• Title/Summary/Keyword: Plasma processing

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TSV (Through Silicon Via)plasma etching technology for 3D IC

  • Jeong, Dae-Jin;Kim, Du-Yeong;Lee, Nae-Eung
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2007.11a
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    • pp.173-174
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    • 2007
  • Through Silicon Via ( TSV)는 향후3D integration devices (CMOS image sensors) 와 보다 더 직접화되고 진보된 memory stack에 기여 할 것이다. 이는 한층 더 진보된 microprocessors system 을 구축 하리라 본다. 해서 본문은 TSV plasma etching processing 소개와 특히 Bosch process에 대한 개선 방법을 제시하고자 한다.

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Dusty Plasmas-from space to semiconductor & display industries (더스티 플라즈마 연구 동향)

  • Chai, Kil-Byoung
    • Vacuum Magazine
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    • v.4 no.2
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    • pp.4-9
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    • 2017
  • Dusty plasmas consisting of electrons, ions, neutral gas molecules, and small solid-state 'dust' particles are ubiquitous. Examples include plasma processing, fusion plasmas, polar mesospheric clouds, Saturn's rings, comet tails, and protoplanetary disks. Since Voyager I and II discovered dusty plasmas in our solar system, dusty plasmas have been extensively studied from space & basic sciences to semiconductor & display industries. Here, a brief review on dusty plasma research is given and some remarkable results are introduced.

Linear Ion Beam Applications for Roll-to-Roll Metal Thin Film Coatings on PET Substrates

  • Lee, Seunghun;Kim, Do-Geun
    • Applied Science and Convergence Technology
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    • v.24 no.5
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    • pp.162-166
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    • 2015
  • Linear ion beams have been introduced for the ion beam treatments of flexible substrates in roll-to-roll web coating systems. Anode layer linear ion sources (300 mm width) were used to make the linear ion beams. Oxygen ion beams having an ion energy from 200 eV to 800 eV used for the adhesion improvement of Cu thin films on PET substrates. The Cu thin films deposited by a conventional magnetron sputtering on the oxygen ion beam treated PET substrates showed Class 5 adhesion defined by ASTM D3359-97 (tape test). Argon ion beams with 1~3 keV used for the ion beam sputtering deposition process, which aims to control the initial layer before the magnetron sputtering deposition. When the discharge power of the linear ion source is 1.2 kW, static deposition rate of Cu and Ni were 7.4 and $3.5{\AA}/sec$, respectively.

Spark Plasma Sintering of the Ni-graphite Composite Powder Prepared by Electrical Explosion of Wire in Liquid and Its Properties

  • Thuyet-Nguyen, Minh;Kim, Jin-Chun
    • Journal of Powder Materials
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    • v.27 no.1
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    • pp.14-24
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    • 2020
  • In this work, the electrical explosion of wire in liquid and subsequent spark plasma sintering (SPS) was introduced for the fabrication of Ni-graphite nanocomposites. The fabricated composite exhibited good enhancements in mechanical properties, such as yield strength and hardness, but reduced the ductility in comparison with that of nickel. The as-synthesized Ni-graphite (5 vol.% graphite) nanocomposite exhibited a compressive yield strength of 275 MPa (about 1.6 times of SPS-processed monolithic nickel ~170 MPa) and elongation to failure ~22%. The hardness of Ni-graphite composite had a value of 135.46 HV, which is about 1.3 times higher than that of pure SPS-processed Ni (105.675 HV). In terms of processing, this work demonstrated that this processing route is a novel, simple, and low-cost method for the synthesis of nickel-graphite composites.

Development of Novel Electrode Materials for Plasma Display Panel

  • Kim, Chul-Hong;Chae, So-Ra;Lee, Min-Hee;Jeong, Hyun-Mi;Kim, Beom-Kwon;Heo, Eun-Gi;Choe, Deok-Hyeon;Lee, Byung-Hak
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.1437-1440
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    • 2008
  • In this paper, we mainly deal with metallic electrode materials and patterning processing of plasma display panels. We focus on the recent development status, where low cost and high performance electrode materials such as Ag-based single-layered bus, low cost-in-use and anti-migration address electrodes are briefly introduced. The technological trends and further works on novel electrode materials and processing are also discussed.

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Address discharge delay reduction in AC PDP by applying MgO nanoparticle under protective layer

  • Seo, Ki-Ho;Shin, Seung-Ha;Choi, Man-Soo;Whang, Ki-Woong
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.355-358
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    • 2008
  • We report a method for improving characteristics of AC PDP in this study. This improvement is obtained by spreading MgO nanoparticles on transparent dielectric layer. These nanoparticles are covered with MgO protective layer by electron beam evaporation. MgO nanoparticle has difference in cathodoluminescence stronger than MgO layer by electron beam evaporation. This method worked for reducing statistical delay especially. Efficacy, discharge voltage and luminance were also improved But these improvements has limited lifetime because continuous ion bombardments changed characteristic of MgO surface.

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Irregular Addressing Scheme for Luminance Improvement of Flat Panel Plasma Display (평판 플라즈마 표시장치의 휘도 개선을 위한 불규칙 어드레싱 구동방식)

  • Son, Il-Hun
    • The Transactions of the Korea Information Processing Society
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    • v.5 no.7
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    • pp.1943-1950
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    • 1998
  • Irregular addressing scheme of gray scale control for the memory type flat panel plasma display is proposed in this paper. Opposed to the conventional addressing method. the scan electrodes are addressed in non-sequential manner. The addressing order for this irregular addressing is resolved to make the pixel duty factor above 90%. This addressing scheme can achieve the prolxJsed peformance regardless of the panel and cell structure and can be implemented without increasing the chive voltage, current or frequency .

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A Study on Characteristics of Plasma Emission Signals with Welding Conditions in CO2 Laser (CO2 레이저용접시 용접조건에 따른 플라즈마 방사신호의 특성연구)

  • Kim, Jong-Do;Lee, Chang-Je
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.11
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    • pp.1256-1261
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    • 2009
  • Today, implementation of the defect detection in laser welding has been researched for a long time, but most studies have been made around thin plate within $1{\sim}3mm^t$. Therefore, this study was measured and analyzed light emission signals of the induced plasma in $CO_2$ laser lap welding of $6mm^t$ Zn primer-coated steel, and based on this analysis, research made an investigation into possibility of monitoring in thick plate welding. It was been analyzing the measured signals by RMS and FFT processing, as a results, we were able to confirm definite difference of two signals between humping bead and sound bead. Thus, possibility of real time monitoring in $CO_2$ laser lap welding verified experimentally.

WEAR PROPERTY OF PLASMA-SPRAYED COATING LAYERA IN Cr$_2$O$_3$

  • Pakr, J.M.;Lee, S.W.;Kim, Byong-Kee;Lee, Dong-Won
    • Journal of the Korean institute of surface engineering
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    • v.29 no.6
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    • pp.745-752
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    • 1996
  • Wear property of plasma spray coating in $Cr_2O_3$ powder manufatured of spray dry method on the aluminum substrate was inspected for the application of piston-ring of automotive enginel. The plama spray coatings were varied with feed rate and particle size. Used the ball-on disc type tribometer, wear volume, friction, surface rougness were investigated. The delamination of the coating layer were observed with SEM. Also the cross-section of wear track were investigated, using optical microscopy. As a result of experiment, wear mechanism was addressed in the various coating process.

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