• Title/Summary/Keyword: Phase-measuring deflectometry

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Measurement of Wafer Deformation using Deflectometry (편향법을 이용한 웨이퍼 변형 측정)

  • Lee, Hodong;Shin, Sanghoon;Yu, Younghun
    • Korean Journal of Optics and Photonics
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    • v.24 no.6
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    • pp.324-330
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    • 2013
  • Phase-measuring deflectometry is a full-field gradient measuring technique that lends itself very well to testing specular optical surfaces. We have measured deformation of a large specular surface by deflectometry. In this work, we have used a Fourier-transform method to get the phase from a measured deformed fringe pattern, and we have used least squares method to obtain the height information of the specular surface from the calculated slope. Experimentally, we have confirmed that deflectometry can be used for deformation measurement of a specular surface like that of a wafer.

Three-Dimensional Measurements of the Specular Components by Using Direct Phase-Measuring Transmission Deflectometry

  • Na, Silin;Shin, Sanghoon;Kim, Doocheol;Yu, Younghun
    • New Physics: Sae Mulli
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    • v.68 no.11
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    • pp.1275-1280
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    • 2018
  • We demonstrated transmission direct phase-measuring deflectometry (DPMD) with a specular phase object having discontinuous surfaces by using two displays and a two-dimensional array detector for display and by recording the distorted fringe patterns. Three-dimensional (3D) information was obtained by calculating the height map directly from the phase information. We developed a mathematical model of the phase-height relationship in transmission DPMD. Unlike normal transmission deflectometry, this method supports height measurement directly from the phase. Compared with other 3D measurement techniques such as interferometry, this method has the advantages of being inexpensive and easy to implement.

Determining the Refractive Index Distribution of an Optical Component Using Transmission Deflectometry with Liquids (액체와 투과형 편향법을 이용한 광학부품의 굴절률 분포 측정)

  • Shin, Sanghoon;Yu, Younghun
    • Korean Journal of Optics and Photonics
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    • v.25 no.6
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    • pp.326-333
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    • 2014
  • Phase-measuring deflectometry is a full-field gradient measuring technique that lends itself very well to testing specular optical surfaces. We have measured the deformation of the surface of a lens by transmission deflectometry with liquids. In this study, a method is proposed for measuring the refractive index distribution of a transparent object component. The proposed method combines transmission deflectometry with liquids. The deformed fringe patterns of a sample immersed in different fluids are recorded, and then the three-dimensional phase information of the sample is reconstructed numerically. We have used phase-shifting and temporal phase-unwrapping methods to retrieve the phase from the measured deformed fringe pattern, and we have used a least-squares method to find the height information of the specular surface from the calculated slope. In particular, we have proposed a theoretical model for determining the refractive index of sample and planar convex lens are demonstrated experimentally.

Simultaneous Determination of Both Surface Profiles of a Bifocal Lens Using Dual-Wavelength Transmission Deflectometry With Liquid (액체와 2 파장 투과형 편향법을 이용한 다초점 렌즈 양면 프로파일 동시측정)

  • Shin, Sanghoon;Yu, Younghun
    • Korean Journal of Optics and Photonics
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    • v.26 no.3
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    • pp.147-154
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    • 2015
  • We propose a method for simultaneously measuring the front and back surface profiles of transparent optical components. The proposed method combines dual-wavelength transmission deflectometry with liquids to record distorted phases at different wavelengths, and then numerically reconstructs the three-dimensional phase information to image the front and back surfaces of the lens. We propose a theoretical model to determine the surface information, and a bifocal lens is experimentally investigated. Unlike conventional transmission deflectometry, our proposed method supports direct observation of the front and back surface profiles of the optical elements.

A Study of Three-Dimensional Measurement By Transmission Deflectometry and Hilbert Transform (Hilbert 변환과 투과형 편향법을 이용한 3차원 측정연구)

  • Na, Silin;Yu, Younghun
    • Korean Journal of Optics and Photonics
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    • v.27 no.2
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    • pp.61-66
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    • 2016
  • We used transmission deflectometry to measure the three-dimensional shapes of optical components, and we used the Hilbert transform to retrieve the phases from measured deformed fringe images. Deflectometry is useful for measuring large-scale samples, and specular samples. We have retrieved the phases from deformed fringe images and Hilbert-transformed images, and have used the least-squares method to find the height information. We have verified that phase retrieval using Hilbert transform is useful by computer simulation and experiment.