• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.148-148
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• 2016

디스플레이 시장이 rigid에서 flexible로 변화하기 시작하면서 유연 투명전극 소재에 대한 수요가 증가하고 있다. 투명전극으로 대표되는 Indium Tin Oxide(ITO)는 고투과 저저항의 장점을 가지지만 유연성이 떨어져 이를 대체 할 투명전극 소재로 Metal mesh, Ag nano-wire, CNT, Graphene, Conductive polymer 등에 대한 응용 연구가 활발히 진행되고 있다. 본 연구에서는 Metal mesh 용 Cu thin film 형성을 위해 플라즈마 표면처리 기술로 플라스틱 기판과 Cu 박막 사이의 밀착력을 향상시키고자 공정 연구를 수행하였다. 고품질의 Cu thin film 제작을 위해 양산용 roll to roll 장비를 이용하였고, 선형이온소스를 적용하여 플라즈마 표면처리를 수행하였다. 이후 마그네트론 스퍼터링을 통해 Ni buffer layer 및 Cu 박막 증착 공정을 in-situ로 진행하였다. 이러한 공정을 통해 제작한 Cu thin film의 밀착력을 평가하기 위해 cross cut test(ASTM D3359)를 수행하였다. 그 결과 플라스틱 기판과 Cu 금속 박막 사이의 밀착력이 0B에서 5B까지 향상된 것을 확인하였고, 플라즈마 표면처리 공정을 통해서 저항 또한 감소되는 결과를 얻을 수 있었다. 본 연구를 통해 polyethylene terephthalate(PET)뿐만 아니라 polyimide(PI) 기판 상에서도 플라즈마 표면처리를 통해 금속 박막의 밀착력이 향상되는 결과를 확인하였으며, flexible copper clad laminate (FCCL) 같은 유연 정보 소자 분야에 응용 가능할 것으로 기대된다.

• Textile Coloration and Finishing
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• v.17 no.1
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• pp.7-13
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• 2005

Continuous and intense UV irradiation on PTT film using two types of UV bulbs at different irradiation power level was carried out to modify surface characteristics of the film including zeta potential, wettability, surface energy, and dyeability. ESCA analysis of the irradiated film showed higher O/C ratio than the untreated film indicating photooxidation of outer surface layer. ATR analysis showed that the ester bonds were broken and some new groups were produced such as carboxylic acid, phenolic hydroxy, and other esters, implying that ester bonds of PTT was responsible for the observed photooxidation effect. The surface of the treated PTT film became more hydrophilic and wettable to water, coupled with increased surface energy. Polar component of the surface energy increased and nonpolar component decreased with increasing irradiation energy. The treatment also decreased zeta potential of the modified surface and nanoscale roughness increased with increasing irradiation. The dyeability of the treated films to catonic dyes was significantly improved by electrostatic and polar interaction between dye molecules and the anionic film surface. The UV irradiation seems to be a viable polymer surface modification technology, which has advantages such as no vacuum requirement and continuous process unlike plasma treatment.

• Proceedings of the KIEE Conference
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• 1991.07a
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• pp.233-237
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• 1991

In the study, samples were made on the electrode in internal glass bell jar by the radio frequency discharge polymerization. The polymerization rate of samples was observed as a function of r.f. discharge power. The characteristics of polymers obtained from TMDSO and HMDSO were analyzed by FT-IR and TGA, and their electrical properties were examined on insulation resistivity, breakdown voltage, dielectric constant, and tan ${\delta}$. (1) There was no difference between PPTMDSO and PPHMDSO in a polymerization rate and thermal and electrical properties. (2) The growing rates of thin film with discharge powers were from $0.42{\mu}/h$ to $1.2{\mu}m/h$. (3) According to IR spectra analysis, discharge power did not effect polymer structure due to polyermization mechanism and effected only polymerization rate. (4) PPTMDSO and PPHMDSO were thermally resistive polymers which did not decompose to $300^{\circ}C$.

• Proceedings of the Korean Society of Dyers and Finishers Conference
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• 2011.03a
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• pp.31-31
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• 2011

Lanasol dyes containing ${\alpha}$-bromoacrylamide or ${\alpha},{\beta}$-dibromopropionylamide group are used for wool dyeing. They are normally applied to wool under pH 4.5 to 6.5 at $100^{\circ}C$. Although wool fabric can be dyed to obtain deep colour, high light and wet fastness, the dyeing processes need long dyeing time at high temperature, with salt addition, which inevitably causes environmental problems. Grafting is a modification method for textile where monomers are covalently bonded onto the polymer chain. It can be initiated by ozone, ${\gamma}$ rays, electron beams, plasma, corona discharge and UV irradiation. Coloration by UV-induced photografting exhibits several advantages such as fast reaction rate, energy saving, simple equipment, easy exploitation and environmentally friendliness. Also it requires much lower energy compared to the conventional dyeing and less damage to the substrate. In this study, a direct sequential UV-induced photografting onto wool fabrics was discussed. To understand the graft polymerization mechanism further, several characterization methods were used. Moreover, the effects of several principal factors on the graft photopolymerization were investigated. Furthermore, the colorfastness results were compared with conventional dyeing methods.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.69-69
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• 2003

최근 trench capacitor, isolation trench, micro-electromechanical system(MEMS), micro-opto-electromechanical system(MOEMS)등의 다양한 기술에 적용될 고종횡비(HAR) 실리콘 식각기술연구가 진행되어 지고 있다. 이는 기존의 습식식각시 발생하는 결정방향에 따른 식각률의 차이에 관한 문제와 standard reactive ion etching(RIE) 에서의 낮은 종횡비와 식각률에 기인한 문제점들을 개선하기 위해 고밀도 플라즈마를 이용한 건식식각 장비를 사용하여 고종횡비(depth/width), 높은 식각률을 가지는 이방성 트랜치 구조를 얻는 것이다. 초기에는 주로 HBr chemistry를 이용한 연구가 진행되었는데 이는 식각률이 낮고 많은양의 식각부산물이 챔버와 시편에 재증착되는 문제가 발생하였다. 또한 SF6 chemistry의 사용을 통해 식각률의 향상은 가져왔지만 화학적 식각에 기인한 local bowing과 같은 이방성 식각의 문제점들로 인해 최근까지 CHF3, C2F6, C4F8, CF4등의 첨가가스를 이용하여 측벽에 Polymer layer의 식각보호막을 형성시켜 이방성 구조를 얻는 multi_step 공정이 일반화 되었다. 이에 본 연구에서는 SF6 chemistry와 소량의 02/HBr의 첨가가스를 이용한 single_step 공정을 통해 공정의 간소화 및 식각 프로파일을 개선하여 최적의 HAR 실리콘 식각공정 조건을 확보하고자 하였다.

• Proceedings of the Korean Society of Applied Pharmacology
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• 1994.04a
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• pp.129-130
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• 1994

The science of toxicology is the understanding of the mechanisms by which exogenous agents produce deleterious effects in biological systems. The actions of chemicals such as drugs are ultimately exerted at the cellular and gene levels. Over the past decade. several in vitro alternative methods such as cultured cells for assessing the toxicity of various xenobiotics have been proposed to reduce the use of animals. In this workshop three advanced methods will be presented. These methods are novel important models for toxicologic studies. Dr. Tabuchis group has establishcd two immortalized gastric surface mucosa cell lines from the pminary cultore of gastric fundic mucosal cells of adult transgenic mice harboring a temperature sensitive simian virus 40 large T-anugen gene. As the immortalized cell lines of various tissues possess unique characteristics to maintain their normal functions for several months, these cell lines are extremely useful for not only toxicity testing but also pharmacological screening in new drug development. Professor Funatsu have studied the formation of spherical multicelluar aggregates of adult rat hepatocytes(spheroid) having tissue like structure. The sphcroid shown thre is a prototype module of an artificial liver support system. Thus, the urea synthesis activity of the artificial liver was maintained at least to days in 100％ rat blood plasma. Dr. Takezawa and his coworkers have developed a novel culture system of multicellular spheroids considered 〃organoids〃 by utilizing a thermo-responsive polymer as a substratum of anchorage dependent cells. His final goal is to reconstitute the organoids of various normal organs, e.g., liver, skin etc. and also abnormal deseased organs such as tumor.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.28A no.11
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• pp.902-909
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• 1991

A reproducible selective dry etch process of GaAs/AlGaAs Heterostructures for High Electron Mobility Transistor(HEMT) Device fabrication is developed. Using RIE mode with $CCl_{2}F_{2}$ as the basic process gas, the observed etch selectivity of GaAs layer with respect to GaAs/$Al_{0.3}Ga_{0.7}$As is about 610:1. Severe polymer deposition problem, parialy generated from the use of $CCl_{2}F_{2}$ gas only, has been significantly reduced by adding a small amount of He gas or by $O_{2}$ plasma ashing after etch process. In order to obtain an optimized etch process for HEMT device fabrication, we com pared the properties of the wet etched Schottky contact with those of the dry etched one, and set dry etch condition to approach the characteristics of Schottky diode on wet etched surface. By applying the optimized etch process, the fabricated HEMT devices have the maximum transconductance $g_{mext}$ of 224 mS/mm, and have relatively uniform distribution across the 2inch wafer in the value of 200$\pm$20mS/mm.

• Asian Pacific Journal of Cancer Prevention
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• v.17 no.7
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• pp.3061-3063
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• 2016

Exploiting the immune system to abolish cancer growth via vaccination is a promising strategy but that is limited by many clinical issues. For DNA vaccines, viral vectors as a delivery system mediate a strong immune response due to their protein structure, which could afflect the cellular uptake of the genetic vector or even induce cytotoxic immune responses against transfected cells. Recently, synthetic DNA delivery systems have been developed and recommended as much easier and simple approaches for DNA delivery compared with viral vectors. These are based on the attraction of the positively charged cationic transfection reagents to negatively charged DNA molecules, which augments the cellular DNA uptake. In fact, there are three major cellular barriers which hinder successful DNA delivery systems: low uptake across the plasma membrane; inadequate release of DNA molecules with limited stability; and lack of nuclear targeting. Recently, a polysaccharide polymer produced by microalgae has been synthesized in a form of polymeric fiber material poly-N-acetyl glucosamine (p-GlcNAc). Due its unique properties, the F2 gel matrix was suggested as an effective delivery system for immune and gene vaccinations.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.112-112
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• 2017

광학적 전기적 특성이 우수한 Indium Tin Oxide (ITO)는 대표적인 투명전극으로 사용되어지고 있다. 하지만 Brittle한 성질로 인해서 플렉서블한 디바이스에 적용하기에는 어려움이 있다. 이러한 문제를 해결하기 위해 본 연구에서는 용액 공정으로 제조 단가가 비교적 저렴하며, 높은 투과도와 전기전도 특성을 가지는 투명전극으로 주목받고 있는 차세대 투명전극인 AgNW에 관한 연구를 수행하였다. AgNW는 나노와이어가 네트워크를 형성하고 있어 높은 전도성과 광 투과도를 가지지만 용액 제조시에 분산에 용이하기 위해서 흡습성의 고분자 물질로 둘러싸여 있기 때문에 환경 안정성이 좋지 않다는 단점이 있다. 또한 나노와이어 간의 높은 접촉저항으로 인해서 접촉저항을 감소시키기 위한 후처리 공정이 요구되어진다. 이를 해결하기 위해 본 연구에서는 AgNW 전극에 플라즈마 처리를 통해서 나노와이어간의 접촉저항을 감소시켜 전기적특성이 약 12% 향상됨을 확인하였다. 고온, 고습 장시간 안정성테스트 결과, 기존 AgNW 전극에 비해서 플라즈마 처리와 보호막을 형성한 AgNW는 저항증가율이 3배 이상 감소하여 환경안정성이 향상된 것을 확인하였다. 이는 흡습성 고분자 물질이 플라즈마 처리에 의해 제거되었고 보호막을 형성하여 산소와의 반응을 감소시켰기 때문으로 판단된다. 플라즈마 처리와 보호막을 형성한 AgNW 전극을 적용하여 투명히터, Polymer Dispersed Liquid Crystal(PDLC)등 다양한 디바이스에 적용한다면 기존의 AgNW 전극보다 높은 효율을 기대할 수 있을 것이라 예상된다.

• Tribology and Lubricants
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• v.11 no.5
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• pp.59-65
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• 1995

Tribological behaviors of nitrogen incorporated amorphous diamond-like carbon films were experimentally measured under a vacuum ($3 \times 10^{-5}$ Torr) using a ball (AISI 52100 steel)-on-disk wear-rig. Nitrogen incorporated DLC films were deposited by r.f. plasma assisted chemical vapor deposition method. Mixtures of benzene and ammonia or nitrogen gases were used as the reaction gases for the r.f. PACVD, and Si (100) wafer was used as the substrate. In the tribo-test, effects of DLC film thickness and normal load in friction were measured and discussed. Results showed that friction of nitrogen incorporated DLC films from a mixture gas of benzene and ammonia was lower than that of 100% benzene, specially in the measurement of minimum coefficient of friction. Differences in frictional characteristics of nitrogen incorporated DLC films were explained with the changes in chemical structures of the films. Result also showed that friction of DLC films increased with the sliding contact cycle, which remarkably accompanied with roll-shaped wear debris. Mechanisms and roles of the polymer-like wear debris were presented and discussed.