• Title/Summary/Keyword: Piezoelectric surface

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Fabrication of a SAW Filter Using a ZnO Thin Film deposited by RF Magnetron Sputtering (RF 마그네트론 스퍼터링법으로 증착된 ZnO 박막 SAW 필터의 제작)

  • Jung, Eun-Ja;Jang, Cheol-Yeong;Jung, Young-Chul;Choi, Hyun-Chul;Lee, Yong-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05c
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    • pp.141-144
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    • 2003
  • This study proposes ZnO thin film as a piezoelectric material for SAW (surface acoustic wave) filter. The ZnO thin film with thickness $2.6{\mu}m$ was deposited (0001)-oriented sapphire by RF magnetron sputtering technique. IDTs (inter-digital transducers) electrodes were patterned upon SAW filter mask with solid finger structure unapodized using lift-off method on ZnO piezoelectric thin film. SAW propagation velocity was measured with the center frequency by HP 8753C network analyzer. A fabricated ZnO SAW filter exhibited a high propagation velocity of 5433 $^m/s$ and relatively insertion loss of -53.391dB at $\lambda=80{\mu}m$. The side-lobe attenuation of the center frequency was about 17dB. When the wavelength was $80{\mu}m$ $(\lambda/4=20{\mu}m)$, the center frequency was 67.907 MHz. $k^2$ (electromechanical coupling coefficient) was 15.84 %.

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Structural design of a piezoelectric flextentional deep-water sonar transducer using a coupled FE-BEM (결합형 유한요소-경계요소 기법을 사용한 심해저용 압전형 유연성 쏘나 트랜스듀서의 구조 설계)

  • Jarng, Soon-Suck;Chung, Woon-Kwan
    • Journal of Sensor Science and Technology
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    • v.8 no.5
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    • pp.377-387
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    • 1999
  • A piezoelectric flextentional deep-water sonar transducer has been designed using a coupled FE-HEM. The dynamics of the sonar transducer is modelled in three dimensions and is analyzed with external electrical excitation conditions. Different results are available such as steady-state frequency response for TX displacement modes, directivity patterns, resonance frequencies, TVRs. While the conventional barrel-stave typed sonar transducer of the piezoelectric material is designed, the external surface of the transducer is modified in order to allow the same hydrostatic pressure to be applied onto the inner and the outer surfaces of the transducer. With this modification for deep-water application, a new resonance mode is generated at lower frequency. This lower resonance mode can be adjusted according to the degree of the outer surface modification.

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Effect of MnO2 on piezoelectric properties of PSN-PZT ceramics for piezoelectric actuator applications (압전 액츄에이터용 PSN-PZT 세라믹스의 압전 특성에 미치는 MnO2 첨가 효과)

  • Choi, J.W.;Song, K.H.;Kim, H.J.;Yoon, S.J.;Yoo, K.S.
    • Journal of Sensor Science and Technology
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    • v.16 no.2
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    • pp.120-125
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    • 2007
  • The effect of $MnO_{2}$ as a sintering additive on the microstructures and the piezoelectric properties, especially mechanical quality factor, of 0.05 Pb$(Sb_{0.5}Nb_{0.5})O_{3}$-0.95 Pb$(Zr_{0.52}Ti_{0.48})O_{3}$ (PSN-PZT) piezoelectric ceramics was investigated. The samples were sintered at $1250^{\circ}C$ for 2 h. The crystal structure and surface morphology of the sample were examined using XRD and FE-SEM, respectively. A study on the influence of $MnO_{2}$ additives on the dielectric and piezoelectric properties showed that the $MnO_{2}$-added PSN-PZT system exhibited a high mechanical quality factor and well-situated piezoelectric properties. The optimized results of $d_{33}$ (319 pC/N), $k_{p}$ (55 %), and $Q_{m}$ (751.24) were obtained at 0.2 wt% $MnO_{2}$ added PSN-PZT piezoelectrics.

A Study on Impact Monitoring Using a Piezoelectric Paint Sensor (압전 페인트 센서를 활용한 충격 모니터링 활용 방안)

  • Choi, Kyungwho;Kang, Donghoon;Park, Seung-Bok;Kang, Lae-Hyong
    • Journal of the Korean Society for Nondestructive Testing
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    • v.35 no.5
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    • pp.349-357
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    • 2015
  • The piezoelectric paint sensor is a paint type sensor comprising of an epoxy and piezoelectric powder, which is the main component of a piezoelectric material. This sensor can be easily attached to any type of structure as compared to other sensors because it is viable to directly apply it on structures, as in the case with a typical paint. In this study, the capability of piezoelectric paint sensor for impact detection was evaluated. In Particular, the applications of the piezoelectric paint sensor for railroad vehicles were considered. There have been various cases reported about the damages caused by flying gravel to the under-cover of the railroad vehicle during operation. In order to prevent this, real-time monitoring of the large under-cover surface of the railroad vehicle is unavoidable. Under the assumption of vehicle application, sensor sensitivities were measured after multiple and prolonged exposure to thermal cycle environment $-20{\sim}60^{\circ}C$). Sensitivity evaluation of paint sensor under environmental conditions was conducted in an aluminum specimen. In results, despite the small variations in sensitivity, we could confirm the applicability of this paint sensor for impact detection even after a severe environmental exposure test.

Bending and free vibration analysis of laminated piezoelectric composite plates

  • Zhang, Pengchong;Qi, Chengzhi;Fang, Hongyuan;Sun, Xu
    • Structural Engineering and Mechanics
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    • v.75 no.6
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    • pp.747-769
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    • 2020
  • This paper provides a semi-analytical approach to investigate the variations of 3D displacement components, electric potential, stresses, electric displacements and transverse vibration frequencies in laminated piezoelectric composite plates based on the scaled boundary finite element method (SBFEM) and the precise integration algorithm (PIA). The proposed approach can analyze the static and dynamic responses of multilayered piezoelectric plates with any number of laminae, various geometrical shapes, boundary conditions, thickness-to-length ratios and stacking sequences. Only a longitudinal surface of the plate is discretized into 2D elements, which helps to improve the computational efficiency. Comparing with plate theories and other numerical methods, only three displacement components and the electric potential are set as the basic unknown variables and can be represented analytically through the transverse direction. The whole derivation is built upon the three dimensional key equations of elasticity for the piezoelectric materials and no assumptions on the plate kinematics have been taken. By virtue of the equilibrium equations, the constitutive relations and the introduced set of scaled boundary coordinates, three-dimensional governing partial differential equations are converted into the second order ordinary differential matrix equation. Furthermore, aided by the introduced internal nodal force, a first order ordinary differential equation is obtained with its general solution in the form of a matrix exponent. To further improve the accuracy of the matrix exponent in the SBFEM, the PIA is employed to make sure any desired accuracy of the mechanical and electric variables. By virtue of the kinetic energy technique, the global mass matrix of the composite plates constituted by piezoelectric laminae is constructed for the first time based on the SBFEM. Finally, comparisons with the exact solutions and available results are made to confirm the accuracy and effectiveness of the developed methodology. What's more, the effect of boundary conditions, thickness-to-length ratios and stacking sequences of laminae on the distributions of natural frequencies, mechanical and electric fields in laminated piezoelectric composite plates is evaluated.

Effect of Hydrothermal Reaction Conditions on Piezoelectric Output Performance of One Dimensional BaTiO3 Nanotube Arrays (1차원 BaTiO3 나노튜브 어레이의 압전발전성능에 수열합성 반응조건이 미치는 영향)

  • Lee, Jae Hoon;Hyeon, Dong Yeol;Heo, Dong Hun;Park, Kwi-Il
    • Journal of Powder Materials
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    • v.28 no.2
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    • pp.127-133
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    • 2021
  • One-dimensional (1D) piezoelectric nanostructures are attractive candidates for energy generation because of their excellent piezoelectric properties attributed to their high aspect ratios and large surface areas. Vertically grown BaTiO3 nanotube (NT) arrays on conducting substrates are intensively studied because they can be easily synthesized with excellent uniformity and anisotropic orientation. In this study, we demonstrate the synthesis of 1D BaTiO3 NT arrays on a conductive Ti substrate by electrochemical anodization and sequential hydrothermal reactions. Subsequently, we explore the effect of hydrothermal reaction conditions on the piezoelectric energy conversion efficiency of the BaTiO3 NT arrays. Vertically aligned TiO2 NT arrays, which act as the initial template, are converted into BaTiO3 NT arrays using hydrothermal reaction with various concentrations of the Ba source and reaction times. To validate the electrical output performance of the BaTiO3 NT arrays, we measure the electricity generated from each NT array packaged with a conductive metal foil and epoxy under mechanical pushings. The generated output voltage signals from the BaTiO3 NT arrays increase with increasing concentration of the Ba source and reaction time. These results provide a new strategy for fabricating advanced 1D piezoelectric nanostructures by demonstrating the correlation between hydrothermal reaction conditions and piezoelectric output performance.

Transmission Noise Seduction Performance of Smart Panels using Piezoelectric Shunt Damping (압전감쇠를 이용한 압전지능패널의 전달 소음저감 성능)

  • 이중근
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.3 no.1
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    • pp.49-57
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    • 2002
  • The possibility of a transmission noise reduction of piezoelectric smart panels using piezoelectric shunt damping is experimentally studied. Piezoelectric smart panel is basically a plate structure on which piezoelectric patch with shunt circuits is mounted and sound absorbing materials are bonded on the surface of the structure. Sound absorbing materials can absorb the sound transmitted at mid frequency region effectively while the use of piezoelectric shunt damping can reduce the transmission at resonance frequencies of the panel structure. To be able to reduce the sound transmission at low panel resonances, piezoelectric damping using the measured electrical impedance model is adopted. Resonant shunt circuit for piezoelectric shunt damping is composed of register and inductor in series, and they are determined by maximizing the dissipated energy throughout the circuit. The transmitted noise reduction performance of smart panels is investigated using an acoustic tunnel. The tunnel is a tube with square crosses section and a loud-speaker is mounted at one side of the tube as a sound source. Panels are mounted in the middle of the tunnel and the transmitted sound pressure across panels is measured. Noise reduction performance of a smart panels possessing absorbing material and/or air gap shows a good result at mid frequency region but little effect in the resonance frequency. By enabling the piezoelectric shunt damping, noise reduction of 10dB, 8dB is achieved at the resonance frequencise as well. Piezoelectric smart panels incorporating passive method and piezoelectric shunt damping are a promising technology for noise reduction in a broadband frequency.

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Development of Surface Acoustic Wave Biosensor Using Epitaxial Lift-Off(ELO) Technology (ELO 기술을 이용한 표면 탄성파 바이오 센서의 개발)

  • 김기범;정우석;권대규;김남균;홍철운
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.447-449
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    • 2004
  • The purpose of this study is measured surface acoustic wave(SAW) characteristics to confirm utilization possibility as SAW sensor using new Pb(Mg$_{1}$3/Nb$_{2}$3/) $O_3$-PbTiO$_3$ (PMN-PT) piezoelectric substrate. We have tried to see if the material can be practically available as a new surface acoustic wave (SAW) biosensor to detect protein. The experimental results clarified that the frequency filtering of the central frequency of the PMN-PT substrate is a superior result to that of the LiTaO$_3$ (LT) substrate, but the result was not completely satisfactory. We know there is a problem in the design of inter-digital transducer (IDT) pattern. The waves transferred through the input terminal forms SAW which is sure to be transferred to the direction of the output terminal and the backward direction of the input terminal. This reflected wave is reiterated with SAW, which is transferred to the output direction, and so the frequency filtering gives a not good result. The electromechanical coupling coefficient of the PMN-PT substrate is excellent, and we can use it as a SAW sensor, in the near future, provided that there will be a new IDT design to increase the frequency filtering.

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Tactile Display to Render Surface Roughness for Virtual Manufacturing Environment (가상제조환경에서 제품의 표면 거칠기 전달을 위한 촉각 디스플레이)

  • Lee, Dong-Jun;Park, Jae-Hyeong;Lee, Wonkyun;Min, Byung-Kwon
    • Journal of the Korean Society for Precision Engineering
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    • v.33 no.1
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    • pp.17-22
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    • 2016
  • In smart factories, the entire manufacturing process from design to the final product is simulated in a virtual manufacturing environment and optimized before starting production. Suppliers and customers make decisions based on the simulation results. Therefore, effective rendering of the information of the virtual products to suppliers and customers is essential for this manufacturing paradigm. In this study, a method of rendering the surface roughness of the virtual products using a tactile display is presented. A tactile display device comprising a $3{\times}3$ array of individually controlled piezoelectric stack actuators is constructed. The surface topology of the virtual products is rendered directly by controlling the piezoelectric stack actuators. A series of experiments is performed to evaluate the performance of the tactile display device. An electrical discharge machined surface is rendered using the proposed method.

Sensitivity Improvement and Operating Characteristics Analysis of the Pressure Sensitive Field Effect Transistor(PSFET) Using Highly-Oriented ZnO Piezoelectric Thin Film

  • Lee, Jeong-Chul;Cho, Byung-Woog;Kim, Chang-Soo;Nam, Ki-Hong;Kwon, Dae-Hyuk;Sohn, Byung-Ki
    • Journal of Sensor Science and Technology
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    • v.6 no.3
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    • pp.180-187
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    • 1997
  • We demonstrate the improvement of sensitivity and analysis of operating characteristics of the piezoelectric pressure sensor using ZnO piezoelectric thin film and FET(field effect transistor) for sensing applied pressure and transforming the pressure into electrical signals, respectively. The sensitivity of the PSFET(pressure sensitive field effect transistor) was improved by using highly-oriented ZnO film perpendicular to the substrate surface and the operating characteristics was investigated by monitoring output voltage with time in various static pressure levels.

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