• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.153-153
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• 2017

The application of the coating supports the mechanical characteristics of the implant, and various materials and coatings are currently being used in the implant in a way to accelerate adhesion. Especially, plasma electrolytic oxidation (PEO) coating has been proposed continually with good surface treatment of titanium alloys. Also, the PEO process can incorporate Ca and P ions on the titanium surface through variables varied factor. PEO process for bioactive surface has carried out in electrolytes containing Ca and P ions. Natural bone is composed of mineral elements such as Mg, Si, Zn, Sr, and Mn, etc. Especially, Mg and Si of these elements play role in bone formation and growth after clinical implantation of bio-implants. In this study, corrosion charateristics of PEO-treated Ti-6Al-4V alloy in solution containing Si and Mg ions has been investigated using several experimental techniques. The PEO-treated surfaces were identified by X-ray diffraction, using a diffractometer (XRD, Philips X' pert PRO, Netherlands) with Cu $K{\alpha}$ radiation. The morphology was observed by field-emission scanning electron microscopy (FE-SEM, Hitachi 4800, Japan) and energy-dispersive X-ray spectroscopy (EDX, Oxford ISIS 310, England). The potentiodynamic polarization and AC impedance tests for electrochemical degradations were carried out in 0.9% NaCl solution at similar body temperature using a potentiostat with a scan rate of 1.67mV/s and potential range from -1500mV to + 2000mV.

• Proceedings of the KWS Conference
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• 2009.11a
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• pp.95-95
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• 2009

Zinc coatings provide the most effective and economical way of protecting steel against corrosion. There are three types of galvanizing lines typically used in production line in galvanizing industries,Galvanize (GI) coating (Zn-0.1-0.3%Al), Galfan coating (Zn-5%Al), Galvalume(GL) coating (45%Zn-Al). In continuous Galvanizing lines, the immersed bath hardware (e.g. bearings, sink, stabilizer, and corrector rolls, and also support roll arms and snout tip) are subjected to corrosion and wear failure. Understanding the reaction of these materials with the molten Zn alloy is becomes scientific and commercial interest. To investigate the reaction with molten Zn alloys, static immersion test performed for 4, 8, 16, and 24 Hr. Two different baths used for the static immersion, which are molten Zn and molten Zn-55%Al. Microstructures characterization of each of the materials and intermetallic layer formed in the reaction zone was performed using optical microscope, SEM and EDS. The thickness of the reaction layer is examined using image analysis to determine the kinetics of the reaction. The phase dominated by two distinct phase which are eutectic carbide and matrix. The morphology of the intermetallic phase formed by molten Zn is discrete phase showing high dissolution of the material, and the intermetallic phase formed by Zn-55wt%Al is continuous. Aluminum reacts readily with the materials compare to Zinc, forming iron aluminide intermetallic layer ($Fe_2Al_5$) at the interface and leaving zinc behind.

• Journal of the Korean institute of surface engineering
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• v.55 no.1
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• pp.24-31
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• 2022

This study investigated the effect of pre-treatment on the PEO film formation of AZ91 Mg alloy. The pre-treatment was conducted for 10 min at room temperature in 0.5 M oxalic acid (C₂H₂O₄) solution containing various ammonium fluoride (NH₄F) concentrations. The pre-treated AZ91 Mg specimens were anodized at 100 mA/cm² of 300 Hz AC for 2 min in 0.1 M NaOH + 0.4 M Na₂SiO₃ solution. When AZ91 Mg alloy was pretreated in 0.5 M oxalic acid with NH₄F concentration less than 0.3 M, continuous dissolution of the AZ91 Mg alloy occurred together with the formation of black smuts and arc initiation time for PEO film formation was very late. It was noticed that corrosion rate of the AZ91 Mg alloy became faster if small amount of NH₄F concentration, 0.1 M, is added. The fast corrosion is attributable to fast formation of porous fluoride together with porous oxides in the reaction products. On the other hand, when AZ91 Mg alloy was pretreated in 0.5 M oxalic acid with sufficient NH₄F more than 0.3 M, a thin and dense protective film was formed on the AZ91 Mg alloy surface which resulted in faster initiation of arcs and formation of PEO film.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.23-23
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• 2011

Chemical-Mechanical Planarization (CMP) 공정이란 화학적 반응 및 기계적인 힘이 복합적으로 작용하여 표면을 평탄화하는 공정이다. 이러한 CMP 공정은 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위하여 도입되었으며 반도체 제조를 위한 필수공정으로 그 중요성이 강조되고 있다. 특히 최근에는 Inter-Level Dielectric (ILD)의 형성과 Shallow Trench Isolation (STI) 공정에서실리콘 산화막을 평탄화하기 위한 CMP 공정에 대해 연구가 활발히 이루어지고 있다. 그러나 CMP 공정 후 scratch, pitting corrosion, contamination 등의 Defect가 발생하는 문제점이 존재한다. 이 중에서도 scratch는 기계적, 열적 스트레스에 의해 생성된 패드의 잔해, 슬러리의 잔유물, 응집된 입자 등에 의해 표면에 형성된다. 반도체 공정에서는 다양한 종류의 실리콘 산화막이 사용되고 gks이러한 실리콘 산화막들은 종류에 따라 경도가 다르다. 따라서 실리콘 산화막의 경도에 따른 CMP 공정 및 이로 인한 Scratch 발생에 관한 연구가 필요하다고 할 수 있다. 본 연구에서는 scratch 형성의 거동을 알아보기 위하여 boronphoshposilicate glass (BPSG), plasma enhanced chemical vapor deposition (PECVD) tetraethylorthosilicate (TEOS), high density plasma (HDP) oxide의 3가지 실리콘 산화막의 기계적 성질 및 이에 따른 CMP 공정에 대한 평가를 실시하였다. CMP 공정 후 효율적인 scratch 평가를 위해 브러시를 이용하여 1차 세정을 실시하였으며 습식세정방법(SC-1, DHF)으로 마무리 하였다. Scratch 개수는 Particle counter (Surfscan6200, KLA Tencor, USA)로 측정하였고, 광학현미경을 이용하여 형태를 관찰하였다. Scratch 평가를 위한 CMP 공정은 실험에 사용된 3가지 종류의 실리콘 산화막들의 경도가 서로 다르기 때문에 동등한 실험조건 설정을 위해 동일한 연마량이 관찰되는 조건에서 실시하였다. 실험결과 scratch 종류는 그 형태에 따라 chatter/line/rolling type의 3가지로 분류되었다 BPSG가 다른 종류의 실리콘 산화막에 비해 많은 수에 scratch가 관찰되었으며 line type이 많은 비율을 차지한다는 것을 확인하였다. 또한 CMP 공정에서 압력이 증가함에 따라 chatter type scratch의 길이는 짧아지고 폭이 넓어지는 것을 확인하였다. 본 연구를 통해 실리콘 산화막의 경도에 따른 scratch 형성 원리를 파악하였다.

• Journal of the Korean Society for Heat Treatment
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• v.27 no.1
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• pp.10-14
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• 2014

Niobium nitride coatings have many potential thin film applications due to their chemical inertness, good mechanical properties, temperature stability and superconducting properties. In this study, $NbN_x$ coatings were prepared by inductively coupled plasma (ICP) assisted DC magnetron sputtering method on the surface of AISI 304 austenitic stainless steels. Effects of target power were studied on mechanical and chemical properties of the coatings. The coating structure was analyzed by X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM). The coating hardness was measured by micro-knoop hardness tester. The coating thickness was measured using a 3D profiler and wear characteristics were estimated using a ball-on-disk wear tester. The thickness of the $NbN_x$ coatings increased linearly from 300 nm to 2000 nm as the Nb target power increased, and it showed over $HK_{0.005}$ 4000 hardness above Nb target power of 300 W. Hexagonal ${\delta}^{\prime}$-NbN phase and cubic ${\delta}$-NbN phase were observed in the coating films and the hardness of the NbNx coatings was higher when these two peaks were mixed. The corrosion resistance increased with the increase of the Nb target power.

• Journal of the Korean Vacuum Society
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• v.9 no.4
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• pp.436-441
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• 2000

Plasma nitrocarburising is a thermochemical heat treatment, and can be used for plain carbon steels and low alloy steels to improve wear, corrosion and fatigue resistance. The process is performed on automotive parts, machinery parts and engineering tools. However, it is still facing problems in obtaining a mono $\varepsilon$ phased compound layer. Therefore, the aim of this research is to investigate the possibility of forming a mono $\varepsilon$ phased compound layer using a gas mixture of nitrogen and methane. It was found that high nitrogen contents were essential for the production of $\varepsilon$ phase compound layer and with increasing methane content in the gas mixture, $\varepsilon$ phase compound layer was favoured. In addition, when the methane content was further increased, cementite was observed in the compound layer. $\gamma$' phase was produced after 10 minutes treatment time and cementite was formed in the compound layer resulting in decreasing the thickness of the compound layer.

• Korean Journal of Materials Research
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• v.13 no.9
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• pp.587-592
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• 2003

The thin films of 316L stainless steel were made on glass and S45C substrate by Ion beam assisted deposition with reactive atmosphere of argon and nitrogen. The films were deposited at the various conditions of ion beam power and the ratios of Ar/$N_2$gas. Properties of these films were analyzed by glancing x-ray diffraction method(GXRD), AES, potentiodynamic test, and salt spray test. The results of GXRD showed that austenite phase could be appeared by $N_2$ion beam treatment and the amount of austenite phase increased with the amount of nitrogen gas. The films without plasma ion source treatment had the weak diffraction peak of ferrite phase. But under the Ar plasma ion beam treatment, the strong diffraction peaks of ferrite phase were appeared and the grain size was increased from 12 to 16 nm. Potentiodynamic polarization test and salt spray test indicated that the corrosion properties of the STS 316L films with nitrogen ion source treatment were better than bulk STS 316L steel and STS 316L films with Ar ion source treatment.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.79-79
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• 2018

마그네슘은 나트륨, 알루미늄과 함께 지구상에서 가장 풍부한 금속 중 하나로서 밀도가 약 $1.74g/cm^3$으로서 구조용 금속재료 중 가장 가볍고 우수한 비강도를 지니고 있으며, 우수한 열전도도, 전기전도도, 전자파 차폐능을 지닌다. 최근 마그네슘 및 그 합금은 항공기, 자동차, 전자제품, 기계류 및 생활용품 등에 쓰이고 있으며, 사용량 및 적용범위가 매년 급격히 증가되고 있는 추세이다. 그러나 마그네슘합금은 매우 낮은 표준 환원전위와 치밀하지 못한 표면 산화막으로 인하여 부식에 대한 저항성이 매우 취약하다는 한계를 가지고 있다. 따라서 마그네슘합금의 표면처리 가운데 부식에 대한 저항성을 보완할 수 있는 방법은 활발한 마그네슘합금의 응용에 필수적이다. 이러한 마그네슘합금의 내식성을 향상시키고자 전기화학적 플라즈마 전해 산화처리 (Plasma Electrolytic Oxidation)를 하게 되는데, 아노다이징, 화성피막처리 등 과 같은 기존의 산업적 표면처리 방안으로는 불가능한 수준의 표면경도를 확보할 수 있을 뿐만 아니라 두꺼운 산화피막 형성을 통해 이들 합금이 가진 기본적 취약점인 내식성 문제를 보완할 수 있는 장점이 있지만, 다공성 산화피막 형성만으로 기대할 수 있는 내식성 향상 효과가 매우 크지는 못하다. 따라서 다공성의 양극산화피막의 단점, 즉 다공성 물질로 부식성 물질의 이동을 허용할 수 있는 공간을 가지는 구조를 개선시킬 수 있는 추가적인 처리를 필요로 한다. 본 연구에서는 발수성 표면처리를 이용하여 다공성 구조물의 표면이 물에 대한 저항성을 가지도록 함으로써 초발수성 표면을 구현하고자 하였다. 이러한 방법은 기존의 후처리 방법인 봉공처리로는 얻을 수 없었던 다공성 구조물로의 부식성 물질의 침투를 억제할 수 있었으며, 상당한 수준의 내식성 향상 효과를 보여주었다. 또한 물에 대한 반발성은 표면에 물의 이동성을 높이는 효과를 보여주며 이로 인하여 자기세척 효과도 보여주었다.

• Journal of the Korean institute of surface engineering
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• v.32 no.2
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• pp.144-156
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• 1999

Thermal Barrier Coating with Functional Gradient Materials (FGM-TBC) can play an important role to protect the parts from harmful environments in high temperatures such as oxidation, corrosion, and wear and to improve the efficiency of aircraft engine by lowering the surface temperature on turbine blade. FGM-TBC can increase the life spans of product and improve the operating properties. Therfore, in this study the evaluations of mechanical and thermal properties of FGM-TBC such as fatigue, oxidation and wear-resistance at high temperatures have been conducted. The samples of both the TBC with 2, 3, 5 layers (YSZ/NiCrAlY) to be produced by Air Plasma Spray method (APS) and the bulk TBC with 6 layers to be produced by Plasma Assisted Sintering method (PAS) were used. Furthermore, residual stress, bond strength, and thermal conductivity were evaluated. The average thickness of the APS was 500$\mu\textrm{m}$ to 600$\mu\textrm{m}$ and the average thickness of the PAS was 3mm. The hardness number of the top layer of APS was 750 Hv to 810Hv and that of PAS was 950 Hv to 1440Hv. The $ZrO_2$ coating layer of APS was composed of tetragonal structure after spraying as the result of XRD analysis. As shown in the results of the high temperature wear test, the 3 layer coating of APS had the best wear resistance at $800^{\circ}C$ and the 5 layer coating of APS had the best wear resistance at $600^{\circ}C$. But, these coatings had the tendency of the low-temperature softening at $300^{\circ}C$. The main mechanism of wear was the adhesive wear and the friction coefficient of coatings was increased as increasing the test temperatures. A s results of thermal conductivity test, the ${\Delta}T$ of the APS coating was increased as number of layer and the range of thermal conductivity of the PAS was $800^{\circ}C$ to $1000^{\circ}C$.

• Korean Journal of Materials Research
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• v.23 no.2
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• pp.135-142
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• 2013

The Ti-6Al-4V extra low interstitial (ELI) alloy has been widely used as an orthopedic implant material because of its excellent mechanical properties and biocompatibility. However, it still has many problems, including a high elastic modulus and toxicity of the Al and V elements. Therefore, non-toxic biomaterials with a low elastic modulus need to be developed. A high energy mechanical milling (HEMM) process is introduced to improve the effect of sintering. Rapid sintering of spark plasma sintering (SPS) under pressure was used to make an ultra fine grain of Ti-25 wt.%Nb-7 wt.%Zr-10 wt.%Mo-(10 wt.%CPP) composites with bio-attractive elements for increasing strength. These composites were fabricated by SPS at $1000^{\circ}C$ at 60 MPa using HEMM powders. During the sintering process, $CaTiO_3$, TixOy, and CaO were formed because of the reaction between Ti and CPP. The effects of CPP content on the physical and mechanical properties of the sintered Ti-Nb-Zr-Mo-CPP composites were investigated. The biocompatibility and corrosion resistance of the Ti-Nb-Zr-Mo alloys were improved by the addition of CPP.