• Title/Summary/Keyword: Phase Coherence

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Overlay And Side-lobe Suppression in AttPSM Lithography Process for An Metal Layer (AttPSM을 사용하는 Metal Layer 리토그라피공정의 Overlay와 Side-lobe현상 방지)

  • 이미영;이흥주
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.18-21
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    • 2002
  • As the mask design rules get smaller, the probability of the process failure becomes higher due to the narrow overlay margin between the contact and metal interconnect layers. To obtain the minimum process margin, a tabbing and cutting method is applied with the rule based optical proximity correction to the metal layer, so that the protection to bridge problems caused by the insufficient space margin between the metal layers can be accomplished. The side-lobe phenomenon from the attenuated phase shift mask with the tight design nile is analyzed through the aerial image simulation for test patterns with variation of the process parameters such as numerical aperture, transmission rate, and partial coherence. The corrected patterns are finally generated by the rules extracted from the side-lobe simulation.

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Rule-based OPC for Side-lobe Suppression in The AttPSM Metal Layer Lithography Process (AttPSM metal layer 리토그라피공정의 side-lobe억제를 위한 Rule-based OPC)

  • Lee, Mi-Young;Lee, Hoong-Joo;Seong, Young-Sub;Kim, Hoon
    • Proceedings of the IEEK Conference
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    • 2002.06b
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    • pp.209-212
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    • 2002
  • As the mask design rules get smaller, the probability of the process failure becomes higher doc to the narrow overlay margin between the contact and metal interconnect layers. To obtain the minimum process margin, a tabbing and cutting method Is applied with the rule based optical\ulcorner proximity correction to the metal layer, so that the protection to bridge problems caused by the insufficient space margin between the metal layers can be accomplished. The side-lobe phenomenon from the attenuated phase shift mask with the tight design rule is analyzed through the aerial image simulation for test patterns with variation of the process parameters such as numerical aperture, transmission rate, and partial coherence. The corrected patterns are finally generated by the rules extracted from the side-lobe simulation.

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Influence of unsteady wake on a turbulent separation bubble (난류박리기포에 대한 비정상 후류의 영향)

  • Chun, Se-Jong;Sung, Hyung-Jin
    • Proceedings of the KSME Conference
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    • 2001.11b
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    • pp.294-299
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    • 2001
  • An experimental study was made of turbulent separated and reattaching flow over a blunt body, where unsteady wake was generated by a spoke wheel-type wake generator with cylindrical rods. The influence of unsteady wake was scrutinized by altering the rotating direction (CW and CCW) and the normalized passing frequency $(0{\leq}St_H{\leq}0.20)$. The Reynolds number based on the cylindrical rod was $Re_d=375$. A phase-averaging technique was employed to characterize the unsteady wake. The effect of different rotating directions was examined in detail, which gave a significant reduction of $X_R$. The wall pressure fluctuations on the blunt body were analyzed in terms of the spectrum and the coherence.

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Combustion Characteristics of Model Gas Turbine Combustor -Radical Luminous Intensity and Local Equivalence Ratio Measurement- (모형 가스터빈 연소기의 연소특성 -라디칼 자발광강도와 국소당량비계측에 대하여-)

  • 최병륜;김태한
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.18 no.4
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    • pp.1064-1071
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    • 1994
  • There are three active radicals which become to the scale of flame diagnostics at the flame front. They are OH, CH and $C_2$ radical. For this, optical measurement system which could monitor simultaneously the luminous waves of three radicals, was constructed. These were analyzed statistically into the cross correlation, coherence and phase. Through such an statistical treatment, combustion characteristics was investigated at the primary zone of gas turbine combustor. The local equivalence ratio was predicted with the ratio of luminuous intensity between CH and $C_2$ radical. This result was matched up to the equivalence ratio calculated from gas composition within 5% error. In general, equivalence ratio was said to be 1.0 at flame front, but it could be increased up to about 1.2 depending on the degree of swirl intensity in case of changing properly the air amount of primary zone.

Estimation of Ice-Sheet Motion Using ERS-1 Inteferometric SAR (ERS-1 InSAR를 이용한 빙하 이동 속도 관측)

  • Sohn, Hong-Gyoo;Park, Hong-Gi;Lee, Hyung-Ki;Yun, Kong-Hyun;Song, Yong-Hak
    • 한국지형공간정보학회:학술대회논문집
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    • 2002.03a
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    • pp.74-78
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    • 2002
  • 본 연구에서는 Greenland의 Sondrestrom 지역에 존재하는 빙하의 운동을 관측하기 위해 두 장의 ERS-1 SAR 영상을 이용한 SAU Interferometry(InSAR) 기법을 적용하였다. 본 연구에서 사용한 지역은 영상 좌편의 암석 지역과 영상 우편의 빙하 지역으로 구성되어 있기 때문에 복잡한 위상차를 보이며, 두 지역의 경계선 지역에서는 자료의 상관도(coherence)가 떨어지기 때문에 절대위상 복원(phase unwrapping) 수행시 시작점(seed point) 위치의 선정이 매우 중요한 사항이다. 또한 대상 지역에 대한 정확한 기준점의 확보가 어렵기 때문에 기선길이(baseline) 추정시 대상지역의 수치고도모형을 이용하여 많은 수의 기준점을 추출하여 기선길이를 추정하였다. 그 결과로 위성의 경사거리 방향에 대한 빙하의 속도 성분을 추출할 수 있었다.

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Multi-modality image fusion via generalized Riesz-wavelet transformation

  • Jin, Bo;Jing, Zhongliang;Pan, Han
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • v.8 no.11
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    • pp.4118-4136
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    • 2014
  • To preserve the spatial consistency of low-level features, generalized Riesz-wavelet transform (GRWT) is adopted for fusing multi-modality images. The proposed method can capture the directional image structure arbitrarily by exploiting a suitable parameterization fusion model and additional structural information. Its fusion patterns are controlled by a heuristic fusion model based on image phase and coherence features. It can explore and keep the structural information efficiently and consistently. A performance analysis of the proposed method applied to real-world images demonstrates that it is competitive with the state-of-art fusion methods, especially in combining structural information.

Influence of Unsteady Wake on a Turbulent Separation Bubble (난류박리기포에 대한 비정상 후류의 영향)

  • Jeon, Se-Jong;Seong, Hyeong-Jin
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.2
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    • pp.353-361
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    • 2002
  • An experimental study was made of turbulent separated and reattaching flow over a blunt body, where unsteady wake was generated by a spoke wheel-type wake generator with cylindrical rods. The influence of unsteady wake was scrutinized by altering the rotating direction (CW and CCW) and the normalized passing frequency (0 St$\_$H/ 0.20). The Reynolds number based on the cylindrical rod was Re$\_$d/=375. A phase-averaging technique was employed to characterize the unsteady wake. The effect of different rotating directions was examined in detail, which gave a significant reduction of x$\_$R/. The wall pressure fluctuations on the blunt body were analysed in terms of the spectrum and the coherence.

Essay on Terminology Formation and Translation Methodology in Korean (전문용어 조어 및 번역 방법론에 대한 시론)

  • LEE, Hyunjoo
    • Cross-Cultural Studies
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    • v.31
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    • pp.331-370
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    • 2013
  • In this knowledge based society, the circulation of knowledge and information is more and more increasing. Terms, as denominations of every specialized concept, has grown in quantity and there are considerable amount of foreign terminology coming to settle down in Korean language. Since terminologies quickly generate and be extinguished, it is important to translate in appropriate way at the very first phase of terminology implementation. This article aims to elaborate the typology of korean terminology translation forms, and propose some guidelines for terminology formation and translation methodology. ISO terminology principle and other institutes' propositions for term formation as well as translational theories constitute two basic columns of the guidelines.

Numerical simulation of air layer morphology on flat bottom plate with air cavity and evaluation of the drag reduction effect

  • Hao, W.U.;Yongpeng, O.U.
    • International Journal of Naval Architecture and Ocean Engineering
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    • v.11 no.1
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    • pp.510-520
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    • 2019
  • To investigate the morphology characteristics of air layer in the air cavity, a numerical method with the combination of RANS equations and VOF two-phase-flow model is proposed for a plate with air cavity. Based on the model above, the dynamic and developmental process of air layer in the air cavity is studied. Numerical results indicate that the air layer in the plate's air cavity exhibits the dynamic state of morphology and the wavelength of air layer becomes larger with the increasing speed. The morphology of air layer agrees with the Froude similarity law and the formation of the air layer is not affected by the parameters of the cavity, however, the wave pattern of the air layer is influenced by the parameters of the cavity. The stable air layer under the air cavity is important for the resistance reduction for the air layer drag reduction.

Spot marking of the multilayer thin films by Nd:YAG laser (Nd:YAG 레이저에 의한 다층 박막의 미소 점 마킹)

  • Kim, Hyun-Jin;Shin, Yong-Jin
    • Korean Journal of Optics and Photonics
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    • v.15 no.4
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    • pp.361-368
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    • 2004
  • We separated the multilayer structure of CD-R(compact disk-recordable) and investigated optimal spot marking conditions and physical and chemical transitions in response to various laser beam energh levels. Spot marking(80 ${\mu}{\textrm}{m}$ spot size) was produced on the surface of each layer using a Q-switched Nd:YAG laser between 27 mJ and 373mJ. By investigating resulting pit formation with Optical Microscopy(OM) and Optical Coherence Tomography(OCT), we analyzed the formation process of spot marking in the multilayer structure of different chemical composition. The localized heating of the substrate in the multilayer thin film caused the short temporal thermal expansion, and absorbed optical energy between reflective and dye interfaces melted dye and increased the volume. During the cooling phase, formation of pit and surrounding rim can be explained by three distinct processes; effect of surface tension, evaporation by spontaneous temperature increase due to laser energy, and mass flow from the recoil pressure. Our results shows that the spot marking formation process in the multilayer thin film is closely related to the layers' physical, chemical, and optical properties, such as surface tension, melt viscosity, layer thickness, and chemical composition.