• Textile Coloration and Finishing
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• v.26 no.3
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• pp.201-208
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• 2014

The high value-added functionality for synthetic fiber can be considered through a plasma enhanced treatment. In this study, PET(Polyethyleneterephthalate) was treated with a glow plasma and corona treatment. Surface characteristics of treated fabric were investigated using electron scanning microscopy(SEM), contact angle, X-ray photoelectron spectroscopy(XPS), tensile and adhesion strength. It was found that the contact angle showed $85.5^{\circ}$ for untreated fabric, $0^{\circ}$ for plasma and corona treatment at the condition of 200W for 7min. By XPS analysis, atomic ratio of O 1s/C 1s was increased from 0.27 to 0.43 by glow plasma and 0.27 to 0.41 by corona treatment at 200W for 7min, respectively. Glow plasma and corona treatment did not significantly change the tensile strength of PET fabric. Adhesion strength showed a substantial enhancement for the surface treated with the glow plasma, while corona treatment was adversely affected.

• Transactions on Electrical and Electronic Materials
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• v.14 no.2
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• pp.71-77
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• 2013

Advanced semiconductor manufacturing technology requires methods to maximize tool efficiency and improve product quality by reducing process variability. Real-time plasma process monitoring and diagnosis have become crucial for fault detection and classification (FDC) and advanced process control (APC). Additional sensors may increase the accuracy of detection of process anomalies, and optical monitoring methods are non-invasive. In this paper, we propose the use of a chromatic data acquisition system for real-time in-situ plasma process monitoring called the Plasma Eyes Chromatic System (PECS). The proposed system was initially tested in a six-inch research tool, and it was then further evaluated for its potential to detect process anomalies in an eight-inch production tool for etching blanket oxide films. Chromatic representation of the PECS output shows a clear correlation with small changes in process parameters, such as RF power, pressure, and gas flow. We also present how the PECS may be adapted as an in-situ plasma arc detector. The proposed system can provide useful indications of a faulty process in a timely and non-invasive manner for successful run-to-run (R2R) control and FDC.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.352-355
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• 2005

This paper describes an engineering model development of a pulsed plasma thruster, which is capable of an impulse bit of 20uNs and a specific impulse of 800s. The solid fuel which is Teflon allows for a self-contained, inert and stable propellant system. And, the PPT technology makes it possible to consider a revolutionary attitude control system (ACS) concept providing stabilization and pointing accuracies previously obtainable only with reaction wheels, with reduced mass and power requirements.

• Elastomers and Composites
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• v.34 no.2
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• pp.128-134
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• 1999

Steel tire cords were coated via RF plasma polymerization of acetylene and butadiene gas in order to enhance adhesion to rubber compounds. Adhesion of tire cords was measured by TCAT and T-test as a function of type of gas, plasma powder, treatment time, gas pressure and Ar gas etching. Some samples were subjected to aging study in distilled water at $80^{\circ}C$ for a period of 7 days. After testing, tire cords were analysed by SEM to elucidate the adhesion mechanism. The highest adhesion values were obtained at 20W, 2min and 25mtorr for acetylene plasma polymerization, and l0W, 4min, 25mtorr for butadiene plasma polymerization. However, Ar plasma etching did not affect adhesion, while the adhesion of tire cords increased rather than decreased, contrary to expectations. It was not possible to elucidate failure mode by SEM, owing to the rough surface of the tire and the thin plasma polymer coating layer.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.04a
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• pp.80-83
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• 2005

In this work, effects of oxygen plasma on surface characteristics of carbon fibers were investigated in mechanical properties interfacial of carbon fibers-reinforced composites. The surface properties of the carbon fibers were determined by acid/base values, FT-IR, and X-ray photoelectron spectroscopy (XPS). Also, the mechanical properties of the composites were studied in and critical stress intensity factor ($K_{IC}$) and critical strain energy release rate mode II ($G_{IIC}$) measurements. As experimental results, the $O_{lS}/C_{lS}$ ratio of the carbon fiber surfaces treated by oxygen plasma was increased compared to that of untreated ones, possibly due to development of oxygen-containing functional groups. The mechanical properties of the composites, including $K_{IC}$ and $G_{IIC}$ had been improved in the oxygen plasma on fibers. These results could be explained that the oxygen plasma was resulted in the increase of the adhesion of between fibers and matrix in a composite system.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.11a
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• pp.23-26
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• 2005

In this work, effects of oxygen plasma on surfc1ce characteristics of carbon fibers were investigated in impact strength of carbon fibers-reinforced composites. The surface properties of the carbon fibers were determined by acid/base values, FT-IR, and X-ray photoelectron spectroscopy (XPS). Also, the mechanical properties of the composites were studied by impact strength measurements. As experimental results, the $O_{IS}/C_{IS}$ ratio of the carbon fiber surfaces treated by oxygen plasma was increased compared to that of untreated ones, possibly due to development of oxygen-containing functional groups. The mechanical properties of the composites, including impact strength had been improved by the oxygen plasma on fibers. These results could be explained that the oxygen plasma resulted in the increase of the adhesion of between fibers and matrix in a composite system.

• 연구논문집
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• s.25
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• pp.193-205
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• 1995

Plasma spray coating technology is essential for the microsemiconductor processes based on the electronic and computer industry, and extend gradually the range of application for up-to-date industry such as diesel engine and gas turbine components. These thechonoogies may be applied to the components requiring wear-resistance, heat resistance, fatigue-resistance, and corrosion-resistance. In this research, plasma spray technology was selected for the wear resistant coatings as the most proper technique. The final goal of this study is to improve the wear resistance through establishment of coating soft-ware, and basic research for industrialization of the technology concerned.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.284-284
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• 2011

Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

• Journal of the Korean Vacuum Society
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• v.17 no.6
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• pp.501-510
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• 2008

The stealth technology to conceal an aircraft from the vision of a radar have been accomplished by coating the surface with special paints absorbing the electromagnetic wave. Nowadays, researches to utilize characteristics of the plasma-wave interaction for realizing the stealth technology are actively progressed. In this paper, to investigate the physical feasibility of the plasma stealth, calculation results for the required conditions of the plasma cloaking on the aircraft flying in the air for showing the stealth function, using a flat non-magnetized non-uniform plasma model, are reported and discussed.

• Journal of the Korean Society for Heat Treatment
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• v.15 no.5
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• pp.234-237
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• 2002