• Korean Membrane Journal
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• 제1권1호
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• pp.1-7
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• 1999

Pd-ceramic composite membranes and catalytic membrane reactors(CMR) have been studied for hydrogen and its isotopes (deuterium and tritium) purification and recovery in the fusion reactor fuel cycle. Particularly a closed-loop process has been studied for recovering tritium from tritiated water by means of a CMR in which the water gas shift reaction takes place. The development of the techniques for coating micro-porous ceramic tubes with Pd and Pd/Ag thin layers is described : P composite membranes have been produced by electroless deposition (Pd/Ag film of 10-20 $\mu$m) and rolling of thin metal sheets (Pd and Pd/Ag membranes of 50-70 $\mu$m). Experimental results of the electroless membranes have shown a not complete hydrogen selectivity because of the presence of some defects(micro-holes) in the metallic thin layer. Conversely the rolled thin Pd and Pd/ag membranes have separated hydrogen from the other gases with a complete selectivity giving rise to a slightly larger (about a factor 1.7) mass transfer resistance with respect to the electroless membranes. Experimental tests have confirmed the good performances of the rolled membranes in terms of chemical stability over several weeks of operation. Therefore these rolled membranes and CMR are adequate for applications in the fusion reactor fuel cycle as well as in the industrial processes where high pure hydrogen is required (i.e. hydrocarbon reforming for fuel cell)

• 센서학회지
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• 제17권6호
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• pp.414-417
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• 2008

This paper describes the fabrication of a Pd/poly 3C-SiC Schottky diode and its characteristics, in which the poly 3C-SiC layer and Pd Schottky contact were deposited by using APCVD and sputter, respectively. Crystalline quality, uniformity, and preferred orientations of the Pd thin film were evaluated by SEM and XRD, respectively. Pd/poly 3C-SiC schottky diodes were fabricated and characterized by I-V and C-V measurements. Its electric current density Js and barrier height voltage were measured as $2{\times}10^{-3}A/cm^2$ and 0.58 eV, respectively. These devices were operated until about $400^{\circ}C$. Therefore, from these results, Pd/poly 3C-SiC Schottky devices have very high potential for high temperature chemical sensor applications.

• 한국수소및신에너지학회논문집
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• 제10권4호
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• pp.191-196
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• 1999

팔라디움 박막시료들(두께 18~67nm)에 대한 수소 흡수-방출 동역학을 4-극 전기비저항 측정법을 이용하여 연구하였다. 실험온도와 수소압력은 $25{\sim}50^{\circ}C$, 0~5 torr 범위였다. 팔라디움 박막은 고진공내에서 열증착 방법으로 사파이어 기판 위에 제작하였다. 수소 흡수-방출과정을 약 100회 반복할 때 까지 시료들의 분말화 현상은 관찰되지 않았으나 박막의 일부가 기판으로부터 분리되는 현상이 관찰되었다. 정방향 반응과 역방향 반응을 분리하여 분석하였다. 반응율에 대한 Arrhenius 그림에서 수소 흡수 방출 활성화 에너지를 얻었다. 팔라디움 박막의 활성화 에너지값들은 박막의 두께 변화에 강하게 의존하지 않았다. 그러나 매우 앓은 박막(두께 18nm)의 활성화 에너지값은 다른 박막의 활성화 에너지 값들보다 작은 경향을 보였다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 하계종합학술대회 논문집(2)
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• pp.387-390
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• 2004

Thick film alcohol gas sensors were fabricated. Their electrical properties and gas sensing characteristics were investigated. The sensitivity of $1wt.\%$ Pd-doped ${\gamma}-Fe_2O_3$ thick film heat treated at $400^{\circ}C$, 2hrs was $74\%$ to 500ppm alcohol gas at the operating temperature of $250^{\circ}C$. The selectivity of the film to alcohol was good. It showed fast response time to low concentrations of alcohol in air, hence this sensor can be used as a breath sensor.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 제5회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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• pp.90-95
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• 2003

The present paper is to investigate the phase stability and soft magnetic properties of amorphous CoNbZr films when Pd is added as a substitution for CoNbZr alloys. The films were prepared by a RF magnetron sputtering method. The CoNbZrPd films deposited on Si wafers exhibited amorphous structures being independent upon the amount of Pd added in the films. On the addition of 4.34% Pd, the excellent soft magnetic characteristics of the films were observed with a coercive force of 0.54 Oe and an anisotropy field of 11 Oe, whereas a coercive force of 1 Oe and an anisotropy field of 3.5 Oe were shown in the film without the addition of Pd. The increased anisotropy field and low coercive force of the films may be attributed to the occupancy of Pd in the preferred sites parallel to the external magnetic field applied on the deposition process. A permeability of about 1100 was kept constant in the operation frequency ranging up to 100 MHz, which can be explained by the Landau-Lifshitz formula.

• 한국자기학회지
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• 제3권1호
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• pp.56-60
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• 1993

FeCo/Pd 초격자 다층박막의 FeCo 와 Pd sublayer 두께를 각각 $2.5\;{\AA}$ 및 $10.5\;{\AA}$으로 유지시키면서 FeCo sublayer 의 Fe 조성이 0에서 100% 까지 변화함에따른 포화자화값, 수직 자기이방성에너지, 보자력 및 Kerr 회전각의 파장 의존성을 조사 하였다. 포화자화값은 Fe 조성이 48 at.%부근에서 최 고치를 보였고, 수직 자기이방성에너 및 조자력은 Fe조성의 증가에따라 단조감소 하였다. Kerr 회전각은 Fe 조성의 증가에따라 감소하였는데 그 크기 및 변화의 폭은 단파장으로 갈수록 증가하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.735-738
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• 2003

Downsizing electronics requires precision position control with an accuracy of sub-micron order, which demands development of ultra-fine displacive devices. Piezoelectric transducer is one of devices transferring electric field energy into mechanical energy and being capable for fine displacement control. The transducer has been widely used as fine Position control device Multilayer piezoelectric actuator, one of typical piezo-transducer, is fabricated by stacking alternatively ceramic and electrode layers several hundred times followed by cofiring process. Electrode material should be tolerable in the firing process maintaining at ceramic-sintering temperatures up to $1100{\sim}1300^{\circ}C$. Ag-Pd can be used as stable electrode material in heat treatment above $960^{\circ}C$. Besides, adding small quantity ceramic powder allow the actuator to be fabricated in a good shape by diminishing shrinkage difference between ceramic and electrode layers, resulting in avoidance of crack and delamination at and/or nearby interface between ceramic an electrode layers. This study presents synthesis of nano-oxide-added Ag/Pd powders and its feasibility to candidate material tolerable at high temperature. The powders were formed in a co-precipitation process of Ag and Pd in nano-oxide-dispersed solution where Ag and Pd precursors are melted in $HNO_3$ acid.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.54-58
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• 2002

The present paper is to investigate the phase stability and soft magnetic properties of amorphous CoNbZr films when Pd is added as a substitution for CoNbZr alloys. The films were prepared by a RF magnetron sputtering method. The CoNbZrPd films deposited on Si wafers exhibited amorphous structures being independent upon the amount of Pd added in the films. On the addition of 4.34% Pd, the excellent soft magnetic characteristics of the films were observed with a coercive force of 0.54 Oe and an anisotropy field of 11 Oe, whereas a coercive force of 1 Oe and an anisotropy field of 3.5 Oe were shown in the film without the addition of Pd. The increased anisotropy field and low coercive force of the films may be attributed to the occupancy of Pd in the preferred sites parallel to the external magnetic field applied on the deposition process. A permeability of about 1100 was kept constant in the operation frequency ranging up to 100 MHz, which can be explained by the Landau-Lifshitz formula.

• Journal of Magnetics
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• 제8권4호
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• pp.146-148
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• 2003

Multilayered films of Co/Pd have been studied as a candidate material for a high density perpendicular recording medium due to higher anisotropy energy. However, high exchange coupling among grains results in large transition noise. To reduce the exchange coupling and grain size, addition of 3rd elements and physical separation of grains have been attempted. In the present paper, effects of sputtering pressure, Co sublayer thickness and Pd underlayer thickness on magnetic properties and microstructures were studied. It was found that by increasing sputtering pressure from 5 mTorr to 25 mTorr, Ms decreased to one half and coercivity increased more than 5000 Oe. The increase of the coercivity is associated with physical separation of grains by high pressure sputtering. Ms per volume of Co for Co/Pd multilayered film deposited at 25 mTorr shows continuous decrease with increasing Co sublayer thickness. This was related to void formation and intermixing of Co/Pd interface. Also, effect of Pd underlayer thickness on magnetic properties will be discussed.

• 마이크로전자및패키징학회지
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• 제2권1호
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• pp.3-18
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• 1995