• 대한기계학회논문집A
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• 제33권10호
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• pp.1045-1053
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• 2009

Precision stages for 6-DOF positioning, actuated by PZT stacks, which are fed back by gap sensors and guided by flexure hinges, have enlarged their application territory in micro/nano manufacturing and measurement area. The precision stages inherently have such limitations as the nonlinearity between input and output in piezoelectric stacks, feedback signal noise in precision capacitive gap sensors and low material damping in precision kinematic linkages of mechanical flexures. To surmount these limitations, the precision stage is modeled with physics-based variables, which are identified by transient response correspondence, and a gain margin calculation algorithm using the Prandtl-Ishlinskii model and describing function is newly developed to assess system performance more precisely than linear controller design schemes. Based on such analyses, a precision positioning controller is designed. Excellent positioning accuracy with rapid settlement accomplished by the controller is shown in step responses of the closed-loop system.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 추계학술대회 논문집
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• pp.799-804
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• 2013

The sensor/actuator active sensor diagnostics procedure, where the sensors/actuators are confirmed to be functioning properly during operation, is a critical component to successfully complete the structural health monitoring (SHM) process with large numbers of active sensors typically installed in a structure. The basis of this process is to track the changes in the capacitive value of piezoelectric materials, which shows up in measured admittance. Due to the temperature dependent nature of piezoelectric materials, we investigated the effects of temperature variations on sensor diagnostic process. The effect of temperature variations found to be remarkable, modifying the measured capacitive values significantly. In addition we analyzed the effect of bonding agents between a PZT patch and a host structure. This paper summarizes considerations needed to develop such sensor diagnostic processes, experimental procedures and results, and additional issues that can be used as guidelines for future investigations.

• Smart Structures and Systems
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• 제17권6호
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• pp.1055-1065
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• 2016

An anisotropic ultrasonic transducer is proposed for Lamb wave applications, such as passive damage or impact localization based on ultrasonic guided wave theory. This transducer is made from a PMNPT single crystal, and has different piezoelectric coefficients $d_{31}$ and $d_{32}$, which are the same for the conventional piezoelectric materials, such as Lead zirconate titanate (PZT). Different piezoelectric coefficients result in directionality of guided wave generated by this transducer, in other words, it is an anisotropic ultrasonic transducer. And thus, it has different sensitivity in comparison with conventional ultrasonic transducer. The anisotropic one can provide more information related to the direction when it is used as sensors. This paper first shows its detailed properties, including analytical formulae and finite elements simulations. Then, its application is described.

• 센서학회지
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• 제8권1호
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• pp.1-9
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• 1999

하나의 PZT 압전세라믹스 소자를 이용하여 종파와 청파를 동시에 송 수신할 수 있는 이중 모우드 초음파 센서에 관하여 이론적으로 고찰하고 실제로 제작하였다. 제작된 초음파 센서가 이중 모우드로 동작할 수 있는 최적조건을 찾기 위해 압전매질에서 파동의 전파방정식을 이론적으로 해석하고 이것으로부터 Euler의 회전 규칙으로 압전소자를 회전하여 절단 가능한 모든 면에 대해서 종파와 횡파의 동시 발생 기구를 조사하였다. 이론적인 해석결과를 확인하기 위하여 제작된 PZT 압전 세라믹스 소자를 종파와 횡파를 효율적으로 송 수신할 수 있는 회전각으로 절단하여 초음파 센서를 제작하고 주파수 변화에 따른 임피던스 변화를 측정하였다. 또한 여기서 제작된 초음파 센서를 스테인레스 스틸(STS303)로 제작된 지연선(delay line)으로 실험한 결과 하나의 초음파 센서로 종파와 횡파를 우수하게 송 수신할 수 있었다.

• 비파괴검사학회지
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• 제29권5호
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• pp.458-465
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• 2009

일반적인 산업현장에서 내부결함 평가를 위해 사용되어온 유도초음파기법은 비결함 지역에서는 에너지 감쇠를 고려하지 않고 적용되어 왔다. 결함 지역에서의 신호는 산란과 반사에 의해서 분명한 감쇠가 발생하지만 비결함 지역에서도 작은 감쇠가 발생한다. 또한 분산선도에서 판파(Lamb wave)는 각 두께, 주파수에 의해 분산성이 달라지기에 각 모드에 적합한 감쇠계수를 찾는 것은 중요하다. 이를 위해 접촉식 PZT(piezoelectric)센서를 이용한 pitch-catch 방식으로 거리에 따른 각 모드의 감쇠계수를 구하였다. 본 연구에서는 흔히 쓰이는 알루미늄과 구리판으로, 두께 차이, 모드 차이, 재질 차이에 의한 실험적인 감쇠율을 구하는데 중점을 두었다. 그 결과 각 변수에 따라 감쇠계수는 달라지며, 정량화가 필요하다는 것을 확인하였다.

• Smart Structures and Systems
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• 제28권6호
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• pp.761-777
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• 2021

This study presents a numerical investigation on the sensitivity of electromechanical (EM) impedance responses to inner damaged concrete of a prestressed anchorage zone. Firstly, the Ottosen yield criterion is selected to simulate the plasticity behavior of the concrete anchorage zone under the compressive loading. Secondly, several overloading cases are selected to analyze inner damage formations in the concrete of the anchorage zone. Using a finite element (FE) model of the anchorage zone, the relationship between applied forces and stresses is analyzed to illustrate inner plasticity regions in concrete induced by the overloading. Thirdly, EM impedance responses of surface-mounted PZT (lead-zirconate-titanate) sensors are numerically acquired before and after concrete damage occurrence in the anchorage zone. The variation of impedance responses is estimated using the RMSD (root-mean-square-deviation) damage metric to quantify the sensitivity of the signals to inner damaged concrete. Lastly, a novel PZT skin, which can measure impedance signatures in predetermined frequency ranges, is designed for the anchorage zone to sensitively monitor the EM impedance signals of the inner damaged concrete. The feasibility of the proposed method is numerically evaluated for a series of damage cases of the anchorage zone. The results reveal that the proposed impedance-based method is promising for monitoring inner damaged concrete in anchorage zones.

• 정보저장시스템학회논문집
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• 제3권1호
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• pp.47-53
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• 2007

In this paper, a thermo-piezoelectric mechanism with integrated heaters and piezoelectric sensors has been studied for low power probe-based data storage. Silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been developed to improve the uniformity of cantilevers. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. And, the $34\times34$ probe array integrated with CMOS circuits has been successfully developed by simple one-step bonding process. The process can simplify the process step and reduce tip wear using silicon nitride tip.

• 한국전기전자재료학회논문지
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• 제20권3호
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• pp.218-222
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• 2007

In this study, Acoustic emission(AE) sensors were fabricated using lead-free piezoelectric ceramics for prohibiting environmental pollution. Structure of AE sensors were designed as Langvin type air backing form. Here, the piezoelectic element was used as PZT(EC-65)(AE1) and NKN(AE2), respectively. The measured resonant frequency, the maximum sensitivity frequency and sensitivity of AE sensors were as follows ; 143 kHz, 29.4 kHz and 69.3 dB in AE1 and 179 kHz, 29.4 kHz and 66.3dB in AE2, respectively.

• 센서학회지
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• 제28권2호
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• pp.106-112
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• 2019

Flexible impact force sensors composed of piezoelectric PZT/PDMS composite sandwiched between Al/PET films were fabricated and their voltage signal characteristics were evaluated under varying impact forces for electronic mitt applications. The piezoelectric impact force sensor on an ethylene-vinyl acetate (EVA) substrate exhibited an output voltage difference of no greater than 40 mV a periodical impact test in with the impact load was increased by as much as 240 N by a restoration time of 5 s in a five-time experiment, implying good sensing ability. Moreover, the impact force sensor embedded four electronic mitts showed a reliable sensitivity of less than 1 mV/N and good repeatability under 100 N-impact force during a cycle test executed 10,000 times. This indicated that the fabricated flexible piezoelectric impact sensor could be used in electronic mitt applications. However, the relatively low elastic limit of substrate material such as EVA or poly-urethane slightly deteriorated the sensitivity of the impact sensor embedded electronic mitt at over 200 N-impact forces.

• 한국전산구조공학회:학술대회논문집
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• 한국전산구조공학회 2009년도 정기 학술대회
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• pp.2-5
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• 2009

본 논문에서는 오실레이터 센서와 램파 센서를 결합하여 구조물 손상 진단을 위한 통합된 압전 센서 시스템을 제안한다. 구조물 손상으로 인한 공진주파수 변화를 관측할 수 있는 오실레이터 센서는 손상 정도에 민감하게 반응하고 구조가 단순한 장치이지만 측정 범위가 센서 주위로 제한되는 특성을 가진다. 반면에 램파를 이용한 진단 시스템은 원거리에 위치한 구조물의 손상부를 감지하기에 유용하다. 본 논문에서는 오실레이터 센서를 이용한 취약 지점의 국부적인 손상 진단 방식과 램파를 이용한 광역적인 손상 진단 방식을 결합하여 각 시스템의 장점들을 활용할 수 있는 센서 시스템의 적용가능성을 연구하였다. PZT소자를 알루미늄 판에 적용하여, 알루미늄판의 손상 정도에 따른 오실레이터 공진주파수의 변화와 램파 신호의 Time of flight, 그리고 진폭의 변화를 이용하여 구조물 손상형태의 판별 가능성을 제시하고 실험을 통하여 그 타당성을 검증하였다.