• Journal of the Korean Society for Precision Engineering
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• v.26 no.7
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• pp.127-133
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• 2009

We present a $3-{\underline{P}}RS$ compliant parallel manipulator actuated by PZTs. The motion ranges are $400-{\mu}m$ translation to the z-direction and 5.7-mrad rotation about any axis on the x-y plane. A mechanical amplifier whose advantage is approximately 5.5 is designed and integrated with flexure revolute and spherical joints in a monolithic way. We evaluated the performance of the system: kinematic and dynamic characteristics. In kinematic point of view, the flexures play the roles of conventional mechanism but any nonlinearity such as dead-zone and backlash, which make it possible to achieve the steady-state resolution less than $0.1{\mu}m$. The system shows resonance near 86 Hz with high magnitude and, therefore, poor transient response. But the settling is faster when the flexures are strained higher.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.12
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• pp.3115-3123
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• 1993

This paper presents a real-time correction method of the movemont errors of a translatory precision machine axis. This method is a null-balances technique in which two plane mirrors are used to generate an interferometric fringe pattern utilizing the optical principles of TwymanGreen interferometry. One mirror is fixed on a reference frame, while the other is placed on the machine axis being supported by three piezoelectric actuators. From the fringe pattern, one translatory and two rotational error components of the machine axis are simultaneously detected by using CCD camera vision and image processing techniques. These errors are then independently suppressed by activating the peizoelectric actuators by real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with movement errors less than 10 nm in vertical straightness, 0.1 arcsec in pitch, and 0.06 arcsec in roll for 50mm travel by adopting the real-time correction method.