• Transactions on Electrical and Electronic Materials
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• v.13 no.5
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• pp.215-220
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• 2012

Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2006.04a
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• pp.240-247
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• 2006

Piezoelectric sensor-based health monitoring technique using a two-step support vector machine (SYM) classifier is discussed for damage identification of a railroad track. An active sensing system composed of two PZT patches was investigated in conjunction with both impedance and guided wave propagation methods to detect two kinds of damage of the railroad track (one is a hole damage of 0.5cm in diameter at web section and the other is a transverse cut damage of 7.5cm in length and 0.5cm in depth at head section). Two damage-sensitive features were extracted one by one from each method; a) feature I: root mean square deviations (RMSD) of impedance signatures and b) feature II: wavelet coefficients for $A_0$ mode of guided waves. By defining damage indices from those damage-sensitive features, a two-dimensional damage feature (2-D DF) space was made. In order to minimize a false-positive indication of the current active sensing system, a two-step SYM classifier was applied to the 2-D DF space. As a result, optimal separable hyper-planes were successfully established by the two-step SYM classifier: Damage detection was accomplished by the first step-SYM, and damage classification was also carried out by the second step-SYM. Finally, the applicability of the proposed two-step SYM classifier has been verified by thirty test patterns.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.6-11
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• 2002

This paper is concerned with the development of the vibration isolation system using piezoelectric actuators and sensors. The active vibration absorber system consists of 4 pairs of PZT actuators bonded on aluminum plates. Hence, the active system is directly connected to the passive system. The rubber attached to the end of the beam is connected to the upper base as a structural member. It allows bending thus maximizing the vertical movement generated by the piezoceramic actuators. The piezoceramic sensors consists of 4 PZT sensors known to tilting, rolling and vertical movement. This paper also presents the development and the movement of the system.

• Journal of Sensor Science and Technology
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• v.10 no.3
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• pp.173-179
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• 2001

The currently used semiconductor pressure sensors are piezoresistive and capacitive type. Especially, semiconductor micro pressure sensors have a great deal of attention because of their small size. However, its fabrication processes are difficult, so that its yield is poor. For the purpose of resolving the drawbacks of the existing silicon pressure sensors, we demonstrate a new type of pressure sensor using PSFET(pressure sensitive field effect transistor) and investigate its operational characteristics. We used PZT(Pb(Zr,Ti)$O_3$) as a pressure sensing material. PZT thin films were deposited on a gate oxide of MOSFET by an rf-magnetron sputtering method. To abtain the stable phase, perovskite structure, furnace annealing technique have been employed in PbO ambient. The sensitivity of the PSFET was 0.38 mV/mmHg.

• Smart Structures and Systems
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• v.9 no.1
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• pp.21-33
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• 2012

In this study, a Lamb-wave based damage detection approach is proposed for damage localization in plate. A sensor network consisting of three PZT wafer type actuators/sensors is used to generate and detect Lamb waves. To minimize the complication resulted from the multimode and dispersive characteristics of Lamb waves, the fundamental symmetric Lamb mode, $S_0$ is selectively generated through designing the excitation frequency of the narrowband input signal. A damage localization algorithm based upon the configuration of the PZT sensor network is developed. Time-frequency analysis method is applied to purify the raw signal and extract damage features. Experimental result obtained from aluminum plate verified the proposed damage localization approach.

• Composites Research
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• v.28 no.4
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• pp.148-154
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• 2015

In order to detect damage in early stages and properly maintaining structures, the structural health monitoring technology is employed. In most cases, active-sensing SHM needs many piezoelectric (PZT) sensors and actuators. Thus, if there is a defect on PZT used for active-sensing SHM, the structural status could be misclassified. This study, for reliable SHM performance, investigated to detect defects of sensors by using the admittance-based sensor diagnostics. This study also introduced an algorithm that can diagnose sensor defects based only on data measured from the sensors in case that information about the changes in adhesive and environmental investigation, this study confirms that the proposed algorithm could be efficiently applied to real-world structures in which a significant temperature variation could take place.

• Journal of Mechanical Science and Technology
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• v.20 no.11
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• pp.1920-1933
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• 2006

Piezoelectric materials produce an electric field by deformation, and deform when subjected to an electric field. The coupling nature of piezoelectric materials has acquired wide applications in electric-mechanical and electric devices, including electric-mechanical actuators, sensors and structures. In this paper, a hollow sphere composed of a radially polarized spherically anisotropic piezoelectric material, e.g., PZT_5 or (Pb) (CoW) $TiO_3$ under internal or external uniform pressure and a constant potential difference between its inner and outer surfaces or combination of these loadings has been studied. Electrodes attached to the inner and outer surfaces of the sphere induce the potential difference. The governing equilibrium equations in radially polarized form are shown to reduce to a coupled system of second-order ordinary differential equations for the radial displacement and electric potential field. These differential equations are solved analytically for seven different sets of boundary conditions. The stress and the electric potential distributions in the sphere are discussed in detail for two piezoceramics, namely PZT _5 and (Pb) (CoW) $TiO_3$. It is shown that the hoop stresses in hollow sphere composed of these materials can be made virtually uniform across the thickness of the sphere by applying an appropriate set of boundary conditions.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.309.2-309
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• 2002

This paper is concerned with the development of the vibration isolation system using piezoelectric actuators and sensors. The active vibration absorber system consists of 4 pairs of PZT actuators bonded on aluminum plates making s- shaped device. Hence, the active system is directly connected to the passive system. The rubber attached to the end of the beam is connected to the upper base as a structural member. It allows bending thus maximizing the vertical movement generated by the piezoceramic actuators. (omitted)

• Proceedings of the Korean Society For Composite Materials Conference
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• 2002.10a
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• pp.216-219
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• 2002

Conventional piezoelectric lead-zirconate-titanate (PZT) senor has high sensitivity, but it is very brittle. Recently polymer films such as polyvinylidene fluoride (PVDF) have been used use as a sensor. The advantages of PVDF are the flexibility and mechanical toughness. Simple process and possible several shapes are also additional advantages. PVDF sensor can be directly embedded and attached to a structure. In this study, PVDF sensor was embedded in single glass fiber/epoxy composites whereas PZT sensor with AE was attached to single fiber composites (SFC). Piezoelectric sensor responds to interfacial damage of SFC. The signals measured by PVDF sensor were compared to PZT sensor. PZT sensor detected the signals of fiber fracture, matrix crack, interfacial debonding and even sensor delamination, whereas PVDF sensor only detected fiber fracture signals so far, because PZT sensor is much more sensitive than current PVDF sensor. Wave voltage of fiber fracture measured by PVDF sensor was lower than that of PZT sensor, but the results of fast Fourier transform (FFT) analysis were same. Wave velocity using two PZT sensors was also studied to know the internal and surface damage effect of epoxy specimens.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.13 no.8
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• pp.612-618
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• 2003

A hybrid vibration control scheme using ER fluid and PZT patches is proposed. Dynamic characteristics of the beam embedded with the ER fluid can be controled by changing the strength of the electric field applied on the ER fluid, thus provides a mean to avoid the resonance. It was found that active vibration control of the structure embedded with ER fluid failed to suppress the vibration excited with broad band frequency due to the limited change of the dynamic characteristics of the structure. To compensate this limited effect of the control scheme with ER fluid alone, PPF control using PZT patches as sensors and actuators is added to construct a hybrid controller. Experimental results suggests that proposed hybrid controller is effective to suppress the additional resonance vibration that appears when each controller is used alone.