• 한국표면공학회지
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• 제43권3호
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• pp.154-158
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• 2010

Numerical analysis is done to investigate the effects of pulse bias on the plasma processing characteristics like ion doping and ion nitriding by using fluid dynamic code with a 2D axi-symmetric model. For 10 mTorr of Ar plasma, -1 kV of pulse bias was simulated. Maximum sheath thickness was around 20 mm based on the electric potential profile. The peak electron temperature was about 20 eV, but did not affect the averaged plasma characteristics of the whole chamber. Maximum ion current density incident on the substrate was 200 $A/m^2$ at the center, but was decreased down to 1/10th at radius 100 mm, giving poor radial uniformity.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2003년도 추계 학술대회논문집
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• pp.212-218
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• 2003

In order to analyze the heat transfer phenomena in the plasma flames, a mathematical model describing heat and fluid flow in an electric arc has been developed and used to predict heat transfer from the arc to the steel bath in a DC Electric Arc Furnace. The arc model takes the separate contributions to the heat transfer from each involved mechanism into account, i.e. radiation, convection and energy transported by electrons. The finite volume method and a SIMPLE algorithm are used for solving the governing MHD equations, i.e., conservation equations of mass, momentum, and energy together with the equations describing a $\kappa-\epsilon$ model for turbulence. The model predicts heat transfer for different currents and arc lengths. Finally these calculation results can be used as a useful insight into plasma phenomena of the industrial-scale electric arc furnace. From these results, it can be concluded that higher arc current and longer arc length give high heat transfer.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2006년도 PARALLEL CFD 2006
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• pp.306-308
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• 2006

Numerical simulations were carried out of the effects of momentum and heat produced by a plasma actuator on neutral flow. Momentum and heat generated during plasma discharge were modeled as a body force and heat source using results of experiments and DSMC of particle. These force and heat model were inserted into a Navier-Stokes equation and the flow around the plasma actuator could be explored by solving fluid dynamics only. Fluid simulation showed that force produced in DSMC generated a jet flow in the vicinity of the plasma actuator and heat accounted for density change.

• 한국입자에어로졸학회지
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• 제5권3호
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• pp.123-131
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• 2009

This paper presents simulation results of particle transport in low-pressure, low-temperature plasma environment. The size dependent transport of particles in the plasma is investigated with a two-dimensional simulation tool developed in-house for plasma chamber analysis and design. The plasma model consists of the first two and three moments of the Boltzmann equation for ion and electron fluids respectively, coupled to Poisson's equation for the self-consistent electric field. The particle transport model takes into account all important factors, such as gravitational, electrostatic, ion drag, neutral drag and Brownian forces, affecting the motion of particles in the plasma environment. The particle transport model coupled with both neutral fluid and plasma models is simulated through a Lagrangian approach tracking the individual trajectory of each particle by taking a force balance on the particle. The size dependant trap locations of particles ranging from a few nm to a few ${\mu}m$ are identified in both electropositive and electronegative plasmas. The simulation results show that particles are trapped at locations where the forces acting on them balance. While fine particles tend to be trapped in the bulk, large particles accumulate near bottom sheath boundaries and around material interfaces, such as wafer and electrode edges where a sudden change in electric field occurs. Overall, small particles form a "dome" shape around the center of the plasma reactor and are also trapped in a "ring" near the radial sheath boundaries, while larger particles accumulate only in the "ring". These simulation results are qualitatively in good agreement with experimental observation.

• 조명전기설비학회논문지
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• 제18권1호
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• pp.52-59
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• 2004

미립자 플라즈마란 입경이 수[$\mu\textrm{m}$]이하의 거의 일정한 크기를 가진 미립자가 다수로 생성 및 유지되면서, 정 또는 부외 전하를 가지고 기체 플라즈마 중에 부유하는 상태를 말한다. 플라즈마 프로세스에서는 이러한 미립자가 집적회로에 중착되어 막의 열화, 회로 배선의 불량 및 단선 등의 약영향을 끼치는 것으로 인식되고 있으며, 이러한 부분에 대한 억제나 제어에 관한 연구가 진행되고 있다. 본 연구에서는 유체 모델을 이용한 시뮬레이션으로부터 방전 챔버내의 Ar 플라즈마의 현상을 이해하고, Ar 플리즈마 중에 미립자를 투입하여 그 움직임을 분석하여, 플라즈마 중의 미립자 운동의 핵석 결과로서는, 하부 전극 면위에 비교적 규칙성을 갖는 미립자가 배열하는 것을 확인할 수 있었다. 또한, 약 전리 플라즈마에서는 전지의 이동로가 크기 때문에 미립자의 대전량은 평균 전자 에너지에 크게 의존하는 것을 알 수 있었다.

• 한국표면공학회지
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• 제44권1호
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• pp.32-37
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• 2011

Numerical analysis is done to investigate the effect of surface treatment of a toilet on the cleanness. The surface treatment using plasma for the super-hydrophobic surface expects the self-cleaning effect of the toilet seat cover for preventing the droplets with a great quantity of bacteria during the toilet flushing after evacuation. In this study, the fluid analysis in the toilet during the flushing was performed by an ultrahigh-speed CCD camera with 1,000 frame/sec and the numerical modeling. And the spattering phenomenon from the toilet surface during urine was analyzed quantitatively by CFD-ACE+ with a free surface model and a mixed model of two fluids. If the surface tension of the toilet surface is weak, many urine droplets after collision bounded in spite of considering the gravity. The turbulence generated by the change of angle and velocity of urine and the variation of the collision phenomenon from toilet surface were modeled numerically.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권1호
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• pp.24-29
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• 2004

$CF_4$ gas is one of the most useful gases in modern technologies for semiconductor fabrication. However, there are many problems which should be solved in order to fabricate semiconductor device, for example, etching speed drop due to ion charge-up and etching selectivity drop due to the high electron energy. One of useful method in order to suppress their damages above is pulsed-time modulated plasma (PM). However, transient responses of charged particles occur when the source power is turned-on and -off in PM method. To control plasma properties in detail, such a transient phenomenon must be investigated. In this paper, we investigate $CF_4$ RF plasma properties under a one-dimensional fluid model. And also for dynamic and stable control of $CF_4$ plasmas, we investigated the transient behavior of the plasmas after step up or down of the amplitude of the power source voltage $V_s$(t). Fundamental properties of transient $CF_4$ plasmas was discussed. Furthermore, we intend to discuss new method for pulsed-time plasma modulation.

• 한국전자파학회논문지
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• 제24권3호
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• pp.331-336
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• 2013

본 논문은 유체 역학적 관점에서 플라즈마 모델링을 통하여 전자 밀도를 계산하는 방식을 제안하였다. 그럼으로써 기존 논문들에서 사용된 단순화된 플라즈마 모델링의 한계를 극복하였다. 계산된 전자 밀도를 finite-difference time-domain(FDTD) 기법에 기반한 맥스웰-볼츠만 시스템에 연계하여 다양한 각도에서 입사하는 전자기파에 대한 산란파 계산을 수행하였다. 전반부에서는 유전체 장벽 방전(dielectric barrier discharge: DBD) 구조에서 발생되는 플라즈마를 모델링하였다. 다수의 모델링 방식 중, 시간 독립적인 변수를 도입하여 정지계의 전위 분포와 전자 밀도 분포를 계산하는 Suzen-Huang 모델을 이용하였다. 후반부에서는 변조된 가우시안 펄스를 플라즈마에 입사시켜 발생하는 산란파를 FDTD 기법을 이용하여 계산하였으며, 이를 바탕으로 레이더 단면적(radar cross section: RCS)을 관찰하였다. 모의실험 결과, DBD 플라즈마에 의해 1~2 dB 감소하는 것을 관찰할 수 있었다. 이는 기존의 논문에서 알려진 RCS 측정 결과와 유사한 양상을 보이며, 본 논문에서 제안한 모델링의 유효성을 확인하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권8호
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• pp.433-442
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• 2004

Various models and various boundary conditions have been suggested for fluid transport simulations of high density plasma discharges such as the inductively coupled plasma discharge. In this work, we compare the various models using one-dimensional simulations based on the FDM(finite difference method), the upwind scheme, the power-law scheme, and the dielectric relaxation scheme［l］ Comparing the exactness, the numerical stability and the efficiency of the various models. the most adoptable model is suggested.

• Journal of Advanced Marine Engineering and Technology
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• 제28권8호
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• pp.1251-1257
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• 2004

In order to analyze the heat transfer phenomena in the plasma flames, a mathematical model describing heat and fluid flow in an electric arc has been developed and used to predict heat transfer from the arc to the steel bath in a DC Electric Arc Furnace. The arc model takes the separate contributions to the heat transfer from each involved mechanism onto account, that is radiation, convection and energy transported by electrons. The finite volume method and a SIMPLE algorithm are used for solving the governing MHD equations, that are conservation equations of mass, momentum and energy together with the equations describing a standard k-${\varepsilon}$ model for turbulence. The model predicts heat transfer for different currents and arc lengths. Finally these calculation results can be used as a useful insight into plasma phenomena of the industrial-scale electric arc furnace. From these results, it can be concluded that higher arc current and longer arc length give high heat transfer