• 제목/요약/키워드: Plasma Properties

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Optical and Electrical Properties of OLED Depending on $O_2$ Plasma Treatment (산소 플라즈마 처리에 따른 OLED의 광학 및 전기적 특성)

  • Lee, Sun-Il;Sung, Yong-Ho;Lee, Dae-Cheon;Lee, Sang-Mok;Song, Bo-Young;Han, Hyeon-Seok;Hong, Jin-Woong
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1489-1490
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    • 2011
  • The $O_2$ plasma treatment is used as improvement of ITO roughness glass for organic light-emitting diodes and organic photovoltaic cells. This study examined the effect of the electrical properties of OLED according to variation of $O_2$ plasma power. In experiment, we found that the electrical characteristics of device are excellent when the power of $O_2$ plasma is 250 W. And when the power of $O_2$ plasma increases over 250 W, the electrical properties were getting worse. $O_2$ plasma treatment not only prevents the diffusion of indium, a metal constituent, to an organic layer but also plays a significant role as improvement of ITO roughness. By considering organic light-emitting diodes treating $O_2$ plasma, it could contribute to the improvement of the efficiency of the device.

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Tensile Properties and Morphology of Carbon Fibers Stabilized by Plasma Treatment

  • Lee, Seung-Wook;Lee, Hwa-Young;Jang, Sung-Yeon;Jo, Seong-Mu;Lee, Hun-Soo;Lee, Sung-Ho
    • Carbon letters
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    • v.12 no.1
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    • pp.16-20
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    • 2011
  • Commercial PAN fibers were thermally stabilized at 220 or $240^{\circ}C$ for 30 min. Those fibers were further stabilized using radio-frequency (RF) capacitive plasma discharge during 5 or 15 min. From Fourier transform infrared spectroscopy results, it was observed that an additional plasma treatment led to further stabilization of PAN fibers. After stabilization, carbonization was performed to investigate the final tensile properties of the fabricated carbon fibers (CFs). The results revealed that a combination of thermal and plasma treatment is a possible stabilization process for manufacturing CFs. Morphology of CFs was investigated using scanning electron microscopy. The morphology shows that the plasma stabilization performed by the RF large gap plasma discharge may damage the surface of the CF, so it is necessary to select a proper process condition to minimize the damage.

A Study on the Properties of Platinum Dry Etching using the MICP (MICP를 이용한 Platinum 건식 식각 특성에 관한 연구)

  • Kim, Jin-Sung;Kim, Jung-Hun;Kim, Youn-Taeg;Joo, Jung-Hoon;Whang, Ki-Woong
    • Proceedings of the KIEE Conference
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    • 1997.11a
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    • pp.279-281
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    • 1997
  • The properties of Platinum dry etching were investigated in MICP(Magnetized Inductively Coupled Plasma). The problem with Platinum etching is the redeposition of sputtered Platinum on the sidewall. Because of the redeposits on the sidewall, the etching of patterned Platinum structure produce feature sizes that exceed the original dimension of the PR size and the etch profile has needle-like shape.[1] Generally, $Cl_2$ plasma is used for the fence-free etching.[1][2][3] The main object of this study was to investigate a new process technology for the fence-free Pt etching. Platinum was etched with Ar plasma at the cryogenic temperature and with Ar/$SF_6$ plasma at room temperature. In cryogenic etching, the height of fence was reduced to 20% at $-190^{\circ}C$ compared with that of room temp., but the etch profile was not fence-free. In Ar/$SF_6$ Plasma, chemical reaction took part in etching process. The trend of properties of Ar/$SF_6$ Plasma etching is similar to that of $Cl_2$ Plasma etching. Fence-free etching was possible, but PR selectivity was very low. A new gas chemistry for fence-free Platinum etching was proposed in this study.

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Effects of Lysozyme, Clupeine, Sucrose, and Sodium Chloride on the Foaming Properties of Egg Albumen and Powdered Beef Plasma (Lysozyme, Clupeine, Sucrose 및 Sodium Chloride가 난백 및 분말 우혈장의 거품성에 미치는 영향)

  • 양승택;최정민
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.24 no.1
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    • pp.82-91
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    • 1995
  • This study was designed to elucidate the effects of lysozyme, clupeine, sucrose, and sodium chloride on the foaming properties of egg albumen and podered beef plasma. Surface tensions of egg albumen(5%, w/w) and powdered beef plasma(5%, w/w) adding to lysozyme, clupeine, sucrose, and sodium chloride were 46.8$\pm$0.379~52.4$\pm$ 0.404dyne/cm(control, 51.5$\pm$0.416dyne/cm) and 54.6$\pm$0.231~60.7$\pm$0.467dyne/cm(control, 53.9$\pm$0.153dyne/cm), respectively. Turbidities of the solutions were 77.0$\pm$0.058~97.9$\pm$ 0.058(control, 91.2$\pm$0.153) and 90.3$\pm$0.058~98.5$\pm$0.115 (control, 82.7$\pm$0.100), respectively. Surface hydrophobicities of the solutions were 524~811(control, 485) and 5102~ 7128(control, 4665), respectively. The solution with high hydrophobicity revealed good foaming properties. Analysis of egg albumen and powdered beef plasma foam by electrophoresis showed that lysozyme was retained for a long time in foam. The optimal concentraitons of lysozyme and clupeine for foaming properties were 0.5% and 0.3% in egg albumen(5%, w/w) and 0.5% and 0.5% in powdered beef plasma(5%, w/w), respectively. In case of egg albumen, sodium chloride dominantly enhanced the action of clupeine. The addition of 0.3% clupeine with sodium chloride(2.0M) to egg albumen(5%, w/w) increased overrun and foam stability by 119.5% and 70.9%, respectively. The addition of 0.5% clupeine to powdered beef plasma(5%, w/w) also increased overrun and foam stability by 43.7% and 127.3%, respectively.

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Characterization of Diamond-like Carbon Films Prepared by Magnetron Plasma Chemical Vapor Deposition

  • Soung Young Kim;Jai Sung Lee;Jin Seok Park
    • The Korean Journal of Ceramics
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    • v.4 no.1
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    • pp.20-24
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    • 1998
  • Thin films of diamond-like carbon(DLC) can be successfully deposited by using a magnetron plasma chemical vapor deposition (CVD) method with an rf(13.56 MHz) plasma of $C_dH_8$. Plasma characteristics are analyzed as a function of the magnetic field. As the magnetic field increases, both electron temperature ($T_e$) and density ($n_e$)increase, but the negative dc self-bias voltage (-$V_{ab}$) decreases, irrespective of gas pressures in the range of 1~7 mTorr. High deposition rates have been obtained even at low gas pressures, which may be attributed to the increased mean free path of electrons in the magentron plasma. Effects of rf power and additive gas on the structural properties of DLC films aer also examined by using various technique namely, TED(transmissio electron diffraction) microanalysis, FTIR, and Raman spectroscopies.

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Synthesis of N-doped Ethylcyclohexane Plasma Polymer Thin Films with Controlled Ammonia Flow Rate by PECVD Method

  • Seo, Hyunjin;Cho, Sang-Jin;Boo, Jin-Hyo
    • Applied Science and Convergence Technology
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    • v.23 no.1
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    • pp.44-47
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    • 2014
  • In this study, we investigated the basic properties of N-doped ethylcyclohexene plasma polymer thin films that deposited by radio frequency (13.56 MHz) plasma-enhanced chemical vapor deposition (PECVD) method with controlled ammonia flow rate. Ethylcyclohexene was used as organic precursor with hydrogen gas as the precursor bubbler gas. Additionally, ammonia ($NH_3$) gas was used as nitrogen dopant. The as-grown polymerized thin films were analyzed using ellipsometry, Fourier-transform infrared [FT-IR] spectroscopy, UV-Visible spectroscopy, and water contact angle measurement. We found that with increasing plasma power, film thickness is gradually increased while optical transmittance is drastically decreased. However, under the same plasma condition, water contact angle is decreased with increasing $NH_3$ flow rate. The FT-IR spectra showed that the N-doped ethylcyclohexene plasma polymer films were completely fragmented and polymerized from ethylcyclohexane.

Dependence of cation ratio in Oxynitride Glasses on the plasma etching rate

  • Lee, Jung-Ki;Hwang, Seong-Jin;Lee, Sung-Min;Kim, Hyung-Sun
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.11a
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    • pp.44.2-44.2
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    • 2009
  • Polycrystalline materials suchas yttria and alumina have been applied as a plasma resisting material for the plasma processing chamber. However, polycrystal line material may easily generate particles and the particles are sources of contamination during the plasma enhanced process. Amorphous material can be suitable to prevent particle generation due to absence of grain-boundaries. We manufactured nitrogen-containing $SiO_2-Al_2O_3-Y_2O_3$ based glasses with various contents of silicon and fixed nitrogen content. The thermal properties, mechanical properties and plasma etching rate were evaluated and compared for the different composition samples. The plasma etching behavior was estimated using XPS with depth profiling. From the result, the plasma etching rate highly depends on the silicon content and it may results from very low volatile temperature of SiF4 generated during plasma etching. The silicon concentration at the plasma etched surface was very low besides the concentration of yttrium and aluminum was relatively high than that of silicon due to high volatile temperature of fluorine compounds which consisted with aluminum and yttrium. Therefore, we conclude that the samples having low silicon content should be considered to obtain low plasma etching rate for the plasma resisting material.

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Culturing of Rat Intestinal Epithelial Cells-18 on Plasma Polymerized Ethylenediamine Films Deposited by Plasma Enhanced Chemical Vapor Deposition

  • Choi, Chang-Rok;Kim, Kyung-Seop;Kim, Hong-Ja;Park, Heon-Yong;Jung, Dong-Geun;Boo, Jin-Hyo
    • Bulletin of the Korean Chemical Society
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    • v.30 no.6
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    • pp.1357-1359
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    • 2009
  • Many researchers studied cell culturing on surfaces with chemical functional groups. Previously, we reported surface properties of plasma polymerized ethylenediamine (PPEDA) films deposited by plasma enhanced chemical vapor deposition with various plasma conditions. Surface properties of PPEDA films can be controlled by plasma power during deposition. In this work, to analyze correlation of cell adherence/proliferation with surface property, we cultured rat intestinal epithelial cells-18 on the PPEDA films deposited with various plasma powers. It was shown that as plasma power was decreased, density of cells cultured on the PPEDA film surface was increased. Our findings indicate that plasma power changed the amine density of the PPEDA film surface, resulting in density change of cells cultured on the PPEDA film surface.

Effect of Diamond-Like Carbon Passivation on Physical and Electrical Properties of Plasma Polymer (플라즈마 폴리머의 물리적, 전기적 특성에서 다이아몬드상 탄소 패시베시션이 미치는 영향)

  • Park, Y.S.;Cho, S.J.;Boo, J.H.
    • Journal of the Korean Vacuum Society
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    • v.21 no.4
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    • pp.193-198
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    • 2012
  • In this study, we have fabricated the polymer insulator and diamond-like carbon (DLC) thin films by using plasma enhanced chemical vapor deposition methods. we fabricated the DLC films with various thicknesses as the passivation layer on plasma polymer and investigated the structural, physical, and electrical properties of DLC/plasma polymer films. The plasma polymer synthesized in this work had the low leakage current and low dielectric constant. The values of hardness and elastic modulus in DLC/plasma polymer films are increased, and the value of rms surface roughness is decreased, and contact angle value is increased with increasing DLC film thickness. In the electrical properties of DLC/plasma polymer, the value of the dielectric constant is increased, however the leakage current property of the DLC/plasma polymer is improved than that of plasma polymer film with increasing DLC film thickness.

Comparison of Functional Properties of Blood Plasma Collected from Black Goat and Hanwoo Cattle

  • Shine Htet Aung;Edirisinghe Dewage Nalaka Sandun Abeyrathne;Mahabbat Ali;Dong Uk Ahn;Young-Sun Choi;Ki-Chang Nam
    • Food Science of Animal Resources
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    • v.43 no.1
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    • pp.46-60
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    • 2023
  • Slaughterhouse blood is a by-product of animal slaughter that can be a good source of animal protein. This research purposed to examine the functional qualities of the blood plasma from Hanwoo cattle, black goat, and their hydrolysates. Part of the plasma was hydrolyzed with proteolytic enzymes (Bacillus protease, papain, thermolysin, elastase, and α-chymotrypsin) to yield bioactive peptides under optimum conditions. The levels of hydrolysates were evaluated by 15% sodium dodecyl sulfate polyacrylamide gel electrophoresis. The antioxidant, metal-chelating, and angiotensin I-converting enzyme (ACE) inhibitory properties of intact blood plasma and selected hydrolysates were investigated. Accordingly, two plasma hydrolysates by protease (pH 6.5/55℃/3 h) and thermolysin (pH 7.5/37℃/3-6 h) were selected for analysis of their functional properties. In the oil model system, only goat blood plasma had lower levels of thiobarbituric acid reactive substances than the control. The diphenyl picrylhydrazyl radical scavenging activity was higher in cattle and goat plasma than in proteolytic hydrolysates. Ironchelating activities increased after proteolytic degradation except for protease-treated cattle blood. Copper-chelating activity was excellent in all test samples except for the original bovine plasma. As for ACE inhibition, only non-hydrolyzed goat plasma and its hydrolysates by thermolysin showed ACE inhibitory activity (9.86±5.03% and 21.77±3.74%). In conclusion, goat plasma without hydrolyzation and its hydrolysates can be a good source of bioactive compounds with functional characteristics, whereas cattle plasma has a relatively low value. Further studies on the molecular structure of these compounds are needed with more suitable enzyme combinations.