• Title/Summary/Keyword: Plating Process

Search Result 480, Processing Time 0.026 seconds

Characteristics of MOCVD Cobalt on ALD Tantalum Nitride Layer Using $H_2/NH_3$ Gas as a Reactant

  • Park, Jae-Hyeong;Han, Dong-Seok;Mun, Dae-Yong;Yun, Don-Gyu;Park, Jong-Wan
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.02a
    • /
    • pp.377-377
    • /
    • 2012
  • Microprocessor technology now relies on copper for most of its electrical interconnections. Because of the high diffusivity of copper, Atomic layer deposition (ALD) $TaN_x$ is used as a diffusion barrier to prevent copper diffusion into the Si or $SiO_2$. Another problem with copper is that it has weak adhesion to most materials. Strong adhesion to copper is an essential characteristic for the new barrier layer because copper films prepared by electroplating peel off easily in the damascene process. Thus adhesion-enhancing layer of cobalt is placed between the $TaN_x$ and the copper. Because, cobalt has strong adhesion to the copper layer and possible seedless electro-plating of copper. Until now, metal film has generally been deposited by physical vapor deposition. However, one draw-back of this method is poor step coverage in applications of ultralarge-scale integration metallization technology. Metal organic chemical vapor deposition (MOCVD) is a good approach to address this problem. In addition, the MOCVD method has several advantages, such as conformal coverage, uniform deposition over large substrate areas and less substrate damage. For this reasons, cobalt films have been studied using MOCVD and various metal-organic precursors. In this study, we used $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) as a cobalt precursor because of its high vapor pressure and volatility, a liquid state and its excellent thermal stability under normal conditions. Furthermore, the cobalt film was also deposited at various $H_2/NH_3$ gas ratio(1, 1:1,2,6,8) producing pure cobalt thin films with excellent conformality. Compared to MOCVD cobalt using $H_2$ gas as a reactant, the cobalt thin film deposited by MOCVD using $H_2$ with $NH_3$ showed a low roughness, a low resistivity, and a low carbon impurity. It was found that Co/$TaN_x$ film can achieve a low resistivity of $90{\mu}{\Omega}-cm$, a low root-mean-square roughness of 0.97 nm at a growth temperature of $150^{\circ}C$ and a low carbon impurity of 4~6% carbon concentration.

  • PDF

Characterization of FeCo Magnetic Metal Hollow Fiber/EPDM Composites for Electromagnetic Interference Shielding (FeCo 자성 금속 중공형 섬유 고분자 복합재의 전자파 차폐 특성 연구)

  • Choi, Jae Ryung;Jung, Byung Mun;Choi, U Hyeok;Cho, Seung Chan;Park, Ka Hyun;Kim, Won-jung;Lee, Sang-Kwan;Lee, Sang Bok
    • Composites Research
    • /
    • v.28 no.6
    • /
    • pp.333-339
    • /
    • 2015
  • Electromagnetic interference shielding composite with low density ($1.18g/cm^3$) was fabricated using electroless plated FeCo magnetic metal hollow fibers and ethylene propylene diene monomer (EPDM) polymer. Aspect ratio of the fibers were controlled and their hollow structure was obtained by heat treatment process. The FeCo hollow fibers were then mixed with EPDM to manufacture the composite. The higher aspect ratio of the magnetic metal hollow fibers resulted in high electromagnetic interference shielding effectiveness (30 dB) of the composite due to its low sheet resistance (30 ohm/sq). The enhanced electromagnetic interference shielding effectiveness was mainly attributed to the formation of conducting network over the percolation threshold by high aspect ratio of fibers as well as an increase of the reflection loss by impedance mismatch owing to low sheet resistance, absorption loss, and multiple internal reflections loss.

Pathogenic E. coli Inactivation in Upland Soils to a Change of Soil Moisture Content and Temperature (밭토양에서 토양수분과 온도변화에 따른 분변성 대장균 사멸율 변화)

  • Kim, Min-Kyeong;Kim, Min-Young;Choi, Chul-Man;Ko, Byong-Gu;Kwon, Soon-Ik;Weon, Hang-Yeon
    • Korean Journal of Soil Science and Fertilizer
    • /
    • v.43 no.1
    • /
    • pp.90-95
    • /
    • 2010
  • The application of livestock manure to cropland is a practice that has been used for centuries. Agricultural crops can utilize nutrients from manure, and the producer can utilize land for disposal, although in a "sustainable system" the concept is manure utilization and not waste disposal. However, meeting regulatory criteria regarding microbial quality remains an expensive and time consuming process. The purpose of this study was to quantify the level of environmental impact of soil moisture and temperature on fecal coliform (Escherichia coli or E. coli) survival in upland soils for sound application of livestock manure. Samples were collected up to 30 days depending on the given conditions. The inactivation rate of E. coli increased linearly with increased temperature while the inactivation rate gradually decreased with decreased soil moisture level. The overall findings of this study showed that the temperature was the limited factor on E. coli survival in soils over soil moisture content. This study will provide useful and practical guidelines to applicators of soil in deciding appropriate handling and time frames for land application for sustainable agriculture.

The Effect of Electrode Pattern on the Humidity-sensing Properties of the Resistive Humidity Sensor Based on All-printing Process (인쇄공정으로 제조된 저항형 습도센서의 감습특성에 대한 전극패턴의 영향 연구)

  • Ahn, Hee-Yong;Gong, Myoung-Seon
    • Polymer(Korea)
    • /
    • v.36 no.2
    • /
    • pp.169-176
    • /
    • 2012
  • Based on our experience in developing resistive humidity sensor, interdigital gold electrodes with different fingers and gaps have been fabricated on a glass epoxy (GE) substrate using screen printing techniques. The basic structure of the electrode consisted of a 3-, 4- and 5-fingers with gaps of 310 and 460 ${\mu}m$. Gold electrode/GE was prepared by first printing silver nanopaste, followed by consecutive electroless plating of Cu, Ni and then Au. Copolymer of [2-(methacryloyloxy)ethyl] dimethyl benzyl ammonium chloride (MDBAC) and methyl methacrylate (MMA) was used as a humidity-sensing polyelectrolyte, which was fabricated by a screen printing method on the Au electrode/GE substrate. The flexible humidity sensor showed acceptable linearity between logarithmic impedance and relative humidity in the range of 20-95%RH, low hysteresis of 1.5%RH, good response and recovery time of 75 sec at 1 V, 1 kHz, and $25^{\circ}C$. Electrode construction had a significant influence on the humidity-sensing characteristics of polymeric humidity sensors. The activation energy between electrode and ion conducting polyelectrolyte plays an important role in explaining the differences of humidity sensing characteristics such as temperature dependence, sensitivity, linearity and hysteresis.

The Meaning of Plant Species in Korean Gugok Poems(九曲詩歌) (우리나라 구곡시가에서 나타난 조경 식물종의 상징적 의미)

  • Oh, Chang-Song;Park, Sang-Wook
    • Journal of the Korean Institute of Traditional Landscape Architecture
    • /
    • v.38 no.2
    • /
    • pp.77-94
    • /
    • 2020
  • Gugok poems were an important material for studying the Gugok landscape garden(九曲園林). the landscape feature(景物)that emerges from poetry is an important material that expresses the sense of placefulness and garden consciousness(園林意識). However, many studies are passive about plant materials that can explore the perception of nature or the aesthetic embodiment process. Therefore, this study seeks to discover various symbolic meanings and reveal the context of plants that have appeared in Gugok poems in order to expand the research material of the Gugok culture. To carry out the purpose of the study, I collected a total of 25 related poems from 18 Gugoks and found a total of 20 species of trees. I used 'R-program' to derive the meaning of trees and examined the meaning of trees by intertextuality. According to the study, the 20 species of trees contained symbolic meanings of world of Taoist hermit, pursuit of study, constancy, true pleasure, dignity, honest poverty, reign of peace, nostalgia. Many species focused on the symbolism of the 'world of Taoist hermit' and then on the 'dignity' was the most frequent. A number of species, except for the peach, zelkova and oak, had multiple meanings. Among them, pine trees and lotus had a wide range of symbolic meanings and different meanings depending on the characteristics of the surrounding landscape. While the Gugok culture generally targets natural scenery, Yongsan, Toegye, Deoksan, and Jusan showed the characteristics of strengthening or reproducing symbolic meanings through artificial plating and gardening. In order to overcome the limitations of the peach tree, which symbolizes 'Mureungdowon(武陵桃園)', Gugok poems used maple trees and reeds as alternative species. In accordance with the above context, the trees appearing in the Gugok poems expressed their symbolic meaning differently according to the landscape features, acts and purposes of the Gugoks, rather than sticking to the traditional meaning.

Fabrication Process of Natural Silk Including Ag Nano-particle (은나노 입자가 함유된 천연실크 제조 방법)

  • Jung, I-Yeon;Kang, Pil-Don;Kim, Kee-Young;Ryu, Kang-Sun;Sohn, Bong-Hee;Kim, Yong-Soon;Kim, Mi-Ja;Lee, Kwang-Gill;Chai, Chang-Keun;Koh, Seok-Keun
    • Journal of Sericultural and Entomological Science
    • /
    • v.49 no.1
    • /
    • pp.24-27
    • /
    • 2007
  • Silkworm fed on the mulberry leaf mixed with silver nanoparticle to produce silver-nanoparticle embedded cocoon. Comparative analysis of silver content of cocoon shell, percentage of pupation and percentage of cocoon-shell weight showed that the optimum concentration and the feeding period of mulberry leaf mixed with silver nanoparticle were 500 ppm and the period from 3 day 5 instar to mounting of silkworm. The silver content of cocoon was observed variously by silkworm breedings. C212 variety makes pale yellow cocoon with the highest silver content(69%). Using the scanning electron microscope, we showed that the size of silver nanoparticles in silk was observed from 26.98 to 99.81nm. Silver-nanoparticle embedded silk is expected to use as high valuable application owing to the different functional properties including antibiotic characteristics and mechanical and electronic properties. The applicable fields expected is antistatic and/or electronic products with biological degradable natural materials.

A Case Study on the Restoration to Designated State Based on the Scientific Analysis of Gold Threads of Gwanghwadang-Wonsam (광화당 원삼의 금사 분석과 원형복원 사례)

  • An, Boyeon;Lee, Ryangmi;Lee, Jangjon
    • Journal of Conservation Science
    • /
    • v.37 no.2
    • /
    • pp.144-153
    • /
    • 2021
  • Gwanghwadang-Wonsam was designated as National Folklore Cultural Heritage No. 52 in 1979, it is in good condition. However, a problem is the attached a phoenix insignia badge that did not exist when it was designated recently. As it became known as the only purple Wonsam artifact with "phoenix insignia", raising the need for its conservation. In this regard, scientific analysis was required to correct misinformation about designated cultural assets and restore the original designated state by analyzing the history of the Gwanghwadang-Wonsam, other relics of the phoenix insignia and its making design patterns. An X-ray fluorescence analysis was used to confirm that the Phoenix insignia's metal threads were titanium-plated silver. Phoenix insignia using titanium-plated gold thread was not identified in Gwanghwadang-Wonsam photographs in 1986, and the TiN-type membrane plating method was used in various industries in the 1990s, which can be estimated to be attached in the early and mid-1990s. Especially, the scientific analysis results from the X-ray fluorescence analysis in this study provide key evidence for conservation processing. This study demonstrates the importance of investigating relics and similar artifacts in the conservation process of inherited relics and as a precedent for restoration that corrects misinformation about designated cultural properties.

A Study on the Improvement Methods for Hybrid Sorghum Seeds Production

  • Ji-Young Kim;Sang-ik Han;Seok-bo Song;Byeong-won Lee;Ji-ho Chu;Young-kwang Ju;Chung Song Kim
    • Proceedings of the Korean Society of Crop Science Conference
    • /
    • 2022.10a
    • /
    • pp.205-205
    • /
    • 2022
  • Sorghum (Sorghum bicolor L.) is a major cereal grain crop of the world and It can be cultivated under high temperature and dry condition with high adaptability to the adverse environment. It is usually eaten with rice in korea and most of domestic sorghum cultivars have been developed by pure line selection and cross breeding. In prior studies, Hybrid cultivar (F1 seed) was known to improve 30-40% in yield and resist to disease and pest than pure line varieties due to hybrid vigor. Therefore, study on the hybrid sorghum is continuously necessary. In korea, hybrid sorghum cultivar have been developed, so we need to find methods seed production technology for supply and commercialization of hybrid seed cultivar. Female inbred line(A-line) and male inbred line(R-line) are needed for hybrid seed production. This study was carried out to investigate growth characteristics and yield of hybrid sorghum according to the seedling period and planting rate between female inbred line(YSA1) and male inbred line (Sodamchal, Miryang 19). When the flowering period of two inbred groups in the process of hybrid seed production is coincides, hybrid seed production is increase. The female inbred line and male inbred lines were cultivated at Daegu in 2021. Two inbred lines were sown at intervals of 3 days and 7days and were evaluated flowering period. As a result, the flowering period of the female inbred line and male inbred lines were matched at the 7days interval. To find out optimal planting rate, two inbred lines were cultivated under different plating rate (4:2, 5:2, 6:2). Yield of YSA1/Sodamchal(F1) was the highest 130(kg/10a) in the 4:2 ratio and yield of YSA1/Miryang 19 was the highest quantity of 139(kg/10a) in the 6:2 ratio. The results of this study could be helpful for hybrid Sorghum seeds production.

  • PDF

A Study of the Golden Royal Seals Made by the Directorate for the Restoration of the Golden Royal Seals(金寶改造都監) in 1705 (1705년 금보개조도감(金寶改造都監) 제작 금보 연구)

  • Je, Ji-Hyeon
    • Korean Journal of Heritage: History & Science
    • /
    • v.50 no.1
    • /
    • pp.42-57
    • /
    • 2017
  • The Joseon Dynasty (1392~1910) had a long tradition of making official seals to commemorate the granting of official royal titles, including posthumous honorary titles, to its kings, queens, crown princes and queen dowagers. These royal seals were typically gold-plated or made of jade. After the death of its holder, each seal would be stored in the royal seal depository in the Royal Ancestral Shrine. Extensive efforts were made to restore the traditions and culture of the royal family of Joseon during the reign of King Sukjong (r. 1674~1720). In 1705, discussions were held about the royal ceremonial objects, including the royal seals, stored in the Royal Ancestral Shrine, resulting in the reproduction of a set of accessories related with the storage of royal seals and ten golden royal seals which had been lost during wars or had yet to be made. With these reproductions, each shrine chamber of the Royal Ancestral Shrine would have had at least one seal. The details of the reproduction project were meticulously recorded in The Royal Protocol by the Directorate for the Restoration of Golden Royal Seals("金寶改造都監儀軌"). Given that the restoration project was the single event that led to the reproduction of all the golden royal seals, it is reasonable to conclude that the directorate had fulfilled a historically significant function. In this study, the main discussion is focused on the establishment of the directorate and the storage and management of the damaged royal seals. The discussion includes the manufacturing process of the golden seals, for which The Royal Protocol is compared with other similar documents in order to gain more detailed knowledge of the measurements of the turtle knob, the lost-wax casting technique, the gold plating with mercury amalgamation technique, and other ornamentation techniques. The discussion also covers the activities of the artisans who made the royal seals, based on a study of the royal protocols; the styles of the artifacts, based on an examination of the remaining examples; and the techniques used by the Directorate for the Restoration of Golden Royal Seals to produce the royal seals in 1705.

Analysis of Resource and GHG Reduction by Recycling Palladium in Plated Spent Catalyst Solution (도금폐촉매액내 팔라듐 재자원화에 따른 자원 및 온실가스 감축량 분석)

  • Shin, Ka-Young;Lee, Seong-You;Kang, Hong-Yoon
    • Resources Recycling
    • /
    • v.30 no.3
    • /
    • pp.47-54
    • /
    • 2021
  • Palladium present in colloidal-type plated spent catalyst solution that is used in electroless plating process has not been recovered but discharged as wastewater so far. Recyclig of paladium in colloidal-type plated spent catalyst solution is achieved with this study. This study presents the estimation of resource consumption and GHG emissions during the recycling and disposal of palladium in the plated spent catalyst solution using life cycle assessment. The reduction of resources and GHG are also estimated. Based on the palladium amount of 1 kg during disposal, the GHG emission amount was estimated to be 9.67E+03 kgCO2eq., and the amount of resource consumption was 3.94E+01 kgSb-eq. However, GHG emission was 1.96E+03 kgCO2eq., and the amount of resource consumption was 1.54E+01 kgSb-eq. during recycling. Considering the major substances affecting GHG emissions and amount of resource consumption, CO2 was found to significantly affect GHG emissions, accounting for 91.42% in disposal and 98.37% in recycling. The major substance affecting the amount of resource consumption was hard coal, which accounted for 40.63% in disposal and 60.73% in recycling. Upon recycling 1 kg palladium, 8,967.17 kgCO2eq. of greenhouse gas emission was reduced, while the resource consumption was reduced to 10.10 kg Sb-eq. In addition, the direct palladium resource reduction rate due to palladium recycling was 50%.