• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.35-40
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• 2010

We have investigated the effects of hydrogen injection via in-situ gas addition ($O_2$, $H_2$, or $O_2$ + $H_2$ gas) and plasma post-treatment (Ar or Ar + H plasma) on material properties of ZnO that is considered to be as a channel layer in transparent thin film transistors. The variations in the electrical resistivity, optical transmittance and bandgap energy, and crystal quality of ZnO thin films were characterized in terms of the methods and conditions used in hydrogen injection. The resistivity was significantly decreased by injection of hydrogen; approximately $10^6\;{\Omega}cm$ for as-grown, $1.2\;{\times}\;10^2\;{\Omega}cm$ for in-situ with $O_2/H_2\;=\;2/3$ addition, and $0.1\;{\Omega}cm$ after Ar + H plasma treatment of 90 min. The average transmittance of ZnO films measured at a wavelength of 400-700 nm was gradually increased by increasing the post-treatment time in Ar + H plasma. The optical bandgap energy of ZnO films was almost monotonically increased by decreasing the $O_2/H_2$ ratio in in-situ gas addition or by increasing the post-treatment time in Ar + H plasma, while the post-treatment using Ar plasma hardly affected the bandgap energy. The role of hydrogen in ZnO was discussed by considering the creation and annihilation of oxygen vacancies as well as the formation of shallow donors by hydrogen.

• Laser Solutions
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• v.5 no.1
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• pp.33-42
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• 2002

In order to investigate the characteristics of the plasma induced by lap-joint CO$_2$ laser welding of automotive steel sheets, the effects of welding speed, shield gas flow rate, gap size, and laser beam defocus to plasma intensity emitted from keyhole have been investigated. The plasma light is measured by fiber and photodiode. Also, the plasma images were captured by the high speed digital camera in 1000frames/sec in order to correlate the plasma light signal with plasma pattern. From the results, it is observed that the difference of the plasma intensity for between the deep penetration and partial penetration exists from 1.2 to 2 times. The plasma light intensity decreased in case of the deep penetration Is observed due to the exhausting of the plasma gas under the sheet. On the other hand, under the conditions of the deep penetration, the plasma intensity is significantly increased by controling the conditions decreasing the penetration depth. It was specially founded that the effect of 0.3mm gap size at partial penetration condition is approximately similar to deep penetration in 0mm gap. It is concluded that the plasma intensity is able to evaluate the penetration depth in lap-joint welding and appears to offer the most straightforward correlation to the welding process.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.5
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• pp.401-409
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• 2013

Numerical analysis on RF (Radio-Frequency) thermal plasma treatment of micro-sized Ni metal was carried out to understand the synthesis mechanism of nano-sized Ni powder by RF thermal plasma. For this purpose, the behaviors of Ni metal particles injected into RF plasma torch were investigated according to their diameters ($1{\sim}100{\mu}m$), RF input power (6 ~ 12 kW) and the flow rates of carrier gases (2 and 5 slpm). From the numerical results, it is predicted firstly that the velocities of carrier gases need to be minimized because the strong injection of carrier gas can cool down the central column of RF thermal plasma significantly, which is used as a main path for RF thermal plasma treatment of micro-sized Ni metal. In addition, the residence time of the injected particles in the high temperature region of RF thermal plasma is found to be also reduced in proportion to the flow rate of the carrier gas In spite of these effects of carrier gas velocities, however, calculation results show that a Ni metal particle even with the diameter of $100{\mu}m$ can be completely evaporated at relatively low power level of 10 kW during its flight of RF thermal plasma torch (< 10 ms) due to the relatively low melting point and high thermal conductivity. Based on these observations, nano-sized Ni metal powders are expected to be produced efficiently by a simple treatment of micro-sized Ni metal using RF thermal plasmas.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.17-18
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• 2011

Plasma in liquid phase has attracted great attention in the last few years by the wide domain of applications in material processing, decomposition of organic and inorganic chemical compounds and sterilization of water. The plasma in liquid is characterized by three main regions which interact each - other during the plasma operation: the liquid phase, which supply the plasma gas phase with various chemical compounds and ions, the plasma in the gas phase at atmospheric pressure and the interface between these two regions. The most complex region, but extremely interesting from the fundamental, chemical and physical processes which occur here, is the boundary between the liquid phase and the plasma gas phase. In our laboratory, plasma in liquid which behaves as a glow discharge type, is generated by using a bipolar pulsed power supply, with variable pulse width, in the range of 0.5~10 ${\mu}s$ and 10 to 30 kHz repetition rate. Plasma in water and other different solutions was characterized by electrical and optical measurements. Strong emissions of OH and H radicals dominate the optical spectra. Generally water with 500 ${\mu}S/cm$ conductivity has a breakdown voltage around 2 kV, depending on the pulse width and the repetition rate of the power supply. The characteristics of the plasma initiated in ultrapure water between pairs of different materials used for electrodes (W and Ta) were investigated by the time-resolved optical emission and the broad-band absorption spectroscopy. The deexcitation processes of the reactive species formed in the water plasma depend on the electrode material, but have been independent on the polarity of the applied voltage pulses. Recently, Coherent anti-Stokes Raman Spectroscopy method was employed to investigate the chemistry in the liquid phase and at the interface between the gas and the liquid phases of the solution plasma system. The use of the solution plasma allows rapid fabrication of the metal nanoparticles without being necessary the addition of different reducing agents, because plasma in the liquid phase provides a reaction field with a highly excited energy radicals. We successfully synthesized gold nanoparticles using a glow discharge in aqueous solution. Nanoparticles with an average size of less than 10 nm were obtained using chlorauric acid solutions as the metal source. Carbon/Pt hybrid nanostructures have been obtained by treating carbon balls, synthesized in a CVD chamber, with hexachloro- platinum acid in a solution plasma system. The solution plasma was successfully used to remove the template remained after the mesoporous silica synthesis. Surface functionalization of the carbon structures and the silica surface with different chemical groups and nanoparticles, was also performed by processing these materials in the liquid plasma.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.9
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• pp.103-108
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• 2008

In-plane shear tests were performed to investigate the shear property change of FRP by plasma modification. Graphite/epoxy prepreg was used as a test material and plasma source was a microwave (2.4GHz) type. Plasma was induced by oxygen gas and its flow rate was kept $4{\sim}5$sccm with low vacuum state of $10^{-3}$ Torr. Prepreg was stacked unidirectionally ($[0^0]_8$) after plasma modification. Wettability was determined by measuring a contact angle. The results showed that the contact angle was decreased from $86^0$ to $45^0$ after plasma modification. Shear strength was also improved by ${\sim}10%$. SEM examination was made on the fracture surface and functional group produced by the plasma modification was investigated by XPS.

• Journal of Welding and Joining
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• v.35 no.3
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• pp.75-81
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• 2017

Recently in the welding field, the establishment of unmanned and automated systems are rapidly developing. Accurate interpretation of the welding phenomenon is applied a number of monitoring systems. In this paper, butt welding (6t) type I using Plasma-MIG welding was carried out. And we evaluated characteristics of the Al-5083 aluminium alloy in Plasma-MIG hybrid welding. Process variables including the plasma current, MIG voltage, wire feeding rate and the welding speed were used. Butt welding was conducted 1 pass. Argon gas was used as the protective gas that results from the experiment were able to achieve full penetration. In addition to monitoring the welding process occurring during MIG welding current, welding votage and Plasma current, voltage were collected in real time, the photodiode and CCD cameras observing the phenomenon that the welding is in progress were measured using a quantity of light.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.8
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• pp.153-157
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• 2003

In the present work, the effect of plasma treatment of aluminum on the fracture toughness of CFRP/aluminum composites was investigated. The surface of the aluminum was treated by a DC plasma. The plasma treatment was carried out at volume ratio of acetylene gas to nitrogen gas of 5:5 and the treatment time used was 30 sec. Cracked lap shear specimens of aluminum/CFRP composites were made using secondary bonding procedure. Fracture toughness of aluminum/CFRP composites was determined using the work factor approach. Then, the fracture toughness of plasma-treated aluminum/CFRP composites was compared with that of untreated aluminum/CFRP composites. The results showed that the fracture toughness of plasma-treated aluminum/CFRP composites was about 50 % higher than that of untreated aluminum/CFRP composites.

• Membrane Journal
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• v.7 no.4
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• pp.183-190
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• 1997

Composite membranes were prepared by the deposition of pentafluoropyridine(PFP) or pentafluorotoluene(PFT) plasma films onto porous Celgard and nonporous poly(dimethylsiloxane) [PDMS] films. Gas permeation measurements for the composite membranes were made in the temperature range of 35$^{\circ}$C to 75 $^{\circ}$C and the solubilities in plasma polymers were measured using a Cahn Microbalance. The permeability coefficients of plasma polymers obeyed the Arrhenius relationship fairly wall. Activation energies for permeation in the plasma films increased with the size of penetrant molecules. The activation energy of plasma polymers was much lower than that of commonly used perfluoropolymers. This difference was proved to be attributable to the much lower heat of solutions of the plasma polymers compared to perfluoropolymers. The diffusion activation energies were comparable with each other.

• Journal of Environmental Science International
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• v.27 no.3
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• pp.219-225
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• 2018

This study was conducted to investigate the possibility of utilizing various types of nozzles and gas-liquid mixers to increase the dissolution rate of plasma gas containing ozone generated in a dielectric barrier plasma reactor. After selecting the air atomizing nozzle with the highest gas dissolution rate among the 13 types of test equipment, we investigated the influence of the operating factors on the air atomizing nozzle to determine the optimal plasma gas dissolution method. The gas dissolution rate was measured by a simple and indirect method, specifically, the measurement of KLa instead of direct measurement of ozone concentration, which requires a longer analysis time. The results showed that the KLa value of the simple mix of air and water was $0.372min^{-1}$, Which is 1.44 times higher than that ($0.258min^{-1}$) of gas emitted from a normal diffuser. Among the nozzles of the same type, the KLa value was highest for the nozzle having the smallest orifice diameter. Among the 13 types of devices tested, the nozzle with highest KLa value was the M22M nozzle, which is a gas-liquid spray nozzle. The relationship between water circulation flow rate and KLa value in the experimental range was linear. The air supply flow rate and KLa value showed a parabolic-type correlation, while the optimum air supply flow rate for the water circulation flow rate of 1.8 L / min is 1.38 times.

• Journal of the Korean Society of Industry Convergence
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• v.24 no.6_2
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• pp.909-917
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• 2021

This study was carried out experimentally on the production and properties of silicon nanopowders characteristics using a transferred type arc plasma apparatus. To investigate the properties of silicon nanopowder, the purity of argon gas(99.999%, 99.9%) and the partial pressure ratio of nitrogen gas(0~90%) were varied. The total pressure in chamber is 400Torr and the silicon chunk amount used as raw material is 300g. The power supplied to the cathode to generate arc plasma was 9~12kW/h, and the electrode was made of tungsten and graphite with a diameter of 13mm. The particle size, impurity elements and powder evaporation rate of the silicon powder were analyzed using the XRD, FE-SEM, TEM and electronic scale. According to the purity of argon gas, the silicon evaporation rate and the particle size were similar, and impurities were generated more in the case of 99.9% purity than 99.999%. When argon gas and nitrogen gas were mixed in the chamber, the silicon evaporation rate and particle size increased as the partial pressure ratio of nitrogen gas increased. In particular, when the partial pressure ratio of nitrogen gas was 80%, the silicon evaporation rate 80g/h, and the particle size was about 80~100nm.