• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2001년도 추계학술대회논문집 I
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• pp.371-375
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• 2001

The concept of a new linear motor that uses piezo-stack actuator is demonstrated. The working principle is far different from the conventional inchworm motor. This motor is based on the self-moving cell concept. The linear motor has three cells and each cell is constructed with one piezo-stack actuator and a shell structure. A cell train is constructed by connecting these cells and the cell train is fitted into a guide way with a proper interference. The cell train moves along the guide way, by activating each cell in succession. The moving motion of the motor is tested. Since this linear motor uses piezo-stack actuator with unified clamping cell, it can produce fast speed, high resolution and large push force.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 추계학술대회논문집
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• pp.649-654
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• 2003

This paper is focused on the research of the ultra precision linear motor by using piezo stack actuators. The development of linear motor which can be controlled nano or micro scale is necessary for the precision manufacturing. Self-moving-cell principle is used for the design of linear motor Self-moving-cell linear motor is consisted of three cell structures, and each cell has two shells and one piezo-stack actuator. Each cell can do clamping and moving by two shell structures. The shell structure deformation by piezo stack actuator can move the linear motor by losing the clamping between the shall and guideway. This paper presents the design, manufacturing and test of the motor.

• 한국항공우주학회지
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• 제38권9호
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• pp.869-874
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• 2010

압전 소자는 부피에 비해 발생 힘이 크고 빠른 응답 특성을 갖기 때문에, 최근 압전 소자를 이용한 모터의 연구가 활발하게 이루어지고 있다. 그러나 발생 변위가 작아, 압전소자의 직접적인 변위 특성을 이용하는 것에 한계가 있다. 따라서 큰 변위를 확보하기 위해, 바이메탈을 사용하거나 한 개 이상의 압전 소자를 사용한 모터가 연구되었다. 본 연구를 통해 제안된 선형 모터는 구동부의 첫 번째 모드 형상을 이용하기 때문에 낮은 구동 주파수에서 작동이 가능하다. 또한 한 개의 압전 소자를 사용하여, 구동 주파수와 구동부의 공진 주파수 비에 따라 모터의 방향을 제어할 수 있도록 고안되었다.

• 천문학회보
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• 제44권2호
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• pp.57.3-57.3
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• 2019

Space applications of the motion have been served with DC motors for decades. But their functionality with a gearbox and lubricants and their weights are always an issue for its application. A piezo-motor has an advantage on the direct driving with higher accuracy, smaller size, and no-EMI. We use the piezo-motor to rotate a filter wheel directly in a balloon-borne coronagraph launched on September 2019. The piezo-motor works well in a temperature range from -10 to 40 Celsius with high reliability and high positioning / tilt accuracy (~0.1degree) with a photo-encoder. We verify its functionality for 7 days. In this talk, we report the design, test processes of the filter wheel including its balloon flight result.

• Nuclear Engineering and Technology
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• 제55권8호
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• pp.3114-3120
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• 2023

A high-accuracy magnetic field measurement device based on a cyclotron is being developed for accelerator mass spectrometry (AMS). In this study, a magnetic field measurement device consisting of a Hall probe sensor, piezo-motor, and step motor was developed to measure the magnetic field of the AMS cyclotron magnet. The Hall probe sensor was calibrated to achieve positional accuracy by using polar coordinates. The measurement results between the ratchet gear and piezo-motor, which are the instruments used for driving the measurement device, were analyzed. The measurement result of the device with a piezo-motor exhibits a difference of 5 Gauss (0.04%) as compared with the simulation result.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• 한국정밀공학회지
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• 제16권3호통권96호
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 학술대회 논문집 정보 및 제어부문
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• pp.754-756
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• 2004

The ultrasonic piezo motor is a new type motor that has an excellent performance and many useful features that electromagnetic motors do not have. But, it suffers from severe system non-linearities and parameter variations especially during speed control. Therefore, it is difficult to accomplish satisfactory control performance by using the conventional PID controller. In this paper, to achieve the precise control, we analyzed response time & change with a driving time, and proposed PD controller combined with neural network. The backpropagation algorithm is used to train a given trajectory. The effectiveness of the used method is confirmed by experiments. The effectiveness of the used method is confirmed by experiments using the ultrasonic motor made in Korea.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.414-417
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• 2001

Recently, developments of device using characteristics of ceramics as a new technical material is in progress. While doing so, Ultrasonic motor which is a part of research & development of piezo-actuator by piezo-effects is being used in the various applications. So, we fabricated a flat-type $L_{1}-B_{8}$ mode Ultrasonic motor and measured the operation characteristics of its. The size of USM is 80*20*1.5[$mm^{3}$](length*width*thickness) and is constructed with stator by piezo-ceramics and stainless elastic body and rotator by bearings. As results of experiments, the fastest speed of revolution(v), the maximum torque(T) and the efficiency( $\eta$ ) were 37.5[cm/sec], 5.0[ $mN{\cdot}m$ ] and 1.17[%] respectively when 27.9[kHz], 150[gf], 50[V] were applied. So, we think this $flat-type_{1}-B_{8}$ mode Ultrasonic motor is able to be used for applications in forwarding device of a paper or electric card and so on.

• 한국산학기술학회논문지
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• 제6권2호
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• pp.165-171
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• 2005

초음파 모터는 전자기식 모터들과는 달리 다양한 특징과 뛰어난 성능을 가진 새로운 형태의 모터이다. 그러나, 초음파 모터는 특히 구동시간에 따라 시스템의 비선형적인 특성과 파라미터의 변화들에 대한 문제를 갖는다. 그러므로 기존의 PID제어기를 사용함으로써 만족스러운 제어기의 성능을 내기가 어렵다. 본 논문에서는 원환형 초음파 모터와 선형 초음파 모터의 정밀 제어를 하기 위해 구동시간에 따른 응답 시간과 변화 등의 특성을 각각 분석하고, 리니어 초음파 모터에 대해서는 ${\mu}m$정도의 오차를 갖는 스텝 제어기와 PD제어기를 결합한 제어기를 제안한다. 제안된 제어기의 성능은 제어를 하지 않고 구동 시에 측정된 슬립 오차와 제안된 제어기를 사용하여 구동 시 측정된 슬립 오차를 비교하여 평가하였다. 실험 결과 스텝 제어기를 사용한 리니어 초음파 모터의 슬립오차는 $10{\mu}m$이하로 우수한 성능을 입증하였다.