• 제목/요약/키워드: Patterning layer

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반송제어모드를 이용한 인라인 식각/세정장치의 ITO 전극형성기술 (ITO Patterning of an In-line Wet Etch/Cleaning System by using a Reverse Moving Control System)

  • 홍성재;임승혁;한형석;권상직;조의식
    • 제어로봇시스템학회논문지
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    • 제14권4호
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    • pp.327-331
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    • 2008
  • An in-line wet etch/cleaning system was established for the research and development in wet etch process as a formation of electrode such as metal or transparent conductive oxide layer. A reverse moving system was equipped in the in-line wet etch/cleaning system for the alternating motion of glass substrate in a wet etch bath of the system. Therefore, it was possible for the glass substrate to be moved back and forth and it was possible to reduce the size of the system by using the reversing moving system. For the effect of the alternating motion of substrate on the etch rate in the in-line wet etch bath, indium tin oxide(ITO) patterns were obtained through wet etch process in the in-line system in which the substrate was moved back and forth. From the CD(critical dimension) skews resulted from the ADI CD and ACI CD of the ITO patterns, it was concluded that the alternating motion of glass substrate are possible to be applied to the mass production of wet etch process.

Development of Process and Equipment for Roll-to-Roll convergence printing technology

  • 김동수;배성우;김충환
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2010년도 춘계학술발표대회
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    • pp.19.1-19.1
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    • 2010
  • The process of manufacturing printed electronics using printing technology is attracting attention because its process cost is lower than that of the conventional semiconductor process. This technology, which offers both a lower cost and higher productivity, can be applied in the production of organic TFT (thin film transistor), solar cell, RFID(radio frequency identification) tag, printed battery, E-paper, touch screen panel, black matrix for LCD(liquid crystal display), flexible display, and so forth. In general, in order to implement printed electronics, narrow width and gap printing, registration of multi-layer printing by several printing units, and printing accuracy of under $20\;{\mu}m$ are all required. These electronic products require high precision to the degree of tens of microns - in a large area with flexible material, and mass productivity at low cost. As such, the roll-to-roll printing process is attracting attention as a mass production system for these printed electronic devices. For the commercialization of this process, two basic electronic ink technologies, such as conductive ink and polymers, and printing equipment have to be developed. Therefore, this paper addressed basis design and test to develop fine patterning equipment employing the roll-to-roll printing equipment and electronic ink.

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White-light-emitting Organic Electroluminescent Device Based On Incomplete Energy Transfer

  • Song, Tae-Joon;Ko, Myung-Soo;Lee, Sung-Soo;Cho, Sung-Min
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.701-705
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    • 2002
  • In order to realize full color display, two approaches were used. The first method is the patterning of red, green, and blue emitters using a selective deposition. Another approach is based on a white-emitting diode, from which the three primary colors could be obtained by micro-patterned color filters. White-light-emitting organic light emitting devices (OLEDs) are attracting much attention recently due to potential applications such as backlights in liquid crystal displays (LCDs) or other illumination purposes. In order for the white OLEDs to be used as backlights in LCDs, the light emission should be bright and have Commission Internationale d'Eclairage (CIE) chromaticity coordinates of (0.33, 0.33). For obtaining white emission from OLEDs, different colors should be mixed with proper balances even though there are a few different methods for mixing colors. In this study, we will report a white organic electroluminescent device based on an incomplete energy transfer. In which the blue and green emission come from the same layer via incomplete energy transfer.

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Quench properties of superconducting fault current limiters connected in parallel

  • Kim, Hye-Rim;Park, Hyo-Sang;Park, Kwon-Bae;Hyun, Ok-Bae;Hwang, Si-Dole
    • Progress in Superconductivity
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    • 제3권2호
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    • pp.224-228
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    • 2002
  • We investigated the quench properties of superconducting fault current limiters (SFCLs) connected in parallel. It was carried out as an effort to scale up the current capacity of SFCL toys texts. SFCLs were based on $YBa_2$$Cu_3$$O_{7}$ films coated in-situ with a gold layer and fabricated by patterning the films into 2 mm wide and 42 cm long meander lines by photolithography. Two SFCLS were connected in parallel and tested with simulated AC fault currents. Initially the current was divided unequally into branches of parallel connection due to unequal resistance of the branches. However, once quench started in the SFCLs, the current oscillated between the branches and then was distributed nearly equally between the branches. In other words, the elements quenched simultaneously. The oscillation amplitude decreased as the source voltage was increased: the oscillation was the most prominent near the quench current. The observed oscillation and the consequent simultaneous quench was understood in terms of quench start and development in the SFCLs.

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Organic Thin-Film Transistors Fabricated on Flexible Substrate by Using Nanotransfer Molding

  • Hwang, Jae-Kwon;Dang, Jeong-Mi;Sung, Myung-Mo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.287-287
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    • 2010
  • We report a new direct patterning method, called liquid bridge-mediated nanotransfer molding (LB-nTM), for the formation of two- or three-dimensional structures with feature sizes between tens of nanometers and tens of micron over large areas. LB-nTM is based on the direct transfer of various materials from a mold to a substrate via a liquid bridge between them. This procedure can be adopted for automated direct printing machines that generate patterns of functional materials with a wide range of feature sizes on diverse substrates. Arrays of TIPS-PEN TFTs were fabricated on 4" polyethersulfone (PES) substrates by LB-nTM using PDMS molds. An inverted staggered structure was employed in the TFT device fabrication. A 150 nm-thick indium-tin oxide (ITO) gate electrode and a 200 nm-thick SiO2dielectric layer were formed on a PES substrate by sputter deposition. An array of TIPS-PEN patterns (thickness: 60 nm) as active channel layers was fabricated on the substrate by LB-nTM. The nominal channel length of the TIPS-PEN TFT was 10 mm, while the channel width was 135 mm. Finally, the source and drain electrodes of 200 nm-thick Ag were defined on the substrate by LB-nTM. The TIPS-PEN TFTs can endure strenuous bending and are also transparent in the visible range, and therefore potentially useful for flexible and invisible electronics.

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펨토초 레이저를 이용한 플렉시블 ITO 패터닝 연구 (Femtosecond laser pattering of ITO film on flexible substrate)

  • 손익부;김영섭;노영철
    • 한국레이저가공학회지
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    • 제13권1호
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    • pp.11-15
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    • 2010
  • Indium tin oxide (ITO) provides high electrical conductivity and transparency in the visible and near IR (infrared) wavelengths. Thus, it is widely used as a transparent electrode for the fabrication of liquid crystal displays (LCDs) and organic light emitting diode displays (OLRDs), photovoltaic devices, and other optical applications. Lasers have been used for removing coating on polymer substrate for flexible display and electronic industry. In selective removal of ITO layer, laser wavelength, pulse energy, scan speed, and the repetition rate of pulses determine conditions, which are efficient for removal of ITO coating without affecting properties of the polymer substrate. ITO coating removal with a laser is more environmentally friendly than other conventional etching methods. In this paper, pattering of ITO film from polymer substrates is described. The Yb:KGW femtosecond laser processing system with a pulse duration of 250fs, a wavelength of 1030nm and a repetition rate of 100kHz was used for removing ITO coating in air. We can remove the ITO coating using a scanner system with various pulse energies and scan speeds. We observed that the amount of debris is minimal through an optical and a confocal microscope, and femtosecond laser pulses with 1030nm wavelength are effective to remove ITO coating without the polymer substrate ablation.

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Constrained Sintering에 의한 $Al_2O_3$/LTCC/$Al_2O_3$ 무수축 기판의 LTCC 두께에 따른 Edge Curvature 제어

  • 조정환;여동훈;신효순;홍연우;김종희;남산
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.301-301
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    • 2008
  • 최근의 세라믹 공정기술은 고집적화 추세에 따라 그린시트의 두께가 얇아지면서 다층화되고 있으므로 fine patterning, Via Hole 크기의 최소화, Via Hole 간의 층간 연결을 위한 그린시트 층간 정밀도가 더욱 중요해지고 있다. 따라서 세라믹의 소성후 수축율 제어는 고집적 세라믹 기판 모듈 제작을 위한 핵심공정기술로 기술 개발에 대한 필요성이 증대되고 있다. 온 연구에서는 일축가압 이용한 PAS법 (Pressure Assisted Constrained Sintering)과 Al2O3를 희생층으로 이용한 Constrained법을 혼합하여 저온 동시소성 세라믹 기판의 x-y축 방향의 수축율을 zero로 제어하고자하였다. Al2O3/LTCC/Al2O3인 샌드위치 구조로 세라믹 시트를 적층하여 Load에 따른 소성수축율 및 LTCC 두께에 따른 Edge Curvature의 Radius를 측정하였다. 그 결과 소성온도 $900^{\circ}C$에서 Constrian Layer $500{\mu}m$, Load 0.92kg/cm3일때 LTCC의 두께가 $400{\mu}m$에서 $2500{\mu}m$로 증가함에 따라 Edge Curvature Radius가 $430{\mu}m$에서 $2200{\mu}m$로 증가하는 것을 확인하였다. 이때 소결 밀도는 2.95g/$cm^3$로 우수한 특성을 나타내었다.

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New polymeric host material for efficient organic electro phosphorescent devices

  • Jung, Choong-Hwa;Park, Moo-Jin;Eom, Jae-Hoon;Shim, Hong-Ku;Lee, Seong-Taek;Yang, Nam-Choul;Liand, Duan;Suh, Min-Chul;Chin, Byung-Doo;Hwang, Do-Hoon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.843-845
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    • 2009
  • A polymeric host for triplet emitters composed of N-alkylcarbazole and tetramethylbenzene units was successfully synthesized. Efficient energy transfer was observed between this polymeric host and green phosphorescent dyes. The device fabricated using 5 wt% green 1 in the polymeric host as the emitting layer showed the best performance. Thin films of this host-guest system, exhibiting clear stripe patterns could be prepared through the LITI process. The patterned films were then used to fabricate electrophosphorescent devices, which show performance characteristics similar to those of spin-coated devices. The new host material is a good candidate to be used in polymer-based full-color electrophosphorescent light-emitting displays.

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Development of flexible 3.5' QCIF (176 X144 pixels) OTFT driven OLED;Integration technologies compatible with normal semiconductor processes

  • Kang, Seung-Youl;Ahn, Seong Deok;Oh, Ji-Young;Kim, Gi-Hyun;Koo, Jae Bon;You, In-Kyu;Kim, Chul-Am;Hwang, Chi-Sun;KoPark, Sang-Hee;Yang, Yong-Suk;Chung, Sung-Mook;Lee, Jeong-Ik;Chu, Hye-Yong;Suh, Kyung-Soo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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    • pp.62-65
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    • 2007
  • Conventional semiconductor processes have been utilized to fabricate 3.5-inch OTFT-driven OLEDs with a resolution of $176\;{\times}\;144$ pixels on plastic substrates. By using a PC-OVD method to deposit a pentacene layer and optimizing patterning and the following processes, we could complete a uniform and reliable integration procedure for an active matrix organic light emitting devices on a plastic substrate. The technical importance of ours is the applicability of conventional semiconductor process to organic materials on plastic substrates. Although there are many hurdles to overcome, our approach and technical improvements are proved to be applicable to plastic electronics.

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뼈형성 단백질(Bone Morphogenetic Protein 1)의 단백질 분해 부위의 발현 및 특성 연구 (Expression, Refolding, and Characterization of the Proteolytic Domain of Human Bone Morphogenetic Protein 1)

  • 차재호
    • 생명과학회지
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    • 제10권2호
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    • pp.218-227
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    • 2000
  • Bone morphogenetic protein 1 (BMP-1) is part of a complex capable of inducing ectopic bone formation in mammals. Studies on TGF-β1 processing and Drosophila dorsal-ventral patterning have focused attention on BMP-1 as important in mediating the biological activity of this bone inducing complex. Herein, the bacterial expression, refolding, purification, and initial characterization of the BMP-1 proteolytic domain (BPD) are described. A semi-quantitative fluorescence-based thin layer chromatography assay was developed to assist in rapidly screening for optimal renaturation conditions. According to a preliminary screen for optimal conditions for the refolding of BPD , a detectable proteolytic activity against a high turnover substrate for astacin, a homologous protease from crayfish was observed. The conditions identified have allowed the expression of sufficient amounts of BPD for the characterization of the protein. Its proteolytic activity exhibits the same cleavage specificity as astacin against seven substrates that were previously synthesized for studying astacin. Furthermore, this activity is inhibited by the metal chelator 1,10-phenanthroline but not by its analogue 1,7-phenanthroline. The collagenase inhibitor Pro-Leu-Gly hydroxamate was found to inhibit both astacin and BPD activity. The results presented in this paper argue that BMP-1 does in fact possess an intrinsic proteolytic activity.

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