• 제목/요약/키워드: Plastic Chip, Thermal Bonding

검색결과 5건 처리시간 0.022초

핫 엠보싱 공정을 이용한 플라스틱 CE(capillary electrophoresis) 마이크로 칩의 제작 (Fabrication of plastic CE (capillary electrophoresis) microchip by hot embossing process)

  • 차남구;박창화;임현우;박진구
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1140-1144
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    • 2005
  • A plastic-based CE (capillary electrophoresis) microchip was fabricated by hot embossing process. A Si mold was made by wet etching process and a PMMA wafer was cut off from 1mm thick PMMA sheet. A micro-channel structure on PMMA substrate was produced by hot embossing process using the Si mold and the PMMA wafer. A vacuum assisted thermal bonding procedure was employed to seal an imprinted PMMA wafer and a blank PMMA wafer. The results of microscopic cross sectional images showed dimensions of channels were well preserved during thermal bonding process. In our procedure, the deformation amount of bonding process was below 1%. The entire fabrication process may be very useful for plastic based microchip systems.

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Cu-Sn 머쉬룸 범프를 이용한 플립칩 접속부의 접속저항과 열 싸이클링 신뢰성 (Contact Resistance and Thermal Cycling Reliability of the Flip-Chip Joints Processed with Cu-Sn Mushroom Bumps)

  • 임수겸;최진원;김영호;오태성
    • 대한금속재료학회지
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    • 제46권9호
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    • pp.585-592
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    • 2008
  • Flip-chip bonding using Cu-Sn mushroom bumps composed of Cu pillar and Sn cap was accomplished, and the contact resistance and the thermal cycling reliability of the Cu-Sn mushroom bump joints were compared with those of the Sn planar bump joints. With flip-chip process at a same bonding stress, both the Cu-Sn mushroom bump joints and the Sn planar bump joints exhibited an almost identical average contact resistance. With increasing a bonding stress from 32 MPa to 44MPa, the average contact resistances of the Cu-Sn mushroom bump joints and the Sn planar bump joints became reduced from $30m{\Omega}/bump$ to $25m{\Omega}/bump$ due to heavier plastic deformation of the bumps. The Cu-Sn mushroom bump joints exhibited a superior thermal cycling reliability to that of the Sn planar bump joints at a bonding stress of 32 MPa. While the contact resistance characteristics of the Cu-Sn mushroom bump joints were not deteriorated even after 1000 thermal cycles ranging between $-40^{\circ}C$ and $80^{\circ}C$, the contact resistance of the Sn planar bump joints substantially increased with thermal cycling.

IPA 저온 접합법을 이용한 PMMA Micro CE Chip의 제작 (Fabrication of PMMA Micro CE Chip Using IPA Assisted Low-temperature Bonding)

  • 차남구;박창화;임현우;조민수;박진구
    • 한국재료학회지
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    • 제16권2호
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    • pp.99-105
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    • 2006
  • This paper reports an improved bonding method using the IPA (isopropyl alcohol) assisted low-temperature bonding process for the PMMA (polymethylmethacrylate) micro CE (capillary electrophoresis) chip. There is a problem about channel deformations during the conventional processes such as thermal bonding and solvent bonding methods. The bonding test using an IPA showed good results without channel deformations over 4 inch PMMA wafer at $60^{\circ}C$ and 1.3 bar for 10 minutes. The mechanism of IPA bonding was attributed to the formation of a small amount of vaporized acetone made from the oxidized IPA which allows to solvent bonding. To verify the usefulness of the IPA assisted low-temperature bonding process, the PMMA micro CE chip which had a $45{\mu}m$ channel height was fabricated by hot embossing process. A functional test of the fabricated CE chip was demonstrated by the separation of fluorescein and dichlorofluorescein. Any leakage of liquids was not observed during the test and the electropherogram result was successfully achieved. An IPA assisted low-temperature bonding process could be an easy and effective way to fabricate the PMMA micro CE chip and would help to increase the yield.

Development of a Chip Bonding Technology for Plastic Film LCDs

  • Park, S.K.;Han, J.I.;Kim, W.K.;Kwak, M.K.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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    • pp.89-90
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    • 2000
  • A new technology realizing interconnection between Plastic Film LCDs panel and a driving circuit was developed under the processing condition of low temperature and pressure with ACFs developed for Plastic Film LCDs. The conduction failure of interconnection of the two resulted from elasticity, low thermal resistance and high thermal expansion of plastic substrates. Conductive particles with elasticity similar to the plastic substrate did not damaged a ITO electrode on plastic substrates, and low temperature and pressure process also did not deform the surface of plastic substrates. As a result highly reliable interconnection with minimum contact resistance was accomplished.

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Wire Bonding PBGA 패키지의 솔더볼 그리드 패턴에 따른 열-기계적 거동 (Thermo-mechanical Behavior of Wire Bonding PBGA Packages with Different Solder Ball Grid Patterns)

  • 주진원
    • 마이크로전자및패키징학회지
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    • 제16권2호
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    • pp.11-19
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    • 2009
  • 모아레 간섭계를 이용하여 와이어 본딩 플라스틱 볼 그리드 (WB-PBGA) 패키지의 열-기계적인 거동 특성을 연구하였다. 실시간 모아레 간섭계를 이용하여 각 온도단계 에서 변위분포를 나타내는 간섭무늬를 각각 얻고, 그로부터 굽힘변형 거동 및 솔더볼의 변형률에 대한 해석을 비교하여 수행하였다. 본 실험에서는 full grid와 perimeter with central connections 및 perimeter의 배열 형태를 갖는 세 가지 패키지를 사용하였으며, 이 배열 형태를 비교하여 굽힘변형 및 솔더볼의 평균변형률을 자세하게 해석하였다. 솔더볼의 유효변형률은 WB-PBGA-FG의 경우 칩 가장자리 바로 바깥쪽 솔더볼에서, WB-PBGA-P/C의 경우 가운데 연결 솔더볼의 가장 바깥 솔더볼에서, WB-PBGA-P의 경우는 칩과 가장 기까운 안쪽 솔더볼에서 최대값을 가지는 것으로 나타났다.

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