• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.39-39
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• 1999

The KSTAR (Korea Superconducting Tokamak Advanced Research) tokamak is a nuclear fusion experimental device for a long pulse/steady-state plasma operation, adopting fully superconducting magnets. In accordance with completion of the basic design of the torus vacuum vessel and the enclosing cryostat, the vacuum pumping and gas fueling basic design has been developed to fulfil the physics requirements. The ultra-high vacuum pumping and sophisticated gas fueling system of the machine is essential to achieve such roles for optimized plasma performance and operation. Recently the vacuum exhaust system using dedicated pumping ports for the vacuum vessel and cryostat has been modified to meet more reliable and successful performance of the KSTAR[Fig. 1].In order to achieve the required base pressure of 5 x 10-9 torr, the total impurity load to the vessel internal is limited to ~5 x 10-5 torr-1/x, while the cryostat base pressure is kept as ~5 x 105 torr to mitigate the thermal load applied to the superconducting magnets. Each KSTAR fueling system will be separately capable of fueling gas at a rate of 50 torr-1/x, consistent with the given pumping throughput. In order to initiate a plasma discharge in KSTAR, the vacuum vessel is filled to a gas pressure of few 10-6 to few 10-4 torr, and additional gas injection is required to maintain and increase the plasma density during the course of the discharge period.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.581-582
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• 2005

In order to apply the discharge plasma processing. to industrial areas, the control of the chemical reaction mechanism is necessary. The hybrid plasma reactor was designed for the effective treatment of wastewater and hazardous volatile organic substances. This plasma reactor was similar to the barrier discharge, and surface discharge on the dielectric surface was propagated to the water surface strongly for the heterogeneous chemical reaction at the interface between the working gas and the water surface. The discharge emission in this discharge reactor was mainly $N_2$ second positive band in the case of $N_2$ or air gas atmosphere, and intensities from OH radicals in Ar gas atmosphere were stronger than in $N_2$ or air gas atmosphere. From this result, it is necessary to apply Ar gas for the effective generation of OH radicals in this plasma reactor.

• Applied Chemistry for Engineering
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• v.22 no.6
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• pp.653-657
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• 2011

Conversion characteristics of $CH_4$ and $CO_2$ was studied using an atmospheric pressure plasma for the preparation of synthesis gas composed of $H_2$ and CO. The effects of delivered power, total gas flow rate, and gas residence time in the reactor on the conversion of $CH_4$ and $CO_2$ were evaluated in a plasma reactor with the type of dielectric barrier discharge. The increase of reactor temperature did not affect on the increase of conversion if the temperature does not reach to the appropriate level. The conversion of $CH_4$ and $CO_2$ largely increased with increasing the delivered power. As the $CH_4/CO_2$ ratio increased, the $CH_4$ conversion decreased, whereas the $CO_2$ conversion increased. Generally, the $CH_4$ convesion was higher than the $CO_2$ conversion through the variation of the process parameters.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.4 no.4
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• pp.370-377
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• 1994

DC plasma torch which is a non-transferred type was constructed and silicon nitride powders were produced. Ar gas is used as a plasma gas and gas reactants with the carrier gas are introduced beneath the plasma ignition part. Two slits are attached and a reactive quenching gas is introduced through them. Using $SiCl_4 and NH_3$ as starting materials, silicon nitride powders were produced. As-produced powders were amorphous and crystalline silicon nitrides were obtained by heating at $1420^{\circ}C$ for two hours under nitrogen atmosphere. Silicon nitride phase was identified in the XRD patterns and IR spectrum, and the image of the powders before and after heating was observed from the TEM analysis.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.21-23
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• 2006

A newly designed micro-plasma device using SU-8 photoresist as a barrier rib has been successfully fabricated and characterized. Operating in neon gas at pressures from 300 to 800 Torr and having hexagonal structure, $5{\times}5$ arrays of micro-plasma device have been investigated. The driving voltage is lower than 250 V.

• The Korean Journal of Pesticide Science
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• v.16 no.1
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• pp.11-20
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• 2012

As increasing the use of pesticides both in number and amount to boost crop production, consumer concerns over food quality and safety with respect to residual pesticides are also continuously increasing. However, there is still lacking of information that can effectively help to remove residual pesticides in foods. In recent years, contaminant removal by gas (or) glow discharge plasma (GDP) attracts great interests on environmental scientists because of its high removal efficiency and environmental compatibility. It was shown to be effective for the removal of some organophosphorus pesticides, phenols, benzoic acid, dyes, and nitrobenzene on solid substrate or in aqueous solution. This work mainly focuses on the removal of wide range of residual pesticides from fresh fruits and vegetables. As for preliminary study, the experiments were carried out to investigate whether GDP can be used as an effective tool for degrading target pesticides or not. With this objective, 60 selected pesticides drop wised onto glass slides were exposed to two types of GDP, dielectric barrier discharge plasma (DBDP) and low pressure discharge plasma (LPDP), for 5 min. Then, they were washed with 2 mL MeCN which were collected and used for determination of remaining concentration of pesticides using LC-MS/MS. Among selected pesticides, degradation of 18 pesticides (endosulfan-total was counted as one pesticide) by GDP could not be examined because control treatments, which were left in ambient environment, of those pesticides recovered less than 70% or even did not recover. However, majority of tested pesticides (42) were degraded by both types of GDP with satisfactory recovery (>80%) of control sample. Pesticides degradation ranged from 66.88% to 100% were achieved by both types of plasma except clothianidin which degradation in LPDP was 26.9%. The results clearly indicate that both types of gas discharge plasma are promising tools for degrading wide range of pesticides on glass substrate.

• Applied Chemistry for Engineering
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• v.29 no.1
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• pp.10-17
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• 2018

POU (point of use) scrubbers were applied for the treatment of waste gases including PFCs (perfluorocompounds) exhausted from the CVD (chemical vapor deposition), etching, and cleaning processes of semiconductor and display manufacturing plant. The GWP (global warming potential) and atmosphere lifetime of PFCs are known to be a few thousands higher than that of $CO_2$, and extremely high temperature more than 3,000 K is required to thermally decompose PFCs. Therefore, POU gas scrubbers based on the thermal plasma technology were developed for the effective control of PFCs and industrial application of the technology. The thermal plasma technology encompasses the generation of powerful plasma via the optimization of the plasma torch, a highly stable power supply, and the matching technique between two components. In addition, the effective mixture of the high temperature plasma and waste gases was also necessary for the highly efficient abatement of PFCs. The purpose of this paper was to provide not only a useful technical information of the post-treatment process for the waste gas scrubbing but also a short perspective on R&D of POU plasma gas scrubbers.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.11
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• pp.1972-1977
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• 2007

Micro plasma has been recently studied to investigate the effects on various cells. We study a micro-plasma produced by a plasma needle that is operated with RF power and its effects on G361 melanoma cells. The micro plasma size ranges from sub-mm to several mm at a few watts of RF power. For the bio-medical treatment, low-temperature plasma is obtained and gas temperature is controlled within several tens of degrees $(^{\circ}C)$ in order not to disturb cell activities. Elementary spectroscopic studies to obtain plasma characteristics are presented for Ar and He plasma with different frequencies of RF power. Also the preliminary results of the micro plasma effects on G361 melanoma cells are presented. It was observed that the irradiation of micro plasma induces cell death through the deprivation of tyrosine phosphorylation in the G361 cells.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.12
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• pp.1051-1056
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• 2008

In this study, the investigations of the TiN etching characteristics were carried out with addition of $Cl_2$ gas in an inductively coupled $BCl_3$-base plasma system. Dry etching of the TiN was studied by varying the etching parameters including $Cl_2$ gas addition ratio, RF power, DC-bias voltage and pressure. The etch rate of TiN thin film was maximum when the $Cl_2$ gas addition flow was 2 sccm with fixed other conditions. As the RF power DC-bias voltage were increased, the etch rate of TiN thin film showed increasing tendency. $BCl_3/Cl_2$/Ar plasmas were characterized by optical emission spectroscopy (OES) analysis. The chemical reaction on the surface of the etched TiN films was investigated with X-ray photoelectron spectroscopy (XPS).

• Journal of Welding and Joining
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• v.33 no.3
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• pp.68-74
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• 2015

Superduplex stainless steels are important materials to the oil and gas industry, especially for off-shore production. TIG welding of super duplex stainless steels to obtain the optimal phase balance between austenite and ferrite is mainly achieved by controlling the cooling rate and the weld chemistry. The latter depends on the filler wire chosen and the shielding gas used. If TIG welding of superduplex stainless steels is performed with argon shielding gas only, then nitrogen gets lost from the weld pool, which can result in a ferrite-rich weld metal, with an inferior corrosion resistance than parent metal. In the present study, nitrogen permeation model from the shield gas which gets into the weld metal in DCEN-TIG welding has suggested. This plasma stream model shows characteristics of permeation of nitrogen ions into the molten metal due to the strong physical effect of plasma stream which formed by the arc pressure rather than the permeation of nitrogen ions caused by electric effect.