• 폴리머
• /
• 제32권5호
• /
• pp.433-439
• /
• 2008

고분자 소재에 평판형 플라즈마 전처리 방식을 적용시켜 polyurethane foam(density : 0.27)과 rubber (butadiene rubber) 소재 표면의 접촉각 및 접착력을 향상시켰다. 플라즈마 반응기의 최적의 반응조건을 조사하기 위해서 전처리기류(질소, 아르곤, 산소, 공기), 기류의 유량($30{\sim}100\;mL/min$), 그리고 전처리 시간($0{\sim}30\;s$) 등을 변화시켜 전처리하고 polyurethane foam의 경우 진공식 플라즈마처리 방식과 상호 비교하였다. 분위기 기류인 $N_2$의 유량을 100 mL/min로 설정 후 polyurethane foam은 10 s, rubber는 3 s 동안 전처리 했을 때 가장 높은 접착박리강도를 나타내었다. 전처리 후 소재의 표면 변화는 SEM과 ATR-FTIR을 이용하여 측정하였다. 결과적으로 평판형 플라즈마 조작 방식에 의한 처리로 소재 표면의 젖음성과 접착박리강도가 개선되었음을 확인하였다.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.182-182
• /
• 2012

Plasma etching is used in various semiconductor processing steps. In plasma etcher, optical- emission spectroscopy (OES) is widely used for in-situ endpoint detection. However, the sensitivity of OES is decreased if polymer is deposited on viewport or the proportion of exposed area on the wafer is too small. Because of these problems, the object is to investigate the suitability of using plasma impedance monitoring (PIM) and self plasma optical emission spectrocopy (SPOES) with statistical approach for in-situ endpoint detection. The endpoint was determined by impedance signal variation from I-V monitor (VI probe) and optical emission signal from SPOES. However, the signal variation at the endpoint is too weak to determine endpoint when $SiO_2$ and SiNx layers are etched by fluorocarbon on inductive coupled plasma (ICP) etcher, if the proportion of $SiO_2$ and SiNx area on Si wafer are small. Therefore, modified principal component analysis (mPCA) is applied to them for increasing sensitivity. For verifying this method, detected endpoint from impedance monitoring is compared with optical emission spectroscopy.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.32-32
• /
• 2011

Plasma etching is used in microelectronic processing for patterning of micro- and nano-scale devices. Commonly, optical emission spectroscopy (OES) is widely used for real-time endpoint detection for plasma etching. However, if the viewport for optical-emission monitoring becomes blurred by polymer film due to prolonged use of the etching system, optical-emission monitoring becomes impossible. In addition, when the exposed area ratio on the wafer is small, changes in the optical emission are so slight that it is almost impossible to detect the endpoint of etching. For this reason, as a simple method of detecting variations in plasma without contamination of the reaction chamber at low cost, a method of measuring plasma impedance is being examined. The object in this research is to investigate the suitability of using plasma impedance monitoring (PIM) with statistical approach for real-time endpoint detection of $SiO_2$ etching. The endpoint was determined by impedance signal variation from I-V monitor (VI probe). However, the signal variation at the endpoint is too weak to determine endpoint when $SiO_2$ film on Si wafer is etched by fluorocarbon plasma on inductive coupled plasma (ICP) etcher. Therefore, modified principal component analysis (mPCA) is applied to them for increasing sensitivity. For verifying this method, detected endpoint from impedance analysis is compared with optical emission spectroscopy (OES). From impedance data, we tried to analyze physical properties of plasma, and real-time endpoint detection can be achieved.

• Journal of Microbiology and Biotechnology
• /
• 제12권6호
• /
• pp.957-961
• /
• 2002

The hypolipidemic effect of exe-polymer produced in submerged mycelial culture of Hericium erinaceus (HE), Auricularia auricula-judue (AA), Flammulina veluripes (FV), Phellinus pini (PP), and Grifola frondosa (GF) was investigated in dietary-induced hyperlipidemic rats. The animals were administered with exe-polymers at the level of 100 mg/kg body weight daily for four weeks. Hypolipidemic effect was achieved in all the experimental groups, however, HE exo-polymer proved to be the most potent one, which significantly reduced the plasma triglyceride ($28.9\%$), total cholesterol ($29.7\%$), low-density lipoprotein (LDL) cholesterol ($39.6\%$), phospholipid ($16.0\%$), and liver total cholesterol ($28.9\%$) level, when compared to the saline administered (control) group. The results of the present investigation strongly demonstrate the potential of HE exe-polymer in combating hyperlipidemia in the experimental animals.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
• /
• pp.989-993
• /
• 2002

Barrier ribs in the color plasma display panel(PDP) function to maintain the discharge space between to glass plates as well as to prevent optical crosstalk. Patterning of barrier ribs is one of unique processes for making PDP. In this work photosensitive barrier rib pastes were prepared by incorporating binder polymer, solvent, functional monomers photoinitiator, mid barrier rib powder. Study on the function of materials for the barrier rib paste were undertaken. After optimization of paste formulation, both photolithographic and transparent soft molding method resulted in fine pattern of barrier ribs with high aspect ratio.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2003년도 하계학술대회 논문집 C
• /
• pp.1906-1908
• /
• 2003

본 연구는 biosensor용 microchannel 제작에 사용되는 PDMS의 표면 개질화와 표면 환원 현상을 해결 하기위한 co-polymer를 이용한 표면 처리특성에 관한 연구이다. PDMS 와 PDMS co-polymer의 표면 개질화를 위해 $O_2$ RF Plasma를 사용하였으며 10W, 1.5sccm의 분위기 하에서 표면 처리 공정을 수행하였다. 실험에 사용된 co-polymer는 소수성과 친수성의 성질을 동시에 갖는 triton x-100과 PDMS를 혼합하여 제작하였다. 각각 흔합비(0.5:100, 1:100, 1.5:100, 2:100)가 다른 시료를 제작하여 플라즈마 표면처리공정을 통해 표면처리를 하였으며, 표면 처리된 PDMS의 표면 특성변화에 비교 검증하였다.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
• /
• pp.171-174
• /
• 2000

This study uses neon and xenon gas mixture discharges to determine the effects of the neon plasma emission on the characteristics of visible emission from the stimulation of the red, green, blue(RGB) phosphor layers in a surface-type alternate current plasma display panel(AC PDP). With a mixture of less than 2% xenon to neon, it is found that the luminance changes in the visible emission of the phosphor layers are similar to those of the neon plasma emission. In the range of xenon mix ratio from 2 to 5%, the luminance of the red, green, blue(RGB) phosphor layers decreases with a decrease in the neon plasma emission intensity. However, with a mixture of above 5% xenon to neon, the luminance of the red, green, blue(RGB) phosphor layers increases regardless of a decrease in the neon plasma emission intensity. Furthermore, the color purity of the red, green, blue(RGB) phosphor layers improve as the neon plasma emission intensity decreases. Accordingly, it is concluded that the optical properties of the phosphor layers, including color purity and luminance, depend on the neon plasma discharge emission as well as the visible emission from the stimulation of the phosphor layers.

• Macromolecular Research
• /
• 제12권1호
• /
• pp.134-140
• /
• 2004

Semi-crystalline poly(ethylene terephthalate) (PET) film surfaces were modified with argon and oxygen plasmas by radio-frequency (RF) glow discharge at 240 mTorr/40 W; the changes in topography and surface structure were investigated by atomic force microscopy (AFM) in conjunction with specular reflectance of infrared microspectroscopy (IMS). Under our operating conditions, analysis of the AFM images revealed that longer plasma treatment results in significant ablation on the film surface with increasing roughness, regardless of the kind of plasma used. The basic topographies, however, were different depending upon the kind of gas used. The specular reflectance analysis showed that the ablative mechanisms of the argon and oxygen plasma treatments are entirely different with one another. For the Ar-plasma-treated PET surface, no observable difference in the chemical structure was observed before and after plasma treatment. On the other hand, the oxygen-plasma-treated PET surface displays a significant decrease in the number of aliphatic C-H groups. We conclude that a constant removal of material from the PET surface occurs when using the Ar-plasma, whereas preferential etching of aliphatic C-H groups, with respect to, e.g. , carbonyl and ether groups, occurs upon oxygen plasma.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1999년도 하계학술대회 논문집 D
• /
• pp.1702-1703
• /
• 1999

We have prepared the plasma-polymerized membrane for pervaporation of organic-liquid mixtures by the plasma polymerization technique. Plasma polymerization techniques were utilized in the development of hydrophilic composite membranes having high hydrogen ion permeability and excellent dimensional stability. To develop an organic liquid permselective membrane. suppressing membrane swelling as well as enhancing the solubility difference is important, the objectives of the present study are to design a suitable membrane for an organic-mixture system by the control of the plasma-polymer solubility.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1992년도 하계학술대회 논문집 B
• /
• pp.900-902
• /
• 1992

In order to develope the uniform Plasma source which is able to make polymer or glass surface modification, the d.c glow discharge characteristics for the hemisphere -cylindrical electrode system with external d.c magnetic field are investigated. Single probe method has been used for detecting plasma parameters. We make uniform plasma generated to the external of electrode between hemisphere and cylindrical electrode. The surface treatment of metal and insulate has been performed by this uniform plasma.