• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.05a
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• pp.377-378
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• 2010

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.05a
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• pp.500-501
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.741-742
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• 2007

• Journal of the Korean Society for Precision Engineering
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• v.25 no.4
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• pp.18-25
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.391-392
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• 2010

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.1
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• pp.7-13
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• 2008

In this paper, the pumping performance of a piezoelectric valveless micropump is simulated with a commercial finite element analysis software, COMSOL Multiphysics. The micropump developed in the previous work is composed of a 4-layer lightweight piezo-composite actuator (LIPCA), a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, structural domain and fluid domain are coupled in the simulation. Water flow rates are numerically predicted for geometric parameters of the micropump. Based on this study, the micropump is optimally designed to obtain its highest pumping performance.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.246-252
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• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2004.10a
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• pp.286-289
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• 2004

This paper presents the fatigue characteristics of LIPCA (LIghtweight Piezo-Composite Actuator) device system. The LIPCA device system is composed of a piezoelectric ceramic layer and fiber reinforced lightweight composite layers. Typically a PZT ceramic layer is sandwiched by a top fiber layer with low CTE (coefficient of thermal expansion) and base layers with high CTE. The advantages of the LIPCA design are weight reduction by using the lightweight fiber reinforced plastic layers without compromising the generation of high force and large displacement and design flexibility by selecting the fiber direction and the size of prepreg layers. To predict the degradation of actuation performance of LIPCA due to fatigue, the cyclic electric loading tests using PZT specimens were performed and the strain for a given excitation voltage was measured during the test. The results from the PZT fatigue test were implemented into CLPT (Classical Laminated Plate Theory) model to predict the degradation of LIPCA's actuation displacement. The fatigue characteristic of PZT was measured using a test system composed of a supporting jig, a high voltage power supplier, data acquisition board, PC, and evaluated.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.8
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• pp.130-136
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• 1997

For compensating the error motion of hydrostatic guideways, we introduce a way that the clearance of table is actively controlled corresponding to the amount of error with the variable capillary. The structure and the theoretical design method of active controlled capillary using piezo actuator, named ACC, are proposed in this paper. Basic characteristics such as the maximum controllable range, micro step response and available dynamic bandwidth are tested for confirmation of structural suitability of ACC, and these characteristics are also tested on the table mounted with ACC for verifying the availability. The experimental result showed that by the use of ACC, the error motion within 2.7 .mu. m of a hydrostatic guideway can be compensated with the resolution of 2.7nm, 1/100 contollable range, and the frequency bandwidth of 5.5 Hz. From these results, it is confirmed that the ACC is very effective to improve the motion accuracy of high or ultra precision hydrostatic guideways.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.72-77
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• 1999

This paper presents 2-dimensional vibration cutting increases dynamic stiffness of tool support and improves the quality of machined surface in micro-machining. 2-dimensional vibration cutting is generated by two piezo actuators arranged orthogonally. A sine-type voltage is input to one actuator and a phase-shifted sine-type voltage is input the other. Then the vibration device actuates the tool in a 2-D elliptical motion with pulsed cutting force. It is a characteristic of 2-D vibration cutting that some negative thrust force occurs as the direction of friction on a tool rake surface is reversed. It helps not only chip flow smoothly and continuously but also cutting force be reduced. The quality of machined surface by 2-D vibration cutting depends on such parameters as vibration amplitude, frequency, cutting speed, depth of cut, etc. Compared to conventional cutting through tool path simulation and experiments under several conditions, the 2-D vibration cutting is verified to bring forth a great decrease of cutting forces, much better surface roughness and moreover much less burr.