• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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• pp.201-202
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• 2003

We developed a novel growth method of aligned carbon nanotubes. Aligned carbon nanotubes are grown on a metal catalyst on a glass substrate using biased Helicon plasma chemical vapor deposition (HPECVD) of $CH_4/H_2$ gases from 400 C to 500 C. The Helicon plasma source is one of the high-density plasma sources and is promising for low temperature carbon deposition. A Ni film was used as a catalyst to reduce the activation energy of the nanotubes' growth. The carbon nanotubes were deposited on the nickel catalysis layer selectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• 제18권4호
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• pp.381-385
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• 2005

The plasma temperature of Ar gas in hollow cathode discharge were measured. This is done by measuring the line profile of the 1s/sub 8/-2p/sub 8/ transition in Ar, using a single-frequency diode laser. Low power diode lasers have been successfully used for investigation of the line profiles of Ar transitions in hollow cathode discharges. It turns out that the plasma temperature of Ar is 640∼783 K in the discharge current range at 7∼10 mA.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 한국윤활학회 1998년도 제28회 추계학술대회
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• pp.265-271
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• 1998

High temperature wear behavior of plasma sprayed zirconia based coating sealing with zirconia sol were investigated for high temperature wear resistance application. The zirconia powders containing 2.5, 5.0, 7.5, 10.0 mol% of MoS$_2$, $Fe_2O_3$ for plasma spray were made by spray drying method. As-sprayed coating was sealed by zirconia-sol to fill up the pore and crack in coating. wear test were performed at temperature ranges from room temperature to 600$\circ$C. The microstructural changes of before and after sealing process were examined by SEM, XRD and EPMA. After sealing process, the porosity was decreased and micro-hardness was increased. The wear properties of coating after sealing process were improved by sealing of pores and cracks. The behavior of wear amount and coefficient of friction were same tendency to before sealing process.

• Tribology and Lubricants
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• 제11권5호
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• pp.108-113
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• 1995

Wear and friction behavior of plasma-sprayed coatings in Mo- and Co-based alloy were studied for the application of piston-ring automobile engine. The plasma-sprayed coatings were varied with gun current density, gas flow, and distance. The surface roughness, microhardness, and wear volume were measured depending on the spray distances. The high temperature hardness value were also measured as a function of temperature. Ball-on-disc geometry configuration tribometer was utilized in air. The wear tests were performed in the temperature ranges from room temperature to 825$^{\circ}$C to investigate the tribological trend of the piston-ring materials in the lack of lubricant. The cross sections of wear track were investigated, using microscopy.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.421-421
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• 2012

Graphene has drawn enormous attention owing to its outstanding properties, such as high charge mobility, excellent transparence and mechanical property. Synthesis of Graphene by chemical vapor deposition (CVD) is an attractive way to produce large-scale Graphene on various substrates. However the fatal limitation of CVD process is high temperature requirement(around $1,000^{\circ}C$), at which many substrates such as Al substrate cannot endure. Therefore, we propose plasma enhanced CVD (PECVD) and decrease the temperature to $400^{\circ}C$. Fig. 1 shows the typical structure of RF-PECVD instrument. The quality of Graphene is affected by several variables. Such as plasma power, distance between substrate and electronic coil, flow rate of source gas and growth time. In this study, we investigate the influence of these factors on Graphene synthesis in vacuum condition. And the results were checked by Raman spectra and conductivity measurement.

• Journal of the Korean Society for Heat Treatment
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• 제23권5호
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• pp.269-276
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• 2010

This study has been carried out to the low temperature plasma nitriding treatment on the mechanical properties of stainless steel at temperature range between $400^{\circ}C$ and $500^{\circ}C$. It was found that there was precipitated to free CrN matrix below $400^{\circ}C$ and there was precipitated S-phase of STS 316L, ${\varepsilon}$-phase of STS 409L and ${\alpha}N$-phase of STS 420J2. STS 316L has formed relatively abundant CrN phase and ${\gamma}^{\prime}-Fe_4N$ phase at $500^{\circ}C$, alternatively STS 409L and STS 420J2 were more deeply nitrided than STS 316L at $500^{\circ}C$.

• The Transactions of the Korean Institute of Electrical Engineers
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• 제39권11호
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• pp.1227-1234
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• 1990

This study is to figure out the properties of the DC thermal plasma at low pressure. For this purpose, a temperature measurement system utilizing emission spectroscopy has been set up and its measurement method and results have been described. At low pressure, the plasma has shown drastic changes in its appearance. The discharge characteristics under low pressure have been measured and analyzed. The temperature of thermal plasma generated in this research has been ranged from 10, 000 K to 15, 000 K. Temperature has been observed to increase with the flow rate and magnetic field strength. The temperature characteristics at low pressure has been observed to coincide with the reported results.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2005년도 춘계학술대회 논문집
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• pp.41-45
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• 2005

In this paper, parameters of electron temperature and density for the mercury-free lighting-source were measured to diagnosis and analyze in Xe based inductively coupled plasma(ICP). In results at several dependences of 20~100 mTorr Xenon pressure, 50~200W RF power and horizontal distribution were especially mentioned. When Xe pressure was 20mTorr and RF power was 200W, the electron temperature and density were respectively 3.58eV and $3.56{\times}10^{12}cm^{-3}$. The key parameters of Xe based ICP depended on Xe pressure more than RF power that could be verified. A high electron temperature and low electron density with a suitable Xe pressure are indispensible parameters for Xe based ICP lighting-source.

• Journal of the Korean institute of surface engineering
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• 제50권2호
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• pp.91-97
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• 2017

The aim of this paper is to investigate the characteristics of electrochemical corrosion with the plasma ion nitriding temperature for 16Cr-10Ni-2Mo stainless steel. The corrosion behavior was analyzed by means of galvanostatic experiment in natural seawater that applied various current density with plasma ion nitriding temperature parameters. In result of galvanostatic experiment, relatively less surface damage morphology and the less damage depth was observed at a nitrided temperature of $450^{\circ}C$ that measured the thickest nitrided layer(S-phase). On the other hand, the most damage depth and unified corrosion behavior presented at a temperature of $500^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 광주전남지부
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• pp.71-74
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• 2006

Discharge of the flat lamp lighting source research arc requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the flat lamp lighting source to understand property of lighting source is very important. distance of discharge electrode is 5.5mm and width is 16.5mm, we measured electron temperature and electron density measured with single langmuir probe in flat lamp. we tested the discharge from 100 Torr to 300 Torr pressure. the Pulse is rectangular pulse with frequency 20kHz and Duty ratio 20%. Resultly, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.