• Journal of the Institute of Electronics Engineers of Korea SD
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• v.42 no.11
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• pp.1-8
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• 2005

In this paper, we present design and prototyping of a low-cost, integrated multi-functional micro health sensor chip that can be used or embedded in widely consumer devices, such as cell phone and PDA, for monitoring environmental condition including air pressure, temperature and humidity. This research's scope includes basic individual sensor study, architecture for integrating sensors on a chip, fabrication process compatibility and test/evaluation of prototype sensors. The results show that the integrated TPH sensor has good characteristics of ${\pm}\;1\%FS$ of linearity and hysteresis for pressure sensor and temperature sensor and of ${\pm}\;5\%FS$ of linearity and hysteresis But if we use 3rd order approximation for humidity sensor, full scale error becomes much smaller and this will be one of our future study.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.5
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• pp.286-291
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• 2014

In this study, novel ultrasonic rotary motor of hexadecagon shape stator was proposed. Stator of the hexadecagon ultrasonic motor was composed of an elastic ring and ceramics. The elastic ring had sixteen sides and sixteen angular points. Eight ceramics were attached on the outer surface of the eight sides of the ring. When rotor of cylindrical shaft was inserted inside of the ring stator, central lines of the sixteen sides of the stator hold the shaft by the slight pressures(frictions). This slight pressure was a preload of the motor and it could be controlled by radius and thickness of the ring. When two sinusoidal voltages which have 90 degree phase difference were applied to each four ceramics, elliptical displacements of inner surface of the ring were obtained. These elliptical displacements of the inner surface rotated the shaft rotor through the frictions. The proposed hexadecagon ultrasonic motor was designed and analyzed by using the finite element method (FEM), depending on materials of the elastic ring. Based on the FEM results, one model of motor which showed maximum displacement at contact points was chosen and fabricated. And characteristics of the motor were compared with simulated results. When the motor was fabricated with these results, EL20ET0.5CT0.5CW2 model showed 115[rpm] speed about input voltage of 60[Vrms] at 65.6[kHz]. And the maximum torque of 6[gfcm] was obtained. From these results, the hexadecagon shaped ultrasonic motor can be used to actuator for optical device which needs detailed position control. Also it can be used to medical and portable device by reducing size and weight.