• Title/Summary/Keyword: Photo System

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Development of Hard Mask Strip Inspection System for Semiconductor Wafer Manufacturing Process (반도체 전공정의 하드마스크 스트립 검사시스템 개발)

  • Lee, Jonghwan;Jung, Seong Wook;Kim, Min Je
    • Journal of the Semiconductor & Display Technology
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    • v.19 no.3
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    • pp.55-60
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    • 2020
  • The hard mask photo-resist strip inspection system for the semiconductor wafer manufacturing process inspects the position of the circuit pattern formed on the wafer by measuring the distance from the edge of the wafer to the strip processing area. After that, it is an inspection system that enables you to check the process status in real time. Process defects can be significantly reduced by applying a tester that has not been applied to the existing wafer strip process, edge etching process, and wafer ashing process. In addition, it is a technology for localizing semiconductor process inspection equipment that can analyze the outer diameter of the wafer and the state of pattern formation, which can secure process stability and improve wafer edge yield.

Detection System for Sub-micrometer Defects of a Photo-mask Using On-axis Interference between Reflected and Scattered Lights

  • Lee, Sangon;Jo, Jae Heung;Kim, Jong Soo;Moon, Il Kweon
    • Journal of the Optical Society of Korea
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    • v.17 no.1
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    • pp.73-80
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    • 2013
  • In the process of lithography using ultra violet light sources for semiconductor devices, most of defects are made by sub-micrometer pollutants generated at photochemical reactions. We proposed and developed a novel vibration-insensitive on-axis interferometer with a sub-micrometer lateral resolution by using the interference between two beams: one scattered from defects and the other reflected from a reference area without defects. The proposed system was successfully demonstrated to detect a small Al defect of 0.5 ${\mu}m$ diameter within the inspection time of less than 30 minutes over the area of the photo-mask which is 6 inch by 6 inch square.

Biohydrogen Production from Food Waste by Two-Stage (Lactate+Photo)-Fermentation Process (2단(유산발효+광발효) 발효공정을 통한 음식물쓰레기로부터의 수소생산)

  • Kim, Ok-Sun;Son, Han-Na;Kim, Dong-Hoon;Jeon, Dong-Jin;Rhee, Young-Woo;Kim, Mi-Sun
    • Journal of Hydrogen and New Energy
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    • v.22 no.3
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    • pp.333-339
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    • 2011
  • In the present work, it was attempted to produce $H_2$ from food waste by the two-stage fermentation system. Food waste was acidified to lactate by using indigenous lactic acid bacteria under mesophilic condition, and the lactate fermentation effluent (LFE) was subsequently converted to $H_2$ by photo-fermentation. $Rhodobacter$ $sphaeroides$ KD131 was used as the photo-fermenting bacteria. The optimal conditions for lactate fermentation were found to be pH of 5.5 and substrate concentration of 30 g Carbo. COD/L, under which yielded 1.6 mol lactate/mol glucose. By filtering the LFE and adding trace metal, $H_2$ production increased by more than three times compared to using raw LFE, and finally reached the $H_2$ yield of 3.6 mol $H_2$/mol lactate. Via the developed two-stage fermentation system $H_2$ yield of 5.8 mol $H_2$/mol glucose was achieved from food waste, whose value was the highest that ever recorded.

Comparative Analysis of Exterior Orientation Parameters of Smartphone Images Using Quaternion-Based SPR and PnP Algorithms (스마트폰 영상정보를 활용한 쿼터니언 기반 후방교회법과 PnP 알고리즘의 외부표정요소 비교 분석)

  • Kim, Namhoon;Lee, Ji-Sang;Bae, Jun-Su;Sohn, Hong-Gyoo
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.37 no.6
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    • pp.465-472
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    • 2019
  • The SPR (Single Photo Resection) is widely used as a method of estimating the EOPs (Exterior Orientation parameters) at the time of taking a photograph, but it requires an initial value and has a disadvantage of being sensitive to the initial value. In this study, we introduce quaternion-based single photo resection and PnP (Perspective-n-Point) algorithm that do not require initial values and compare the results. Photos were taken using a general smartphone, and the ground control point acquisition was based on the hybrid MMS (Mobile Mapping System) point cloud data possessed by the researchers. As a result, when the collinear condition based SPR is true value, quaternion-based SPR has higher attitude angle estimation accuracy than PnP algorithm. In case of camera position estimation, both algorithms showed accuracy within 0.8m when compared with ground control points.

Studies on decomposition behavior of oxalic acid waste by UVC photo-Fenton advanced oxidation process

  • Kim, Jin-Hee;Lee, Hyun-Kyu;Park, Yoon-Ji;Lee, Sae-Binna;Choi, Sang-June;Oh, Wonzin;Kim, Hak-Soo;Kim, Cho-Rong;Kim, Ki-Chul;Seo, Bum-Chul
    • Nuclear Engineering and Technology
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    • v.51 no.8
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    • pp.1957-1963
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    • 2019
  • A UVC photo-Fenton advanced oxidation process (AOP) was studied to develop a process for the decomposition of oxalic acid waste generated in the chemical decontamination of nuclear power plants. The oxalate decomposition behavior was investigated by using a UVC photo-Fenton reactor system with a recirculation tank. The effects of the three operational variables-UVC irradiation, H2O2 and Fenton reagent-on the oxalate decomposition behavior were experimentally studied, and the behavior of the decomposition product, CO2, was observed. UVC irradiation of oxalate resulted in vigorous CO2 bubbling, and the irradiation dose was thought to be a rate-determining variable. Based on the above results, the oxalate decomposition kinetics were investigated from the viewpoint of radical formation, propagation, and termination reactions. The proposed UVC irradiation density model, expressed by the first-order reaction of oxalate with the same amount of H2O2 consumption, satisfactorily predicted the oxalate decomposition behavior, irrespective of the circulate rate in the reactor system within the experimental range.

Photo Retrieval System using Kinect Sensor in Smart TV Environment (스마트 TV 환경에서 키넥트 센서를 이용한 사진 검색 시스템)

  • Choi, Ju Choel
    • Journal of Digital Convergence
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    • v.12 no.3
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    • pp.255-261
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    • 2014
  • Advances of digital device technology such as digital cameras, smart phones and tablets, provide convenience way for people to take pictures during his/her life. Photo data is being spread rapidly throughout the social network, causing the excessive amount of data available on the internet. Photo retrieval is categorized into three types, which are: keyword-based search, example-based search, visualize query-based search. The commonly used multimedia search methods which are implemented on Smart TV are adapting the previous methods that were optimized for PC environment. That causes some features of the method becoming irrelevant to be implemented on Smart TV. This paper proposes a novel Visual Query-based Photo Retrieval Method in Smart TV Environment using a motion sensing input device known as Kinect Sensor. We detected hand gestures using kinect sensor and used the information to mimic the control function of a mouse. The average precision and recall of the proposed system are 81% and 80%, respectively, with threshold value was set to 0.7.

Development of Infusion Pump System using Photodiode Array (광 다이오드 어레이 센서를 이용한 인퓨전 펌프 시스템의 개발)

  • Kwon, Jang-Woo;Park, Jung-Sun;Lee, Dong-Hun;Lee, Eung-Huyk;Hong, Seung-Hong
    • Journal of Sensor Science and Technology
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    • v.5 no.3
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    • pp.65-73
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    • 1996
  • One of the important factor in drug stuffs to a patient is to inject exact amount with stable flow rates. Since improper injection amount and flow rates would cause bad effect to recovery of a patient, the detecting sensors with high sensitivity is required for an injection pump systems' performance improvement. In this study, the three sensors, piezo film sensor, photo transistor and photo array, were compared to find best one for an injection pump monitoring system. Using suggested data processing technique and photo array sensors, we could minimize the effect of interference, disturbance, illumination, and sensitivity change caused by sensor's position. According to the experiments, the photo array showed the higher reliance than any other the three types of sensors.

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Photo-Transistors Based on Bulk-Heterojunction Organic Semiconductors for Underwater Visible-Light Communications (가시광 수중 무선통신을 위한 이종접합 유기물 반도체 기반 고감도 포토트랜지스터 연구)

  • Jeong-Min Lee;Sung Yong Seo;Young Soo Lim;Kang-Jun Baeg
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.36 no.2
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    • pp.143-150
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    • 2023
  • Underwater wireless communication is a challenging issue for realizing the smart aqua-farm and various marine activities for exploring the ocean and environmental monitoring. In comparison to acoustic and radio frequency technologies, the visible light communication is the most promising method to transmit data with a higher speed in complex underwater environments. To send data at a speedier rate, high-performance photodetectors are essentially required to receive blue and/or cyan-blue light that are transmitted from the light sources in a light-fidelity (Li-Fi) system. Here, we fabricated high-performance organic phototransistors (OPTs) based on P-type donor polymer (PTO2) and N-type acceptor small molecule (IT-4F) blend semiconductors. Bulk-heterojunction (BHJ) PTO2:IT-4F photo-active layer has a broad absorption spectrum in the range of 450~550 nm wavelength. Solution-processed OPTs showed a high photo-responsivity >1,000 mA/W, a large photo-sensitivity >103, a fast response time, and reproducible light-On/Off switching characteristics even under a weak incident light. BHJ organic semiconductors absorbed photons and generated excitons, and efficiently dissociated to electron and hole carriers at the donor-acceptor interface. Printed and flexible OPTs can be widely used as Li-Fi receivers and image sensors for underwater communication and underwater internet of things (UIoTs).

Remote Measurements of the Geological Structures, Using Photogrammetric Method (입체사진을 이용한 원거리 면구조 측정)

  • Hwang Sang-Gi
    • The Journal of Engineering Geology
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    • v.15 no.2 s.42
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    • pp.201-212
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    • 2005
  • A photogrammetric camera system and a software have been built for capturing planned stereo images. To evaluate the system,25 planar data from a constructed rock slope were measured using both geological compass and photo system. Comparison of the data groups from both system showed matching relationship that falls within the error range of $5.25\pm4.53$ in strike and $3.18\pm3.17$ in dip angles, when the 2 standard deviation error distributions were considered. To evaluate the errors of the Photo matching and non planarity of the surface, orientations of the same plane were repeatedly measured 20times. These measurements showed error ranges of $8.2\pm3.4$in strike and $6.6\pm3.4$ in dip angle, considering the same error distributions. Measured strikes and dips were compared with the corresponding compass measurements in 5 constructed. slopes to test the system. Stereonet plots showed that the photo system measured data coincided well with the compass measurements. With these evaluations, the photo system can measure the planar structure in inaccessible locations with reliable accuracy at the same time reducing the data gathering period therefore resulting to an efficient geological survey.

Visible Light Communication based Multi-hop Multimedia Data Transmission Networks System (VLC 기반 멀티 홉 멀티미디어 데이터 전송 네트워크 시스템)

  • Park, In-Chul;Shin, Jung-Jin;Park, Joo-Young;Dung, Le The;An, Beongku
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.14 no.3
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    • pp.21-31
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    • 2014
  • In this paper, we propose VLC(visible light communication) based multi-hop multimedia data transmission system. The main contributions and features of the proposed system are as follows. First, the contribution of this research is to develope the LED communication based multi-hop transmission network system which can transmit multimedia data(audio data, video data) with long distance. Second, the developed system has the following features: In transmitter, audio data and video data are transmitted via multi-hops using two channels. The relay in audio channel receives digital audio signal by using photo diode and then transmits the signal to receiver after error checking and amplifying. The receiver receives the encoded audio data via photo diode and then converts to analog audio signal by using decoding and amplifying. The relay in video channel receives video signal by using photo diode and then amplify the video signal using OP-AMP and then transmits the signal to receiver. The receiver amplifies the received signal from photo diode and then sends it to the monitor. The performance evaluation of the proposed system is conducted in the laboratory with fluorescent light source. The results of the performance evaluation confirm that the system can provide high quality multimedia data transmission from transmiter to receiver via multi-hop relays in a long distance while we can see there are differences in the transmitted multimedia(audio and video) quality according to the used LED colors.