developed model with MAE, RMSE, 𝜇, 𝜎, R2, and a20-index of 14.6, 20.8, 1.05, 0.27, 0.85, and 0.61, respectively for training data and 10.4, 14.1, 0.98, 0.25, 0.94, and 0.60, respectively for validation data. Furthermore, the developed model achieved much better predictions than the standard predictive models as it scored lower MAE, RMSE, and 𝜎, and higher R2 and a20-index. The new model can be used in future with confidence in optimized designs as its accuracy is higher than standard predictive models.

Optimization of Fuzzy Inference Systems Based on Data Information Granulation (데이터 정보입자 기반 퍼지 추론 시스템의 최적화)

  • 오성권;박건준;이동윤
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.53 no.6
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    • pp.415-424
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    • 2004
  • In this paper, we introduce and investigate a new category of rule-based fuzzy inference system based on Information Granulation(IG). The proposed rule-based fuzzy modeling implements system structure and parameter identification in the efficient form of “If..., then...” statements, and exploits the theory of system optimization and fuzzy implication rules. The form of the fuzzy rules comes with three types of fuzzy inferences: a simplified one that involves conclusions that are fixed numeric values, a linear one where the conclusion part is viewed as a linear function of inputs, and a regression polynomial one as the extended type of the linear one. By the nature of the rule-based fuzzy systems, these fuzzy models are geared toward capturing relationships between information granules. The form of the information granules themselves becomes an important design features of the fuzzy model. Information granulation with the aid of HCM(Hard C-Means) clustering algorithm hell)s determine the initial parameters of rule-based fuzzy model such as the initial apexes of the membership functions and the initial values of polynomial function being used in the Premise and consequence Part of the fuzzy rules. And then the initial Parameters are tuned (adjusted) effectively with the aid of the improved complex method(ICM) and the standard least square method(LSM). In the sequel, the ICM and LSM lead to fine-tuning of the parameters of premise membership functions and consequent polynomial functions in the rules of fuzzy model. An aggregate objective function with a weighting factor is proposed in order to achieve a balance between performance of the fuzzy model. Numerical examples are included to evaluate the performance of the proposed model. They are also contrasted with the performance of the fuzzy models existing in the literature.

Analytical and experimental exploration of sobol sequence based DoE for response estimation through hybrid simulation and polynomial chaos expansion

  • Rui Zhang;Chengyu Yang;Hetao Hou;Karlel Cornejo;Cheng Chen
    • Smart Structures and Systems
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    • v.31 no.2
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    • pp.113-130
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    • 2023
  • Hybrid simulation (HS) has attracted community attention in recent years as an efficient and effective experimental technique for structural performance evaluation in size-limited laboratories. Traditional hybrid simulations usually take deterministic properties for their numerical substructures therefore could not account for inherent uncertainties within the engineering structures to provide probabilistic performance assessment. Reliable structural performance evaluation, therefore, calls for stochastic hybrid simulation (SHS) to explicitly account for substructure uncertainties. The experimental design of SHS is explored in this study to account for uncertainties within analytical substructures. Both computational simulation and laboratory experiments are conducted to evaluate the pseudo-random Sobol sequence for the experimental design of SHS. Meta-modeling through polynomial chaos expansion (PCE) is established from a computational simulation of a nonlinear single-degree-of-freedom (SDOF) structure to evaluate the influence of nonlinear behavior and ground motions uncertainties. A series of hybrid simulations are further conducted in the laboratory to validate the findings from computational analysis. It is shown that the Sobol sequence provides a good starting point for the experimental design of stochastic hybrid simulation. However, nonlinear structural behavior involving stiffness and strength degradation could significantly increase the number of hybrid simulations to acquire accurate statistical estimation for the structural response of interests. Compared with the statistical moments calculated directly from hybrid simulations in the laboratory, the meta-model through PCE gives more accurate estimation, therefore, providing a more effective way for uncertainty quantification.

Testing of a discontinuity point in the log-variance function based on likelihood (가능도함수를 이용한 로그분산함수의 불연속점 검정)

  • Huh, Jib
    • Journal of the Korean Data and Information Science Society
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    • v.20 no.1
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    • pp.1-9
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    • 2009
  • Let us consider that the variance function in regression model has a discontinuity/change point at unknown location. Yu and Jones (2004) proposed the local polynomial fit to estimate the log-variance function which break the positivity of the variance. Using the local polynomial fit, Huh (2008) estimate the discontinuity point of the log-variance function. We propose a test for the existence of a discontinuity point in the log-variance function with the estimated jump size in Huh (2008). The proposed method is based on the asymptotic distribution of the estimated jump size. Numerical works demonstrate the performance of the method.

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An Implementation of Efficient Error-reducing Method Using DSP for LED I-V Source and Measurement System (DSP를 이용한 LED I-V 공급 및 측정 시스템에서의 효율적인 오차 감소 기법 구현)

  • Park, Chang Hee;Cho, Sung Ho
    • Journal of the Institute of Electronics and Information Engineers
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    • v.52 no.12
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    • pp.109-117
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    • 2015
  • In this paper, we proposed error-reducing method to source or measure a current or voltage for LED in the I-V characteristic analysis system using a digital signal processor (DSP). this method has the advantage of reducing a non-linear circuit error and random error. random error can be reduced using recursive averaging technique and non-linear circuit error can be reduced using 2rd polynomial regression calibration parameters fitting with measured sample data. it corrects measured error of IR, VR, VF1, VF2, VF3 of LED using calibration parameters. experimental results show that can be performed with about 0.017~0.043% accuracy.

Mathematical Analysis of Growth of Tobacco (Nicotiana tabaccum L.) II. A New Model for Growth Curve (담배의 생장반응에 관한 수리해석적 연구 제2보 담배생장곡선의 신모형에 관하여)

  • Kim, Y.A.;Ban, Y.S.
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.27 no.1
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    • pp.84-86
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    • 1982
  • The experiment was conducted with three varieties (Hicks, Burley 21, and Sohyang) and cultivation type (Improved mulching, general mulching, and non mulching) of NC 2326 to model to curve of tabacco growth against time. The basic growth data were obtained by harvest method at intervals of ten days from transplanting at 7-8 times and analyzed by polynomial regression, orthogonal polynomial, and logarithmic transformation. It is shown that the C model of growth curve: T = A +$\sqrt{(1.4 AK + K)}$2K provides an excellent fit.

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