• Title/Summary/Keyword: Photolithographic

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Barrier Rib Patterning Technology for Cost Effective High Resolution PDP

  • Park, Lee-Soon;Paek, Sin-Hye;Yun, Sang-Won;Choi, Hyung-Suk
    • 한국정보디스플레이학회:학술대회논문집
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    • 2002.08a
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    • pp.989-993
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    • 2002
  • Barrier ribs in the color plasma display panel(PDP) function to maintain the discharge space between to glass plates as well as to prevent optical crosstalk. Patterning of barrier ribs is one of unique processes for making PDP. In this work photosensitive barrier rib pastes were prepared by incorporating binder polymer, solvent, functional monomers photoinitiator, mid barrier rib powder. Study on the function of materials for the barrier rib paste were undertaken. After optimization of paste formulation, both photolithographic and transparent soft molding method resulted in fine pattern of barrier ribs with high aspect ratio.

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Evaluation of Activated Platelet Using Peptide-Immobilized Surface (펩타이드가 고정된 표면을 이용한 혈소판 활성화 평가)

  • Kim, J.H.;Kim, H.J.;Kim, J.;Min, B.G.
    • Proceedings of the KOSOMBE Conference
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    • v.1998 no.11
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    • pp.223-224
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    • 1998
  • RGDF immobilized micro-patterned surface was developed to detect the functional state of platelets. Using photolithographic technology, an RGDF micro-patterned surface was prepared on silicon wafer. Platelet adhesion to this surface was observed by fluorescence microscopy after staining platelets with mepacrine. Nonactivated platelets pretreated with $PGE_1$ interacted incompletely with the RGDF micro-patterned surface, whereas activated platelets treated with ADP interacted with the surface extensively. These results show that the distinct selectivity of an RGDF-immobilized micro-patterned surface can be used to detect the functional state of platelets.

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Photolithographic Silicon Patterns with Z-DOL (perfluoropolyether, PFPE) Coating as Tribological Surfaces for Miniaturized Devices

  • Singh, R. Arvind;Pham, Duc-Cuong;Yoon, Eui-Sung
    • KSTLE International Journal
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    • v.9 no.1_2
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    • pp.10-12
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    • 2008
  • Silicon micro-patterns were fabricated on Si (100) wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and micro-channels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces were then evaluated for their micro-friction behavior in comparison with those of bare Si (100) flat, Z-DOL coated Si (100) flat and uncoated Si patterns. Experimental results showed that the chemically treated (Z-DOL coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the test materials. The results indicate that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro/Nano-Electro-Mechanical-Systems (MEMS/NEMS).

Transient Protection of Intramolecular Hydrogen Bonding: A Simple but Elegant Approach for Functional Imaging

  • Kim, Jong-Man;Min, Sung-Jun;Park, Bum-Jun;Lee, Jae-Hyung;Ahn, Kwang-Duk
    • Macromolecular Research
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    • v.12 no.5
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    • pp.493-500
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    • 2004
  • We have developed a novel method for patterning functional images in thin polymer films. The key materials we utilized for the imaging were dihydroxyanthraquinones protected with acid-labile tert-butoxycarbonyl (t-Boc) blocking groups. Among the tested compounds, 1,4-dihydroxyanthraquinone (quinizarin; 1) underwent the most drastic change in terms of its color and fluorescence upon protection. We prepared the t-Boc-protected quinizarin and polymers bearing the protected quinizarins as pendent groups. To investigate the possibility of a single-component imaging system, we synthesized a styrenic monomer 14 incorporating protected quinizarin and a maleimide derivative 15 bearing a photoacid generating group and subjected them to polymerization. Selective removal of the protecting groups of the quinizarin moieties in the exposed area using photolithographic techniques allowed regeneration of quinizarin and patterned fluorescence images in the polymer films.

Electrical properties of Organic TFT patterned by shadow-mask with all layer

  • Lee, Joo-Won;Kim, Jai-Kyeong;Jang, Jin;Ju, Byeong-Kwon
    • Proceedings of the IEEK Conference
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    • 2006.06a
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    • pp.543-544
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    • 2006
  • Pentacene thin film transistors fabricated without photolithographic patterning were fabricated on the plastic substrates. Both the organic/inorganic thin films and metallic electrode were patterned by shifting the position of the shadow mask which accompanies the substrate throughout the deposition process. By using an optically transparent zirconium oxide ($ZrO_2$) as a gate insulator and octadecyltrimethoxysilane (OTMS) as an organic molecule for self-assembled monolayer (SAM) to increase the adhesion between the plastic substrate and gate insulator and the mobility with surface treatment, high-performance transistor with field effect mobility $.66\;cm^2$/V s and $I_{on}/I_{off}$>$10^5$ was formed on the plastic substrate. This technique will be applicable to all structure deposited at low temperature and suitable for an easy process for flexible display.

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Positive Type Photoresist for Patterning of Interdielectric Layer of TFT Array

  • Lee, Hyo-Jung;Kim, Hyo-Jin;Kim, Soon-Hak;Park, Lee-Soon;Lee, Yun-Su;Song, Gab-Deuk
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.564-566
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    • 2007
  • Synthesis of two photoactive compounds containing core imide moiety was carried out for an application to interdielectric layer in TFTLCD array. An aqueous alkaline developable polymer matrix was synthesized by free radical copolymerization. A positive photoresist formulation was developed utilizing synthesized UV monomers, photoactive compound, binder polymer, sulfactant and alkali developable polymer matrix. It was found that via-holes with good resolution, high transmittance and thermal resistance could be obtained by photolithographic process utilizing the new positive interdielectric material with high thermal stability.

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Mechano-Chemical Microfabrication Technology Based on Micro/Nano-Tribology : Development Process and Prospect (마이크로/나노 트라이볼로지 기반 기계-화학적 미세가공기술 : 발전과정 및 전망)

  • 성인하;김대은
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2002.10a
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    • pp.274-279
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    • 2002
  • In this paper, the development process of an unique and creative micro/nano-structure fabrication technique based on micro/nano-tribology are reviewed and discussed. The so-called Mechano-Chemical Process(MCP), which has been developed since 1995 by Tribology Research Laboratory at Yonsei University with the motivation to overcome the demerits of the conventional photolithographic techniques, is based on the fundamental understanding of the interaction between the tool tip and the workpiece surface. This process is a maskless process which offers tremendous flexibility in surface patterns that can be created on a workpiece surface without using any capital intensive equipment. It Is capable of fabricating the prototypes of micro/nano-components, micro- structured surface with various geometries, micro-molds for making polymer or metal parts, and micro-fluidic channels for lab-on-a- chip

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Development of New Biochip using Magnetic Interaction and Random Fluidic Self-assembly (자기력과 Random Fluidic Self-assembly에 의한 신규 바이오칩의 개발)

  • Choi, Yong-Sung;Kwon, Young-Soo;Park, Dae-Hee
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.6
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    • pp.615-621
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    • 2004
  • This paper describes a new constructing method of multifunctional biosensor using many kinds of biomaterials. A metal particle and an array was fabricated by photolithographic. Biomaterials were immobilized on the metal particle. The array and the particles were mixed in a buffer solution, and were arranged by magnetic force interaction and random fluidic self-assembly. A quarter of total Ni dots were covered by the particles. The binding direction of the particles was controllable, and condition of particles was almost with Au surface on top. The particles were successfully arranged on the array. The biomaterial activities were detected by chemiluminescence and electrochemical methods.

Development of Protein Chip Microarray Using a Magnetic (자성체를 이용한 단백질칩 마이크로어레이의 개발)

  • Choi, Yong-Sung;Lee, Kyung-Sup;Park, Tae-Hee
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.2398-2400
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    • 2005
  • In this paper, we have been described a new constructing method of multichannel biosensor using self-assembly by magnetic force interaction. A metal particle and an array was fabricated by photolithographic. Biomaterials were immobilized on the metal particle. The array and the particles were mixed in a buffer solution, and were arranged by magnetic force interaction and self-assembly. A quarter of total Ni dots were covered by the particles. The binding direction of the particles was controllable, and condition of particles was almost with Au surface on top. The particles were successfully arranged on the array. The biomaterial activities were detected by chemiluminescence.

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Protein Chip by Magnetic Force (자기력에 의한 단백질칩)

  • Choi, Yong-Sung;Moon, Jong-Dae;Lee, Kyung-Sup
    • Proceedings of the KIEE Conference
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    • 2006.07c
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    • pp.1317-1318
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    • 2006
  • In this paper, we have been described a new constructing method of multichannel biosensor using self-assembly by magnetic force interaction. A metal particle and an array was fabricated by photolithographic. Biomaterials were immobilized on the metal particle. The array and the particles were mixed in a buffer solution, and were arranged by magnetic force interaction and self-assembly. A quarter of total Ni dots were covered by the particles. The binding direction of the particles was controllable, and condition of particles was almost with Au surface on top. The particles were successfully arranged on the array. The biomaterial activities were detected by chemiluminescence.

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