• 한국정밀공학회지
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• 제10권4호
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• pp.54-63
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• 1993

This paper presents the dynamic modeling and control methodology to arrest structural deflections of industrial robotic manipulators featuring elastic members retrofitted with surface bonded pizoelectric actuators and sensors. The cynamic modeling is accomplished by employing a variational theorem, prior to developing a finite element formulation. This finite element formulation accounts for both original robot member elements and also bonded piezoelectric material elements. The governing equation of motion is then modified by condensing the electric potential vectors and subsequently two different negative velocity feedback controllers are established; a constant-gain feedback controller and a constant- amplitude feedback controller. By adopting a Model P50 articulating industrial robot manufactured by Gerneral Electric Company, conputer simulations are underlaken in order to demonstrate superior performance characteristics to be accrued from this proposed methodology such as smaller deflections at the end-effector.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2011년도 정기총회 및 추계학술대회 논문집
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• pp.2632-2634
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• 2011

In the Structural Health Monitoring field, the piezoelectric elements are bonded the surface of the structures for generating the guided wave. For this reason, the structures become two-layer beam. It is very important to know precisely the dynamic characteristic of structures and also predict precisely the wave propagation in structures. Because wave propagation is very useful to analysis the dynamic characteristic of structures. In this paper, the governing equations of motion are derived from Hamilton's principle by applying the Timoshenko beam theory and Mindlin-Herrmann rod theory at the first. and then the wave propagations in a composite beams with a surface-bonded piezoelectric are examined.

• 대한전자공학회논문지
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• 제10권6호
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• pp.56-61
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• 1973

압전 결정 LiNbO3에서 탄성표면파(Rayleigh 표면파)의 온도계수가 가장 작은 131° 로테이트 Y캇트의 전반로에 Ag와 Pd를 증착하여 증착막의 두께에 따른 위상속도의 변화와 위상속도의 온도계수의 변화를 수치해석방법에 의하여 계산하였다. 계산한 결과 Ag의 경우는 증착막의 두께가 증가함에 따라 온도계수가 급격히 증가하나 Pd의 경우는 증가와 감소의 불규칙성을 보이며 wh=9000에서 -36×10 /℃의 위상속도의 온도계수의 최소치를 얻었다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권12호
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• pp.597-600
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• 2002

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be made as monolithic integrated devices with compatibility to semiconductor process, leading to small size and low cost, high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible suspended FBAR using surface micromachining. Membrane is composed $Si_3N_4SiO_2Si _3N_4$ multi layer and air gap is about 50${\mu}{\textrm}{m}$. Firstly, We perform one dimensional simulation applying transmission line theorem to verify resonance characteristic of the FBAR. Process of the FBAR is used MEMS technology. Fabricated FBAR resonate at 2.4GHz, $K^2_{eff}$ and Q are 4.1% and 1100.

• 대한기계학회논문집
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• 제17권7호
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• pp.1731-1739
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• 1993

An application of Scanning Tunneling Microscopy(STM) is investigated for the measurement of 3-dimensional profiles of the macro-machined patterns of which critical dimensions lie in the range of submicrometers. Special emphasis of this investigation is given to extending the measuring ranges of STM upto the order of several micrometers while maintaining superb nanometer measuring resolution. This is accomplished by correcting hysteresis effects of piezoelectric actuators by using non-linear compensation models. Detailed aspects of design and control of a prototype measurement system are described with some actual measuring examples in which fine It patterns can successfully be traced with a resolution of 1 nanometer over a surface range of $4{\times}2$ micrometers.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 1996년도 추계학술대회 학술발표 논문집
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• pp.176-179
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• 1996

This paper describes the tip displacement of a flexible miniature arm controlled by the piezoelectric bimorph cells cemented on the surface of the arm. The arm is driven by the torques generated by the cells, and the endpoiht of the arm is controlled so that it moves in synchrony with the fluctuation of the target and maintains a constant distance to the surface of the traget. The voltage applied to the cells is controlled by a feedback signal composed of the tip displacement and the velocity. A theoretical solution is obtained by considering the cell-arm system as a stepped beam and applying time-discrete method to the governing equations of the system. The results are good agreement for a wide range of physical paramehers involved.

• 한국기계가공학회지
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• 제5권3호
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• pp.29-35
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• 2006

Various types of elliptical motions are generated by PZT mechanism which is composed of two parallel piezoelectric actuators. Elliptical vibration cutting(EVC) is obtained by attaching single crystal diamond cutting tool to the mechanism, and V-grooving for Brass and Aluminum is carried out by applying the EVC. It is experimentally observed that the cutting force in the process of the EVC reduces compared to the ordinary non-vibration cutting, which is due to the decrease of undeformed chip thickness and frictional force between the tool and chip. Ultrasonic elliptical vibration cutting(UEVC) suppresses burr formation and decreases cutting force still more, so UEVC makes it possible to enhance the shape accuracy of machined surface.

• 한국통신학회논문지
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• 제34권11A호
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• pp.904-908
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• 2009

The PZT(lead, zirconium, titanium) based ceramics which, are reported to be ferroelectric materials have their important applications in the areas of surface acoustic waves (SAW), filters, infrared detectors, actuators, ferroelectric random acess memory, speakers, electronic switches etc. Moreover, these PZT materials possess the large electromechanical coupling factor, large spontaneous polarization, low dielectric loss and low internal stress etc. Hence, keeping in view the unique properties of PZT piezoelectric ceramics we also tried to synthesize indigenously the small sized PZT ceramic powder in the laboratory by using the modified sol-gel approach. In this paper, Propyl alcohol based sol-gel method was used for preparation of PZT piezoelectric ceramic. The powder obtained by this sol-gel process was calcined and sintering to reach a pyrochlore-free crystal phase. The characterization of synthesized material was carried out by the XRD analysis and the surface morphology was determined by high resolution scanning electron microscopy.

• 한국전기전자재료학회논문지
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• 제32권3호
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• pp.207-212
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• 2019

A flat-type piezoelectric ceramic ultrasonic transmitter was successfully fabricated for application in acoustic devices with cone-free diaphragms. The transmitter, possessing a center frequency of 40.6 kHz, exhibited a higher displacement characteristic for a multilayer type compared with a single layer type. Surface roughness treatment of an Al elastic diaphragm influenced a slight increase (1.1 dB) in the sound pressure level (SPL) at $10V_{rms}$ due to the enlarged surface area. The fabricated multilayer piezoelectric ceramic ultrasonic transmitter showed increasing SPL with increasing input voltage, with a maximum SPL of approximately 123.6 dB at $10V_{rms}$. This implies a doubly increased SPL density of $3.6dB/mm^3$, superior to that of a commercial open-type transmitter with a cone.

• 센서학회지
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• 제32권2호
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• pp.88-94
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• 2023

Recently, piezoelectric tactile sensors have garnered considerable attention in the field of texture recognition owing to their high sensitivity and high-frequency detection capability. Despite their remarkable potential, improving their mechanical flexibility to attach to complex surfaces remains challenging. In this study, we present a flexible piezoelectric sensor that can be bent to an extremely small radius of up to 2.5 mm and still maintain good electrical performance. The proposed sensor was fabricated by controlling the thickness that induces internal stress under external deformation. The fabricated piezoelectric sensor exhibited a high sensitivity of 9.3 nA/kPa ranging from 0 to 10 kPa and a wide frequency range of up to 1 kHz. To demonstrate real-time texture recognition by rubbing the surface of an object with our sensor, nine sets of fabric plates were prepared to reflect their material properties and surface roughness. To extract features of the objects from the detected sensing data, we converted the analog dataset to short-term Fourier transform images. Subsequently, texture recognition was performed using a convolutional neural network with a classification accuracy of 97%.