• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 추계학술대회 논문집
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• pp.40-43
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• 1996

Substrates of SAW filter are mainly single crystal such as LiNbO$_3$, LiTaO$_3$. However, fabrication of crystal is difficult and cost is very high. In this study, crystal was substituted for piezoelectric ceramics which has simple fabrication process. The same SAW filter mask was photolithographed on crystal(LiNbO$_3$) substrate and ceramic(PZT4, PZT5A and PZT8) substrate in order to compare experimental value with theoretical value. The difference of center frequency was only 3.7%. PZT8 showed good bandwidth properties. It is considered that PZT8 has higher mechanical quality factor and propagation velocity than PZT4, PTT5A.

• 한국전기전자재료학회논문지
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• 제17권4호
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• pp.422-425
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• 2004

In this study, the AZO thin films were prepared as a function of oxygen gas flow ratio at room temperature by FTS(Facing Targets Sputtering) apparatus using Zn:Al(metal)-Zn:Al(metal) or Zn(metal)-ZnO:Al(ceramic). The film thickness, crystalline and electric properties of AZO thin film was evaluated by $\alpha$-step, XRD and 4-point probe. In the results, the resistivity of AZO thin film was shown the lowest value about 8${\times}$10$^{-2}$ $\Omega$-cm(Zn:Al-Zn:Al), 3${\times}$10$^{-1}$ $\Omega$-cm(Zn-ZnO:Al) at the oxygen gas flow ratio 0.3. And the AZO thin film has good crystalline at oxygen gas flow ration 0.4, using Zn:Al-Zn:Al targets.

• 한국전기전자재료학회논문지
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• 제15권9호
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• pp.798-807
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• 2002

ZnO thin films on Si wafer were deposited by RF magnetron reactive sputter with various RF power, chamber pressure, argon/oxygen gas ratios ana substrate temperatures. Crystallinities, surface morphologies, and electrical properties of the films were investigated by XRD, AFM, RBS, and electrometer(keithley 617). ZnO films showed a strong c-axis preferred orientation. Surface roughness and resistivity were changed by the argon/oxygen gas ratio. The minimum surface roughness of 12${\AA}$ and maximum resistivity of $10^8\Omega cm$ were achieved at Ar/O$O_2$=0/100.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.303-306
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• 1999

In this study, the piezoelectric ceramics PZT powder was synthesized by Wet-Dry combination method. The flexible 1-3-0 type composites were fabricated with piezoceramic PZT and Eccogel polymer matrix embedded 3rd phase. This paper represents the acoustic properties with various 3rd phase wt.%. The acoustic impedance of 1-3-0 type composites was lower than that of single phase PZT ceramics. The pulse-echo response of transducer fabricated with 1-3-0 type composites was better than solid PZT transducer.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.229-233
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• 2000

In this study, the temperature coefficient of resonant frequency($TCF_r$), dielectric and piezoelectric properties of $Pb_{1-x}Sr_x[(Sb_{1/2}Nb_{1/2})_{0.035}(Mn_{1/3}Nb_{2/3})_{0.065}(Zr_{0.49},Ti_{0.51})_{0.90}]O_3$ ceramics were investigated with the Sr substitution to Pb site. The dielectric constant was increased according to the increase of Sr substitution and electromechanical coupling factor($k_t$) also showed the highest values of 0.485 when the Sr substitution was 5 mol%. Moreover, the mechanical quality factor($Q_{mt}$) showed the highest value of 233 when the Sr substitution was 2 mol%.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.234-237
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• 2000

In this paper, the structural, dielectric and piezoelectric properties of the Pb[(S $b_{1}$2/N $b_{1}$2/)$_{0.035}$- $_Mn_{1}$3/N $b_{2}$3/)$_{0.065}$-(Z $r_{0.49}$, $Ti_{0.51}$)$_{0.90}$] $O_3$ ceramics were investigated with respect to the variation of the milling time. Grain size was decreased as the increase of milling time. As the milling time is increased, the particle size of the powder was decreased. Dielectric constant and electromechanical coupling factor (Qm)were slowly increased with the increase of milling time. The highest value of Qm was 1,497 at milling time 8 hour. Temperature coefficient of resonant frequency(TC $F_{r}$) was moved to positive side with the increase of milling time.e.e.e.e.e.e.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.251-252
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• 2007

In this paper, in order to spray diesel fuel, multilayer actuator structured-ultrasonic nozzle and resonant inverter were manufactured. Multilayer actuator structured-ultrasonic nozzle as fabricated using PMN-PNN-PZT ceramics showing excellent piezoelectric characteristics. Its electrical and temperature properties were measured for investigating he applicability of stable ultrasonic nozle for spraying diesel fuel.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.272-273
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• 2007

In this paper, ultrasonic nozzle and driving circuit were manufactured, respectively. And then, their electrical properties. were investigated. Ultrasonic nozzle was fabricated using PSN-PMN-PZT ceramics showing excellent piezoelectric characteristics. In order to drive ultrasonic nozzle, PWM controller(KA3525A) was used. The purpose of this study is to find the optimal driving condition of ultrasonic. nozzle. Accordingly electrical and temperature characteristic of ultrasonic driving system were investigated as a function of the input voltage.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.313-316
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• 2003

The lead zirconate titanate, $Pb(Zr_{0:52}Ti_{0:48})O_3$, films of $0.5\;{\mu}m,\;1\;{\mu}m$ and $2\;{\mu}m$ thickness were fabricated on $Pt/Ti/SiO_2/Si$ substrate by the rf magnetron sputtering method. The PZT films were annealed using by a rapid thermal annealing (RTA) method. The thickness dependence of the film structure, dielectric properties, Polarization-electric field hysteresis loops and capacitance-voltage characteristics were investigated over the thickness range of $0.5\;{\mu}m,\;1\;{\mu}m$ and $2\;{\mu}m$. According to the XRD patterns of the films, (110) peak intensity increases with film thickness increased. The increase of PZT films thickness leads to the decrease of the remanent polarization and the dielectric constant.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.300-300
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• 2006

일반적으로 PZT계 세라믹스는 높은 결정격자 이방성을 가지고 있으며, 우수한 압전특성을 가지고 있다. 이러한 특성을 보이기 위해서는 높은 온도($1200^{\circ}C$)에서 소결을 해야하기 때문에 PbO의 휘발로 인하여 환경문제가 야기되고 있다. 이러한 문제를 해결하기 위해서 Li, Na같은 액상소결제를 첨가시켜 소결온도를 낮추는 연구를 하고 있다. 본 연구에서는 $Pb(Mn_{1/3}Nb_{2/3})O_3$-PZT세라믹스가 갖는 높은 결정격자 이방성을 유지시키고, 저온소결시 압전 및 유전특성을 향상시키기 위해서 $Pb(Mg_{1/2}W_{1/2})O_3$를 치환시켜 attrition milling 시간에 따른 PWM-PMN-PZT세라믹스의 압전특성을 조사하였다.