• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.2
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• pp.175-180
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• 2009

In this article, we fabricated polytetrafluoroethylene(PTFE) nozzle treated by ion beam, in order to fabricate polymer based electrospray micro thruster with super hydrophobic nozzle. To obtain the super hydrophobic surface, PTFE surface is treated by argon and oxygen plasma treatment process. The optimal condition is investigated argon and oxygen flow rate as well as the paalied energy level for the treatment process. Fabricated nozzle was evaluated by measuring contact angle, and the surface morphology was examined by using scanning electron microscope(SEM) and atomic force microscope(AFM). We observe that jetting becomes more stable and repeatable on the treated nozzle. And to evaluate performance of fabricated nozzle, we measure micro scale thrust using a cantilever and a nozzle treated by ion beam laser displacement sensor.

• Journal of the Korean Vacuum Society
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• v.20 no.6
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• pp.416-421
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• 2011

In this paper, the relationship of chamber contamination and the intensity change of specific wavelength was investigated. "diff_CO" formula was introduced to rule out background noise caused by external conditions and to detect when the polymer is removed from the chamber. As RF time increased, diff_CO trend showed the decrease of the maximum peak and increased number of small intensity peaks. From the diff_CO change, it was possible to determine when the chamber needs to be cleaned without opening the chamber.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.447-447
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• 2010

일찍이 $SiO_2$ (Silicon dioxide) 박막은 다양한 분야에서 유전층, 부식 방지층, passivation층 등의 역할을 해왔다. 그리고 이러한 박막 공정은 대부분 진공의 환경에서 그 공정이 이루어지고 있다. 하지만 이러한 진공 system은 chamber, loadlock 그리고 펌프 등의 다양한 진공장비로 인한 생산 비용 증가, 공정의 복잡성뿐만 아니라 공정의 대면적화에 어려움을 지니고 있다. 그리고 최근 flexible display의 제조 공정에서 polymer 혹은 plastic 기판을 제조 공정에 적용시키기 위해 저온 공정이 필수적으로 요구 되고 있다. 이러한 기술적 한계를 뛰어 넘기 위해 최근 많은 연구가들은 atmospheric pressure plasma enhanced chemical vapor deposition (AP-PECVD)에 대해 지속적으로 다양한 연구를 하고 있다. 본 연구에서는 remote-type의 modified pin-to-plate dielectric barrier discharge (DBD) 시스템을 이용한 $SiO_2$ 무기 박막 증착에 관해 연구하였다. $O_2$/He/Ar의 gas와 5 kV AC power (30 kHz)의 전원장치를 통해 고밀도 대기압 플라즈마를 발생시켰고, silicon precursor로는 hexamethyldisilazane (HMSD)를 사용하였다. 먼저 HMDS와 $O_2$ gas의 flow rate 변화에 따른 증착률을 조사하였고 그 다음으로 박막의 조성 및 표면 특성을 조사하였다. HMDS의 유량이 100 ~ 300 sccm으로 증가함에 따라 증착속도는 증가했다. 하지만 FT-IR을 통해 HMDS의 유량이 증가하면 반응에 참여할 산소 분자의 부족으로 인해 $-(CH_3)_X$의 peak intensity가 증가하고, -OH의 peak intensity가 점차 감소함을 관찰 할 수 있었다. 또한 증착된 박막의 표면에 particle과 불균일한 surface morphology 등을 SEM image를 통해 관찰 하였다. 산소 유량이 탄소와 관련된 많은 불순물들의 제거에 도움이 됨에도 불구하고 14 slm 이상의 산소가 반응기 내로 주입되게 되면 대기압 플라즈마의 discharge가 불안정하게 되어 공정효율을 저하시키는 요소가 되었다. 결과적으로 HMDS (150 sccm)/$O_2$ (14 slm)/He (5 slm)/Ar (3 slm)의 조건에서 약 42.7 nm/min 증착률을 가지며, 불순물이 적고 surface morphology가 깨끗한 $SiO_2$ 박막을 증착할 수 있었다.

• Advances in nano research
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• v.4 no.1
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• pp.1-14
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• 2016

Superparamagnetic iron oxide nanoparticles (Nps), composed of magnetite, $Fe_3O_4$, or maghemite, ${\gamma}-Fe_2O_3$, core and biocompatible polymer shell, such as dextran or chitozan, have recently found wide applications in magnetic resonance imaging, contrast enhancement and hyperthermia therapy. For different diagnostic and therapeutic applications, current attempt is focusing on the synthesis and biomedical applications of various ferrite Nps, such as $CoFe_2O_4$ and $MnFe_2O_4$, differing from iron oxide Nps in charge, surface chemistry and magnetic properties. This study is focused on the synthesis of manganese ferrite, $MnFe_2O_4$, Nps by most commonly used chemical way pursuing better control of their size, purity and magnetic properties. Co-precipitation syntheses were performed using aqueous alkaline solutions of Mn(II) and Fe(III) salts and NaOH within a wide pH range using various hydrothermal treatment regimes. Different additives, such as citric acid, cysteine, glicine, polyetylene glycol, triethanolamine, chitosan, etc., were tested on purpose to obtain good yield of pure phase and monodispersed Nps with average size of ${\leq}20nm$. Transmission electron microscopy (TEM), X-ray diffraction, energy dispersive X-ray spectroscopy (EDX), $M\ddot{o}ssbauer$ spectroscopy down to cryogenic temperatures, magnetic measurements and inductively coupled plasma mass spectrometry were employed in this study.

• Applied Chemistry for Engineering
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• v.34 no.3
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• pp.258-263
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• 2023

In this study, conductive polymers and the enzyme tyrosinase (Tyr) were deposited on the surface of a screen printed carbon electrode (SPCE), which can be fabricated as a disposable sensor chip, and applied to the detection of bisphenol F (BPF), an endocrine disruptor with proven links to male diseases and thyroid disorders, using electrochemical methods. On the surface of the SPCE working electrode, which was negatively charged by oxygen plasma treatment, a positively charged conductive polymer, poly(diallyldimethyl ammonium chloride) (PDDA), a negatively charged polymer compound, poly(sodium 4-styrenesulfonate) (PSS), and another layer of PDDA were layered by electrostatic attraction in the order of PDDA, PSS, and finally PDDA. Then, a layer of Tyr, which was negatively charged due to pH adjustment to 7.0, was added to create a PDDA-PSS-PDDA-Tyr sensor for BPF. When the electrode sensor is exposed to a BPF solution, which is the substrate and target analyte, 4,4'-methylenebis(cyclohexa-3,5-diene-1,2-dione) is generated by an oxidation reaction with the Tyr enzyme on the electrode surface. The reduction process of the product at 0.1 V (vs. Ag/AgCl) generating 4,4'-methylenebis(benzene-1,2-diol) was measured using cyclic and differential pulse voltammetries, resulting in a change in the peak current with respect to the concentration of BPF. In addition, we compared the detection performance of BPF using an ionic liquid electrolyte as an alternative to phosphate-buffered saline, which has been used in many previous sensing studies. Furthermore, the selectivity of bisphenol S, which acts as an interfering substance with a similar structure to BPF, was investigated. Finally, we demonstrated the practical applicability of the sensor by applying it to analyze the concentration of BPF in real samples prepared in the laboratory.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.38.2-38.2
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• 2011

폴리머 박막은 그 고유한 특성으로 인해 여러 산업적으로 널리 사용되고 있는 재료이다 예로 의약품이나 식품 포장지의 배리어, 전자부품의 절연체, 반도체 공정에서의 사용, 혹은 부식방지를 위해 사용 되어지기도 한다. 이 폴리머 박막을 증착 하기 위한 방법으로 이전부터 CVD (Chemical Vapor Deposition) 방법이 많이 사용되었고 지금까지도 가장 많이 사용되는 방법이다. CVD를 사용하여 $SiO_2$-like 필름의 증착은 전구체(precursor)로 Silane ($SiH_4$)을 사용하였으며, 플라즈마 발생 소스(source)로 열 혹은 전기장 등을 사용 하며 공정 시 압력 또한 대부분 저압 하에서 실시 하였다. 이와 같은 이전 CVD 방법의 문제는 사용되는 Silane 자체가 인체에 해로울 정도로 독성이 있으며 폭발성도 같이 가지고 있어 작업환경의 위험성이 높으며 열을 사용한 CVD의 경우 높은 공정 온도로 인해 증착 할 수 있는 대상이 제한 되어 지며 높은 열의 발생을 위해 많은 에너지의 소비가 필요하다. 저압 플라즈마를 사용한 CVD 는 공정상 높은 열의 발생이 일어나지 않아 기판 운용상 문제가 되지 않지만 저압 환경에서 해당 공정이 이루어기 때문에 인해 필수적으로 고가의 진공 챔버가 필수적이며 저압을 유지할 고가의 진공 펌프나 추가 장비들이 필요하게 된다, 또한 챔버 내에서 이루어지는 공정으로 인해 공정의 연속성이 떨어져 시잔비용 또한 많이 잡아 먹는다. 이러한 열 혹은 저압 플라즈마등을 사용한 공정의 단점을 해결하기 위해 여러 연구자들이 다양한 방법을 통해 연구를 하였다. 대기압 유전체 배리어 방전(AP-DBD: Atmospheric Pressure-Dielectric Barrier Discharge)을 사용한 폴리머 박막의 증착은 이전 전통적인 방법에 비해 낮은 장비 가격과 낮은 공정 온도 그리고 연속적인 공정 등의 장점이 있는 폴리머 박막 증착 방법 이다. 대기압 유전체 배리어 방전 공정 변수로 공급 전압 및 주파수 그리고 공급 전압의 영향, 전구체를 유전체 배리어 방전 전극으로 이동 시키기 위해 사용된 캐리어 가스의 종류 및 유량, 화학양론적 계수를 맞추기 위해 같이 포함되는 산소 가스의 유량, DBD 전극의 형태에 따른 증착 박막의 균일성 등 이 존재하며 이런 많은 변수 들에 대한 연구가 진행 되었지만 아직 이 대기압 DBD를 이용한 폴리머 박막의 증착에 대한 명확한 이해는 아직 완전 하다 할 수 없다. 본 연구에서는 이러한 대기압 DBD를 이용하여 폴리머 박막의 증착시 영향을 미치는 많은 공정 변수 등이 박막생성에 미치는 영향과 증착된 박막의 성질에 대한 연구를 진행 하였다.

• Journal of Pharmaceutical Investigation
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• v.29 no.1
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• pp.29-36
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• 1999

Aceclofenac is an non-steroidal antiinflammatory drug which has been used in the treatment of rheumatoidal rthritis and osteo-arthritis. In order to decrease the gastric ulcerogenic effects and contol the plasma level of aceclofenac, we have developed the transdermal delivery system of aceclofenac plaster, which were formulated employing matrix polymers of acrylates and penetration-enhancers such as $Lauroglycol^{\circledR}$, $Transcutol^{\circledR}$, oleic acid and linoleic acid. Using Franz diffusion cells mounted with a rat skin, transdermal penetration characteristics of the formulations were evaluated by the HPLC assay of aceclofenac and diclofenac, an active metabolite, in the receptor compartment of pH 7.2 phosphate buffered solution. Skin penetration was increased when the content of aceclofenac increased, showing the flux $(J,\;{\mu}g/cm^2/hr)$ of 0.37 and 2.50 for 2% and 6.75% of the content, respectively. The flux$(J,\;{\mu}g/cm^2/hr)$ from plasters made of $Durotak^{\circledR}$ 87-2074, $Durotak^{\circledR}$ 87-2510 and $Durotak^{\circledR}$ 87-2097 were 2.50, 2.77 and 4.39, respectively. $Durotak^{\circledR}$ 87-2074 showed the lowest penetration due to the carboxylic acid group in the polymer, which might form a strong hydrogen bonding with a secondary amine of aceclofenac. Although both $Durotak^{\circledR}$ 87-2510 and $Durotak^{\circledR}$ 87-2097 are amine-resistant adhesives, $Durotak^{\circledR}$ 872510 showed lower penetration than $Durotak^{\circledR}$ 87-2097 because of the hydroxyl group in $Durotak^{\circledR}$ 87-2510, which might form a weak hydrogen bonding with aceclofenac. These results reveal that the functional group in acrylic polymers would greatly affect the release of aceclofenac from the matrix, which is the rate-limiting step in the penetration of aceclofenac through rat skins. The penetration of aceclofenac from plasters using different penetration-enhancers increased in the following order: Transcutol < linoleic acid < oleic acid. And the flux from the plasters containing oleic acid as a penetrationenhancer was 2.22 times greater than that of creams, which suggest that a newly deveolped aceclofenac plaster could be used in the treatment of rheumatoidal arthritis and osteo-arthritis as an advanced transdermal delivery system.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.48 no.3
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• pp.7-11
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• 2011

In this paper, we proposed a simple and high-yield printing process for source and drain electrodes of organic thin film transistor (OTFT). The surface energy of PVP (poly 4-vinylphenol) gate dielectric was decreased from 56 $mJ/m^2$ to 45 $mJ/m^2$ by adding fluoride of 3000ppm into it. Meanwhile the surface energy of source and drain (S/D) electrodes area on the PVP was increased to 87 $mJ/m^2$ by treating the areas, which was patterned by photolithography, with oxygen plasma, maximizing the surface energy difference from the other areas. A conductive polymer, G-PEDOT:PSS, was deposited on the S/D electrode areas by brushing painting process. With such a simple process we could obtain a high yield of above 90 % in $16{\times}16$ arrays of OTFTs. The performance of OTFTs with the fluoride-added PVP was similar to that of OTFTs with the ordinary PVP without fluoride, generating the mobility of 0.1 $cm^2/V.sec$, which was sufficient enough to drive electrophoretic display (EPD) sheet. The EPD panel employing the OTFT-backpane successfully demonstrated to display some patterns on it.

• Journal of the Microelectronics and Packaging Society
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• v.12 no.4 s.37
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• pp.275-280
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• 2005

We propose a new approach to greatly simplify the fabrication of conventional nanoimprint lithography (NIL) by combined nanoimprint and photolithography (CNP). We introduce a hybrid mask mold (HMM) made from UV transparent material with a UV-blocking Cr metal layer placed on top of the mold protrusions. We used a negative tone photo resist (PR) with higher selectivity to substrate the CNP process instead of the UV curable monomer and thermal plastic polymer that has been commonly used in NIL. Self-assembled monolayer (SAM) on HMM plays a reliable role for pattern transfer when the HMM is separated from the transfer layer. Hydrophilic $SiO_2$ thin film was deposited on all parts of the HMM, which improved the formation of SAM. This $SiO_2$ film made a sub-10nm formation without any pattern damage. In the CNP technique with HMM, the 'residual layer' of the PR was chemically removed by the conventional developing process. Thus, it was possible to simplify the process by eliminating the dry etching process, which was essential in the conventional NIL method.

• Journal of the Korean Society of Food Science and Nutrition
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• v.36 no.1
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• pp.51-57
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• 2007

Levan, the fructose polymer is an indigestible carbohydrate regularly consumed by humans. Its physiological functions, in terms of hypocholesterolemic effect and calcium metabolism, have not been well documented. The objective of this study was to investigate the effects of levan on blood lipids and the calcium absorption ratio in rats fed a 0.1% low calcium diet. Thirty rats were divided into three groups and fed a 0.1% low calcium diet (control) or low calcium diets containing either 2.5% levan or 5% levan for eight weeks. The blood lipid and biomarkers relevant to Ca metabolism (urinary Ca and hydroxyproline), the femoral weight and the Ca contents were determined. The body weight gains were lower in the 5% levan group than the control group. Plasma concentrations of triacylglycerol and LDL-cholesterol decreased in the 5% levan group, compared to the control group, but the atherogenic indice were not affected. Blood alkaline phosphatase activity, Ca and urinary hydroxyproline excretion levels were not different in the three groups. The net calcium absorption in rats fed a 5% levan diet was greater than rats fed the control diet, while the femoral weights and Ca contents were not significantly different in the three groups. We concluded that a 5% levan diet could both enhance the calcium absorption and improve the lipid profiles in rats fed a low calcium diet.