• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1997년도 추계학술대회 논문집
• /
• pp.1067-1071
• /
• 1997

A new type of gripper for micrometer-size objects is developed using piezoelectric multi-layer benders. It is composed of three chopsticks, two of which are designed to grip micro-objects. The third one is reserved for helping the two when objects are released from the chopsticks. It is well known that a micro object is much easier to grasp than to release it after holding it. The electrostatic force between the chopsticks and an object is believed to be the main cause of adhesion in a dry environment. The surface tension becomes very important when liquids are present or in a liquid. The third auxiliary chopsticks is introduced to solve there surface effects. All the three chopsticks are made of tungsten wires with sharpened ends by etching. When grasping microparts, the two chopsticks are utilized, and, when releasing them anywhere the parts are located, the third one reduces the electrostatic force between the objects and the chopstick may be to help the other two chopsticks to hold an objects in a desired orientation. We constructed the three chopstick gripoer for micro objects and test their function by holding and releasing an object of a diameter of 100 micrometers. We make use of open loop voltage control. The bender displacement resolution is sub-micrometer. The gripping forces, about tens of mN are obtained. The experiment shows that the third auxiliary chopstick functions effectively.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2000년도 춘계학술대회논문집
• /
• pp.1528-1532
• /
• 2000

The conventional optics and near field optics are compared numerically in the view points of the spot size and propagation characteristics. The decaying characteristics of near field light require the optics to access the object within several tens of nanometers. Therefore the gap control is one of the main issues in the near field optics area. In this paper the gap control is done by using the shear force of the NF(Near Field) probe and the characteristics are examined. The probe is modeled as a 2'nd order mass-spring-damper system driven by a harmonic force. The primary cause of the decrease in vibration amplitude is due to the damping force - shear force - between the surface and the probe. Using the model, damping constant and resonance frequency of the probe is calculated as a function of probe-sample distance. Detecting the amplitude and phase shift of the NF probe attached to the high Q-factor piezoelectric tuning fork, we can control the position of the NF probe about 0 to 50nm above the sample. The feedback signal to regulate the probe-sample distance can be used independently for surface topography imaging. 3-D view of the shear force image of a testing sample with the period of $1{\mu}m$ will be shown.

• 센서학회지
• /
• 제9권4호
• /
• pp.327-333
• /
• 2000

중심주파수가 340MHz이고 $1.435{\mu}m$의 IDT 전극 폭과 간격을 가진 양방향 전송형 SAW필터를 LN $128^{\circ}$ Y-X 웨이퍼의 압전기판으로 제작하였다. 전력 내구성을 개선시키기 위한 방안으로 Al에 비해 밀도가 크고, 열팽창계수가 작으며 접착력이 좋은 Ti를 압전체기판과 전극물질인 Al 사이에 증착시켰다. Ti의 두께 및 열처리 온도가 내전력 특성에 미치는 영향을 분석하였는데, Ti층이 두꺼울수록 내전력이 개선되었으며, 특히 $300^{\circ}C$에서 열처리하였을 때 가장 우수하였다.

• 전기학회논문지
• /
• 제59권2호
• /
• pp.390-396
• /
• 2010

An 80MHz surface acoustic wave (SAW)-based gyroscope utilizing a progressive wave was developed on a piezoelectric substrate. The developed sensor consists of two SAW oscillators in which one is used for sensing element and has metallic dots in the cavity between input and output IDTs. The other is used for a reference element. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, oscillation frequency differences between the two oscillators were observed because of the Coriolis force acting on the metallic dots. Depending on the angular rate, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg.s within the angular rate range of 0~1000 deg/s. The performances of devices with three IDT structures for two kinds of piezoelectric substrates were characterized. Good thermal stability was also observed during the evaluation process.

• 한국정보전자통신기술학회논문지
• /
• 제1권2호
• /
• pp.27-32
• /
• 2008

A current research basically diverted towards an increase in the operational output with the minimization of the materials used, which ultimately scaled down the dimensions of ceramic electronic components. In this direction the nano-technology pave the revolutionary changes in particular the electronic industries. The applications of nano-sized particles or nano-sized materials are hence, playing a significant role for various purposes. The PZT(lead, zirconium, titanium) based ceramics which, are reported to be ferroelectric materials have their important applications in the areas of surface acoustic waves (SAW), filters, infrared detectors, actuators, ferroelectric random access memory, speakers, electronic switches etc. Moreover, these PZT materials possess the large electro mechanical coupling factor, large spontaneous polarization, low dielectric loss and low internal stress etc. Hence, keeping in view the unique properties of PZT piezoelectric ceramics we also tried to synthesize indigenously the small sized PZT ceramic powder in the laboratory by using the modified sol-gel approach. In this paper, propyl alcohol based sol-gel method was used for preparation of PZT piezoelectric ceramic. The powder obtained by this sol-gel process was calcined and sintering to reach a pyrochlore-free crystal phase. The characterization of synthesized material was carried out by the XRD analysis and the surface morphology was determined by high resolution scanning electron microscopy.

• 한국표면공학회지
• /
• 제54권6호
• /
• pp.324-330
• /
• 2021

As energy harvesting technology becomes important in relation to environmental issues, piezoelectric materials that convert mechanical energy into electrical energy are attracting attention. However, PZT, a representative material for piezoelectricity, is becoming difficult to use due to the problem that its components can cause environmental pollution. For this reason, recent research suggests a triboelectric nanogenerator (TENG) that generates energy through the combined effect of triboelectricity and electric induction for alternative piezoelectric devices. In TENG, electrical power is determined by the dielectric constant, thickness, and grain generation of the charged material. Therefore, in this study, a Rutile phase TiO₂ thin film with high dielectric constant was formed using the spin-coating process and the effect of annealing was investigated. For electrical analysis, a TENG device was fabricated using PTFE as a material with an opposite charge, and electrical output according to film thickness and grain formation was comparatively analyzed.

• International Journal of Concrete Structures and Materials
• /
• 제9권3호
• /
• pp.307-321
• /
• 2015

The primary objective of this study is to investigate the feasibility of an innovative surface-mount sensor, made of a piezoelectric disc (PZT sensor), as a consistent source for surface wave velocity and transmission measurements in concrete structures. To this end, one concrete slab with lateral dimensions of 1500 by 1500 mm and a thickness of 200 mm was prepared in the laboratory. The concrete slab had a notch-type, surface-breaking crack at its center, with depths increasing from 0 to 100 mm at stepwise intervals of 10 mm. A PZT sensor was attached to the concrete surface and used to generate incident surface waves for surface wave measurements. Two accelerometers were used to measure the surface waves. Signals generated by the PZT sensors show a broad bandwidth with a center frequency around 40 kHz, and very good signal consistency in the frequency range from 0 to 100 kHz. Furthermore, repeatability of the surface wave velocity and transmission measurements is significantly improved compared to that obtained using manual impact sources. In addition, the PZT sensors are demonstrated to be effective for monitoring an actual surface-breaking crack in a concrete beam specimen subjected to various external loadings (compressive and flexural loading with stepwise increases). The findings in this study demonstrate that the surface mount sensor has great potential as a consistent source for surface wave velocity and transmission measurements for automated health monitoring of concrete structures.

• Journal of Periodontal and Implant Science
• /
• 제46권2호
• /
• pp.107-115
• /
• 2016

Purpose: The aim of this study was to evaluate and compare tooth surface characteristics in extracted human molars after cervical enamel projections (CEPs) were removed with the use of three rotating instruments. Methods: We classified 60 extracted molars due to periodontal lesion with CEPs into grade I, II, or III, according to the Masters and Hoskins' criteria. Each group contained 20 specimens. Three rotating instruments were used to remove the CEPs: a piezoelectric ultrasonic scaler, a periodontal bur, and a diamond bur. Tooth surface characteristics before and after removal of the projections were then evaluated with scanning electron microscopy (SEM). We analyzed the characteristics of the tooth surfaces with respect to roughness and whether the enamel projections had been completely removed. Results: In SEM images, surfaces treated with the diamond bur were smoothest, but this instrument caused considerable harm to tooth structures near the CEPs. The piezoelectric ultrasonic scaler group produced the roughest surface but caused less harm to the tooth structure near the furcation. In general, the surfaces treated with the periodontal bur were smoother than those treated with the ultrasonic scaler, and the periodontal bur did not invade adjacent tooth structures. Conclusions: For removal of grade II CEPs, the most effective instrument was the diamond bur. However, in removing grade III projections, the diamond bur can destroy both adjacent tooth structures and the periodontal apparatus. In such cases, careful use of the periodontal bur may be an appropriate substitute.

• 한국어병학회지
• /
• 제20권3호
• /
• pp.307-313
• /
• 2007

In this study, a QCM biosensor was made to detect Edwardsiella tarda (E. tarda) using a specific antibody. A 9 MHz AT-cut piezoelectric wafer layered with two gold electrodes of 5mm diameter had a reproducibility of 0.1 Hz in frequency response and was used as the transducer of the QCM biosensor. Self assembled layer (SAM) was conformed on a quartz crystal by treating with 3-mer-captopropionic acid (MPA) and activated with N-ethyl-N'-(3-dimethyl-aminopropyl) carbodiimide (EDC) and N-hydroxysuccinimide (NHS). The resulting NHS group was further converted to hydrazide by the reaction with hydrazine. Aldehyde group was introduced into the carbohydrate moiety of anti-E. tarda antibody by the reaction with periodic acid and was used to immobilise the antibody through the reaction with hydrazide group on the electrode surface. A baseline was established in the presence of phosphate-buffered saline (PBS) and a resonant frequency (F1) was measured. Sample was added to the sensor surface and second resonant frequency (F2) was measured after unbound substances were washed out with PBS several times. Finally, the frequency shift (ΔF) representing the mass change was calculated by subtracting F2 from F1. After adding the oxidized anti-E. tarda antibody to the electrode surface containing hydrazide group, frequency shift of 288.811.4 Hz (mean S.E) was observed, thus proving that considerable amount of antibody was immobilized. In the immunoassay test, the frequency shift of 1877.75 Hz, 580.67 Hz, 221.39 Hz, 7.671.83 Hz (mean S.E) were observed at doses of 1000, 500, 100, 50 g of bacterial cells, respectively. It was also demonstrated that the prepared sensor chip was stable enough to withstand repeated surface regeneration with 0.2 M Tris-glycine and 1 % DMSO, pH 2.3 more than ten times.

• 한국인터넷방송통신학회논문지
• /
• 제12권5호
• /
• pp.91-97
• /
• 2012

근래의 전기 전자 제품은 기능은 향상되는 반면 크기는 소형화되는 추세에 있다. 기존 입체 형태의 음향 신호 재생 장치로서의 엑츄에이터 대신 압전 소자를 이용한 스피커가 개발되기 시작하였다. 압전 소자는 압전 특성을 갖는 물질로서 물체의 외부에서 전압을 가할 때 기계적인 변형을 일으키는 특징(즉 피에조 특징)을 이용한다. 초기의 필름 스피커는 화학적 성질의 한계로 인하여 전도성 고분자 막을 형성하기 힘들다는 한계가 있었고, 도포한 두께를 균일하게 유지하기 힘들었으며, 음향 신호의 출력과 동작 주파수의 한계가 있다는 등의 종래 기술의 문제점을 해결하기 위해, 전도 물질과 피에조 물질(필름)의 결합력을 증가시킴으로써 전도체의 저항을 줄이고 주파수 영역을 확장하고자 한다. 피에조 필름의 표면 접착력을 향상시키고, 고분자 전도체 막의 흡착력을 증가시킴으로써 음향시스템의 출력 향상을 위해 코로나 표면처리방식에 의한 표면 특징을 변화시킴으로써 출력개선을 하였다.