• Title/Summary/Keyword: Plasma Polymer

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Study of Surface Reaction and Gas Phase Chemistries in High Density C4F8/O2/Ar and C4F8/O2/Ar/CH2F2 Plasma for Contact Hole Etching

  • Kim, Gwan-Ha
    • Transactions on Electrical and Electronic Materials
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    • v.16 no.2
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    • pp.90-94
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    • 2015
  • In this study, the characterizations of oxide contact hole etching are investigated with C4F8/O2/Ar and CH2F2/C4F8/O2/ Ar plasma. As the percent composition of C4F8 in a C4F8/O2/Ar mixture increases, the amount of polymer deposited on the etched surface also increases because the CxFy polymer layer retards the reaction of oxygen atoms with PR. Adding CH2F2 into the C4F8/O2/Ar plasma increases the etch rate of the oxide and the selectivity of oxide to PR. The profile of contact holes was close to 90°, and no visible residue was seen in the SEM image at a C4F8/(C4F8+O2) ratio of 58%. The changes of chemical composition in the chamber were analyzed using optical emission spectroscopy, and the chemical reaction on the etched surface was investigated using X-ray photoelectron spectroscopy.

Immobilization and Grafting of Acrylic Acid on Polyethylene Surface by Ar-plasma Treatment (알곤 플라즈마처리에 의한 폴리에틸랜 표면상의 아크릴산 고정화와 그라프팅)

  • 김민정;서은덕
    • Polymer(Korea)
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    • v.26 no.2
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    • pp.279-286
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    • 2002
  • For surface modification of polymers with hydrophilic functional groups, acrylic acid was grafted and immobilized on the surface of polyethylene(PE) by cold-plasma treatment using Ar gas. The modifications were identified by analysis of ATR-IR spectrum and by the measurement of contact angles. Compared to virgin PE significant decreases in contact angle were observed for both the grafted PE and the immobilized PE. The decreases of contact angle were in the range of 47~$53^{\circ}$ for grafted PE and 23~$26^{\circ}$ for immobilized PE. The degree of hydrophilicity depended strongly on the plasma-treating time and discharge power. For the case of grafting it has show that the longer plasma-treating time, the higher hydrophilic character. For the case of immobilization, whereas, higher discharge power and longer exposure to plasma have shown the detrimental effect for the preparation of hydrophilic PE surface due to the decrease of carboxyl group by ablation effect. The decrease in adhesion strength of immobilized PE. compared to grafted PE, was also attributed to the ablation of carboxyl group.

Improvement of Barrier Property of LDPE Food Packaging Film by Plasma Polymerization (플라스마 중합을 이용한 LDPE 식품포장 필름의 차단성 향상)

  • Kim, Kyoung-Seok;Cho, Dong-Lyun
    • Polymer(Korea)
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    • v.32 no.1
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    • pp.38-42
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    • 2008
  • Ultrathin films were coated on low density Polyethylene (LDPE) food packaging films by plasma polymerization of methane, acetylene, hexamethyldisiloxane (HMDSO), and HMDSO+oxygen to improve the barrier property of the LDPE films. The film coated in HMDSO +oxygen (flow rate: 0.6+ 9.0 SCCM) plasma at 40 W for 10 min showed the highest improvement in the barrier property against oxygen, reducing the permeability of oxygen as much as 18.6 times. The film coated in acetylene (flow rate 0.75 SCCM) plasma at 10 W for 10 min showed the highest improvement in the barrier property against carbon dioxide and moisture, reducing the permeability of carbon dioxide and moisture as much as 12.0 and 3.0 times, respectively. In addition, cherry tomato, cucumber, and mushroom (Flammulina velutipes) wrapped with the coated films were kept fresh $1.5{\sim}3.0$ times longer than those wrapped with an LDPE film.

Flexible ITO/PEDOT:PSS Hybrid Transparent Conducting Electrode for Organic Photovoltaics

  • Lim, Kyounga;Jung, Sunghoon;Kang, Jae-Wook;Kim, Jong-Kuk;Kim, Do-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.299-299
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    • 2013
  • Indium Tin Oxide (ITO) has widely been used as a transparent conductive oxide (TCE) for photovoltaic devices. Lately, flexibility of ITO becomes an issue as demand of flexible device increases. Several scientists have tried to substitute ITO to different materials such as conductive polymer, graphene, CNT, and metal nanowire because of ITO brittleness. Among the substitute materials, PEDOT:PSS has mostly paid attention because PEDOT:PSS has excellent flexibility and good conductivity. The conductivity of PEDOT:PSS increases up to 1000 S/cm with additives such as DMSO, EG, sorbitol, and so on. In our research group, we introduce a conductive polymer PEDOT:PSS as a buffer layer to improve not only flexibility but also conductivity. As PEDOT:PSS layer forms beneath ITO thin film (20 nm), sheet resistance decreases from $230{\Omega}$/${\Box}$ to $85{\Omega}$/${\Box}$ and crack initiation decreases from 4.5 mm to 3.5 mm as well. We have fabricated organic photovoltaic device and power conversion efficiencies using conventional ITO electrode and ITO/PEDOT:PSS hybrid electrode. The photovoltaic property such as power conversion efficiency for ITO/PEDOT:PSS hybrid electrode is comparable to the value obtained using conventional ITO electrode on glass substrate.

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Effects of Oxygen Plasma-treated Graphene Oxide on Mechanical Properties of PMMA/Aluminum Hydroxide Composites (산소 플라즈마 처리된 그래핀 산화물이 PMMA/수산화알루미늄 컴포지트의 기계적 물성에 미치는 영향)

  • Kim, Hyo-Chul;Jeon, Son-Yeo;Kim, Hyung-Il;Choi, Ho-Suk;Hong, Min-Hyuk;Choi, Ki-Seop
    • Polymer(Korea)
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    • v.35 no.6
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    • pp.565-573
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    • 2011
  • The nanocomposites containing graphene oxide (GO) were prepared in order to improve the mechanical properties of poly(methyl methacrylate)/aluminum hydroxide (PMMA/AH) composites. GO was prepared from graphite by oxidation of Hummers method followed by exfoliation with thermal treatment. The surface of GO was modified by oxygen plasma in various exposure times from 0 to 70 min to improve interfacial compatibility. Compared with PMMA/AH composites, the nanocomposites containing GO modified with oxygen plasma for the exposure time up to 50 min showed significant increases in flexural strength, flexural modulus, Rockwell hardness, Barcol hardness, and Izod impact strength. The morphology of fracture surface showed an improved interfacial adhesion between PMMA/AH composites and GO, which was properly treated with oxygen plasma. The mechanical properties of nanocomposites were deteriorated by increasing the content of GO above 0.07 phr due to the nonuniform dispersion of GO.

Mechanisms of Platelet Adhesion on Elastic Polymer Surfaces: Protein Adsorption and Residence Effects

  • Insup Noh;Lee, Jin-Hui
    • Macromolecular Research
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    • v.9 no.4
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    • pp.197-205
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    • 2001
  • Platelet adhesion onto elastic polymeric biomaterials was tested in vitro by perfusing human whole blood at a shear rate of 100 sec$\^$-1/ for possible verification of mechanisms of initial platelet adhesion perfusion of blood on the polymeric substrates was performed after treatments either with or without pre-adsorption of 1% blood plasma, and either with or without residence of the protein-preadsorbed substrate in phosphate buffered solution. The surfaces employed were elastic polymers such as poly(ether urethane urea), poly(ether urethane), silicone urethane copolymer, silicone rubber and poly(ether urethane) with the anti-calcifying agent hydroxyethane bisphosphate. Each polymer surface treated was exposed in vitro to the dynamic, heparinized whole blood perfused for upto 6 min and the surface area of platelets initially adhered was measured by employing in situ epifluorescence video microscopy. The blood perfusion was performed on the surfaces treated at the following three different conditions: directly on the bare surfaces, after protein pre-adsorption and after residence in buffer for 3 days of the surfaces protein pre-adsorbed for 2 h. The effects of blood plasma pre-adsorption on the initial platelet adhesion was surface-dependent. The amount of the adsorbed fibrinogen and the surface coverage area of the adhered platelets were dependent on the surface conditions whether substrates were bare surfaces or protein pre-adsorbed ones. To test an effect of possible morphological (re)orientations of the adsorbed proteins on the initial platelet adhesion, the polymeric substrate pre-adsorbed with 1% blood plasma was immersed in phosphate buffered solution for 3 days and then exposed to physiological blood perfusion. The surface area of the platelets adhered on these surfaces was significantly different from that of the surfaces treated with protein pre-adsorption only. These results indicated that platelet adhesion was dependent on the surface property itself and pre-treatment conditions such as blood perfusion without any pre-adsorption of proteins, and blood perfusion either after protein pre-adsorption or after subsequent substrate residence in buffer of the substrate pre-adsorbed with proteins. Understanding of these results may guide for better designs of blood-contacting materials based on protein behaviors.

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Surface Properties of Liposomes Modified with Poly(ethylenimine) (폴리에틸렌이민으로 개질된 리포솜의 표면 특성)

  • 박윤정;남다은;서동환;한희동;김태우;김문석;신병철
    • Polymer(Korea)
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    • v.28 no.6
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    • pp.502-508
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    • 2004
  • Cationic liposomes for cancer treatment have been developed in the field of chemotharpy. It was well combined on the surface of anionic tumor cell membrane by electrostatic interaction. Thus, the object of this study was to prepare the cationic liposomes capable of forming an ionic complex with the anionic cell membrane. To prepare the cationic liposomes, 1,2-distearoyl-sn-glycero-3-phosphoethanolamine (DSPE) as a cationic lipid material and polyethylenimine (PEI) as a cationic polymer were synthesized. Ionic property on the surface of liposomes was determined by the zeta potential. The adsorption characteristics of plasma protein for liposome in bovine serum were determined by the particle size and turbidity change. To estimate the stability of liposome in buffered solution, the change of particle size was measured at room temperature for seven days. The cationic liposomes were absorbed a large amount of plasma protein in bovine serum because plasma protein having anionic charge was fixed on the surface of cationic liposomes. This result indicate that the modification on the surface of liposomes using cationic polyethylenimine enhances the protein adsorption in bovine serum. Additionaly, cationic liposomes showed good stability in buffered solution for seven days.

Composite PEO-Coatings as Defence Against Corrosion and Wear: A Review

  • Gnedenkov, S.V.;Sinebryukhov, S.L.;Sergienko, V.I.;Gnedenkov, A.S.
    • Corrosion Science and Technology
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    • v.18 no.5
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    • pp.212-219
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    • 2019
  • This paper reviews recent approaches to develop composite polymer-containing coatings by plasma electrolytic oxidation (PEO) using various low-molecular fractions of superdispersed polytetrafluoroethylene (SPTFE). The features of the unique approaches to form the composite polymer-containing coating on the surface of MA8 magnesium alloy were summarized. Improvement in the corrosion and tribological behavior of the polymer-containing coating can be attributed to the morphology and insulating properties of the surface layers and solid lubrication effect of the SPTFE particles. Such multifunctional coatings have high corrosion resistance ($R_p=3.0{\times}10^7{\Omega}cm^2$) and low friction coefficient (0.13) under dry wear conditions. The effect of dispersity and ${\xi}$-potential of the nanoscale materials ($ZrO_2$ and $SiO_2$) used as electrolyte components for the plasma electrolytic oxidation on the composition and properties of the coatings was investigated. Improvement in the protective properties of the coatings with the incorporated nanoparticles was explained by the greater thickness of the protective layer, relatively low porosity, and the presence of narrow non-through pores. The impedance modulus measured at low frequency for the zirconia-containing layer (${\mid}Z{\mid}_{f=0.01Hz}=1.8{\times}10^6{\Omega}{\cdot}cm^2$) was more than one order of magnitude higher than that of the PEO-coating formed in the nanoparticles-free electrolyte (${\mid}Z{\mid}_{f=0.01Hz}=5.4{\times}10^4{\Omega}{\cdot}cm^2$).