• 제목/요약/키워드: Photo-lithography technology

검색결과 44건 처리시간 0.024초

반사형 콜레스테릭 칼라필터의 시야각에 따른 광특성 향상에 관한 연구 (Improvement of Optical Characteristics in Viewing Directions in a Reflective Cholesteric Liquid Crystal Color Filter)

  • 김태현;임영진;황성진;이명훈;장원근;이승희
    • 폴리머
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    • 제31권2호
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    • pp.148-152
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    • 2007
  • 콜레스테릭 액정모노머를 이용하여 액정표시장치용 선택반사 칼라필터 원형을 개발하였다. 콜레스테릭 액정은 특정한 기판처리 조건에서 나선(helical twist) 구조를 갖는 액정으로서 피치와 비슷한 크기의 입사 파장을 반사시키는 독특한 선택반사의 광특성을 갖는다. 실험결과 R, G, B의 파장영역을 반사시키는 반구형으로 패턴된 콜레스테릭 반사 필름을 개발하여 그 반사파장의 피크 값을 살펴본 바, 시야각 방향 변화에 따라 적색, 녹색필름은 단파장쪽으로 반사파장 피크가 이동하였으며 청색의 경우 별다른 변화가 없었다. 포토리소그래피를 이용하여 포토레지스트(Photo-resist)를 thermal reflow방식으로 마이크로미터 크기의 반구형의 주기적인 패턴을 얻을 수 있었으며 그 위에 형성된 적색, 녹색, 청색의 필름은 패턴이 없는 경우에 비하여 시야각에 따른 반사파장의 변화가 적음을 육안을 통하여, 그리고 Lab좌표를 통해서 각각 정량적으로 확인할 수 있었다.

동분말이 함유된 에폭시 수지를 이용한 마이크로 기어의 제작에 관한 연구 (A Study on a Microreplication Process for Real 3D Structures Using a Soft Lithography)

  • 정성일;박선준;이인환;정해도;조동우
    • 한국정밀공학회지
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    • 제21권12호
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    • pp.29-36
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    • 2004
  • In this paper, a new replication technique for a real 3D microstructure was introduced, in which a master Pattern WES made of photo-curable epoxy using a microstereolithography technology, and then it was transferred onto an epoxy-copper particle composite. A helical gear was selected as one of the real 3D microstructure for this study, and it was replicated from a pure epoxy to an epoxy composite. In addition, the transferability of the microreplication process was evaluated, and the properties of :he epoxy composite were compared to that of the pure epoxy, including hardness, wear-resistance and thermal conductivity.

Selective Growth of Carbon Nanotubes and Its Electron Emission Properties

  • Ryu, Je-Hwang;Kim, Ki-Seo;Yu, Yi-Yin;Moon, Jong-Hyun;Park, Kyu-Chang;Jang, Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.1229-1232
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    • 2006
  • We have grown well-aligned carbon nanotube arrays on the selective areas by plasma enhanced chemical vapor deposition at the substrate temperature of $580\;^{\circ}C$. The selective areas for CNTs growth can be defined by photo lithography technology. The CNTs are uniformly grown on the areas regardless of island diameters. Electron emission currents were measured in a vacuum with a diode structure at room temperature. Uniform electron emission currents were achieved with $40\;{\mu}m$ island spacing with $5{\mu}m$ island diameter.

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Optical Properties of Long Wave Infrared Spoof Plasmon using Hexagonal Periodic Silver Hole Arrays

  • Lee, Byungwoo;Kwak, Hoe Min;Kim, Ha Sul
    • Applied Science and Convergence Technology
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    • 제25권2호
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    • pp.42-45
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    • 2016
  • A two-dimensional metal hole array (2DMHA) structure is fabricated by conventional photo-lithography and electron beam evaporation. The transmittance of the 2DMHA is measured at long wave infrared (LWIR) wavelengths (${\lambda}{\sim}10$ to $24{\mu}m$). The 2DMHA sample shows transmittance of 70 and 67% at $15.4{\mu}m$ due to plasmonic resonance with perforated silver and gold thin films, respectively, under surface normal illumination at LWIR wavelengths. The measured infrared spectrum is separated into two peaks when the size of the hole becomes larger than a half-pitch of the hole array. Six degenerated plasmon modes (1,0) at the metal/Si surface split to three modes at an incident beam angle of $45^{\circ}$ with respect to the surface normal direction, and wavelength shifts of the transmitted spectrum are observed in a red shift and blue shift at the same time.

휴대용 근적외선 분광분석기를 이용한 비침투 혈당 측정 (Non-invasive Blood Glucose Measurement by a Portable Near Infrared (NIR) System)

  • 강나루;우영아;차봉수;이현철;김효진
    • 약학회지
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    • 제46권5호
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    • pp.331-336
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    • 2002
  • The purpose of this study is to develop a non-invasive blood glucose measurement method by a portable near infrared (NIR) system which was newly integrated by our lab. The portable NIR system includes a tungsten halogen lamp, a specialized reflectance fiber optic probe and a photo diode array type InGaAs detector; which was developed by a microchip technology based on the lithography. Reflectance NIR spectra of different parts of human body (finger tip, earlobe, and inner lip) were recorded by using a fiber optic probe. The spectra were collected over the spectral range 1100 ∼ 1740 nm. Partial least squares regression (PLSR) was applied for the calibration and validation for the determination of blood glucose. The calibration model from earlobe spectra presented better results, showing good correlation with a glucose oxidase method which is a mostly used standard method. This model predicted the glucose concentration for validation set with a SEP of 33 mg/dL. This study indicated the feasibility for non-invasive monitoring of blood glucose by a portable near infrared system.

Micro pH Sensor Using Patterned Hydrogel with pH Indicators

  • Jang, Ji-Sung;Kwon, Sung-Hoon
    • 센서학회지
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    • 제20권4호
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    • pp.234-237
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    • 2011
  • This paper presents a study into pH Indicator-Embedded hydrogel micro-particles which are encoded various shapes according to the captured indicator. We incorporate various pH indicators into a photo-curable hydrogel, PEG-DA(Poly(ethylene glycol) diacrylate). Using the latest fluidic lithography techniques, we can easily fabricate variously patterned hydrogel particles based on in-situ photopolymerization of the PEG-DA in a micro-fluidic channel. The shape of the particle is related to the pH indicator inside the particle. We demonstrate that the micro pH sensors change their colors according to the pH levels. The micro pH sensors have various characteristics that are related to the curing time, particle size, etc. By changing these conditions, we can adjust the long term stability and reaction time of the hybrid micro pH sensors.

전극 패턴을 이용한 Electrowetting display의 오일 제어 (Oil Movement Control of Electrowetting Display with Patterned Electrode)

  • 김태현;김연식;;정은;이승희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 학술대회 및 기술세미나 논문집 디스플레이 광소자
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    • pp.47-48
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    • 2006
  • Electrowetting phenomenon is applied in the various field of technology. One of that is electrowetting display as a paper like electronic paper. Fast response and easy to express a color is goodness. In spite of that, the oil movement of the electrowetting display is irregular. So it doesn't look like uniform. Because of the above reason, electrowetting display using patterned electrode is made and the characteristic of oil movement is observed. Electrode and polymer wall is patterned by photo-lithography. We analyze the oil movement according to the variation of size and the position of etched electrode area.

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하전입자의 분포에 따른 Electrowetting display의 오일의 움직임 (Oil Movement Control by Charge Density Control in the Electrowetting Display)

  • 김태현;김연식;;정은;한윤봉;이승희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.495-496
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    • 2006
  • Electrowetting phenomenon is applied in the various field of technology. One of that is electrowetting display as a paper like electronic paper. Fast response and easy to express a color is goodness. In spite of that, the oil movement of the electrowetting display is irregular. So it doesn't look like uniform. Because of above reason, electrowetting display using patterned electrode is made and the characteristic of oil movement is observed. Electrode and polymer wall is patterned by photo-lithography. We analyze the oil movement according to the variation of size and the position of etched electrode area.

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Noninvasive blood glucose monitoring system based on NIR spectroscopy with a contact pressure control device

  • Kang, Na-Roo;Baek, Ju-Hyun;Woo, Young-Ah;Kim, Hyo-Jin
    • 대한약학회:학술대회논문집
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    • 대한약학회 2003년도 Proceedings of the Convention of the Pharmaceutical Society of Korea Vol.2-2
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    • pp.67.3-68
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    • 2003
  • The purpose of this study is to improve repeatability of a non-invasive blood glucose measurement. The portable NIR system that was newly integrated by our lab includes a tungsten halogen lamp, a specialized reflectance fiber optic probe and a photo diode array type InGaAs detector, which was developed by a microchip technology based on the lithography. Reflectance NIR spectra of finger tip were recorded by using a fiber optic probe. The probe was fixed in the system and subjects put their finger on the probe head. (omitted)

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AZO 박막의 표면 거칠기에 따른 OLED 소자의 특성 (Effect of surface roughness of AZO thin films on the characteristics of OLED device)

  • 이봉근;이규만
    • 반도체디스플레이기술학회지
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    • 제9권4호
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    • pp.25-29
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    • 2010
  • We have investigated the effect of surface roughness of TCO substrate on the characteristics of OLED (organic light emitting diodes) devices. In order to control the surface roughness of AZO thin films, we have processed photo-lithography and reactive ion etching. The micro-size patterned mask was used, and the etching depth was controlled by changing etching time. The surface morphology of the AZO thin film was observed by FESEM and atomic force microscopy (AFM). And then, organic materials and cathode electrode were sequentially deposited on the AZO thin films. Device structure was AZO/${\alpha}$-NPD/DPVB/$Alq_3$/LiF/Al. The DPVB was used as a blue emitting material. The electrical characteristics such as current density vs. voltage and luminescence vs. voltage of OLED devices were measured by using spectrometer. The current vs. voltage and luminance vs. voltage characteristics were systematically degraded with increasing surface roughness. Furthermore, the retention test clearly presented that the reliability of OLED devices was directly influenced with the surface roughness, which could be interpreted in terms of the concentration of the electric field on the weak and thin organic layers caused by the poor step coverage.