• 제목/요약/키워드: Pillar curve

검색결과 12건 처리시간 0.017초

Pt 금속마스크를 이용하여 제작한 나노패턴 Si(111) 기판위에 성장한 GaN 박막 특성 (Characterization of GaN epitaxial layer grown on nano-patterned Si(111) substrate using Pt metal-mask)

  • 김종옥;임기영
    • 마이크로전자및패키징학회지
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    • 제21권3호
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    • pp.67-71
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    • 2014
  • 본 연구에서는 Si(111) 기판을 이용하여 고품질의 GaN 박막을 성장하기 위하여 다양한 패턴을 갖는 Si 기판을 제작하였다. Si(111) 기판위에 이온 스퍼터(ion-sputter)를 이용하여 Pt 박막을 증착한 후 열처리(thermal annealing)하여 Pt 금속 마스크를 형성하고 유도 결합 플라즈마 이온 식각(inductively coupled plasma-reactive ion etching, ICP-RIE) 공정을 통하여 기둥(pillar)형태의 나노 패턴된 Si(111) 기판을 제작하였고 리소그래피 공정을 통하여 마이크로 패턴된 Si(111) 기판을 제작하였다. 일반적인 Si(111) 기판, 마이크로 패턴된 Si(111) 기판 및 나노 패턴된 Si(111) 기판위에 유기화학기상증착(metal organic chemical vapor deposition, MOCVD) 방법으로 GaN 박막을 성장하여 표면 특성과 결정성 및 광학적 특성을 분석하였다. 나노 패턴된 Si(111) 기판위에 성장한 GaN 박막은 일반적인Si(111) 기판과 마이크로 패턴된 Si(111) 기판위에 성장한 GaN 박막보다 표면의 균열과 거칠기가 개선되었다. 나노 패턴된 Si(111) 기판위에 성장한 GaN (002)면과 (102)면에 x-선 회절(x-ray diffraction, XRD) 피크의 반폭치(full width at half maximum, FWHM)는 576 arcsec, 828 arcsec으로 다른 두 기판위에 성장한 GaN 박막 보다 가장 낮은 값을 보여 결정성이 향상되었음을 확인하였다. Photoluminescence(PL)의 반폭치는 나노 패턴된 Si(111) 기판위에 성장한 GaN 박막이 46.5 meV으로 다른 기판위에 성장한 GaN 박막과 비교하여 광학적 특성이 향상되었음을 확인하였다.

에폭시 수지 모르터의 특성에 관한 실험적 연구 (Experimental Studies on the Properties of Epoxy Resin Mortars)

  • 연규석;강신업
    • 한국농공학회지
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    • 제26권1호
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    • pp.52-72
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    • 1984
  • This study was performed to obtain the basic data which can be applied to the use of epoxy resin mortars. The data was based on the properties of epoxy resin mortars depending upon various mixing ratios to compare those of cement mortar. The resin which was used at this experiment was Epi-Bis type epoxy resin which is extensively being used as concrete structures. In the case of epoxy resin mortar, mixing ratios of resin to fine aggregate were 1: 2, 1: 4, 1: 6, 1: 8, 1:10, 1 :12 and 1:14, but the ratio of cement to fine aggregate in cement mortar was 1 : 2.5. The results obtained are summarized as follows; 1.When the mixing ratio was 1: 6, the highest density was 2.01 g/cm$^3$, being lower than 2.13 g/cm$^3$ of that of cement mortar. 2.According to the water absorption and water permeability test, the watertightness was shown very high at the mixing ratios of 1: 2, 1: 4 and 1: 6. But then the mixing ratio was less than 1 : 6, the watertightness considerably decreased. By this result, it was regarded that optimum mixing ratio of epoxy resin mortar for watertight structures should be richer mixing ratio than 1: 6. 3.The hardening shrinkage was large as the mixing ratio became leaner, but the values were remarkably small as compared with cement mortar. And the influence of dryness and moisture was exerted little at richer mixing ratio than 1: 6, but its effect was obvious at the lean mixing ratio, 1: 8, 1:10,1:12 and 1:14. It was confirmed that the optimum mixing ratio for concrete structures which would be influenced by the repeated dryness and moisture should be rich mixing ratio higher than 1: 6. 4.The compressive, bending and splitting tensile strenghs were observed very high, even the value at the mixing ratio of 1:14 was higher than that of cement mortar. It showed that epoxy resin mortar especially was to have high strength in bending and splitting tensile strength. Also, the initial strength within 24 hours gave rise to high value. Thus it was clear that epoxy resin was rapid hardening material. The multiple regression equations of strength were computed depending on a function of mixing ratios and curing times. 5.The elastic moduli derived from the compressive stress-strain curve were slightly smaller than the value of cement mortar, and the toughness of epoxy resin mortar was larger than that of cement mortar. 6.The impact resistance was strong compared with cement mortar at all mixing ratios. Especially, bending impact strength by the square pillar specimens was higher than the impact resistance of flat specimens or cylinderic specimens. 7.The Brinell hardness was relatively larger than that of cement mortar, but it gradually decreased with the decline of mixing ratio, and Brinell hardness at mixing ratio of 1 :14 was much the same as cement mortar. 8.The abrasion rate of epoxy resin mortar at all mixing ratio, when Losangeles abation testing machine revolved 500 times, was very low. Even mixing ratio of 1 :14 was no more than 31.41%, which was less than critical abrasion rate 40% of coarse aggregate for cement concrete. Consequently, the abrasion rate of epoxy resin mortar was superior to cement mortar, and the relation between abrasion rate and Brinell hardness was highly significant as exponential curve. 9.The highest bond strength of epoxy resin mortar was 12.9 kg/cm$^2$ at the mixing ratio of 1:2. The failure of bonded flat steel specimens occurred on the part of epoxy resin mortar at the mixing ratio of 1: 2 and 1: 4, and that of bonded cement concrete specimens was fond on the part of combained concrete at the mixing ratio of 1 : 2 ,1: 4 and 1: 6. It was confirmed that the optimum mixing ratio for bonding of steel plate, and of cement concrete should be rich mixing ratio above 1 : 4 and 1 : 6 respectively. 10.The variations of color tone by heating began to take place at about 60˚C, and the ultimate change occurred at 120˚C. The compressive, bending and splitting tensile strengths increased with rising temperature up to 80˚ C, but these rapidly decreased when temperature was above 800 C. Accordingly, it was evident that the resistance temperature of epoxy resin mortar was about 80˚C which was generally considered lower than that of the other concrete materials. But it is likely that there is no problem in epoxy resin mortar when used for unnecessary materials of high temperature resistance. The multiple regression equations of strength were computed depending on a function of mixing ratios and heating temperatures. 11.The susceptibility to chemical attack of cement mortar was easily affected by inorganic and organic acid. and that of epoxy resin mortar with mixing ratio of 1: 4 was of great resistance. On the other hand, when mixing ratio was lower than 1 : 8 epoxy resin mortar had very poor resistance, especially being poor resistant to organicacid. Therefore, for the structures requiring chemical resistance optimum mixing of epoxy resin mortar should be rich mixing ratio higher than 1: 4.

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