• 제목/요약/키워드: Plasma spectroscopy

검색결과 1,114건 처리시간 0.031초

Reduction of Thermal Conductivity Through Complex Microstructure by Dispersion of Carbon Nanofiber in p-Type Bi0.5Sb1.5Te3 Alloys

  • P. Sharief;B. Madavali;Y. Sohn;J.H. Han;G. Song;S.H. Song;S.J. Hong
    • Archives of Metallurgy and Materials
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    • 제66권3호
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    • pp.803-808
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    • 2021
  • The influence of nano dispersion on the thermoelectric properties of Bi2Te3 was actively investigating to wide-spread thermoelectric applications. Herein this report, we have systematically controlled the microstructure of Bi0.5Sb1.5Te3 (BST) alloys through the incorporation of carbon nanofiber (CNF), and studied their effect on thermoelectric properties, and mechanical properties. The BST/x-CNF (x-0, 0.05, 0.1, 0.2 wt.%) composites powder was fabricated using high energy ball milling, and subsequently consolidated the powder using spark plasma sintering. The identification of CNF in bulk composites was analyzed in Raman spectroscopy and corresponding CNF peaks were recognized. The BST matrix grain size was greatly reduced with CNF dispersion and consistently decreased along CNF percentage. The electrical conductivity was reduced and Seebeck coefficient varied in small-scale by embedding CNF. The thermal conductivity was progressively diminished, obtained lattice thermal conductivity was lowest compared to bare sample due to induced phonon scattering at interfaces of secondary phases as well as highly dense fine grain boundaries. The peak ZT of 0.95 achieved for 0.1 wt.% dispersed BST/CNF composites. The Vickers hardness value of 101.8 Hv was obtained for the BST/CNF composites.

고감도 sub-ppm 수준의 다공성 CuO/In2O3나노구조 트리메틸아민 가스센서 (Highly Sensitive sub-ppm level Trimethylamine Gas Sensor Based on Porous CuO/In2O3 Nanostructures )

  • 윤성도;명윤;나찬웅
    • 센서학회지
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    • 제33권5호
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    • pp.305-309
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    • 2024
  • Trimethylamine (TMA) is an organic amine gas that serves as a key indicator for evaluating the freshness of seafood. We synthesized a highly sensitive trimethylamine (TMA) sensor based on porous indium oxide (In2O3) nanoparticles (NPs) loaded with CuO in the range of 6.7 to 28.4 at.%. CuO was loaded by hydrazine reduction onto as prepared In2O3 NPs using the microwave irradiation method. Crystal structures, morphologies, and chemical composition of CuO/In2O3 nanostructures (NSs) were characterized by X-ray diffraction, field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, and inductively coupled plasma mass spectrometry. The response of the 23.8 at.% CuO/In2O3 to 2.5 ppm TMA at 325℃ was 5.7, which was 2.8 times higher than that of porous In2O3 NPs. The high sensitivity and selective detection of TMA were attributed to electronic interactions between CuO and In2O3 and the high catalytic activity of CuO to TMA. Altogether, this CuO/In2O3 sensor could be used in the future to detect low concentrations of TMA, thereby aiding in the storage and distribution of marine food resources.

일부 젊은 성인여자의 Fe, Zn, Cu, Mn, Se, Mo 및 Cr의 식사섭취, 혈청농도 및 소변배설 (Dietary Intakes, Serum Concentrations, and Urinary Excretions of Fe, Zn, Cu, Mn, Se, Mo, and Cr of Korean Young Adult Women)

  • 김경희;임현숙
    • Journal of Nutrition and Health
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    • 제39권8호
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    • pp.762-772
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    • 2006
  • This study was conducted to investigate dietary intakes, serum concentrations, and urinary excretions of iron (Fe), zinc (Zn), copper (Cu), manganese (Mn), selenium (Se), molybdenum (Mo), and chromium (Cr) of Korean young adult women. A total of 19 apparently healthy young adult women aged in their twenties or thirties participated voluntarily. One-tenth of all foods they consumed for 3 consecutive days were collected, all urine excreted for the same 3 days was gathered, and fasting venous blood was withdrawn for the trace mineral analyses. Of the food, blood, and urine samples, the contents of Zn, Cu, Mn, Se, Mo, and Cr were analyzed by inductively coupled plasma-mass spectroscopy (ICP-MS) and that of Fe by inductively coupled plasma-atomic emission spectroscopy (ICP-AES) after wet digestion. The intake of Fe, $6.94{\pm}2.18mg$, did not meet the estimated average requirement (EAR) for Korean women aged 20-29 years old. On the contrary, the intakes of Zn ($9.35{\pm}4.95mg$), Cu ($1.18{\pm}0.26mg$), and Mn ($3.69{\pm}0.69mg$) were sufficient for each respective EAR. However, some of the subjects did not take the EAR for Zn. The Se intake, $41.93{\pm}9.28{\mu}g$, however, was almost similar to the EAR for Se. Although there are no references for Mo and Cr, the intakes of these minerals ($134.0{\pm}49.1\;and\;136.5{\pm}147.9{\mu}g$, respectively) seemed to be excessively sufficient. Serum Fe concentration, $88.7{\pm}36.8{\mu}g/dL$, seemed to be a little bit lower than its reference median but within its normal range. Approximately one-fourth of the subjects were in anemic determined by Hb and Hct and below the deficiency serum level of Fe, $60{\mu}g/dL$. In addition, serum Se concentration, $3.73{\pm}0.60{\mu}g/dL$, was also below its reference median and normal range. However, serum concentrations of Zn ($99.6{\pm}30.6{\mu}g/dL$) and Mo ($0.25{\pm}0.10{\mu}g/dL$) were fairly good compared to each reference median. The status of Cu could be determined as good although its serum concentration ($91.6{\pm}14.6{\mu}g/dL$) was slightly below its reference median. Since there are no decisive reference values, it was not easy to evaluate serum concentrations of Mn ($0.93{\pm}0.85{\mu}g/dL$) and Cr ($8.60{\pm}7.25{\mu}g/dL$). But Mn and Cr status seemed to be adequate. Urinary Fe excretion, $4.48{\pm}1.98{\mu}g/dL$, was pretty much lower than its reference and that of Se, $2.45{\pm}1.17{\mu}g/dL$, was also lower than its average. On the other hand, those of Zn ($42.95{\pm}20.47{\mu}g/dL$) and Cu ($5.68{\pm}1.50{\mu}g/dL$) were flirty good. In case of Mn, urinary excretion, $0.31{\pm}0.09{\mu}g/dL$, was much greater than its reference. Urinary excretions of Mo ($7.48{\pm}2.95{\mu}g/dL$) and Cr ($1.37{\pm}0.41{\mu}g/dL$) were very higher compared to each reference. The results of this study revealed that Korean young adult women were considerably poor in Fe status, a bit inadequate in Se status, partly inadequate in Zn status, and flirty good in Cu, Mn, Mo and Cr status. However, there was a problem of excessive intakes of Mo and Cr. It, therefore, should be concerned to increase the intakes of Fe, Se and Zn but to decrease Mo and Cr consumption for young adult women.

A bilayer diffusion barrier of atomic layer deposited (ALD)-Ru/ALD-TaCN for direct plating of Cu

  • Kim, Soo-Hyun;Yim, Sung-Soo;Lee, Do-Joong;Kim, Ki-Su;Kim, Hyun-Mi;Kim, Ki-Bum;Sohn, Hyun-Chul
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.239-240
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    • 2008
  • As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

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환경 바이오모니터링에서의 혈중 중금속 분석 숙련도 시험을 위한 표준물질 제조 및 적용성 평가 (Development and Validation of Reference Material for Proficiency Testing of Blood Heavy Metals in Environmental Biomonitoring)

  • 임호섭;양민호;오세림;김소영;정호준;조용민;이정섭;김현정;이채관;문찬석;이종화
    • 한국환경보건학회지
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    • 제42권6호
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    • pp.450-464
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    • 2016
  • Objectives: This study developed and validated reference materials (RMs) to analyze metal compounds in blood. Methods: We referred to KoNEHS (Korea National Environmental Health Survey) to estimate concentrations of blood metals (cadmium, Cd; lead, Pb; mercury, Hg) and applied analytical methods (inductively coupled plasma - mass spectroscopy, ICP-MS, for Cd and Pb; graphite furnace - atomic absorption spectrometry, GF-AAS, for Cd and Pb; and direct mercury analyzer, DMA, for Hg). Homogeneity and stability tests were carried out. In addition, certified values and uncertainties of RMs were calculated through internal and external experiments. All RMs were developed and assessed in various forms according to element, analytical method, and two types of concentration levels high concentration for occupational exposure and low concentration for environmental exposure. Results: All samples showed acceptable homogeneity, except for low concentration of Cd in the GF-AAS method. Short- and long-term stabilities were satisfied by ANOVA testing. In the inter-laboratory comparison, robust medians were lower than the certified values of all RMs (robust median/reference value; $1.301/1.327{\mu}g/L$ for Cd, ICP-MS, low concentration; $3.152/3.388{\mu}g/L$ for Cd, ICP-MS, high concentration; $1.219/1.301{\mu}g/L$ for Cd, GF-AAS, low concentration; $3.074/3.321{\mu}g/L$ for Cd, GF-AAS, high concentration; $14.473/14.516{\mu}g/L$ for Pb, ICP-MS, low concentration; $50.069/50.114{\mu}g/L$ for Pb, ICP-MS, high concentration; $12.881/14.147{\mu}g/L$ for Pb, GF-AAS, low concentration; $47.015/47.591{\mu}g/L$ for Pb, GF-AAS, high concentration; $4.059/4.218{\mu}g/L$ for Hg, DMA, low concentration; $11.474/11.181{\mu}g/L$ for Hg, DMA, high concentration). Conclusion: This study demonstrates procedures for developing and validating RMs for biomonitoring in the field of the environmental health.

항균성 Ag-30CaO·70SiO2 Gel의 MC3T3 세포적합성에 관한 연구 (Evaluate the Suitability of MC3T3 Cells to Antibacterial Ag-30CaO·70SiO2 Gel)

  • 윤금재;류재경;안응모;김윤종;김택남;노인섭;조성백
    • 한국재료학회지
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    • 제24권12호
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    • pp.671-676
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    • 2014
  • It is known that bones get damaged by accidents and aging. Since the discovery of Bioglass, various kinds of ceramics have been also found to bond to living bone; some of these ceramics are already being clinically used as bone-repairing materials. In the present study, antibacterial calcium silicate gel ($Ag-30CaO{\cdot}70SiO_2$ gel) was prepared by sol-gel method in order to control the microstructure, which is related to the dissolution rate and induction period of apatite formation in body environment. In addition, biological $Ag-30CaO{\cdot}70SiO_2$ is tested. This was done to impart antimicrobial activity to the $30CaO{\cdot}70SiO_2$. Ag ion was added during sol-gel synthesis to replace the $H_2O$ added during the making of the $30CaO{\cdot}70SiO_2$ gel, which has silver solutions of various concentration. After the sol-gel process, 1N-$HNO_3$ solution was used to wash the gel when synthesizing the gel, in order to maintain the porous structure and remove PEG, water soluble polymers. Then, the apatite forming ability of the sol-gel derived CaO-$SiO_2$ gels was investigated using simulated body fluid (SBF), which had almost the same ion concentration as that of human blood plasma. The gels were analyzed by FT-IR spectroscopy, SEM observation, XRD, and fluorescent microscopy. The apatite was successfully created even after washing the gel; apatite is present in an amorphous state, and was found to affect the concentration of the Ag ion in cells in MC3T3 live & dead assay results. From these results, it is suggested that a good material that can be used to repair defects of nature bone is $Ag-30CaO{\cdot}70SiO_2$ gel.

탈알루미늄 및 알칼리/알칼리토금속 양이온을 교환한 Y형 제올라이트의 NO흡착 특성 (Adsorption Characteristics of Nitrogen monoxide over Dealuminated and Alkali/Alkaline-earth Metal ion Exchanged Y-Zeolites)

  • 김철현;이창섭
    • 한국가스학회지
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    • 제9권4호
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    • pp.17-25
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    • 2005
  • 탈알루미늄 및 알칼리/알칼리토금속 양이온을 교환한 Y형 제올라이트 촉매를 제조하였다. 제조한 촉매물질의 원소조성 및 구조 변화를 ICP-AES, XRF 및 XRD와 같은 각종 분광학적 방법으로 분석하였으며, NO-TPD 실험을 통한 표면흡착종의 탈착 거동을 조사하였다. 탈알루미늄 처리 후 출발물질인 NaY보다 촉매물질의 Si/Al비는 증가하였으며, 탈알루미늄 후 Cs및 Ba양이온으로 교환한 Y형 제올라이트의 경우 Si/Al비가 부가적으로 조금 더 감소하였다. 탈알루미늄 처리한 촉매는 Al원자의 탈리로 기본골격의 파괴가 심화되어 framework (tetrahedral)구조가 감소하고 non-framework (octahedral) 구조가 증가하였다. 이러한 현상은 스팀처리시간이 많아질수록 증가하였으며 양이온을 교환한 후에는 더 크게 나타났다. NO-TPD 실험에서 탈알루미늄 및 양이온 교환 후 촉매의 활성점을 나타내는 탈착 봉우리들은 저온으로 이동하였으며, 스팀처리시간이 많아질수록 탈착 봉우리가 상대적으로 저온에서 나타났다. 탈알루미늄 및 양이온 교환을 한 Y형 제올라이트는 교환된 양이온과 탈알루미늄으로 인한 non-framework (octahedral) 구조의 생성이 촉매의 활성에 미치는 영향이 더 큰 것으로 나타났다.

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초고속 대면적 표면 처리 장치가 부착된 300 mm 폭 연성 동박적층 필림 제작용 진공 웹 코터 (Vacuum Web-coater with High Speed Surface Modification Equipment for fabrication of 300 mm wide Flexible Copper Clad Laminate (FCCL))

  • 최형욱;박동희;김지환;최원국;손영진;송범식;조정;김영섭
    • 한국진공학회지
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    • 제16권2호
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    • pp.79-90
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    • 2007
  • 저에너지 초고속 표면 처기 이온원, 4개의 마그네트론 스퍼터 캐소드가 부착된 300 mm 폭 다목적 연성 기판 제작을 위한 부피 800 L 용량의 진공 웹코터 원형 (prototype) 장비를 설계 제작하였고, 무접착제 2층 연성 동박 적층 필림을 제작하여 성능을 평가하였다. 2 개의 터보 펌프 및 폴리콜드를 장착한 비코팅 부분인 상실부와 각각 1개씩의 터보 펌프를 사용한 표면 처리 및 코팅 부분인 하실부의 진공 배기 특성을 측정하였다. 패러데이 컵을 사용하여 대면적 이온원의 이온 전류 밀도 및 균일도를 측정하고, 스퍼터 캐소드의 자기장 분포 및 타겟 사용 효율을 조사하였다. 진공 웹코터의 성능 및 각 구성 요소의 특성 조사를 위하여 연성 기판으로는 폴리이미드 (Kapton-E) $38{\mu}m$을 사용하여 여러 가지 가스 이온에 대한표면 처리 조건에 따른 증류수의 접촉각 변화와 화학 성분의 변화를 x-선 분광학을 사용하여 조사하였다. 고밀도 2층 연성 동박 적층 필림 기판을 스퍼터-전기 도금법으로 제작하기 위하여 스퍼터 타겟으로는 Ni-Cr 및 Cu 금속을 사용하여, 각각의 증착율을 직류 전력의 변화 및 롤의 속도에 따라 조사하였고, 전기 도금으로 $9{mu}m$ 까지 동박 적층 필림을 제작한 후 접착력 및 내열성, 내화학성을 측정하여 소형 진공 웹 코터의 특성을 조사하였다.

발화합성용액의 pH가 Y1Ba2Cu3O7-x 초전도상 생성 속도에 미치는 영향 (Effect of the pH of Pyrophoric Synthetic Solution on the Formation Kinetics of Y1Ba2Cu3O7-x Superconducting Phase)

  • 박정식;김영순;양석우;김춘영;신형식
    • 공업화학
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    • 제9권2호
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    • pp.165-171
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    • 1998
  • $Y_2O_3$(99.9%)와 $BaCO_3$(99.9%) 및 CuO(99.9%)를 사용하여 $Y_1Ba_2Cu_3O_{7-x}$(123) 분말을 발화합성법에 의해 제조하였다. 발화전 용액을 여러 가지 pH로 변화시켜 제조하였으며, 이 분말을 성형하여 열처리 온도와 시간 변화에 따른 상형성과 반응특성을 조사하였다. 시료의 조성과 조직의 특성은 ICP와 SEM을 이용하여 측정하였고, Y-Ba-Cu-O계의 상형성과 전화율을 결정하기 위해 X선 회절분석을 하였다. 발화합성법을 이용하여 pH 7(${\pm}0.3$)에서 제조된 123 분말이 순도와 균일성 및 반응특성에서 가장 좋은 결과를 보였다. pH 7(${\pm}0.3$)에서 제조된 분말을 이용한 123 상생성에 따른 활성화에너지(${\Delta}E_a$)는 191kJ/mol으로서 고상반응법의 230kJ/mol에 약 13% 정도 더 낮았다.

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X-선 회절분석을 이용한 biphasic calcium phosphate 분말의 화학양론적 Ca/P 비율 확인 (Determination of stoichiometric Ca/P ratio in biphasic calcium phosphates using X-ray diffraction analysis)

  • 송용근;김동현;김태완;김양도;박홍채;윤석영
    • 한국결정성장학회지
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    • 제20권2호
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    • pp.93-100
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    • 2010
  • X-선 회절 분석방법을 통해 biphasic calcium phosphate(BCP) 분말의 Ca/P 몰 비율을 확인하고 특성을 평가하였다. 다양한 화학 양론적인 Ca/P 몰 비율을 가지는 BCP 분말은 공침반응 및 하소과정을 통해 합성하였다. 1.5에서 1.67의 Ca/P 몰 비율을 가지는 분말의 조성은 초기 출발물질의 Ca/P 몰 비율, pH 10에서의 공침 과정 및$900^{\circ}C$ 열처리에 의해 정해졌다. 화학 양론적 Ca/P 몰 비율을 가지는 BCP 분말의 구조, 형상 및 화학적 특성평가는 XRD의 상-정량 확인 분석을 바탕으로 주사전자현미경 및 유도 결합 플라즈마 분광분석기와 함께 수행 하였다. BCP 분말의 용해도는 $36.5^{\circ}C$ 및 pH 7.4 의 phosphate buffer solution(PBS)에서 특성평가 하였다.