• Title/Summary/Keyword: PbO3 세라믹 박막

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Fabrication and characteristics PbTiO3/P(VDF/TrFE) thin films for pyroelectric infrared sensor (초전형 적외선 센서용 PbTiO3/P(VDF/TrFE) 박막의 제조 및 특성)

  • Kwon, Sung-Yeol
    • Journal of Sensor Science and Technology
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    • v.12 no.1
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    • pp.10-15
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    • 2003

  • $PbTiO_3$/P(VDF/TrFE) thin film for pyroelectric infrared sensor's sensing materials have been fabricated by spin coating technique. 65 wt% VDF and 35 wt% TrFE were for P(VDF/TrFE) powder. $PbTiO_3$ powder was used for a ceramic - polymer composites materials. Surface of composite thin film by ceramic fraction factor was observed by SEM. The $PbTiO_3$/P(VDF/TrFE) thin film capacitancy, dielectric constant and dielectric loss measured by impedence analyzer(HP4192A) and pyroelectric coefficient was measured by semiconductor parameter analyzer(HP4145B).

  • https://doi.org/10.5369/JSST.2003.12.1.010 인용 PDF KSCI

Microstructure and Ferroelectric Properties of PZT Thin Films Deposited on various Interlayers by R.F. Magnetron Sputtering (R.F. Magnetron Sputtering으로 다양한 Interlayer 층위에 형성시킨 PZT 박막의 미세구조와 강유전 특성)

  • Park, Chul-Ho;Choi, Duck-Young;Son, Young-Guk
    • Journal of the Korean Ceramic Society
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    • v.39 no.8
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    • pp.742-749
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    • 2002

  • The PZT thin films werre deposited on Pt/Ti/$SiO_2$/Si substrate by R. F. magnetron sputtering with $Pb_{1.1}Zr_{0.53}Ti_{0.47}O_3$ target. When interlayers(PbO, $TiO_2$, PbO/$TiO_2$) were inserted between PZT and Pt, the crystallization of the PZT thin films was considerably improved and the processing temperature was lowered. Compared to the pure PZT thin films, dielectric constant, dielectric loss and polarization properties of PZT thin films with interlayers were considerably improved. From XPS depth profile analysis, it was confirmed that PZT thin films and interlayers existed independently. In particular, PZT thin films deposited on interlayer(PbO/$TiO_2$) showed the best dielectric property (${\varepsilon}_r$=414.94, tan${\delta}$=0.0241, Pr=22${\mu}C/cm^2$).

  • https://doi.org/10.4191/KCERS.2002.39.8.742 인용 PDF KSCI