• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.8
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• pp.607-612
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• 1998

RF HPCVD(Helicon Plasma Chemical Vapor Deposition) has been successfully constructed for diamond thin films. The system consists of plasma generation tube, deposition chamber, pumping lines for gas system. A mixture of $CH_4 and H_2$is used for reaction. Two thermocouples, a quartz tube surrounded by a RF antenna and a magnet, and a high temperature heater were set up in the deposition chamber. The process for the thin film diamond deposition has been carried put in a high vacuum system at a substrate temperature of $800^{\circ}C$, and pressure of 5 mtorr. It is also demonstrated. that the RF HPCVD system has advantages for controlling deposition parameters easily.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.179-179
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• 2016

A radio-frequency (RF) Inductively Coupled Plasma (ICP) torch system was used for boron-nitride nano-tube (BNNT) synthesis. Because of electrodeless plasma generation, no electrode pollution and effective heating transfer during nano-material synthesis can be realized. For stable plasma generation, argon and nitrogen gases were injected with 60 kW grid power in the difference pressure from 200 Torr to 630 Torr. Varying hydrogen gas flow rate from 0 to 20 slpm, the electrical and optical plasma properties were investigated. Through the spectroscopic analysis of atomic argon line, hydrogen line and nitrogen molecular band, we investigated the plasma electron excitation temperature, gas temperature and electron density. Based on the plasma characterization, we performed the synthesis of BNNT by inserting 0.5~1 um hexagonal-boron nitride (h-BN) powder into the plasma. We analysis the structure characterization of BNNT by SEM (Scanning Electron Microscopy) and TEM (Transmission Electron Microscopy), also grasp the ingredient of BNNT by EELS (Electron Energy Loss Spectroscopy) and Raman spectroscopy. We treated bundles of BNNT with the atmospheric pressure plasma, so that we grow the surface morphology in the water attachment of BNNT. We reduce the advancing contact angle to purity bundles of BNNT.

• Journal of Environmental Science International
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• v.20 no.5
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• pp.623-630
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• 2011

This study investigated the degradation of N, N-Dimethyl-4-nitrosoaniline (RNO, indicator of the generation of OH radical) by using dielectric barrier discharge (DBD) plasma. The DBD plasma reactor of this study consisted of a quartz dielectric tube, titanium discharge (inner) and ground (outer) electrode. The effect of shape (rod, spring and pipe) of ground electrode, diameter (9~30 mm) of ground electrode of spring shape and inside diameter (4~13 mm) of quartz tube, electrode diameter (1~4 mm), electrode materials (SUS, Ti, iron, Cu and W), height difference of discharge and ground electrode (1~15.5 cm) and gas flow rate (1~7 L/min) were evaluated. The experimental results showed that shape of ground electrode and materials of ground and discharge electrode were not influenced the RNO degradation. The thinner the diameter of discharge and ground electrode, the higher RNO degradation rate observed. The effect of height gap of discharge between ground electrode on RNO degradation was not high within the experimented value. Among the experimented parameters, inside diameter of quartz tube and gas flow rate were most important parameters which are influenced the decomposition of RNO. Optimum inside diameter of quartz tube and gas flow rate were 7 mm and 4 L/min, respectively.

• Applied Chemistry for Engineering
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• v.22 no.3
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• pp.249-254
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• 2011

A nonthermal plasma reactor in conjunction with a tubular type with a ferroelectric (high-dielectric ceramic) pellet layer was designed and constructed. $SrBiTaO_9$ (SBT) pellets with 2.0 mm in diameter were held within the tube arrangement by two metal mesh electrodes (20 mm separation) connected to a high-voltage AC power supply. The dielectric constant of SBT pellets was 150 at room temperature and 500 at curie temperature ($335^{\circ}C$). The generation rate of ozone in the plasma reactor almost linearly increased with increasing applied voltage. In the case of the plasma reactor packed with SBT pellets the generation rate of ozone sharply increased at the applied voltage more than 20 kV. The ozone generation rate at the negative corona discharge was higher than that of the positive corona discharge. However, the destruction efficiency of toluene and methylene chloride was not increased in proportion to ozone concentration.

• Bulletin of the Korean Chemical Society
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• v.25 no.2
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• pp.233-236
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• 2004

Total impurity analysis of a primary standard solution is one of the essential procedures to determine an accurate concentration of the standard solution by the gravimetry. Bi impurity is determined in Pb standard solutions by inductively coupled plasma mass spectrometry (ICP-MS). The direct nebulization of the Pb standard solution produces a significant amount of the Pb matrix-induced molecular ions which give rise to a serious spectral interference to the Bi determination. In order to avoid the spectral interference from the interferent $^{208}PbH^+$, the hydride generation method is employed for the matrix separation. The Bi hydride vapor is generated by reaction of the sample solution with 1% sodium borohydride solution. The vapor is then directed by argon carrier gas into the ICP after separation from the mixture solution in a liquid-gas separator made of a polytetrafluoroethylene membrane tube. The presence of 1000 ${\mu}$g/mL Pb matrix caused reduction of the bismuthine generation efficiency by about 40%. The standard addition method is used to overcome the chemical interference from the Pb matrix. Optimum conditions are investigated for the hydride-generation ICPMS. The detection limit of this method is 0.5 pg/mL for the sample solutions containing 1000 ${\mu}$g/mL Pb matrix.

• Journal of the Korean Vacuum Society
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• v.22 no.3
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• pp.111-118
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• 2013

The influence of gas flow on the plasma generation in the atmospheric plasma jet is described with the theory of hydrodynamics. The plasma discharge is affected by the gas-flow streams with Reynolds number (Re) as well as the gas pressure with Bernoulli's theorem according to the gas flow rate inserted into the glass tube. The length of plasma column is varied with the flow types such as the laminar flow of Re<2,000 and the turbulent flow of Re>4,000 as it has been known in a general fluid experiments. In the laminar flow, the plasma column length is increased as the increase of flow rate. Since the pressure in the glass tube becomes low as the increase of flow velocity by the Bernoulli's theorem, the breakdown voltage of plasma discharge is reduced by the Paschen's law. Therefore, the plasma length is increased as the increasing flow rate with the fixed operation voltage. In the transition of laminar and turbulent flows, the plasma length is decreased. When the flow becomes turbulent as the flow rate is increasing, the plasma length becomes short and the discharge is shut down ultimately. In the discharge of laminar flow, the diameter of plasma beam exposed on the substrate surface is kept less than the glass diameter, since the gas flow is kept to the distinct distance from the nozzle of glass tube.

• Journal of Environmental Health Sciences
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• v.37 no.3
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• pp.218-225
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• 2011

Objectives: In this paper, a dielectric barrier discharge (DBD) plasma reactor was investigated for degrading the dye Rhodamine B (RhB) in aqueous solutions. Methods: The DBD plasma reactor system in this study consisted of a plasma component [titanium discharge (inner), ground (outer) electrode and quartz dielectric tube], power source, and gas supply. The effects of various parameters such as first voltage (input power), gas flow rate, second voltage (output power), conductivity and pH were investigated. Results: Experimental results showed that a 99% aqueous solution of 20 mg/l Rhodamine B is decolorized following an eleven minute plasma treatment. When comparing the performance of electrolysis and plasma treatment, the RhB degradation of the plasma process was higher that of the electrolysis. The optimum first voltage and air flow rate were 160 V (voltage of trans is 15 kV) and 3 l/min, respectively. With increased second voltage (4 kV to 15 kV), RhB degradation was increased. The higher the pH and the lower conductivity, the more Rhodamine B degradation was observed. Conclusions: OH radical generation of dielectric plasma process was identified by degradation of N, N-dimethyl-4-nitrosoaniline (RNO, indicator of OH radical generation). It was observed that the effect of UV light, which was generated as streamer discharge, on Rhodamine B degradation was not high. Rhodamine B removal was influenced by real second voltage regardless of initial first and second voltage. The effects of pH and conductivity were not high on the Rhodamine B degradation.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.639-639
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• 2013

In this research we report the significant contribution of the as-spun multi-walled carbon nanotube (MWCNT) on the x-ray images formation using a low tube voltage x-ray source. The MWCNT, which was used for the fabrication of the spun CNT, was grown using a microwave plasma-enhanced chemical vapor deposition machine. Electrical-optics simulation software was utilized to determine the electron field emission trajectory of the triode-structure-as-spun CNT-based x-ray source. It was shown that a significant amount of converging electrons hit the target anode producing a clear x-ray image. These x-ray images where produced at a small amount of anode current of 0.67 mA at a tube voltage of 5 kV with the gate voltage of 0 V. Also, comparisons of the radiographs at various exposure times of the sample where analyzed with and without an x-ray dose filter. Results showed that spatially-resolved images were formed using the as-spun CNT at a low tube voltage with a $54-{\mu}m$ Al x-ray filter. This study can be used for low-voltage medical applications.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.240.2-240.2
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• 2014

Characteristics of pulse-discharged plasma in liquid and its biological applications to proteins are investigated by making use of high voltage Marx generator. The Marx generator has been consisted of 5 stages, where each charging capacitor is $0.5{\mu}F$ to generate a high voltage pulse with rising time of $1{\mu}s$. We have applied an input voltage of 6 kV to the each capacitor of $0.5{\mu}F$. The high voltage pulsed plasma has been generated inside a polycarbonate tube by a single-shot operation, where the breakdown voltage is measured to be 7 kV, current of 1.2 kA, and pulse width of ${\sim}1{\mu}s$ between the two electrodes of anode-cathode made of stainless steel, which are immersed into the liquids. For the investigation of the influence of pulsed plasma on biomolcules, we have focused on the amino acids, DNA, proteins, cell and cholesterol.

• Nuclear Engineering and Technology
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• v.48 no.3
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• pp.795-798
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• 2016

Transmission X-ray tubes based on carbon nanotube have attracted significant attention recently. In most of these tubes, tungsten is used as the target material. In this article, the well-known simulator Geant4 was used to obtain some of the tungsten target parameters. The optimal thickness for maximum production of usable X-rays when the target is exposed to electron beams of different energies was obtained. The linear variation of optimal thickness of the target for different electron energies was also obtained. The data obtained in this study can be used to design X-ray tubes. A beryllium window was considered for the X-ray tube. The X-ray energy spectra at the moment of production and after passing through the target and window for different electron energies in the 30-110 keV range were also obtained. The results obtained show that with a specific thickness, the target material itself can act as filter, which enables generation of X-rays with a limited energy.