• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.10
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• pp.487-491
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• 2003

The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. The deflection of glass diaphragm measured by atomic force microscope (AFM) is about 0.4$\mu\textrm{m}$ when applying a 150V square wave voltage at 300Hz across a 300${\mu}\ell$ thick piezoelectric disc. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backpressure of the micropump with diffusers are about 32.9${\mu}\ell$/min and 173Pa respectively for the above mentioned deflection conditions.

• Proceedings of the KIEE Conference
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• 2008.05a
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• pp.179-180
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• 2008

In this paper, the variable tendency piezoelectric constant and resonance characteristics piezoelectric ceramics due to the electric field is studied. The practical application of piezoelectric ceramics is not only applied in field of small signal. For example, in case of an ultrasonic motor, $120{\sim}130Vrms$ of driving voltage is needed and that of an piezoelectric pump, $200{\sim}220Vrms$ of voltage is required. Therefore, to examine the characteristics of piezoelectric ceramics in large signal contributes to reducing the susceptibility to the multifarious application and securing the ease of the production of control circuit. These contributions may be connected to the expansion of industrial application. We fabricated disk-type piezoelectric ceramic samples by using conventional method and measured the resonance characteristics of these samples under from low to high voltage driving conditions. According to increasing the value of the input voltage, we measured the resonance frequency of the piezoelectric ceramic, and inquired into the cause of these phenomena.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.4
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• pp.39-47
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• 2005

In this paper, a novel high power micropump using active check valves in place of conventional passive check valves employed at the inlet and outlet ports is presented. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. A prototype micropump having an effective size of $17mm{\times}8mm{\times}11mm$ is fabricated. Frequency-dependent flow rate characteristics, bi-directional flow characteristics and load characteristics are experimentally investigated using a timing control method for valve closing motion. From the obtained experimental results, it is ascertained that optimal values of the phase shift compared to the voltage to drive pump chamber are $15^{\circ}$ for inlet check valve and $195^{\circ}$ for outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with an effective size of $10mm{\times}10mm{\times}10mm$ is fabricated and the basic characteristics are experimentally investigated.

• The KSFM Journal of Fluid Machinery
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• v.11 no.3
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• pp.14-21
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• 2008

A numerical simulation on the flow field of a valveless bidirectional piezoelectric micropump has been performed. In this type of micropump, the oscillation of the piezoelectric diaphragm generates the blowing and suction flow through the oblique channel from the pumping chamber. The angle between the oblique and main channel causes the variation of flow distribution through upstream and downstream channels in suction and blowing modes. In the suction flow mode, the working fluid flows from both the upstream and downstream of the main channel to the pumping chamber through the oblique channel. However, in the blowing flow mode, the fluid pushed out of the pumping chamber flows more toward the downstream of the main channel due to the inertia of the fluid. In the present study, the effects of geometries such as the angle of oblique channel and the shape of main channel on the flow rate of the up/downstream were investigated. The flow rate obtained from the pump and the energy required to the pump were also analyzed for various displacements and frequencies of the oscillation of the diaphragm.

• Journal of Sensor Science and Technology
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• v.28 no.1
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• pp.52-57
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• 2019

Studies to augment emotion and immersion in multimedia content through olfactory stimulation are being increasingly conducted in the past two decades, and a variety of scent devices have been developed. Most of the scent devices are very large and heavy; consequently, they are installed on a table rather than being attached to the Head-mounted Display (HMD). Even if such devices are mounted on the HMD, it is not possible to control the scent density because of the size limitation, and it is not easy to be immersed in the experience because of the noise caused by the scent device. In order for an actual virtual reality or an augmented reality system to work efficiently with the scent device, three conditions - noiseless, a compact design, and concentration control- must be satisfied. In this study, we design a scent device that satisfies these three conditions. By using a miniature piezoelectric pump, a small size scent device is designed so that it can be easily attached to the lower end of the HMD, and hardly any noise is generated. Moreover, it is possible to control the concentration of the scent by controlling the piezoelectric pump using amplitude and frequency.

• Journal of the Semiconductor & Display Technology
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• v.17 no.4
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• pp.62-65
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• 2018

We will provides a micro-pump infusion injector with the cloud networking for remote control. The existing infusion injector with controlled manually have an uncomfortable to use it inconveniently. The proposed remote control infusion, infusion system enables the identification and control of injected amount through the IOT function on th WEB. The micro-pump used is a piezo electric pump manufactured by using MEMS technology, and the amount of charge is varied depending on the frequency magnitude through the micro-controller. The micro-pump can adjust the speed of the fluid depending on the frequency and can be from 0.1ml / min to 7ml / min when the frequency is from 3 to 110Hz.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.229-232
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• 2005

This paper presents the design and fabrication of backflow prevented Micropump using the metal membrane. The Micropump is consisted of the lower plate, metal membrane, upper plate and the piezoelectric-element. The lower plate includes the micro channel and the inlet, outlet of the Micropump. The upper plate includes the micro channel and connects the piezoelectric-element. These plate are fabricated on the Pyrex glass wafer by sandblasting process. The metal membrane does roll of check valve that is prevented backflow of the Micropump. The metal membrane is fabricated on the stainless steel by laser machining. Piezoelectric-element is actuated the Micropump and controlled flowing of fluid. The Micropump is fabricated by bonding process of these multi-layer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1824-1827
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• 2005

For application to micro fluid control systems such as ${\mu}TAS$ (Micro Total Analysis Systems) and DDS (Drug Delivery Systems), it is very significant to handle precise and minute flow rates with low pressure pulsation. In this study, a novel valveless piezoelectric pump using peristaltic motion with three disk type PZT actuators is presented. The newly devised pump with an effective size of $70mm{\times}60mm{\times}55mm$ has three actuator layers connected in series from inlet to outlet. The PZT actuator has a maximum displacement of 240 ${\mu}m$ and a maximum force of 1.6 N. When the driving voltage for PZT actuators is sequentially applied with a certain phase shift, the pumping is performed by peristaltic motion of liquid volume. The working fluid is shut off without the driving voltage. Three methods for sequential driving are proposed and experimentally investigated. First and second methods utilize an intermittent sinusoidal waveform with phase shift of $90{\circ}\;and\;120^{\circ}$, respectively. Third method uses a rectangular waveform with phase shift of $90^{\circ}$. A controller with multi-phase shifter is designed and fabricated. Then, frequency and voltage-flow rate characteristics and load pressure-flow rate characteristics are experimentally investigated to verify the validity of the developed pump.

• Proceedings of the KIEE Conference
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• 2008.10a
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• pp.119-120
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• 2008

Using the extensional vibration mode of PZT bar, a piezopump is successfully made. The traveling extensional wave along the circumference of the bar is obtained by dividing standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic bar.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2011.04a
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• pp.331-332
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• 2011